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참고 서적

백과 23개 파트가 근거로 삼는 전공 서적의 서지와 목차. AI가 쓴 본문에 출처를 붙이는 장치이자, 집필 단계 03에서 “어느 교재의 몇 절 기준으로”를 지시할 때 여는 페이지다. 장 제목을 누르면 절이 펼쳐진다.

68등록 서적
61원본 대조
2절 수준 확보
2장 수준 확보
0부분 확보
3미확보

확보 상태는 목차를 어느 깊이까지 확인했는가를 뜻한다. 원본 대조는 출판사 목차 원본으로 확인해 절까지(목차에 쪽수가 있으면 쪽수도) 실은 것이고, 나머지는 웹 출처를 교차 확인한 것이다. 미확보 항목은 목차 자리를 비워두었으니 직접 채워 넣으면 된다. 최신 판 목차도 구해 오는 대로 교체한다 — 판이 바뀌면 절 번호가 달라지므로 인용할 판을 하나로 고정하는 것이 중요하다.

원본 대조절 수준 확보장 수준 확보부분 확보미확보
I

기초 과학

1부 · 수학 기초

Advanced Engineering Mathematics

1부Erwin Kreyszig · 10th ed. · Wiley, 2011 · ISBN 978-0-470-45836-5  원본 대조

Part A — Ordinary Differential Equations (ODEs)1

1First-Order ODEs2
  • 1.1Basic Concepts. Modeling2
  • 1.2Geometric Meaning of y′ = f(x, y). Direction Fields, Euler’s Method9
  • 1.3Separable ODEs. Modeling12
  • 1.4Exact ODEs. Integrating Factors20
  • 1.5Linear ODEs. Bernoulli Equation. Population Dynamics27
  • 1.6Orthogonal Trajectories. Optional36
  • 1.7Existence and Uniqueness of Solutions for Initial Value Problems38
2Second-Order Linear ODEs46
  • 2.1Homogeneous Linear ODEs of Second Order46
  • 2.2Homogeneous Linear ODEs with Constant Coefficients53
  • 2.3Differential Operators. Optional60
  • 2.4Modeling of Free Oscillations of a Mass–Spring System62
  • 2.5Euler–Cauchy Equations71
  • 2.6Existence and Uniqueness of Solutions. Wronskian74
  • 2.7Nonhomogeneous ODEs79
  • 2.8Modeling: Forced Oscillations. Resonance85
  • 2.9Modeling: Electric Circuits93
  • 2.10Solution by Variation of Parameters99
3Higher Order Linear ODEs105
  • 3.1Homogeneous Linear ODEs105
  • 3.2Homogeneous Linear ODEs with Constant Coefficients111
  • 3.3Nonhomogeneous Linear ODEs116
4Systems of ODEs. Phase Plane. Qualitative Methods124
  • 4.0For Reference: Basics of Matrices and Vectors124
  • 4.1Systems of ODEs as Models in Engineering Applications130
  • 4.2Basic Theory of Systems of ODEs. Wronskian137
  • 4.3Constant-Coefficient Systems. Phase Plane Method140
  • 4.4Criteria for Critical Points. Stability148
  • 4.5Qualitative Methods for Nonlinear Systems152
  • 4.6Nonhomogeneous Linear Systems of ODEs160
5Series Solutions of ODEs. Special Functions167
  • 5.1Power Series Method167
  • 5.2Legendre’s Equation. Legendre Polynomials Pn(x)175
  • 5.3Extended Power Series Method: Frobenius Method180
  • 5.4Bessel’s Equation. Bessel Functions J# (x)187
  • 5.5Bessel Functions of the Y# (x). General Solution196
6Laplace Transforms203
  • 6.1Laplace Transform. Linearity. First Shifting Theorem (s-Shifting)204
  • 6.2Transforms of Derivatives and Integrals. ODEs211
  • 6.3Unit Step Function (Heaviside Function). Second Shifting Theorem (t-Shifting)217
  • 6.4Short Impulses. Dirac’s Delta Function. Partial Fractions225
  • 6.5Convolution. Integral Equations232
  • 6.6Differentiation and Integration of Transforms. ODEs with Variable Coefficients238
  • 6.7Systems of ODEs242
  • 6.8Laplace Transform: General Formulas248
  • 6.9Table of Laplace Transforms249

Part B — Linear Algebra. Vector Calculus255

7Linear Algebra: Matrices, Vectors, Determinants. Linear Systems256
  • 7.1Matrices, Vectors: Addition and Scalar Multiplication257
  • 7.2Matrix Multiplication263
  • 7.3Linear Systems of Equations. Gauss Elimination272
  • 7.4Linear Independence. Rank of a Matrix. Vector Space282
  • 7.5Solutions of Linear Systems: Existence, Uniqueness288
  • 7.6For Reference: Second- and Third-Order Determinants291
  • 7.7Determinants. Cramer’s Rule293
  • 7.8Inverse of a Matrix. Gauss–Jordan Elimination301
  • 7.9Vector Spaces, Inner Product Spaces. Linear Transformations. Optional309
8Linear Algebra: Matrix Eigenvalue Problems322
  • 8.1The Matrix Eigenvalue Problem. Determining Eigenvalues and Eigenvectors323
  • 8.2Some Applications of Eigenvalue Problems329
  • 8.3Symmetric, Skew-Symmetric, and Orthogonal Matrices334
  • 8.4Eigenbases. Diagonalization. Quadratic Forms339
  • 8.5Complex Matrices and Forms. Optional346
9Vector Differential Calculus. Grad, Div, Curl354
  • 9.1Vectors in 2-Space and 3-Space354
  • 9.2Inner Product (Dot Product)361
  • 9.3Vector Product (Cross Product)368
  • 9.4Vector and Scalar Functions and Their Fields. Vector Calculus: Derivatives375
  • 9.5Curves. Arc Length. Curvature. Torsion381
  • 9.6Calculus Review: Functions of Several Variables. Optional392
  • 9.7Gradient of a Scalar Field. Directional Derivative395
  • 9.8Divergence of a Vector Field402
  • 9.9Curl of a Vector Field406
10Vector Integral Calculus. Integral Theorems413
  • 10.1Line Integrals413
  • 10.2Path Independence of Line Integrals419
  • 10.3Calculus Review: Double Integrals. Optional426
  • 10.4Green’s Theorem in the Plane433
  • 10.5Surfaces for Surface Integrals439
  • 10.6Surface Integrals443
  • 10.7Triple Integrals. Divergence Theorem of Gauss452
  • 10.8Further Applications of the Divergence Theorem458
  • 10.9Stokes’s Theorem463

Part C — Fourier Analysis. Partial Differential Equations (PDEs)473

11Fourier Analysis474
  • 11.1Fourier Series474
  • 11.2Arbitrary Period. Even and Odd Functions. Half-Range Expansions483
  • 11.3Forced Oscillations492
  • 11.4Approximation by Trigonometric Polynomials495
  • 11.5Sturm–Liouville Problems. Orthogonal Functions498
  • 11.6Orthogonal Series. Generalized Fourier Series504
  • 11.7Fourier Integral510
  • 11.8Fourier Cosine and Sine Transforms518
  • 11.9Fourier Transform. Discrete and Fast Fourier Transforms522
  • 11.10Tables of Transforms534
12Partial Differential Equations (PDEs)540
  • 12.1Basic Concepts of PDEs540
  • 12.2Modeling: Vibrating String, Wave Equation543
  • 12.3Solution by Separating Variables. Use of Fourier Series545
  • 12.4D’Alembert’s Solution of the Wave Equation. Characteristics553
  • 12.5Modeling: Heat Flow from a Body in Space. Heat Equation557
  • 12.6Heat Equation: Solution by Fourier Series. Steady Two-Dimensional Heat Problems. Dirichlet Problem558
  • 12.7Heat Equation: Modeling Very Long Bars. Solution by Fourier Integrals and Transforms568
  • 12.8Modeling: Membrane, Two-Dimensional Wave Equation575
  • 12.9Rectangular Membrane. Double Fourier Series577
  • 12.10Laplacian in Polar Coordinates. Circular Membrane. Fourier–Bessel Series585
  • 12.11Laplace’s Equation in Cylindrical and Spherical Coordinates. Potential593
  • 12.12Solution of PDEs by Laplace Transforms600

Part D — Complex Analysis607

13Complex Numbers and Functions. Complex Differentiation608
  • 13.1Complex Numbers and Their Geometric Representation608
  • 13.2Polar Form of Complex Numbers. Powers and Roots613
  • 13.3Derivative. Analytic Function619
  • 13.4Cauchy–Riemann Equations. Laplace’s Equation625
  • 13.5Exponential Function630
  • 13.6Trigonometric and Hyperbolic Functions. Euler’s Formula633
  • 13.7Logarithm. General Power. Principal Value636
14Complex Integration643
  • 14.1Line Integral in the Complex Plane643
  • 14.2Cauchy’s Integral Theorem652
  • 14.3Cauchy’s Integral Formula660
  • 14.4Derivatives of Analytic Functions664
15Power Series, Taylor Series671
  • 15.1Sequences, Series, Convergence Tests671
  • 15.2Power Series680
  • 15.3Functions Given by Power Series685
  • 15.4Taylor and Maclaurin Series690
  • 15.5Uniform Convergence. Optional698
16Laurent Series. Residue Integration708
  • 16.1Laurent Series708
  • 16.2Singularities and Zeros. Infinity715
  • 16.3Residue Integration Method719
  • 16.4Residue Integration of Real Integrals725
17Conformal Mapping736
  • 17.1Geometry of Analytic Functions: Conformal Mapping737
  • 17.2Linear Fractional Transformations (Möbius Transformations)742
  • 17.3Special Linear Fractional Transformations746
  • 17.4Conformal Mapping by Other Functions750
  • 17.5Riemann Surfaces. Optional754
18Complex Analysis and Potential Theory758
  • 18.1Electrostatic Fields759
  • 18.2Use of Conformal Mapping. Modeling763
  • 18.3Heat Problems767
  • 18.4Fluid Flow771
  • 18.5Poisson’s Integral Formula for Potentials777

Part E — Numeric Analysis787

19Numerics in General790
  • 19.1Introduction790
  • 19.2Solution of Equations by Iteration798
  • 19.3Interpolation808
  • 19.4Spline Interpolation820
  • 19.5Numeric Integration and Differentiation827
20Numeric Linear Algebra844
  • 20.1Linear Systems: Gauss Elimination844
  • 20.2Linear Systems: LU-Factorization, Matrix Inversion852
  • 20.3Linear Systems: Solution by Iteration858
  • 20.4Linear Systems: Ill-Conditioning, Norms864
  • 20.5Least Squares Method872
  • 20.6Matrix Eigenvalue Problems: Introduction876
  • 20.7Inclusion of Matrix Eigenvalues879
  • 20.8Power Method for Eigenvalues885
  • 20.9Tridiagonalization and QR-Factorization888
21Numerics for ODEs and PDEs900
  • 21.1Methods for First-Order ODEs901
  • 21.2Multistep Methods911
  • 21.3Methods for Systems and Higher Order ODEs915
  • 21.4Methods for Elliptic PDEs922
  • 21.5Neumann and Mixed Problems. Irregular Boundary931
  • 21.6Methods for Parabolic PDEs936
  • 21.7Method for Hyperbolic PDEs942

Part F — Optimization, Graphs949

22Unconstrained Optimization. Linear Programming950
  • 22.1Basic Concepts. Unconstrained Optimization: Method of Steepest Descent951
  • 22.2Linear Programming954
  • 22.3Simplex Method958
  • 22.4Simplex Method: Difficulties962
23Graphs. Combinatorial Optimization970
  • 23.1Graphs and Digraphs970
  • 23.2Shortest Path Problems. Complexity975
  • 23.3Bellman’s Principle. Dijkstra’s Algorithm980
  • 23.4Shortest Spanning Trees: Greedy Algorithm984
  • 23.5Shortest Spanning Trees: Prim’s Algorithm988
  • 23.6Flows in Networks991
  • 23.7Maximum Flow: Ford–Fulkerson Algorithm998
  • 23.8Bipartite Graphs. Assignment Problems1001

Part G — Probability, Statistics1009

24Data Analysis. Probability Theory1011
  • 24.1Data Representation. Average. Spread1011
  • 24.2Experiments, Outcomes, Events1015
  • 24.3Probability1018
  • 24.4Permutations and Combinations1024
  • 24.5Random Variables. Probability Distributions1029
  • 24.6Mean and Variance of a Distribution1035
  • 24.7Binomial, Poisson, and Hypergeometric Distributions1039
  • 24.8Normal Distribution1045
  • 24.9Distributions of Several Random Variables1051
25Mathematical Statistics1063
  • 25.1Introduction. Random Sampling1063
  • 25.2Point Estimation of Parameters1065
  • 25.3Confidence Intervals1068
  • 25.4Testing Hypotheses. Decisions1077
  • 25.5Quality Control1087
  • 25.6Acceptance Sampling1092
  • 25.7Goodness of Fit. χ²-Test1096
  • 25.8Nonparametric Tests1100
  • 25.9Regression. Fitting Straight Lines. Correlation1103
부록 1ReferencesA1
부록 2Answers to Odd-Numbered ProblemsA4
부록 3Auxiliary MaterialA63
  • A3.1Formulas for Special FunctionsA63
  • A3.2Partial DerivativesA69
  • A3.3Sequences and SeriesA72
  • A3.4Grad, Div, Curl, ∇² in Curvilinear CoordinatesA74
부록 4Additional ProofsA77
부록 5TablesA97

원본 목차 PDF로 대조 완료 — 7부 25장 + 부록 5종, 175개 절, 쪽수 포함. §12.7 Heat Equation: Modeling Very Long Bars가 푸리에 변환으로 반무한 매질 확산을 풀어 오차함수 프로파일을 준다 — 18.7의 수학적 근거. 부록 3(Auxiliary Material)에 특수함수 공식·곡선좌표계 연산자가, 부록 5(Tables)에 오차함수·정규분포표가 있다.

Mathematical Methods for Physicists: A Comprehensive Guide

1부Arfken · Weber · Harris · 7th ed. · Academic Press, 2013 · ISBN 978-0-12-384654-9  원본 대조

1Mathematical Preliminaries1
  • 1.1Infinite Series1
  • 1.2Series of Functions21
  • 1.3Binomial Theorem33
  • 1.4Mathematical Induction40
  • 1.5Operations of Series Expansions of Functions41
  • 1.6Some Important Series45
  • 1.7Vectors46
  • 1.8Complex Numbers and Functions53
  • 1.9Derivatives and Extrema62
  • 1.10Evaluation of Integrals65
  • 1.11Dirac Delta Functions75
2Determinants And Matrices83
  • 2.1Determinants83
  • 2.2Matrices95
3Vector Analysis123
  • 3.1Review of Basics Properties124
  • 3.2Vector in 3 ‐ D Spaces126
  • 3.3Coordinate Transformations133
  • 3.4Rotations in ℜ³139
  • 3.5Differential Vector Operators143
  • 3.6Differential Vector Operators: Further Properties153
  • 3.7Vector Integrations159
  • 3.8Integral Theorems164
  • 3.9Potential Theory170
  • 3.10Curvilinear Coordinates182
4Tensor And Differential Forms205
  • 4.1Tensor Analysis205
  • 4.2Pseudotensors, Dual Tensors215
  • 4.3Tensor in General Coordinates218
  • 4.4Jacobians227
  • 4.5Differential Forms232
  • 4.6Differentiating Forms238
  • 4.7Integrating Forms243
5Vector Spaces251
  • 5.1Vector in Function Spaces251
  • 5.2Gram ‐ Schmidt Orthogonalization269
  • 5.3Operators275
  • 5.4Self‐Adjoint Operators283
  • 5.5Unitary Operators287
  • 5.6Transformations of Operators292
  • 5.7Invariants294
  • 5.8Summary – Vector Space Notations296
6Eigenvalue Problems299
  • 6.1Eigenvalue Equations299
  • 6.2Matrix Eigenvalue Problems301
  • 6.3Hermitian Eigenvalue Problems310
  • 6.4Hermitian Matrix Diagonalization311
  • 6.5Normal Matrices319
7Ordinary Differential Equations329
  • 7.1Introduction329
  • 7.2First ‐ Order Equations331
  • 7.3ODEs with Constant Coefficients342
  • 7.4Second‐Order Linear ODEs343
  • 7.5Series Solutions‐ Frobenius‘ Method346
  • 7.6Other Solutions358
  • 7.7Inhomogeneous Linear ODEs375
  • 7.8Nonlinear Differential Equations377
8Sturm – Liouville Theory381
  • 8.1Introduction381
  • 8.2Hermitian Operators384
  • 8.3ODE Eigenvalue Problems389
  • 8.4Variation Methods395
  • 8.5Summary, Eigenvalue Problems398
9Partial Differential Equations401
  • 9.1Introduction401
  • 9.2First ‐ Order Equations403
  • 9.3Second – Order Equations409
  • 9.4Separation of Variables414
  • 9.5Laplace and Poisson Equations433
  • 9.6Wave Equations435
  • 9.7Heat – Flow, or Diffution PDE437
  • 9.8Summary444
10Green’ Functions447
  • 10.1One – Dimensional Problems448
  • 10.2Problems in Two and Three Dimensions459
11Complex Variable Theory469
  • 11.1Complex Variables and Functions470
  • 11.2Cauchy – Riemann Conditions471
  • 11.3Cauchy’s Integral Theorem477
  • 11.4Cauchy’s Integral Formula486
  • 11.5Laurent Expansion492
  • 11.6Singularities497
  • 11.7Calculus of Residues509
  • 11.8Evaluation of Definite Integrals522
  • 11.9Evaluation of Sums544
  • 11.10Miscellaneous Topics547
12Further Topics In Analysis551
  • 12.1Orthogonal Polynomials551
  • 12.2Bernoulli Numbers560
  • 12.3Euler – Maclaurin Integration Formula567
  • 12.4Dirichlet Series571
  • 12.5Infinite Products574
  • 12.6Asymptotic Series577
  • 12.7Method of Steepest Descents585
  • 12.8Dispertion Relations591
13Gamma Function599
  • 13.1Definitions, Properties599
  • 13.2Digamma and Polygamma Functions610
  • 13.3The Beta Function617
  • 13.4Stirling’s Series622
  • 13.5Riemann Zeta Function626
  • 13.6Other Ralated Function633
14Bessel Functions643
  • 14.1Bessel Functions of the First kind, Jν(x)643
  • 14.2Orthogonality661
  • 14.3Neumann Functions, Bessel Functions of the Second kind667
  • 14.4Hankel Functions674
  • 14.5Modified Bessel Functions, Iν(x) and Kν(x)680
  • 14.6Asymptotic Expansions688
  • 14.7Spherical Bessel Functions698
15Legendre Functions715
  • 15.1Legendre Polynomials716
  • 15.2Orthogonality724
  • 15.3Physical Interpretation of Generating Function736
  • 15.4Associated Legendre Equation741
  • 15.5Spherical Harmonics756
  • 15.6Legendre Functions of the Second Kind766
16Angular Momentum773
  • 16.1Angular Momentum Operators774
  • 16.2Angular Momentum Coupling784
  • 16.3Spherical Tensors796
  • 16.4Vector Spherical Harmonics809
17Group Theory815
  • 17.1Introduction to Group Theory815
  • 17.2Representation of Groups821
  • 17.3Symmetry and Physics826
  • 17.4Discrete Groups830
  • 17.5Direct Products837
  • 17.6Simmetric Group840
  • 17.7Continous Groups845
  • 17.8Lorentz Group862
  • 17.9Lorentz Covariance of Maxwell’s Equantions866
  • 17.10Space Groups869
18More Special Functions871
  • 18.1Hermite Functions871
  • 18.2Applications of Hermite Functions878
  • 18.3Laguerre Functions889
  • 18.4Chebyshev Polynomials899
  • 18.5Hypergeometric Functions911
  • 18.6Confluent Hypergeometric Functions917
  • 18.7Dilogarithm923
  • 18.8Elliptic Integrals927
19Fourier Series935
  • 19.1General Properties935
  • 19.2Application of Fourier Series949
  • 19.3Gibbs Phenomenon957
20Integral Transforms963
  • 20.1Introduction963
  • 20.2Fourier Transforms966
  • 20.3Properties of Fourier Transforms980
  • 20.4Fourier Convolution Theorem985
  • 20.5Signal – Proccesing Applications997
  • 20.6Discrete Fourier Transforms1002
  • 20.7Laplace Transforms1008
  • 20.8Properties of Laplace Transforms1016
  • 20.9Laplace Convolution Transforms1034
  • 20.10Inverse Laplace Transforms1038
21Integral Equations1047
  • 21.1Introduction1047
  • 21.2Some Special Methods1053
  • 21.3Neumann Series1064
  • 21.4Hilbert – Schmidt Theory1069
22Calculus Of Variations1081
  • 22.1Euler Equation1081
  • 22.2More General Variations1096
  • 22.3Constrained Minima/Maxima1107
  • 22.4Variation with Constraints1111
23Probability And Statistics1125
  • 23.1Probability: Definitions, Simple Properties1126
  • 23.2Random Variables1134
  • 23.3Binomial Distribution1148
  • 23.4Poisson Distribution1151
  • 23.5Gauss’ Nomal Distribution1155
  • 23.6Transformation of Random Variables1159
  • 23.7Statistics1165

원본 목차 PDF로 대조 완료 — 23장 153개 절, 쪽수 포함. Part 구분 없이 선형 배열이며 모든 장이 Additional Readings로 끝난다. §12.8 Dispersion Relations가 크라머스-크로니히, §17.10 Space Groups가 결정 대칭. 수치해석 장이 없다 — 그쪽은 Kreyszig Ch.19–21.

Mathematical Methods in the Physical Sciences

1부Mary L. Boas · 3rd ed. · Wiley, 2005 · ISBN 978-0-471-19826-0  원본 대조

1Infinite Series, Power Series1
  • 1The Geometric Series1
  • 2Definitions and Notation4
  • 3Applications of Series6
  • 4Convergent and Divergent Series6
  • 5Testing Series for Convergence; the Preliminary Test9
  • 6Convergence Tests for Series of Positive Terms: Absolute Convergence10
  • AThe Comparison Test10
  • BThe Integral Test11
  • CThe Ratio Test13
  • DA Special Comparison Test15
  • 7Alternating Series17
  • 8Conditionally Convergent Series18
  • 9Useful Facts About Series19
  • 10Power Series; Interval of Convergence20
  • 11Theorems About Power Series23
  • 12Expanding Functions in Power Series23
  • 13Techniques for Obtaining Power Series Expansions25
  • AMultiplying a Series by a Polynomial or by Another Series26
  • BDivision of Two Series or of a Series by a Polynomial27
  • CBinomial Series28
  • DSubstitution of a Polynomial or a Series for the Variable in Another
  • ECombination of Methods30
  • FTaylor Series Using the Basic Maclaurin Series30
  • GUsing a Computer31
  • 14Accuracy of Series Approximations33
  • 15Some Uses of Series36
  • 16Miscellaneous Problems44
2Complex Numbers46
  • 1Introduction46
  • 2Real and Imaginary Parts of a Complex Number47
  • 3The Complex Plane47
  • 4Terminology and Notation49
  • 5Complex Algebra51
  • ASimplifying to x +iy form51
  • BComplex Conjugate of a Complex Expression52
  • CFinding the Absolute Value of z53
  • DComplex Equations54
  • EGraphs54
  • FPhysical Applications55
  • 6Complex Infinite Series56
  • 7Complex Power Series; Disk of Convergence58
  • 8Elementary Functions of Complex Numbers60
  • 9Euler’s Formula61
  • 10Powers and Roots of Complex Numbers64
  • 11The Exponential and Trigonometric Functions67
  • 12Hyperbolic Functions70
  • 13Logarithms72
  • 14Complex Roots and Powers73
  • 15Inverse Trigonometric and Hyperbolic Functions74
  • 16Some Applications76
  • 17Miscellaneous Problems80
3Linear Algebra82
  • 1Introduction82
  • 2Matrices; Row Reduction83
  • 3Determinants; Cramer’s Rule89
  • 4Vectors96
  • 5Lines and Planes106
  • 6Matrix Operations114
  • 7Linear Combinations, Linear Functions, Linear Operators124
  • 8Linear Dependence and Independence132
  • 9Special Matrices and Formulas137
  • 10Linear Vector Spaces142
  • 11Eigenvalues and Eigenvectors; Diagonalizing Matrices148
  • 12Applications of Diagonalization162
  • 13A Brief Introduction to Groups172
  • 14General Vector Spaces179
  • 15Miscellaneous Problems184
4Partial Differentiation188
  • 1Introduction and Notation188
  • 2Power Series in Two Variables191
  • 3Total Differentials193
  • 4Approximations using Differentials196
  • 5Chain Rule or Differentiating a Function of a Function199
  • 6Implicit Differentiation202
  • 7More Chain Rule203
  • 8Application of Partial Differentiation to Maximum and Minimum Problems211
  • 9Maximum and Minimum Problems with Constraints; Lagrange Multipliers214
  • 10Endpoint or Boundary Point Problems223
  • 11Change of Variables228
  • 12Differentiation of Integrals; Leibniz’ Rule233
  • 13Miscellaneous problems238
5Multiple Integrals241
  • 1Introduction241
  • 2Double and Triple Integrals242
  • 3Applications of Integration; Single and Multiple Integrals249
  • 4Change of Variables in Integrals; Jacobians258
  • 5Surface Integrals270
  • 6Miscellaneous Problems273
6Vector Analysis276
  • 1Introduction276
  • 2Applications of Vector Multiplication276
  • 3Triple Products278
  • 4Differentiation of Vectors285
  • 5Fields289
  • 6Directional Derivative; Gradient290
  • 7Some Other Expressions Involving ∇296
  • 8Line Integrals299
  • 9Green’s Theorem in the Plane309
  • 10The Divergence and the Divergence Theorem314
  • 11The Curl and Stokes’ Theorem324
  • 12Miscellaneous Problems336
7Fourier Series And Transforms340
  • 1Introduction340
  • 2Simple Harmonic Motion and Wave Motion; Periodic Functions340
  • 3Applications of Fourier Series345
  • 4Average Value of a Function347
  • 5Fourier Coefficients350
  • 6Dirichlet Conditions355
  • 7Complex Form of Fourier Series358
  • 8Other Intervals360
  • 9Even and Odd Functions364
  • 10An Application to Sound372
  • 11Parseval’s Theorem375
  • 12Fourier Transforms378
  • 13Miscellaneous Problems386
8Ordinary Differential Equations390
  • 1Introduction390
  • 2Separable Equations395
  • 3Linear First-Order Equations401
  • 4Other Methods for First-Order Equations404
  • 5Second-Order Linear Equations with Constant Coefficients and Zero Right-Hand Side408
  • 6Second-Order Linear Equations with Constant Coefficients and Right-Hand Side Not Zero417
  • 7Other Second-Order Equations430
  • 8The Laplace Transform437
  • 9Solution of Differential Equations by Laplace Transforms440
  • 10Convolution444
  • 11The Dirac Delta Function449
  • 12A Brief Introduction to Green Functions461
  • 13Miscellaneous Problems466
9Calculus Of Variations472
  • 1Introduction472
  • 2The Euler Equation474
  • 3Using the Euler Equation478
  • 4The Brachistochrone Problem; Cycloids482
  • 5Several Dependent Variables; Lagrange’s Equations485
  • 6Isoperimetric Problems491
  • 7Variational Notation493
  • 8Miscellaneous Problems494
10Tensor Analysis496
  • 1Introduction496
  • 2Cartesian Tensors498
  • 3Tensor Notation and Operations502
  • 4Inertia Tensor505
  • 5Kronecker Delta and Levi-Civita Symbol508
  • 6Pseudovectors and Pseudotensors514
  • 7More About Applications518
  • 8Curvilinear Coordinates521
  • 9Vector Operators in Orthogonal Curvilinear Coordinates525
  • 10Non-Cartesian Tensors529
  • 11Miscellaneous Problems535
11Special Functions537
  • 1Introduction537
  • 2The Factorial Function538
  • 3Definition of the Gamma Function; Recursion Relation538
  • 4The Gamma Function of Negative Numbers540
  • 5Some Important Formulas Involving Gamma Functions541
  • 6Beta Functions542
  • 7Beta Functions in Terms of Gamma Functions543
  • 8The Simple Pendulum545
  • 9The Error Function547
  • 10Asymptotic Series549
  • 11Stirling’s Formula552
  • 12Elliptic Integrals and Functions554
  • 13Miscellaneous Problems560
12Series Solutions Of Differential Equations; Legendre, Bessel, Hermite, And Laguerre Functions562
  • 1Introduction562
  • 2Legendre’s Equation564
  • 3Leibniz’ Rule for Differentiating Products567
  • 4Rodrigues’ Formula568
  • 5Generating Function for Legendre Polynomials569
  • 6Complete Sets of Orthogonal Functions575
  • 7Orthogonality of the Legendre Polynomials577
  • 8Normalization of the Legendre Polynomials578
  • 9Legendre Series580
  • 10The Associated Legendre Functions583
  • 11Generalized Power Series or the Method of Frobenius585
  • 12Bessel’s Equation587
  • 13The Second Solution of Bessel’s Equation590
  • 14Graphs and Zeros of Bessel Functions591
  • 15Recursion Relations592
  • 16Differential Equations with Bessel Function Solutions593
  • 17Other Kinds of Bessel Functions595
  • 18The Lengthening Pendulum598
  • 19Orthogonality of Bessel Functions601
  • 20Approximate Formulas for Bessel Functions604
  • 21Series Solutions; Fuchs’s Theorem605
  • 22Hermite Functions; Laguerre Functions; Ladder Operators607
  • 23Miscellaneous Problems615
13Partial Differential Equations619
  • 1Introduction619
  • 2Laplace’s Equation; Steady-State Temperature in a Rectangular Plate621
  • 3The Diffusion or Heat Flow Equation; the Schrödinger Equation628
  • 4The Wave Equation; the Vibrating String633
  • 5Steady-state Temperature in a Cylinder638
  • 6Vibration of a Circular Membrane644
  • 7Steady-state Temperature in a Sphere647
  • 8Poisson’s Equation652
  • 9Integral Transform Solutions of Partial Differential Equations659
  • 10Miscellaneous Problems663
14Functions Of A Complex Variable666
  • 1Introduction666
  • 2Analytic Functions667
  • 3Contour Integrals674
  • 4Laurent Series678
  • 5The Residue Theorem682
  • 6Methods of Finding Residues683
  • 7Evaluation of Definite Integrals by Use of the Residue Theorem687
  • 8The Point at Infinity; Residues at Infinity702
  • 9Mapping705
  • 10Some Applications of Conformal Mapping710
  • 11Miscellaneous Problems718
15Probability And Statistics722
  • 1Introduction722
  • 2Sample Space724
  • 3Probability Theorems729
  • 4Methods of Counting736
  • 5Random Variables744
  • 6Continuous Distributions750
  • 7Binomial Distribution756
  • 8The Normal or Gaussian Distribution761
  • 9The Poisson Distribution767
  • 10Statistics and Experimental Measurements770
  • 11Miscellaneous Problems776

원본 목차 PDF로 대조 완료 — 15장 189개 절, 쪽수 포함. 절 번호가 장 안에서 1부터 다시 시작하는 방식(Ch.13 §3)이라 인용할 때 장을 반드시 함께 적어야 한다. Kreyszig보다 물리 지향, Arfken보다 평이하다. §8.12 Green Functions, §11.9 The Error Function, §13.3 The Diffusion or Heat Flow Equation, §3.13 A Brief Introduction to Groups가 1부에서 직접 쓰이는 절.

2부 · 전자기학

Introduction to Electrodynamics

2부David J. Griffiths · 4th ed. · Pearson 2013 / Cambridge 2017 · ISBN 978-1-108-42041-9  원본 대조

1Vector Analysis1
  • 1.1Vector Algebra1
  • 1.1.1Vector Operations1
  • 1.1.2Vector Algebra: Component Form4
  • 1.1.3Triple Products7
  • 1.1.4Position, Displacement, and Separation Vectors8
  • 1.1.5How Vectors Transform10
  • 1.2Differential Calculus13
  • 1.2.1“Ordinary” Derivatives13
  • 1.2.2Gradient13
  • 1.2.3The Del Operator16
  • 1.2.4The Divergence17
  • 1.2.5The Curl18
  • 1.2.6Product Rules20
  • 1.2.7Second Derivatives22
  • 1.3Integral Calculus24
  • 1.3.1Line, Surface, and Volume Integrals24
  • 1.3.2The Fundamental Theorem of Calculus29
  • 1.3.3The Fundamental Theorem for Gradients29
  • 1.3.4The Fundamental Theorem for Divergences31
  • 1.3.5The Fundamental Theorem for Curls34
  • 1.3.6Integration by Parts36
  • 1.4Curvilinear Coordinates38
  • 1.4.1Spherical Coordinates38
  • 1.4.2Cylindrical Coordinates43
  • 1.5The Dirac Delta Function45
  • 1.5.1The Divergence of r̂/r 245
  • 1.5.2The One-Dimensional Dirac Delta Function46
  • 1.5.3The Three-Dimensional Delta Function50
  • 1.6The Theory of Vector Fields52
  • 1.6.1The Helmholtz Theorem52
  • 1.6.2Potentials53
2Electrostatics59
  • 2.1The Electric Field59
  • 2.1.1Introduction59
  • 2.1.2Coulomb’s Law60
  • 2.1.3The Electric Field61
  • 2.1.4Continuous Charge Distributions63
  • 2.2Divergence and Curl of Electrostatic Fields66
  • 2.2.1Field Lines, Flux, and Gauss’s Law66
  • 2.2.2The Divergence of E71
  • 2.2.3Applications of Gauss’s Law71
  • 2.2.4The Curl of E77
  • 2.3Electric Potential78
  • 2.3.1Introduction to Potential78
  • 2.3.2Comments on Potential80
  • 2.3.3Poisson’s Equation and Laplace’s Equation83
  • 2.3.4The Potential of a Localized Charge Distribution84
  • 2.3.5Boundary Conditions88
  • 2.4Work and Energy in Electrostatics91
  • 2.4.1The Work It Takes to Move a Charge91
  • 2.4.2The Energy of a Point Charge Distribution92
  • 2.4.3The Energy of a Continuous Charge Distribution94
  • 2.4.4Comments on Electrostatic Energy96
  • 2.5Conductors97
  • 2.5.1Basic Properties97
  • 2.5.2Induced Charges99
  • 2.5.3Surface Charge and the Force on a Conductor103
  • 2.5.4Capacitors105
3Potentials113
  • 3.1Laplace’s Equation113
  • 3.1.1Introduction113
  • 3.1.2Laplace’s Equation in One Dimension114
  • 3.1.3Laplace’s Equation in Two Dimensions115
  • 3.1.4Laplace’s Equation in Three Dimensions117
  • 3.1.5Boundary Conditions and Uniqueness Theorems119
  • 3.1.6Conductors and the Second Uniqueness Theorem121
  • 3.2The Method of Images124
  • 3.2.1The Classic Image Problem124
  • 3.2.2Induced Surface Charge125
  • 3.2.3Force and Energy126
  • 3.2.4Other Image Problems127
  • 3.3Separation of Variables130
  • 3.3.1Cartesian Coordinates131
  • 3.3.2Spherical Coordinates141
  • 3.4Multipole Expansion151
  • 3.4.1Approximate Potentials at Large Distances151
  • 3.4.2The Monopole and Dipole Terms154
  • 3.4.3Origin of Coordinates in Multipole Expansions157
  • 3.4.4The Electric Field of a Dipole158
4Electric Fields in Matter167
  • 4.1Polarization167
  • 4.1.1Dielectrics167
  • 4.1.2Induced Dipoles167
  • 4.1.3Alignment of Polar Molecules170
  • 4.1.4Polarization172
  • 4.2The Field of a Polarized Object173
  • 4.2.1Bound Charges173
  • 4.2.2Physical Interpretation of Bound Charges176
  • 4.2.3The Field Inside a Dielectric179
  • 4.3The Electric Displacement181
  • 4.3.1Gauss’s Law in the Presence of Dielectrics181
  • 4.3.2A Deceptive Parallel184
  • 4.3.3Boundary Conditions185
  • 4.4Linear Dielectrics185
  • 4.4.1Susceptibility, Permittivity, Dielectric Constant185
  • 4.4.2Boundary Value Problems with Linear Dielectrics192
  • 4.4.3Energy in Dielectric Systems197
  • 4.4.4Forces on Dielectrics202
5Magnetostatics210
  • 5.1The Lorentz Force Law210
  • 5.1.1Magnetic Fields210
  • 5.1.2Magnetic Forces212
  • 5.1.3Currents216
  • 5.2The Biot-Savart Law223
  • 5.2.1Steady Currents223
  • 5.2.2The Magnetic Field of a Steady Current224
  • 5.3The Divergence and Curl of B229
  • 5.3.1Straight-Line Currents229
  • 5.3.2The Divergence and Curl of B231
  • 5.3.3Ampère’s Law233
  • 5.3.4Comparison of Magnetostatics and Electrostatics241
  • 5.4Magnetic Vector Potential243
  • 5.4.1The Vector Potential243
  • 5.4.2Boundary Conditions249
  • 5.4.3Multipole Expansion of the Vector Potential252
6Magnetic Fields in Matter266
  • 6.1Magnetization266
  • 6.1.1Diamagnets, Paramagnets, Ferromagnets266
  • 6.1.2Torques and Forces on Magnetic Dipoles266
  • 6.1.3Effect of a Magnetic Field on Atomic Orbits271
  • 6.1.4Magnetization273
  • 6.2The Field of a Magnetized Object274
  • 6.2.1Bound Currents274
  • 6.2.2Physical Interpretation of Bound Currents277
  • 6.2.3The Magnetic Field Inside Matter279
  • 6.3The Auxiliary Field H279
  • 6.3.1Ampère’s Law in Magnetized Materials279
  • 6.3.2A Deceptive Parallel283
  • 6.3.3Boundary Conditions284
  • 6.4Linear and Nonlinear Media284
  • 6.4.1Magnetic Susceptibility and Permeability284
  • 6.4.2Ferromagnetism288
7Electrodynamics296
  • 7.1Electromotive Force296
  • 7.1.1Ohm’s Law296
  • 7.1.2Electromotive Force303
  • 7.1.3Motional emf305
  • 7.2Electromagnetic Induction312
  • 7.2.1Faraday’s Law312
  • 7.2.2The Induced Electric Field317
  • 7.2.3Inductance321
  • 7.2.4Energy in Magnetic Fields328
  • 7.3Maxwell’s Equations332
  • 7.3.1Electrodynamics Before Maxwell332
  • 7.3.2How Maxwell Fixed Ampère’s Law334
  • 7.3.3Maxwell’s Equations337
  • 7.3.4Magnetic Charge338
  • 7.3.5Maxwell’s Equations in Matter340
  • 7.3.6Boundary Conditions342
8Conservation Laws356
  • 8.1Charge and Energy356
  • 8.1.1The Continuity Equation356
  • 8.1.2Poynting’s Theorem357
  • 8.2Momentum360
  • 8.2.1Newton’s Third Law in Electrodynamics360
  • 8.2.2Maxwell’s Stress Tensor362
  • 8.2.3Conservation of Momentum366
  • 8.2.4Angular Momentum370
  • 8.3Magnetic Forces Do No Work373
9Electromagnetic Waves382
  • 9.1Waves in One Dimension382
  • 9.1.1The Wave Equation382
  • 9.1.2Sinusoidal Waves385
  • 9.1.3Boundary Conditions: Reflection and Transmission388
  • 9.1.4Polarization391
  • 9.2Electromagnetic Waves in Vacuum393
  • 9.2.1The Wave Equation for E and B393
  • 9.2.2Monochromatic Plane Waves394
  • 9.2.3Energy and Momentum in Electromagnetic Waves398
  • 9.3Electromagnetic Waves in Matter401
  • 9.3.1Propagation in Linear Media401
  • 9.3.2Reflection and Transmission at Normal Incidence403
  • 9.3.3Reflection and Transmission at Oblique Incidence405
  • 9.4Absorption and Dispersion412
  • 9.4.1Electromagnetic Waves in Conductors412
  • 9.4.2Reflection at a Conducting Surface416
  • 9.4.3The Frequency Dependence of Permittivity417
  • 9.5Guided Waves425
  • 9.5.1Wave Guides425
  • 9.5.2TE Waves in a Rectangular Wave Guide428
  • 9.5.3The Coaxial Transmission Line431
10Potentials and Fields436
  • 10.1The Potential Formulation436
  • 10.1.1Scalar and Vector Potentials436
  • 10.1.2Gauge Transformations439
  • 10.1.3Coulomb Gauge and Lorenz Gauge440
  • 10.1.4Lorentz Force Law in Potential Form442
  • 10.2Continuous Distributions444
  • 10.2.1Retarded Potentials444
  • 10.2.2Jefimenko’s Equations449
  • 10.3Point Charges451
  • 10.3.1Liénard-Wiechert Potentials451
  • 10.3.2The Fields of a Moving Point Charge456
11Radiation466
  • 11.1Dipole Radiation466
  • 11.1.1What is Radiation?466
  • 11.1.2Electric Dipole Radiation467
  • 11.1.3Magnetic Dipole Radiation473
  • 11.1.4Radiation from an Arbitrary Source477
  • 11.2Point Charges482
  • 11.2.1Power Radiated by a Point Charge482
  • 11.2.2Radiation Reaction Reaction492
12Electrodynamics and Relativity502
  • 12.1The Special Theory of Relativity502
  • 12.1.1Einstein’s Postulates502
  • 12.1.2The Geometry of Relativity508
  • 12.1.3The Lorentz Transformations519
  • 12.1.4The Structure of Spacetime525
  • 12.2Relativistic Mechanics532
  • 12.2.1Proper Time and Proper Velocity532
  • 12.2.2Relativistic Energy and Momentum535
  • 12.2.3Relativistic Kinematics537
  • 12.2.4Relativistic Dynamics542
  • 12.3Relativistic Electrodynamics550
  • 12.3.1Magnetism as a Relativistic Phenomenon550
  • 12.3.2How the Fields Transform553
  • 12.3.3The Field Tensor562
  • 12.3.4Electrodynamics in Tensor Notation565
  • 12.3.5Relativistic Potentials569
AVector Calculus in Curvilinear Coordinates575
  • A.1Introduction575
  • A.2Notation575
  • A.3Gradient576
  • A.4Divergence577
  • A.5Curl579
  • A.6Laplacian581
BThe Helmholtz Theorem582
CUnits585

원본 목차 PDF로 대조 완료 — 12장 + 부록 3종, 52개 절과 162개 소절, 쪽수 포함. 소절까지 인쇄 목차에 실린 드문 교재다. Ch.3 Potentials(유일성 정리·영상법·변수분리법)가 14.1 문턱하 2차원 푸아송 해석해의 기법이고, §9.4.3 The Frequency Dependence of Permittivity가 타원계측·광학 상수의 근거다.

Elements of Electromagnetics

2부Matthew N. O. Sadiku · 7th ed. · Oxford University Press, 2018 · ISBN 978-0-19-069861-4  원본 대조

Part 1 — Vector Analysis

1Vector Algebra3
  • 1.1Introduction3
  • 1.2A Preview of the Book4
  • 1.3Scalars and Vectors4
  • 1.4Unit Vector5
  • 1.5Vector Addition and Subtraction6
  • 1.6Position and Distance Vectors7
  • 1.7Vector Multiplication11
  • 1.8Components of a Vector16
2Coordinate Systems and Transformation31
  • 2.1Introduction31
  • 2.2Cartesian Coordinates (x, y, z)32
  • 2.3Circular Cylindrical Coordinates (ρ, ϕ, z)32
  • 2.4Spherical Coordinates (r, θ, ϕ)35
  • 2.5Constant-Coordinate Surfaces44
3Vector Calculus59
  • 3.1Introduction59
  • 3.2Differential Length, Area, and Volume59
  • 3.3Line, Surface, and Volume Integrals66
  • 3.4Del Operator69
  • 3.5Gradient of a Scalar71
  • 3.6Divergence of a Vector and Divergence Theorem75
  • 3.7Curl of a Vector and Stokes’s Theorem82
  • 3.8Laplacian of a Scalar90
  • 3.9Classification of Vector Fields92

Part 2 — Electrostatics

4Electrostatic Fields111
  • 4.1Introduction111
  • 4.2Coulomb’s Law and Field Intensity112
  • 4.3Electric Fields due to Continuous Charge Distributions119
  • 4.4Electric Flux Density130
  • 4.5Gauss’s Law—Maxwell’s Equation132
  • 4.6Applications of Gauss’s Law134
  • 4.7Electric Potential141
  • 4.8Relationship between E and V—Maxwell’s Equation147
  • 4.9An Electric Dipole and Flux Lines150
  • 4.10Energy Density in Electrostatic Fields154
  • 4.11Application Note—Electrostatic Discharge159
5Electric Fields in Material Space177
  • 5.1Introduction177
  • 5.2Properties of Materials177
  • 5.3Convection and Conduction Currents178
  • 5.4Conductors181
  • 5.5Polarization in Dielectrics187
  • 5.6Dielectric Constant and Strength190
  • 5.7Linear, Isotropic, and Homogeneous Dielectrics191
  • 5.8Continuity Equation and Relaxation Time196
  • 5.9Boundary Conditions198
  • 5.10Application Note—Materials with High Dielectric Constant207
  • 5.11Application Note—Graphene208
  • 5.12Application Note—Piezoelectrics210
6Electrostatic Boundary-Value Problems225
  • 6.1Introduction225
  • 6.2Poisson’s and Laplace’s Equations225
  • 6.3Uniqueness Theorem227
  • 6.4General Procedures for Solving Poisson’s or Laplace’s Equation228
  • 6.5Resistance and Capacitance249
  • 6.6Method of Images266
  • 6.7Application Note—Capacitance of Microstrip Lines272
  • 6.8Application Note—RF MEMS275
  • 6.9Application Note—Supercapacitors276

Part 3 — Magnetostatics

7Magnetostatic Fields297
  • 7.1Introduction297
  • 7.2Biot–Savart’s Law298
  • 7.3Ampère’s Circuit Law—Maxwell’s Equation309
  • 7.4Applications of Ampère’s Law309
  • 7.5Magnetic Flux Density—Maxwell’s Equation317
  • 7.6Maxwell’s Equations for Static Fields319
  • 7.7Magnetic Scalar and Vector Potentials320
  • 7.8Derivation of Biot–Savart’s Law and Ampère’s Law326
  • 7.9Application Note—Lightning328
  • 7.10Application Note—Polywells329
8Magnetic Forces, Materials, and Devices349
  • 8.1Introduction349
  • 8.2Forces due to Magnetic Fields349
  • 8.3Magnetic Torque and Moment361
  • 8.4A Magnetic Dipole363
  • 8.5Magnetization in Materials368
  • 8.6Classification of Materials372
  • 8.7Magnetic Boundary Conditions376
  • 8.8Inductors and Inductances381
  • 8.9Magnetic Energy384
  • 8.10Magnetic Circuits392
  • 8.11Force on Magnetic Materials394
  • 8.12Application Note—Magnetic Levitation399
  • 8.13Application Note—SQUIDs401

Part 4 — Waves and Applications

9Maxwell’s Equations421
  • 9.1Introduction421
  • 9.2Faraday’s Law422
  • 9.3Transformer and Motional Electromotive Forces424
  • 9.4Displacement Current433
  • 9.5Maxwell’s Equations in Final Forms436
  • 9.6Time-Varying Potentials439
  • 9.7Time-Harmonic Fields441
  • 9.8Application Note—Memristor454
  • 9.9Application Note—Optical Nanocircuits455
  • 9.10Application Note—Wireless Power Transfer and Qi Standard457
10Electromagnetic Wave Propagation473
  • 10.1Introduction473
  • 10.2Waves in General474
  • 10.3Wave Propagation in Lossy Dielectrics480
  • 10.4Plane Waves in Lossless Dielectrics487
  • 10.5Plane Waves in Free Space487
  • 10.6Plane Waves in Good Conductors489
  • 10.7Wave Polarization498
  • 10.8Power and the Poynting Vector502
  • 10.9Reflection of a Plane Wave at Normal Incidence506
  • 10.10Reflection of a Plane Wave at Oblique Incidence517
  • 10.11Application Note—Microwaves529
  • 10.12Application Note—60 GHz Technology534
11Transmission Lines553
  • 11.1Introduction553
  • 11.2Transmission Line Parameters554
  • 11.3Transmission Line Equations557
  • 11.4Input Impedance, Standing Wave Ratio, and Power564
  • 11.5The Smith Chart572
  • 11.6Some Applications of Transmission Lines585
  • 11.7Transients on Transmission Lines592
  • 11.8Application Note—Microstrip Lines and Characterization of Data Cables604
  • 11.9Application Note—Metamaterials612
  • 11.10Application Note—Microwave Imaging613
12Waveguides633
  • 12.1Introduction633
  • 12.2Rectangular Waveguides634
  • 12.3Transverse Magnetic Modes638
  • 12.4Transverse Electric Modes643
  • 12.5Wave Propagation in the Guide654
  • 12.6Power Transmission and Attenuation656
  • 12.7Waveguide Current and Mode Excitation660
  • 12.8Waveguide Resonators666
  • 12.9Application Note—Optical Fiber672
  • 12.10Application Note—Cloaking and Invisibility678
13Antennas691
  • 13.1Introduction691
  • 13.2Hertzian Dipole693
  • 13.3Half-Wave Dipole Antenna697
  • 13.4Quarter-Wave Monopole Antenna701
  • 13.5Small-Loop Antenna702
  • 13.6Antenna Characteristics707
  • 13.7Antenna Arrays715
  • 13.8Effective Area and the Friis Equation725
  • 13.9The Radar Equation728
  • 13.10Application Note—Electromagnetic Interference and Compatibility732
  • 13.11Application Note—Textile Antennas and Sensors737
  • 13.12Application Note—Fractal Antennas739
  • 13.13Application Note—RFID742
14Numerical Methods757
  • 14.1Introduction757
  • 14.2Field Plotting758
  • 14.3The Finite Difference Method766
  • 14.4The Moment Method779
  • 14.5The Finite Element Method791
  • 14.6Application Note—Microstrip Lines810

원본 목차 PDF로 대조 완료 — 4개 Part 14장 138개 절, 쪽수 포함. 벡터해석을 1부에 따로 두고 정전계 → 정자계 → 시변계 순으로 가는 공학 구성이라, 전송선(11장)·도파관(12장)·안테나(13장)가 Griffiths보다 두껍다. 원서가 절 번호 앞에 †를 붙여 한 학기 강의에서 건너뛰어도 되는 절을 표시하는데, 여기서는 그 표식을 빼고 실었다. 각 장 끝 Application Note도 본문 절 번호를 그대로 이어받는다 — §5.11 Graphene, §9.8 Memristor, §11.9 Metamaterials, §12.9 Optical Fiber가 그 예. 수치해석(14장)에 유한차분·모멘트법·유한요소법이 들어 있어 20부 TCAD의 배경으로 쓸 수 있다.

3부 · 일반물리와 광학

Optics

3부Eugene Hecht · 5th ed. · Pearson, 2017 · ISBN 978-1-292-09696-4 (Global Ed.)  원본 대조

1A Brief History9
  • 1.1Prolegomenon9
  • 1.2In the Beginning9
  • 1.3From the Seventeenth Century10
  • 1.4The Nineteenth Century12
  • 1.5Twentieth-Century Optics15
2Wave Motion18
  • 2.1One-Dimensional Waves18
  • 2.2Harmonic Waves22
  • 2.3Phase and Phase Velocity26
  • 2.4The Superposition Principle28
  • 2.5The Complex Representation30
  • 2.6Phasors and the Addition of Waves31
  • 2.7Plane Waves32
  • 2.8The Three-Dimensional Differential Wave Equation36
  • 2.9Spherical Waves37
  • 2.10Cylindrical Waves39
  • 2.11Twisted Light39
3Electromagnetic Theory, Photons, and Light45
  • 3.1Basic Laws of Electromagnetic Theory46
  • 3.2Electromagnetic Waves54
  • 3.3Energy and Momentum57
  • 3.4Radiation69
  • 3.5Light in Bulk Matter76
  • 3.6The Electromagnetic-Photon Spectrum83
  • 3.7Quantum Field Theory90
4The Propagation of Light96
  • 4.1Introduction96
  • 4.2Rayleigh Scattering96
  • 4.3Reflection104
  • 4.4Refraction108
  • 4.5Fermat’s Principle117
  • 4.6The Electromagnetic Approach121
  • 4.7Total Internal Reflection133
  • 4.8Optical Properties of Metals139
  • 4.9Familiar Aspects of the Interaction of Light and Matter142
  • 4.10The Stokes Treatment of Reflection and Refraction147
  • 4.11Photons, Waves, and Probability148
5Geometrical Optics159
  • 5.1Introductory Remarks159
  • 5.2Lenses159
  • 5.3Stops183
  • 5.4Mirrors188
  • 5.5Prisms199
  • 5.6Fiberoptics204
  • 5.7Optical Systems215
  • 5.8Wavefront Shaping239
  • 5.9Gravitational Lensing244
6More on Geometrical Optics255
  • 6.1Thick Lenses and Lens Systems255
  • 6.2Analytical Ray Tracing259
  • 6.3Aberrations266
  • 6.4GRIN Systems284
  • 6.5Concluding Remarks286
7The Superposition of Waves290
  • 7.1The Addition of Waves of the Same Frequency291
  • 7.2The Addition of Waves of Different Frequency302
  • 7.3Anharmonic Periodic Waves308
  • 7.4Nonperiodic Waves318
8Polarization338
  • 8.1The Nature of Polarized Light338
  • 8.2Polarizers346
  • 8.3Dichroism347
  • 8.4Birefringence351
  • 8.5Scattering and Polarization361
  • 8.6Polarization by Reflection363
  • 8.7Retarders366
  • 8.8Circular Polarizers373
  • 8.9Polarization of Polychromatic Light374
  • 8.10Optical Activity375
  • 8.11Induced Optical Effects — Optical Modulators380
  • 8.12Liquid Crystals384
  • 8.13A Mathematical Description of Polarization387
9Interference398
  • 9.1General Considerations398
  • 9.2Conditions for Interference402
  • 9.3Wavefront-Splitting Interferometers405
  • 9.4Amplitude-Splitting Interferometers416
  • 9.5Types and Localization of Interference Fringes432
  • 9.6Multiple-Beam Interference433
  • 9.7Applications of Single and Multilayer Films441
  • 9.8Applications of Interferometry446
10Diffraction457
  • 10.1Preliminary Considerations457
  • 10.2Fraunhofer Diffraction465
  • 10.3Fresnel Diffraction505
  • 10.4Kirchhoff’s Scalar Diffraction Theory532
  • 10.5Boundary Diffraction Waves535
11Fourier Optics542
  • 11.1Introduction542
  • 11.2Fourier Transforms542
  • 11.3Optical Applications552
12Basics of Coherence Theory588
  • 12.1Introduction588
  • 12.2Fringes and Coherence590
  • 12.3Visibility594
  • 12.4The Mutual Coherence Function and the Degree of Coherence597
  • 12.5Coherence and Stellar Interferometry603
13Modern Optics: Lasers and Other Topics612
  • 13.1Lasers and Laserlight612
  • 13.2Imagery — The Spatial Distribution of Optical Information638
  • 13.3Holography652
  • 13.4Nonlinear Optics667
부록 1Electromagnetic Theory677
부록 2The Kirchhoff Diffraction Theory680

원본 목차 PDF로 대조 완료 — 13장 90개 절 + 부록 2종, 쪽수 포함. 인쇄 목차가 x.y까지만이라 소절은 여전히 미확보다. 리소그래피 대응: NA는 5.3·5.7, 레일리 기준과 에어리 원판은 10.2, MTF·PSF는 11.3, 박막 간섭은 9.4·9.6·9.7, 부분 결맞음은 12.2~12.4.

Fundamentals of Physics, Extended

3부Halliday · Resnick · Walker · 12th ed. · Wiley, 2021 · ISBN 978-1-119-77351-1  원본 대조

1Measurement1
  • 1.1Measuring Things, Including Lengths1
  • 1.2Time5
  • 1.3Mass6
2Motion Along a Straight Line13
  • 2.1Position, Displacement, and Average Velocity13
  • 2.2Instantaneous Velocity and Speed18
  • 2.3Acceleration20
  • 2.4Constant Acceleration23
  • 2.5Free-Fall Acceleration28
  • 2.6Graphical Integration in Motion Analysis30
3Vectors44
  • 3.1Vectors and Their Components44
  • 3.2Unit Vectors, Adding Vectors by Components50
  • 3.3Multiplying Vectors52
4Motion in Two and Three Dimensions67
  • 4.1Position and Displacement67
  • 4.2Average Velocity and Instantaneous Velocity70
  • 4.3Average Acceleration and Instantaneous Acceleration73
  • 4.4Projectile Motion75
  • 4.5Uniform Circular Motion82
  • 4.6Relative Motion in One Dimension84
  • 4.7Relative Motion in Two Dimensions86
5Force and Motion—I101
  • 5.1Newton’s First and Second Laws101
  • 5.2Some Particular Forces109
  • 5.3Applying Newton’s Laws113
6Force and Motion—II132
  • 6.1Friction132
  • 6.2The Drag Force and Terminal Speed138
  • 6.3Uniform Circular Motion140
7Kinetic Energy and Work156
  • 7.1Kinetic Energy156
  • 7.2Work and Kinetic Energy158
  • 7.3Work Done by the Gravitational Force163
  • 7.4Work Done by a Spring Force167
  • 7.5Work Done by a General Variable Force170
  • 7.6Power174
8Potential Energy and Conservation of Energy186
  • 8.1Potential Energy186
  • 8.2Conservation of Mechanical Energy193
  • 8.3Reading a Potential Energy Curve196
  • 8.4Work Done on a System by an External Force201
  • 8.5Conservation of Energy205
9Center of Mass and Linear Momentum225
  • 9.1Center of Mass225
  • 9.2Newton’s Second Law for a System of Particles229
  • 9.3Linear Momentum234
  • 9.4Collision and Impulse236
  • 9.5Conservation of Linear Momentum240
  • 9.6Momentum and Kinetic Energy in Collisions243
  • 9.7Elastic Collisions in One Dimension247
  • 9.8Collisions in Two Dimensions251
  • 9.9Systems with Varying Mass: A Rocket252
10Rotation270
  • 10.1Rotational Variables270
  • 10.2Rotation with Constant Angular Acceleration279
  • 10.3Relating the Linear and Angular Variables281
  • 10.4Kinetic Energy of Rotation285
  • 10.5Calculating the Rotational Inertia286
  • 10.6Torque291
  • 10.7Newton’s Second Law for Rotation292
  • 10.8Work and Rotational Kinetic Energy296
11Rolling, Torque, and Angular Momentum310
  • 11.1Rolling as Translation and Rotation Combined310
  • 11.2Forces and Kinetic Energy of Rolling313
  • 11.3The Yo-Yo316
  • 11.4Torque Revisited317
  • 11.5Angular Momentum320
  • 11.6Newton’s Second Law in Angular Form322
  • 11.7Angular Momentum of a Rigid Body325
  • 11.8Conservation of Angular Momentum328
  • 11.9Precession of a Gyroscope333
12Equilibrium and Elasticity344
  • 12.1Equilibrium344
  • 12.2Some Examples of Static Equilibrium349
  • 12.3Elasticity355
13Gravitation372
  • 13.1Newton’s Law of Gravitation372
  • 13.2Gravitation and the Principle of Superposition375
  • 13.3Gravitation Near Earth’s Surface377
  • 13.4Gravitation Inside Earth381
  • 13.5Gravitational Potential Energy383
  • 13.6Planets and Satellites: Kepler’s Laws387
  • 13.7Satellites: Orbits and Energy390
  • 13.8Einstein and Gravitation393
14Fluids406
  • 14.1Fluids, Density, and Pressure406
  • 14.2Fluids at Rest409
  • 14.3Measuring Pressure412
  • 14.4Pascal’s Principle413
  • 14.5Archimedes’ Principle415
  • 14.6The Equation of Continuity419
  • 14.7Bernoulli’s Equation423
15Oscillations436
  • 15.1Simple Harmonic Motion436
  • 15.2Energy in Simple Harmonic Motion444
  • 15.3An Angular Simple Harmonic Oscillator446
  • 15.4Pendulums, Circular Motion448
  • 15.5Damped Simple Harmonic Motion453
  • 15.6Forced Oscillations and Resonance456
16Waves—I468
  • 16.1Transverse Waves468
  • 16.2Wave Speed on a Stretched String476
  • 16.3Energy and Power of a Wave Traveling Along a String478
  • 16.4The Wave Equation480
  • 16.5Interference of Waves482
  • 16.6Phasors487
  • 16.7Standing Waves and Resonance490
17Waves—II505
  • 17.1Speed of Sound505
  • 17.2Traveling Sound Waves508
  • 17.3Interference511
  • 17.4Intensity and Sound Level515
  • 17.5Sources of Musical Sound518
  • 17.6Beats522
  • 17.7The Doppler Effect524
  • 17.8Supersonic Speeds, Shock Waves529
18Temperature, Heat, and the First Law of Thermodynamics541
  • 18.1Temperature541
  • 18.2The Celsius and Fahrenheit Scales545
  • 18.3Thermal Expansion547
  • 18.4Absorption of Heat550
  • 18.5The First Law of Thermodynamics556
  • 18.6Heat Transfer Mechanisms562
19The Kinetic Theory of Gases578
  • 19.1Avogadro’s Number578
  • 19.2Ideal Gases579
  • 19.3Pressure, Temperature, and RMS Speed583
  • 19.4Translational Kinetic Energy586
  • 19.5Mean Free Path587
  • 19.6The Distribution of Molecular Speeds589
  • 19.7The Molar Specific Heats of an Ideal Gas593
  • 19.8Degrees of Freedom and Molar Specific Heats597
  • 19.9The Adiabatic Expansion of an Ideal Gas600
20Entropy and the Second Law of Thermodynamics613
  • 20.1Entropy613
  • 20.2Entropy in the Real World: Engines620
  • 20.3Refrigerators and Real Engines626
  • 20.4A Statistical View of Entropy629
21Coulomb’s Law641
  • 21.1Coulomb’s Law641
  • 21.2Charge Is Quantized652
  • 21.3Charge Is Conserved654
22Electric Fields665
  • 22.1The Electric Field665
  • 22.2The Electric Field due to a Charged Particle668
  • 22.3The Electric Field due to a Dipole670
  • 22.4The Electric Field due to a Line of Charge673
  • 22.5The Electric Field due to a Charged Disk679
  • 22.6A Point Charge in an Electric Field680
  • 22.7A Dipole in an Electric Field683
23Gauss’ Law696
  • 23.1Electric Flux696
  • 23.2Gauss’ Law701
  • 23.3A Charged Isolated Conductor705
  • 23.4Applying Gauss’ Law: Cylindrical Symmetry708
  • 23.5Applying Gauss’ Law: Planar Symmetry710
  • 23.6Applying Gauss’ Law: Spherical Symmetry713
24Electric Potential724
  • 24.1Electric Potential724
  • 24.2Equipotential Surfaces and the Electric Field729
  • 24.3Potential due to a Charged Particle733
  • 24.4Potential due to an Electric Dipole736
  • 24.5Potential due to a Continuous Charge Distribution738
  • 24.6Calculating the Field from the Potential741
  • 24.7Electric Potential Energy of a System of Charged Particles743
  • 24.8Potential of a Charged Isolated Conductor746
25Capacitance759
  • 25.1Capacitance759
  • 25.2Calculating the Capacitance761
  • 25.3Capacitors in Parallel and in Series765
  • 25.4Energy Stored in an Electric Field770
  • 25.5Capacitor with a Dielectric774
  • 25.6Dielectrics and Gauss’ Law778
26Current and Resistance789
  • 26.1Electric Current789
  • 26.2Current Density792
  • 26.3Resistance and Resistivity796
  • 26.4Ohm’s Law801
  • 26.5Power, Semiconductors, Superconductors805
27Circuits816
  • 27.1Single-Loop Circuits816
  • 27.2Multiloop Circuits826
  • 27.3The Ammeter and the Voltmeter833
  • 27.4RC Circuits833
28Magnetic Fields850
  • 28.1Magnetic Fields and the Definition of B850
  • 28.2Crossed Fields: Discovery of the Electron855
  • 28.3Crossed Fields: The Hall Effect857
  • 28.4A Circulating Charged Particle861
  • 28.5Cyclotrons and Synchrotrons866
  • 28.6Magnetic Force on a Current-Carrying Wire869
  • 28.7Torque on a Current Loop872
  • 28.8The Magnetic Dipole Moment874
29Magnetic Fields Due to Currents886
  • 29.1Magnetic Field due to a Current886
  • 29.2Force Between Two Parallel Currents892
  • 29.3Ampere’s Law894
  • 29.4Solenoids and Toroids899
  • 29.5A Current-Carrying Coil as a Magnetic Dipole901
30Induction and Inductance915
  • 30.1Faraday’s Law and Lenz’s Law915
  • 30.2Induction and Energy Transfers923
  • 30.3Induced Electric Fields927
  • 30.4Inductors and Inductance932
  • 30.5Self-Induction934
  • 30.6RL Circuits935
  • 30.7Energy Stored in a Magnetic Field940
  • 30.8Energy Density of a Magnetic Field942
  • 30.9Mutual Induction943
31Electromagnetic Oscillations and Alternating Current956
  • 31.1LC Oscillations956
  • 31.2Damped Oscillations in an RLC Circuit963
  • 31.3Forced Oscillations of Three Simple Circuits966
  • 31.4The Series RLC Circuit974
  • 31.5Power in Alternating-Current Circuits982
  • 31.6Transformers985
32Maxwell’s Equations; Magnetism of Matter998
  • 32.1Gauss’ Law for Magnetic Fields998
  • 32.2Induced Magnetic Fields1000
  • 32.3Displacement Current1003
  • 32.4Magnets1007
  • 32.5Magnetism and Electrons1009
  • 32.6Diamagnetism1015
  • 32.7Paramagnetism1016
  • 32.8Ferromagnetism1019
33Electromagnetic Waves1032
  • 33.1Electromagnetic Waves1032
  • 33.2Energy Transport and the Poynting Vector1040
  • 33.3Radiation Pressure1043
  • 33.4Polarization1045
  • 33.5Reflection and Refraction1050
  • 33.6Total Internal Reflection1056
  • 33.7Polarization by Reflection1059
34Images1072
  • 34.1Images and Plane Mirrors1072
  • 34.2Spherical Mirrors1076
  • 34.3Spherical Refracting Surfaces1083
  • 34.4Thin Lenses1086
  • 34.5Optical Instruments1094
  • 34.6Three Proofs1098
35Interference1111
  • 35.1Light as a Wave1111
  • 35.2Young’s Interference Experiment1117
  • 35.3Interference and Double-Slit Intensity1122
  • 35.4Interference from Thin Films1126
  • 35.5Michelson’s Interferometer1135
36Diffraction1148
  • 36.1Single-Slit Diffraction1148
  • 36.2Intensity in Single-Slit Diffraction1153
  • 36.3Diffraction by a Circular Aperture1158
  • 36.4Diffraction by a Double Slit1162
  • 36.5Diffraction Gratings1166
  • 36.6Gratings: Dispersion and Resolving Power1170
  • 36.7X-Ray Diffraction1173
37Relativity1186
  • 37.1Simultaneity and Time Dilation1186
  • 37.2The Relativity of Length1196
  • 37.3The Lorentz Transformation1199
  • 37.4The Relativity of Velocities1204
  • 37.5Doppler Effect for Light1205
  • 37.6Momentum and Energy1209
38Photons and Matter Waves1225
  • 38.1The Photon, the Quantum of Light1225
  • 38.2The Photoelectric Effect1227
  • 38.3Photons, Momentum, Compton Scattering, Light Interference1230
  • 38.4The Birth of Quantum Physics1236
  • 38.5Electrons and Matter Waves1238
  • 38.6Schrödinger’s Equation1242
  • 38.7Heisenberg’s Uncertainty Principle1244
  • 38.8Reflection from a Potential Step1246
  • 38.9Tunneling Through a Potential Barrier1248
39More About Matter Waves1258
  • 39.1Energies of a Trapped Electron1258
  • 39.2Wave Functions of a Trapped Electron1264
  • 39.3An Electron in a Finite Well1268
  • 39.4Two- and Three-Dimensional Electron Traps1270
  • 39.5The Hydrogen Atom1275
40All About Atoms1293
  • 40.1Properties of Atoms1293
  • 40.2The Stern–gerlach Experiment1300
  • 40.3Magnetic Resonance1303
  • 40.4Exclusion Principle and Multiple Electrons in a Trap1304
  • 40.5Building the Periodic Table1308
  • 40.6X Rays and the Ordering of the Elements1310
  • 40.7Lasers1314
41Conduction of Electricity in Solids1327
  • 41.1The Electrical Properties of Metals1327
  • 41.2Semiconductors and Doping1336
  • 41.3The p-n Junction and the Transistor1341
42Nuclear Physics1352
  • 42.1Discovering the Nucleus1352
  • 42.2Some Nuclear Properties1355
  • 42.3Radioactive Decay1362
  • 42.4Alpha Decay1365
  • 42.5Beta Decay1368
  • 42.6Radioactive Dating1371
  • 42.7Measuring Radiation Dosage1372
  • 42.8Nuclear Models1373
43Energy from the Nucleus1385
  • 43.1Nuclear Fission1385
  • 43.2The Nuclear Reactor1392
  • 43.3A Natural Nuclear Reactor1396
  • 43.4Thermonuclear Fusion: The Basic Process1398
  • 43.5Thermonuclear Fusion in the Sun and Other Stars1400
  • 43.6Controlled Thermonuclear Fusion1402
44Quarks, Leptons, and the Big Bang1410
  • 44.1General Properties of Elementary Particles1410
  • 44.2Leptons, Hadrons, and Strangeness1419
  • 44.3Quarks and Messenger Particles1425
  • 44.4Cosmology1431
부록 AThe International System of Units (SI)A-1
부록 BSome Fundamental Constants of PhysicsA-3
부록 CSome Astronomical DataA-4
부록 DConversion FactorsA-5
부록 EMathematical FormulasA-9
부록 FProperties of the ElementsA-12
부록 GPeriodic Table of the ElementsA-15

원본 목차 PDF로 대조 완료 — 44장 268개 모듈 + 부록 7종, 쪽수 포함. 11판에서 12판 Extended로 교체했다. 이 책은 절에 해당하는 단위를 모듈(x.y)이라 부르고 목차에 모듈 제목을 전부 대문자로 싣는데, 여기서는 일반 표기로 바꿔 실었다. 모듈 아래 소제목(“What Is Physics?” 등)은 옮기지 않았다. Extended판이라 38~44장(광자·물질파·원자·고체·핵·입자)이 붙어 있고, 그중 41장 Conduction of Electricity in Solids가 반도체·도핑·p-n 접합·트랜지스터를 1학년 수준으로 훑는다 — 7부·9부의 같은 주제를 얕게 먼저 보는 자리.

Fundamentals of Heat and Mass Transfer

3부Bergman · Lavine · Incropera · DeWitt · 8th ed. · Wiley, 2017 · ISBN 978-1-118-98917-3  원본 대조

1Introduction1
  • 1.1What and How?2
  • 1.2Physical Origins and Rate Equations3
  • 1.2.1Conduction3
  • 1.2.2Convection6
  • 1.2.3Radiation8
  • 1.2.4The Thermal Resistance Concept12
  • 1.3Relationship to Thermodynamics12
  • 1.3.1Relationship to the First Law of Thermodynamics (Conservation of Energy)13
  • 1.3.2Relationship to the Second Law of Thermodynamics and the Efficiency of Heat Engines28
  • 1.4Units and Dimensions33
  • 1.5Analysis of Heat Transfer Problems: Methodology35
  • 1.6Relevance of Heat Transfer38
  • 1.7Summary42
2Introduction to Conduction59
  • 2.1The Conduction Rate Equation60
  • 2.2The Thermal Properties of Matter62
  • 2.2.1Thermal Conductivity63
  • 2.2.2Other Relevant Properties70
  • 2.3The Heat Diffusion Equation74
  • 2.4Boundary and Initial Conditions82
  • 2.5Summary86
3One-Dimensional, Steady-State Conduction99
  • 3.1The Plane Wall100
  • 3.1.1Temperature Distribution100
  • 3.1.2Thermal Resistance102
  • 3.1.3The Composite Wall103
  • 3.1.4Contact Resistance105
  • 3.1.5Porous Media107
  • 3.2An Alternative Conduction Analysis121
  • 3.3Radial Systems125
  • 3.3.1The Cylinder125
  • 3.3.2The Sphere130
  • 3.4Summary of One-Dimensional Conduction Results131
  • 3.5Conduction with Thermal Energy Generation131
  • 3.5.1The Plane Wall132
  • 3.5.2Radial Systems138
  • 3.5.3Tabulated Solutions139
  • 3.5.4Application of Resistance Concepts139
  • 3.6Heat Transfer from Extended Surfaces143
  • 3.6.1A General Conduction Analysis145
  • 3.6.2Fins of Uniform Cross-Sectional Area147
  • 3.6.3Fin Performance Parameters153
  • 3.6.4Fins of Nonuniform Cross-Sectional Area156
  • 3.6.5Overall Surface Efficiency159
  • 3.7Other Applications of One-Dimensional, Steady-State Conduction163
  • 3.7.1The Bioheat Equation163
  • 3.7.2Thermoelectric Power Generation167
  • 3.7.3Nanoscale Conduction175
  • 3.8Summary179
4Two-Dimensional, Steady-State Conduction209
  • 4.1General Considerations and Solution Techniques210
  • 4.2The Method of Separation of Variables211
  • 4.3The Conduction Shape Factor and the Dimensionless Conduction Heat Rate215
  • 4.4Finite-Difference Equations221
  • 4.4.1The Nodal Network221
  • 4.4.2Finite-Difference Form of the Heat Equation: No Generation and Constant Properties222
  • 4.4.3Finite-Difference Form of the Heat Equation: The Energy Balance Method223
  • 4.5Solving the Finite-Difference Equations230
  • 4.5.1Formulation as a Matrix Equation230
  • 4.5.2Verifying the Accuracy of the Solution231
  • 4.6Summary236
  • 4S.1The Graphical MethodW-1
  • 4S.1.1Methodology of Constructing a Flux PlotW-1
  • 4S.1.2Determination of the Heat Transfer RateW-2
  • 4S.1.3The Conduction Shape FactorW-3
  • 4S.2The Gauss-Seidel Method: Example of UsageW-5
5Transient Conduction253
  • 5.1The Lumped Capacitance Method254
  • 5.2Validity of the Lumped Capacitance Method257
  • 5.3General Lumped Capacitance Analysis261
  • 5.3.1Radiation Only262
  • 5.3.2Negligible Radiation262
  • 5.3.3Convection Only with Variable Convection Coefficient263
  • 5.3.4Additional Considerations263
  • 5.4Spatial Effects272
  • 5.5The Plane Wall with Convection273
  • 5.5.1Exact Solution274
  • 5.5.2Approximate Solution274
  • 5.5.3Total Energy Transfer: Approximate Solution276
  • 5.5.4Additional Considerations276
  • 5.6Radial Systems with Convection277
  • 5.6.1Exact Solutions277
  • 5.6.2Approximate Solutions278
  • 5.6.3Total Energy Transfer: Approximate Solutions278
  • 5.6.4Additional Considerations279
  • 5.7The Semi-Infinite Solid284
  • 5.8Objects with Constant Surface Temperatures or Surface Heat Fluxes291
  • 5.8.1Constant Temperature Boundary Conditions291
  • 5.8.2Constant Heat Flux Boundary Conditions293
  • 5.8.3Approximate Solutions294
  • 5.9Periodic Heating301
  • 5.10Finite-Difference Methods304
  • 5.10.1Discretization of the Heat Equation: The Explicit Method304
  • 5.10.2Discretization of the Heat Equation: The Implicit Method311
  • 5.11Summary318
  • 5S.1Graphical Representation of One-Dimensional, Transient Conduction in the Plane Wall, Long Cylinder, and SphereW-12
  • 5S.2Analytical Solutions of Multidimensional EffectsW-16
6Introduction to Convection341
  • 6.1The Convection Boundary Layers342
  • 6.1.1The Velocity Boundary Layer342
  • 6.1.2The Thermal Boundary Layer343
  • 6.1.3The Concentration Boundary Layer345
  • 6.1.4Significance of the Boundary Layers346
  • 6.2Local and Average Convection Coefficients346
  • 6.2.1Heat Transfer346
  • 6.2.2Mass Transfer347
  • 6.3Laminar and Turbulent Flow353
  • 6.3.1Laminar and Turbulent Velocity Boundary Layers353
  • 6.3.2Laminar and Turbulent Thermal and Species Concentration Boundary Layers355
  • 6.4The Boundary Layer Equations358
  • 6.4.1Boundary Layer Equations for Laminar Flow359
  • 6.4.2Compressible Flow362
  • 6.5Boundary Layer Similarity: The Normalized Boundary Layer Equations362
  • 6.5.1Boundary Layer Similarity Parameters363
  • 6.5.2Dependent Dimensionless Parameters363
  • 6.6Physical Interpretation of the Dimensionless Parameters372
  • 6.7Boundary Layer Analogies374
  • 6.7.1The Heat and Mass Transfer Analogy375
  • 6.7.2Evaporative Cooling378
  • 6.7.3The Reynolds Analogy381
  • 6.8Summary382
  • 6S.1Derivation of the Convection Transfer EquationsW-25
  • 6S.1.1Conservation of MassW-25
  • 6S.1.2Newton’s Second Law of MotionW-26
  • 6S.1.3Conservation of EnergyW-29
  • 6S.1.4Conservation of SpeciesW-32
7External Flow395
  • 7.1The Empirical Method397
  • 7.2The Flat Plate in Parallel Flow398
  • 7.2.1Laminar Flow over an Isothermal Plate: A Similarity Solution399
  • 7.2.2Turbulent Flow over an Isothermal Plate405
  • 7.2.3Mixed Boundary Layer Conditions406
  • 7.2.4Unheated Starting Length407
  • 7.2.5Flat Plates with Constant Heat Flux Conditions408
  • 7.2.6Limitations on Use of Convection Coefficients409
  • 7.3Methodology for a Convection Calculation409
  • 7.4The Cylinder in Cross Flow417
  • 7.4.1Flow Considerations417
  • 7.4.2Convection Heat and Mass Transfer419
  • 7.5The Sphere427
  • 7.6Flow Across Banks of Tubes430
  • 7.7Impinging Jets439
  • 7.7.1Hydrodynamic and Geometric Considerations439
  • 7.7.2Convection Heat and Mass Transfer440
  • 7.8Packed Beds444
  • 7.9Summary445
8Internal Flow469
  • 8.1Hydrodynamic Considerations470
  • 8.1.1Flow Conditions470
  • 8.1.2The Mean Velocity471
  • 8.1.3Velocity Profile in the Fully Developed Region472
  • 8.1.4Pressure Gradient and Friction Factor in Fully Developed Flow474
  • 8.2Thermal Considerations475
  • 8.2.1The Mean Temperature476
  • 8.2.2Newton’s Law of Cooling477
  • 8.2.3Fully Developed Conditions477
  • 8.3The Energy Balance481
  • 8.3.1General Considerations481
  • 8.3.2Constant Surface Heat Flux482
  • 8.3.3Constant Surface Temperature485
  • 8.4Laminar Flow in Circular Tubes: Thermal Analysis and Convection Correlations489
  • 8.4.1The Fully Developed Region489
  • 8.4.2The Entry Region494
  • 8.4.3Temperature-Dependent Properties496
  • 8.5Convection Correlations: Turbulent Flow in Circular Tubes496
  • 8.6Convection Correlations: Noncircular Tubes and the Concentric Tube Annulus504
  • 8.7Heat Transfer Enhancement507
  • 8.8Forced Convection in Small Channels510
  • 8.8.1Microscale Convection in Gases (0.1 µm ≲ Dh ≲ 100 µm)510
  • 8.8.2Microscale Convection in Liquids511
  • 8.8.3Nanoscale Convection (Dh ≲ 100 nm)512
  • 8.9Convection Mass Transfer515
  • 8.10Summary517
9Free Convection539
  • 9.1Physical Considerations540
  • 9.2The Governing Equations for Laminar Boundary Layers542
  • 9.3Similarity Considerations544
  • 9.4Laminar Free Convection on a Vertical Surface545
  • 9.5The Effects of Turbulence548
  • 9.6Empirical Correlations: External Free Convection Flows550
  • 9.6.1The Vertical Plate551
  • 9.6.2Inclined and Horizontal Plates554
  • 9.6.3The Long Horizontal Cylinder559
  • 9.6.4Spheres563
  • 9.7Free Convection Within Parallel Plate Channels564
  • 9.7.1Vertical Channels565
  • 9.7.2Inclined Channels567
  • 9.8Empirical Correlations: Enclosures567
  • 9.8.1Rectangular Cavities567
  • 9.8.2Concentric Cylinders570
  • 9.8.3Concentric Spheres571
  • 9.9Combined Free and Forced Convection573
  • 9.10Convection Mass Transfer574
  • 9.11Summary575
10Boiling and Condensation595
  • 10.1Dimensionless Parameters in Boiling and Condensation596
  • 10.2Boiling Modes597
  • 10.3Pool Boiling598
  • 10.3.1The Boiling Curve598
  • 10.3.2Modes of Pool Boiling599
  • 10.4Pool Boiling Correlations602
  • 10.4.1Nucleate Pool Boiling602
  • 10.4.2Critical Heat Flux for Nucleate Pool Boiling604
  • 10.4.3Minimum Heat Flux605
  • 10.4.4Film Pool Boiling605
  • 10.4.5Parametric Effects on Pool Boiling606
  • 10.5Forced Convection Boiling611
  • 10.5.1External Forced Convection Boiling612
  • 10.5.2Two-Phase Flow612
  • 10.5.3Two-Phase Flow in Microchannels615
  • 10.6Condensation: Physical Mechanisms615
  • 10.7Laminar Film Condensation on a Vertical Plate617
  • 10.8Turbulent Film Condensation621
  • 10.9Film Condensation on Radial Systems626
  • 10.10Condensation in Horizontal Tubes631
  • 10.11Dropwise Condensation632
  • 10.12Summary633
11Heat Exchangers645
  • 11.1Heat Exchanger Types646
  • 11.2The Overall Heat Transfer Coefficient648
  • 11.3Heat Exchanger Analysis: Use of the Log Mean Temperature Difference651
  • 11.3.1The Parallel-Flow Heat Exchanger652
  • 11.3.2The Counterflow Heat Exchanger654
  • 11.3.3Special Operating Conditions655
  • 11.4Heat Exchanger Analysis: The Effectiveness–NTU Method662
  • 11.4.1Definitions662
  • 11.4.2Effectiveness–NTU Relations663
  • 11.5Heat Exchanger Design and Performance Calculations670
  • 11.6Additional Considerations679
  • 11.7Summary687
  • 11S.1Log Mean Temperature Difference Method for Multipass and Cross-Flow Heat ExchangersW-40
  • 11S.2Compact Heat ExchangersW-44
12Radiation: Processes and Properties701
  • 12.1Fundamental Concepts702
  • 12.2Radiation Heat Fluxes705
  • 12.3Radiation Intensity707
  • 12.3.1Mathematical Definitions707
  • 12.3.2Radiation Intensity and Its Relation to Emission708
  • 12.3.3Relation to Irradiation713
  • 12.3.4Relation to Radiosity for an Opaque Surface715
  • 12.3.5Relation to the Net Radiative Flux for an Opaque Surface716
  • 12.4Blackbody Radiation716
  • 12.4.1The Planck Distribution717
  • 12.4.2Wien’s Displacement Law718
  • 12.4.3The Stefan–Boltzmann Law718
  • 12.4.4Band Emission719
  • 12.5Emission from Real Surfaces726
  • 12.6Absorption, Reflection, and Transmission by Real Surfaces735
  • 12.6.1Absorptivity736
  • 12.6.2Reflectivity737
  • 12.6.3Transmissivity739
  • 12.6.4Special Considerations739
  • 12.7Kirchhoff’s Law744
  • 12.8The Gray Surface746
  • 12.9Environmental Radiation752
  • 12.9.1Solar Radiation753
  • 12.9.2The Atmospheric Radiation Balance755
  • 12.9.3Terrestrial Solar Irradiation757
  • 12.10Summary760
13Radiation Exchange Between Surfaces785
  • 13.1The View Factor786
  • 13.1.1The View Factor Integral786
  • 13.1.2View Factor Relations787
  • 13.2Blackbody Radiation Exchange796
  • 13.3Radiation Exchange Between Opaque, Diffuse, Gray Surfaces in an Enclosure800
  • 13.3.1Net Radiation Exchange at a Surface801
  • 13.3.2Radiation Exchange Between Surfaces802
  • 13.3.3The Two-Surface Enclosure808
  • 13.3.4Two-Surface Enclosures in Series and Radiation Shields810
  • 13.3.5The Reradiating Surface812
  • 13.4Multimode Heat Transfer817
  • 13.5Implications of the Simplifying Assumptions820
  • 13.6Radiation Exchange with Participating Media820
  • 13.6.1Volumetric Absorption820
  • 13.6.2Gaseous Emission and Absorption821
  • 13.7Summary825
14Diffusion Mass Transfer849
  • 14.1Physical Origins and Rate Equations850
  • 14.1.1Physical Origins850
  • 14.1.2Mixture Composition851
  • 14.1.3Fick’s Law of Diffusion852
  • 14.1.4Mass Diffusivity853
  • 14.2Mass Transfer in Nonstationary Media855
  • 14.2.1Absolute and Diffusive Species Fluxes855
  • 14.2.2Evaporation in a Column858
  • 14.3The Stationary Medium Approximation863
  • 14.4Conservation of Species for a Stationary Medium863
  • 14.4.1Conservation of Species for a Control Volume864
  • 14.4.2The Mass Diffusion Equation864
  • 14.4.3Stationary Media with Specified Surface Concentrations866
  • 14.5Boundary Conditions and Discontinuous Concentrations at Interfaces870
  • 14.5.1Evaporation and Sublimation871
  • 14.5.2Solubility of Gases in Liquids and Solids871
  • 14.5.3Catalytic Surface Reactions876
  • 14.6Mass Diffusion with Homogeneous Chemical Reactions878
  • 14.7Transient Diffusion881
  • 14.8Summary887
부록 AThermophysical Properties of Matter897
부록 BMathematical Relations and Functions929
부록 CThermal Conditions Associated with Uniform Energy Generation in One-Dimensional, Steady-State Systems935
부록 DThe Gauss–Seidel Method941
부록 EThe Convection Transfer Equations943
  • E.1Conservation of Mass944
  • E.2Newton’s Second Law of Motion944
  • E.3Conservation of Energy945
  • E.4Conservation of Species946
부록 FBoundary Layer Equations for Turbulent Flow947
부록 GAn Integral Laminar Boundary Layer Solution for Parallel Flow over a Flat Plate951

원본 목차 PDF로 대조 완료 — 14장 + 부록 7종, 130개 절과 158개 소절, 쪽수 포함. 5판(Incropera·DeWitt 2인 저자판)에서 8판으로 교체했다. 14장 구성은 5판과 같지만 절이 늘었다 — §3.1.5 Porous Media, §3.7.2 Thermoelectric Power Generation, §3.7.3 Nanoscale Conduction, §8.8 Forced Convection in Small Channels가 5판에 없던 것으로 박막·마이크로 스케일 열전달을 직접 다룬다. 쪽수가 W-로 시작하는 4S·5S·6S·11S 절은 인쇄본이 아니라 온라인 보충 자료다.

4부 · 화학 기초

Atkins' Physical Chemistry

4부Atkins · de Paula · Keeler · 12th ed. · Oxford University Press, 2022 · ISBN 978-0-19-884781-6  원본 대조

1Focus 1 — The properties of gases3
  • 1AThe perfect gas4
  • 1A.1Variables of state4
  • 1A.2Equations of state6
  • 1BThe kinetic model11
  • 1B.1The model11
  • 1B.2Collisions16
  • 1CReal gases18
  • 1C.1Deviations from perfect behaviour18
  • 1C.2The van der Waals equation22
2Focus 2 — The First Law33
  • 2AInternal energy34
  • 2A.1Work, heat, and energy34
  • 2A.2The definition of internal energy36
  • 2A.3Expansion work37
  • 2A.4Heat transactions40
  • 2BEnthalpy45
  • 2B.1The definition of enthalpy45
  • 2B.2The variation of enthalpy with temperature47
  • 2CThermochemistry50
  • 2C.1Standard enthalpy changes50
  • 2C.2Standard enthalpies of formation53
  • 2C.3The temperature dependence of reaction enthalpies54
  • 2C.4Experimental techniques55
  • 2DState functions and exact differentials58
  • 2D.1Exact and inexact differentials58
  • 2D.2Changes in internal energy59
  • 2D.3Changes in enthalpy62
  • 2D.4The Joule–Thomson effect63
  • 2EAdiabatic changes66
  • 2E.1The change in temperature66
  • 2E.2The change in pressure67
3Focus 3 — The Second and Third Laws75
  • 3AEntropy76
  • 3A.1The Second Law76
  • 3A.2The definition of entropy78
  • 3A.3The entropy as a state function80
  • 3BEntropy changes accompanying specific processes86
  • 3B.1Expansion86
  • 3B.2Phase transitions87
  • 3B.3Heating88
  • 3B.4Composite processes89
  • 3CThe measurement of entropy91
  • 3C.1The calorimetric measurement of entropy91
  • 3C.2The Third Law92
  • 3DConcentrating on the system96
  • 3D.1The Helmholtz and Gibbs energies96
  • 3D.2Standard molar Gibbs energies100
  • 3ECombining the First and Second Laws104
  • 3E.1Properties of the internal energy104
  • 3E.2Properties of the Gibbs energy107
4Focus 4 — Physical transformations of pure substances119
  • 4APhase diagrams of pure substances120
  • 4A.1The stabilities of phases120
  • 4A.2Coexistence curves122
  • 4A.3Three representative phase diagrams125
  • 4BThermodynamic aspects of phase transitions128
  • 4B.1The dependence of stability on the conditions128
  • 4B.2The location of coexistence curves131
5Focus 5 — Simple mixtures141
  • 5AThe thermodynamic description of mixtures143
  • 5A.1Partial molar quantities143
  • 5A.2The thermodynamics of mixing147
  • 5A.3The chemical potentials of liquids150
  • 5BThe properties of solutions155
  • 5B.1Liquid mixtures155
  • 5B.2Colligative properties158
  • 5CPhase diagrams of binary systems: liquids166
  • 5C.1Vapour pressure diagrams166
  • 5C.2Temperature–composition diagrams168
  • 5C.3Distillation170
  • 5C.4Liquid–liquid phase diagrams172
  • 5DPhase diagrams of binary systems: solids178
  • 5D.1Eutectics178
  • 5D.2Reacting systems180
  • 5D.3Incongruent melting180
  • 5EPhase diagrams of ternary systems182
  • 5E.1Triangular phase diagrams182
  • 5E.2Ternary systems183
  • 5FActivities186
  • 5F.1The solvent activity186
  • 5F.2The solute activity187
  • 5F.3The activities of regular solutions189
  • 5F.4The activities of ions190
6Focus 6 — Chemical equilibrium205
  • 6AThe equilibrium constant206
  • 6A.1The Gibbs energy minimum206
  • 6A.2The description of equilibrium207
  • 6BThe response of equilibria to the conditions214
  • 6B.1The response to pressure214
  • 6B.2The response to temperature216
  • 6CElectrochemical cells219
  • 6C.1Half-reactions and electrodes219
  • 6C.2Varieties of cell220
  • 6C.3The cell potential221
  • 6C.4The determination of thermodynamic functions224
  • 6DElectrode potentials226
  • 6D.1Standard potentials226
  • 6D.2Applications of standard electrode potentials228
7Focus 7 — Quantum theory237
  • 7AThe origins of quantum mechanics239
  • 7A.1Energy quantization239
  • 7A.2Wave–particle duality244
  • 7BWavefunctions248
  • 7B.1The Schrödinger equation248
  • 7B.2The Born interpretation248
  • 7COperators and observables253
  • 7C.1Operators253
  • 7C.2Superpositions and expectation values257
  • 7C.3The uncertainty principle259
  • 7C.4The postulates of quantum mechanics261
  • 7DTranslational motion263
  • 7D.1Free motion in one dimension263
  • 7D.2Confined motion in one dimension264
  • 7D.3Confined motion in two and more dimensions268
  • 7D.4Tunnelling271
  • 7EVibrational motion275
  • 7E.1The harmonic oscillator275
  • 7E.2Properties of the harmonic oscillator279
  • 7FRotational motion283
  • 7F.1Rotation in two dimensions283
  • 7F.2Rotation in three dimensions286
8Focus 8 — Atomic structure and spectra305
  • 8AHydrogenic atoms306
  • 8A.1The structure of hydrogenic atoms306
  • 8A.2Atomic orbitals and their energies309
  • 8BMany-electron atoms318
  • 8B.1The orbital approximation318
  • 8B.2The Pauli exclusion principle319
  • 8B.3The building-up principle322
  • 8B.4Self-consistent field orbitals327
  • 8CAtomic spectra329
  • 8C.1The spectra of hydrogenic atoms329
  • 8C.2The spectra of many-electron atoms330
9Focus 9 — Molecular structure343
  • 9AValence-bond theory346
  • 9A.1Diatomic molecules346
  • 9A.2Resonance348
  • 9A.3Polyatomic molecules348
  • 9BMolecular orbital theory: the hydrogen molecule-ion353
  • 9B.1Linear combinations of atomic orbitals353
  • 9B.2Orbital notation358
  • 9CMolecular orbital theory: homonuclear diatomic molecules359
  • 9C.1Electron configurations359
  • 9C.2Photoelectron spectroscopy364
  • 9DMolecular orbital theory: heteronuclear diatomic molecules366
  • 9D.1Polar bonds and electronegativity366
  • 9D.2The variation principle367
  • 9EMolecular orbital theory: polyatomic molecules373
  • 9E.1The Hückel approximation373
  • 9E.2Applications376
  • 9E.3Computational chemistry379
  • 9FComputational chemistry383
  • 9F.1The central challenge383
  • 9F.2The Hartree−Fock formalism384
  • 9F.3The Roothaan equations385
  • 9F.4Evaluation and approximation of the integrals386
  • 9F.5Density functional theory388
10Focus 10 — Molecular symmetry397
  • 10AShape and symmetry398
  • 10A.1Symmetry operations and symmetry elements398
  • 10A.2The symmetry classification of molecules400
  • 10A.3Some immediate consequences of symmetry404
  • 10BGroup theory407
  • 10B.1The elements of group theory407
  • 10B.2Matrix representations409
  • 10B.3Character tables412
  • 10CApplications of symmetry417
  • 10C.1Vanishing integrals417
  • 10C.2Applications to molecular orbital theory420
  • 10C.3Selection rules422
11Focus 11 — Molecular spectroscopy427
  • 11AGeneral features of molecular spectroscopy429
  • 11BRotational spectroscopy440
  • 11B.1Rotational energy levels440
  • 11B.4Nuclear statistics and rotational states449
  • 11CVibrational spectroscopy of diatomic molecules452
  • 11DVibrational spectroscopy of polyatomic molecules461
  • 11D.1Normal modes461
  • 11ESymmetry analysis of vibrational spectra466
  • 11FElectronic spectra470
  • 11F.1Diatomic molecules470
  • 11GDecay of excited states481
12Focus 12 — Magnetic resonance499
  • 12AGeneral principles500
  • 12A.1Nuclear magnetic resonance500
  • 12A.2Electron paramagnetic resonance503
  • 12BFeatures of NMR spectra506
  • 12B.1The chemical shift506
  • 12B.2The origin of shielding constants508
  • 12B.3The fine structure511
  • 12B.4The origin of spin-spin coupling514
  • 12B.5Exchange processes517
  • 12B.6Solid-state NMR518
  • 12CPulse techniques in NMR521
  • 12C.1The magnetization vector521
  • 12C.2Spin relaxation525
  • 12C.3Spin decoupling527
  • 12C.4The nuclear Overhauser effect528
  • 12DElectron paramagnetic resonance531
  • 12D.1The g-value531
  • 12D.2Hyperfine structure532
  • 12D.3The McConnell equation533
13Focus 13 — Statistical thermodynamics543
  • 13AThe Boltzmann distribution544
  • 13A.1Configurations and weights544
  • 13A.2The relative populations of states548
  • 13BMolecular partition functions550
  • 13B.1The significance of the partition function550
  • 13B.2Contributions to the partition function552
  • 13CMolecular energies561
  • 13C.1The basic equations561
  • 13C.2Contributions of the fundamental modes of motion562
  • 13DThe canonical ensemble567
  • 13D.1The concept of ensemble567
  • 13D.2The mean energy of a system569
  • 13D.3Independent molecules revisited569
  • 13D.4The variation of the energy with volume570
  • 13EThe internal energy and the entropy573
  • 13E.1The internal energy573
  • 13E.2The entropy575
  • 13FDerived functions582
  • 13F.1The derivations582
  • 13F.2Equilibrium constants585
14Focus 14 — Molecular interactions597
  • 14AThe electric properties of molecules599
  • 14A.1Electric dipole moments599
  • 14A.2Polarizabilities601
  • 14A.3Polarization603
  • 14BInteractions between molecules608
  • 14B.1The interactions of dipoles608
  • 14B.2Hydrogen bonding613
  • 14B.3The total interaction614
  • 14CLiquids618
  • 14C.1Molecular interactions in liquids618
  • 14C.2The liquid–vapour interface621
  • 14C.3Surface films624
  • 14C.4Condensation627
  • 14DMacromolecules629
  • 14D.1Average molar masses629
  • 14D.2The different levels of structure630
  • 14D.3Random coils631
  • 14D.4Mechanical properties635
  • 14D.5Thermal properties637
  • 14ESelf-assembly640
  • 14E.1Colloids640
  • 14E.2Micelles and biological membranes643
15Focus 15 — Solids655
  • 15ACrystal structure657
  • 15A.1Periodic crystal lattices657
  • 15A.2The identification of lattice planes659
  • 15BDiffraction techniques663
  • 15B.1X-ray crystallography663
  • 15B.2Neutron and electron diffraction671
  • 15CBonding in solids673
  • 15C.1Metals673
  • 15C.2Ionic solids677
  • 15C.3Covalent and molecular solids681
  • 15DThe mechanical properties of solids683
  • 15EThe electrical properties of solids686
  • 15E.1Metallic conductors686
  • 15E.2Insulators and semiconductors687
  • 15E.3Superconductors689
  • 15FThe magnetic properties of solids691
  • 15F.1Magnetic susceptibility691
  • 15F.2Permanent and induced magnetic moments692
  • 15F.3Magnetic properties of superconductors693
  • 15GThe optical properties of solids695
  • 15G.1Excitons695
  • 15G.2Metals and semiconductors696
  • 15G.3Nonlinear optical phenomena697
16Focus 16 — Molecules in motion707
  • 16ATransport properties of a perfect gas708
  • 16A.1The phenomenological equations708
  • 16A.2The transport parameters710
  • 16BMotion in liquids717
  • 16B.1Experimental results717
  • 16B.2The mobilities of ions719
  • 16CDiffusion724
  • 16C.1The thermodynamic view724
  • 16C.2The diffusion equation726
  • 16C.3The statistical view730
17Focus 17 — Chemical kinetics737
  • 17AThe rates of chemical reactions739
  • 17A.1Monitoring the progress of a reaction739
  • 17A.2The rates of reactions741
  • 17BIntegrated rate laws747
  • 17B.1Zeroth-order reactions747
  • 17B.2First-order reactions747
  • 17B.3Second-order reactions749
  • 17CReactions approaching equilibrium753
  • 17C.1First-order reactions approaching equilibrium753
  • 17C.2Relaxation methods754
  • 17DThe Arrhenius equation757
  • 17D.1The temperature dependence of rate constants757
  • 17D.2The interpretation of the Arrhenius parameters759
  • 17EReaction mechanisms762
  • 17E.1Elementary reactions762
  • 17E.2Consecutive elementary reactions763
  • 17E.3The steady-state approximation764
  • 17E.4The rate-determining step766
  • 17E.5Pre-equilibria767
  • 17E.6Kinetic and thermodynamic control of reactions768
  • 17FExamples of reaction mechanisms769
  • 17F.1Unimolecular reactions769
  • 17F.2Polymerization kinetics771
  • 17F.3Enzyme-catalysed reactions774
  • 17GPhotochemistry778
  • 17G.1Photochemical processes778
  • 17G.2The primary quantum yield779
  • 17G.3Mechanism of decay of excited singlet states780
  • 17G.4Quenching781
  • 17G.5Resonance energy transfer783
18Focus 18 — Reaction dynamics793
  • 18ACollision theory794
  • 18A.1Reactive encounters794
  • 18A.2The RRK model799
  • 18BDiffusion-controlled reactions801
  • 18B.1Reactions in solution801
  • 18B.2The material-balance equation803
  • 18CTransition-state theory806
  • 18C.1The Eyring equation806
  • 18C.2Thermodynamic aspects809
  • 18C.3The kinetic isotope effect812
  • 18DThe dynamics of molecular collisions815
  • 18D.1Molecular beams815
  • 18D.2Reactive collisions818
  • 18D.3Potential energy surfaces819
  • 18D.4Some results from experiments and calculations820
  • 18EElectron transfer in homogeneous systems824
  • 18E.1The rate law824
  • 18E.2The role of electron tunnelling825
  • 18E.3The rate constant826
  • 18E.4Experimental tests of the theory828
19Focus 19 — Processes at solid surfaces835
  • 19AAn introduction to solid surfaces836
  • 19A.1Surface growth836
  • 19A.2Physisorption and chemisorption837
  • 19A.3Experimental techniques838
  • 19BAdsorption and desorption844
  • 19B.1Adsorption isotherms844
  • 19B.2The rates of adsorption and desorption850
  • 19CHeterogeneous catalysis853
  • 19C.1Mechanisms of heterogeneous catalysis853
  • 19C.2Catalytic activity at surfaces855
  • 19DProcesses at electrodes857
  • 19D.1The electrode–solution interface857
  • 19D.2The current density at an electrode858
  • 19D.3Voltammetry862
  • 19D.4Electrolysis865
  • 19D.5Working galvanic cells865

원본 목차 PDF로 대조 완료 — 19개 Focus, 91개 Topic, 241개 세부 절, 쪽수 포함. 11판에서 12판으로 교체했다. 장이 아니라 Focus 단위이고 그 아래 알파벳 Topic(1A, 1B …), 다시 그 아래 번호 절(1A.1 …)이 온다. 인용할 때는 Topic 기호를 반드시 함께 적어야 한다 — §1A.2처럼. 각 Topic 끝의 Checklist of concepts·equations와 절 아래 (a)(b)(c) 단계는 목차 항목이 아니므로 옮기지 않았다. 반도체에 바로 걸리는 자리는 Focus 15 Solids — 15A 결정 구조, 15B 회절, 15C 고체의 결합(밴드), 15E 전기적 성질, 15G 광학적 성질.

Inorganic Chemistry

4부Weller · Overton · Rourke · Armstrong · 7th ed. · Oxford University Press, 2018 · ISBN 978-0-19-876812-8  원본 대조

Part 1 — Foundations (p.1)

1Atomic structure3
  • The structures of hydrogenic atoms7
  • 1.1Spectroscopic information7
  • 1.2Some principles of quantum mechanics8
  • 1.3Atomic orbitals9
  • Many-electron atoms15
  • 1.4Penetration and shielding15
  • 1.5The building-up principle18
  • 1.6The classification of the elements20
  • 1.7Atomic properties23
2Molecular structure and bonding33
  • Lewis structures33
  • 2.1The octet rule34
  • 2.2Resonance35
  • 2.3The VSEPR model35
  • Valence bond theory38
  • 2.4The hydrogen molecule38
  • 2.5Homonuclear diatomic molecules39
  • 2.6Polyatomic molecules40
  • Molecular orbital theory42
  • 2.7An introduction to the theory42
  • 2.8Homonuclear diatomic molecules45
  • 2.9Heteronuclear diatomic molecules48
  • 2.10Bond properties51
  • Bond properties, reaction enthalpies, and kinetics53
  • 2.11Bond length53
  • 2.12Bond strength and reaction enthalpies54
  • 2.13Electronegativity and bond enthalpy55
  • 2.14An introduction to catalysis57
3Molecular symmetry62
  • An introduction to symmetry analysis62
  • 3.1Symmetry operations, elements, and point groups63
  • 3.2Character tables69
  • Applications of symmetry71
  • 3.3Polar molecules71
  • 3.4Chiral molecules72
  • 3.5Molecular vibrations73
  • The symmetries of molecular orbitals77
  • 3.6Symmetry-adapted linear combinations77
  • 3.7The construction of molecular orbitals77
  • 3.8The vibrational analogy80
  • Representations81
  • 3.9The reduction of a representation81
  • 3.10Projection operators82
  • 3.11Polyatomic molecules83
4The structures of simple solids90
  • The description of the structures of solids91
  • 4.1Unit cells and the description of crystal structures91
  • 4.2The close packing of spheres94
  • 4.3Holes in close-packed structures97
  • The structures of metals and alloys100
  • 4.4Polytypism101
  • 4.5Nonclose-packed structures101
  • 4.6Polymorphism of metals102
  • 4.7Atomic radii of metals103
  • 4.8Alloys and interstitials104
  • Ionic solids108
  • 4.9Characteristic structures of ionic solids109
  • 4.10The rationalization of structures117
  • The energetics of ionic bonding121
  • 4.11Lattice enthalpy and the Born–Haber cycle122
  • 4.12The calculation of lattice enthalpies123
  • 4.13Comparison of experimental and theoretical values125
  • 4.14The Kapustinskii equation127
  • 4.15Consequences of lattice enthalpies128
  • Defects and nonstoichiometry131
  • 4.16The origins and types of defects131
  • 4.17Nonstoichiometric compounds and solid solutions135
  • The electronic structures of solids137
  • 4.18The conductivities of inorganic solids137
  • 4.19Bands formed from overlapping atomic orbitals138
  • 4.20Semiconduction142
5Acids and bases149
  • Brønsted acidity150
  • 5.1Proton transfer equilibria in water151
  • Characteristics of Brønsted acids157
  • 5.2Periodic trends in aqua acid strength157
  • 5.3Simple oxoacids158
  • 5.4Anhydrous oxides161
  • 5.5Polyoxo compound formation162
  • Lewis acidity164
  • 5.6Examples of Lewis acids and bases164
  • 5.7Group characteristics of Lewis acids165
  • 5.8Hydrogen bonding168
  • Reactions and properties of Lewis acids and bases170
  • 5.9The fundamental types of reaction170
  • 5.10Factors governing interactions between Lewis acids and bases171
  • 5.11Thermodynamic Lewis acidity parameters173
  • Nonaqueous solvents174
  • 5.12Solvent levelling174
  • 5.13The Hammett acidity function and its application to strong, concentrated acids175
  • 5.14The solvent system definition of acids and bases176
  • 5.15Solvents as acids and bases176
  • Applications of acid–base chemistry180
  • 5.16Superacids and superbases180
  • 5.17Heterogeneous acid–base reactions180
6Oxidation and reduction185
  • Reduction potentials186
  • 6.1Redox half-reactions186
  • 6.2Standard potentials and spontaneity187
  • 6.3Trends in standard potentials190
  • 6.4The electrochemical series191
  • 6.5The Nernst equation192
  • Redox stability193
  • 6.6The influence of pH193
  • 6.7Reactions with water194
  • 6.8Oxidation by atmospheric oxygen196
  • 6.9Disproportionation and comproportionation196
  • 6.10The influence of complexation197
  • 6.11The relation between solubility and standard potentials198
  • Diagrammatic presentation of potential data199
  • 6.12Latimer diagrams199
  • 6.13Frost diagrams200
  • 6.14Proton-coupled electron transfer: Pourbaix diagrams204
  • 6.15Applications in environmental chemistry: natural waters205
  • Chemical extraction of the elements206
  • 6.16Chemical reduction206
  • 6.17Chemical oxidation210
  • 6.18Electrochemical extraction210
7An introduction to coordination compounds216
  • The language of coordination chemistry217
  • 7.1Representative ligands218
  • 7.2Nomenclature221
  • Constitution and geometry222
  • 7.3Low coordination numbers222
  • 7.4Intermediate coordination numbers223
  • 7.5Higher coordination numbers225
  • 7.6Polymetallic complexes227
  • Isomerism and chirality227
  • 7.7Square-planar complexes228
  • 7.8Tetrahedral complexes230
  • 7.9Trigonal-bipyramidal and square-pyramidal complexes230
  • 7.10Octahedral complexes231
  • 7.11Ligand chirality235
  • The thermodynamics of complex formation237
  • 7.12Formation constants237
  • 7.13Trends in successive formation constants238
  • 7.14The chelate and macrocyclic effects239
  • 7.15Steric effects and electron delocalization240
8Physical techniques in inorganic chemistry244
  • Diffraction methods245
  • 8.1X-ray diffraction245
  • 8.2Neutron diffraction249
  • Absorption and emission spectroscopies251
  • 8.3Ultraviolet–visible spectroscopy252
  • 8.4Fluorescence or emission spectroscopy255
  • 8.5Infrared and Raman spectroscopy256
  • Resonance techniques260
  • 8.6Nuclear magnetic resonance260
  • 8.7Electron paramagnetic resonance266
  • 8.8Mössbauer spectroscopy268
  • Ionization-based techniques269
  • 8.9Photoelectron spectroscopy269
  • 8.10X-ray absorption spectroscopy270
  • 8.11Mass spectrometry271
  • Chemical analysis274
  • 8.12Atomic absorption spectroscopy274
  • 8.13CHN analysis274
  • 8.14X-ray fluorescence elemental analysis275
  • 8.15Thermal analysis276
  • Magnetometry and magnetic susceptibility278
  • Electrochemical techniques279
  • Microscopy281
  • 8.16Scanning probe microscopy281
  • 8.17Electron microscopy282

Part 2 — The elements and their compounds (p.287)

9Periodic trends289
  • Periodic properties of the elements289
  • 9.1Valence electron configurations289
  • 9.2Atomic parameters290
  • 9.3Occurrence295
  • 9.4Metallic character296
  • 9.5Oxidation states297
  • Periodic characteristics of compounds300
  • 9.6Presence of unpaired electrons300
  • 9.7Coordination numbers301
  • 9.8Bond enthalpy trends301
  • 9.9Binary compounds302
  • 9.10Wider aspects of periodicity305
  • 9.11Anomalous nature of the first member of each group308
10Hydrogen311
  • Part A: The essentials311
  • 10.1The element312
  • 10.2Simple compounds313
  • Part B: The detail317
  • 10.3Nuclear properties317
  • 10.4Production of dihydrogen318
  • 10.5Reactions of dihydrogen321
  • 10.6Compounds of hydrogen322
  • 10.7General methods for synthesis of binary hydrogen compounds332
11The Group 1 elements336
  • Part A: The essentials336
  • 11.1The elements337
  • 11.2Simple compounds338
  • 11.3The atypical properties of lithium340
  • Part B: The detail340
  • 11.4Occurrence and extraction340
  • 11.5Uses of the elements and their compounds341
  • 11.6Hydrides344
  • 11.7Halides345
  • 11.8Oxides and related compounds346
  • 11.9Sulfides, selenides, and tellurides348
  • 11.10Hydroxides348
  • 11.11Compounds of oxoacids349
  • 11.12Nitrides and carbides351
  • 11.13Solubility and hydration352
  • 11.14Solutions in liquid ammonia352
  • 11.15Zintl phases containing alkali metals353
  • 11.16Coordination compounds353
  • 11.17Organometallic compounds355
12The Group 2 elements358
  • Part A: The essentials359
  • 12.1The elements359
  • 12.2Simple compounds360
  • 12.3The anomalous properties of beryllium361
  • Part B: The detail362
  • 12.4Occurrence and extraction362
  • 12.5Uses of the elements and their compounds363
  • 12.6Hydrides365
  • 12.7Halides365
  • 12.8Oxides, sulfides, and hydroxides367
  • 12.9Nitrides and carbides369
  • 12.10Salts of oxoacids370
  • 12.11Solubility, hydration, and beryllates374
  • 12.12Coordination compounds374
  • 12.13Organometallic compounds375
  • 12.14Lower oxidation state Group 2 compounds377
13The Group 13 elements380
  • Part A: The essentials381
  • 13.1The elements381
  • 13.2Compounds382
  • 13.3Boron clusters and borides385
  • Part B: The detail386
  • 13.4Occurrence and recovery387
  • 13.5Uses of the elements and their compounds387
  • 13.6Simple hydrides of boron388
  • 13.7Boron trihalides391
  • 13.8Boron–oxygen compounds393
  • 13.9Compounds of boron with nitrogen394
  • 13.10Metal borides396
  • 13.11Higher boranes and borohydrides397
  • 13.12Metallaboranes and carboranes402
  • 13.13The hydrides of aluminium, gallium, indium, and thallium404
  • 13.14Trihalides of aluminium, gallium, indium, and thallium405
  • 13.15Low oxidation state halides of aluminium, gallium, indium, and thallium405
  • 13.16Oxo compounds of aluminium, gallium, indium, and thallium406
  • 13.17Sulfides of gallium, indium, and thallium407
  • 13.18Compounds with Group 15 elements407
  • 13.19Zintl phases408
  • 13.20Organometallic compounds408
14The Group 14 elements412
  • Part A: The essentials413
  • 14.1The elements413
  • 14.2Simple compounds415
  • 14.3Extended silicon–oxygen compounds416
  • Part B: The detail417
  • 14.4Occurrence and recovery417
  • 14.5Diamond and graphite418
  • 14.6Other forms of carbon419
  • 14.7Hydrides423
  • 14.8Compounds with halogens425
  • 14.9Compounds of carbon with oxygen and sulfur428
  • 14.10Simple compounds of silicon with oxygen431
  • 14.11Oxides of germanium, tin, and lead433
  • 14.12Compounds with nitrogen433
  • 14.13Carbides434
  • 14.14Silicides436
  • 14.15Extended silicon–oxygen compounds437
  • 14.16Organosilicon and organogermanium compounds440
  • 14.17Organometallic compounds441
15The Group 15 elements445
  • Part A: The essentials446
  • 15.1The elements446
  • 15.2Simple compounds447
  • 15.3Oxides and oxoanions of nitrogen449
  • Part B: The detail450
  • 15.4Occurrence and recovery450
  • 15.5Uses450
  • 15.6Nitrogen activation453
  • 15.7Nitrides and azides454
  • 15.8Phosphides455
  • 15.9Arsenides, antimonides, and bismuthides456
  • 15.10Hydrides456
  • 15.11Halides459
  • 15.12Oxohalides460
  • 15.13Oxides and oxoanions of nitrogen460
  • 15.14Oxides of phosphorus, arsenic, antimony, and bismuth465
  • 15.15Oxoanions of phosphorus, arsenic, antimony, and bismuth466
  • 15.16Condensed phosphates467
  • 15.17Phosphazenes468
  • 15.18Organometallic compounds of arsenic, antimony, and bismuth469
16The Group 16 elements474
  • Part A: The essentials475
  • 16.1The elements475
  • 16.2Simple compounds476
  • 16.3Ring and cluster compounds478
  • Part B: The detail478
  • 16.4Oxygen478
  • 16.5Reactivity of oxygen481
  • 16.6Sulfur481
  • 16.7Selenium, tellurium, and polonium483
  • 16.8Hydrides484
  • 16.9Halides487
  • 16.10Metal oxides487
  • 16.11Metal sulfides, selenides, tellurides, and polonides488
  • 16.12Oxides489
  • 16.13Oxoacids of sulfur491
  • 16.14Polyanions of sulfur, selenium, and tellurium495
  • 16.15Polycations of sulfur, selenium, and tellurium496
  • 16.16Sulfur–nitrogen compounds496
17The Group 17 elements500
  • Part A: The essentials501
  • 17.1The elements501
  • 17.2Simple compounds502
  • 17.3The interhalogens503
  • Part B: The detail505
  • 17.4Occurrence, recovery, and uses505
  • 17.5Molecular structure and properties508
  • 17.6Reactivity trends510
  • 17.7Pseudohalogens510
  • 17.8Special properties of fluorine compounds511
  • 17.9Structural features512
  • 17.10The interhalogens513
  • 17.11Halogen oxides516
  • 17.12Oxoacids and oxoanions517
  • 17.13Thermodynamic aspects of oxoanion redox reactions518
  • 17.14Trends in rates of oxoanion redox reactions519
  • 17.15Redox properties of individual oxidation states520
  • 17.16Fluorocarbons522
18The Group 18 elements526
  • Part A: The essentials527
  • 18.1The elements527
  • 18.2Simple compounds527
  • Part B: The detail528
  • 18.3Occurrence and recovery528
  • 18.4Uses529
  • 18.5Synthesis and structure of xenon fluorides530
  • 18.6Reactions of xenon fluorides531
  • 18.7Xenon–oxygen compounds532
  • 18.8Xenon insertion compounds533
  • 18.9Organoxenon compounds534
  • 18.10Coordination compounds534
  • 18.11Other compounds of noble gases535
19The d-block elements538
  • Part A: The essentials539
  • 19.1Occurrence and recovery539
  • 19.2Chemical and physical properties539
  • Part B: The detail542
  • 19.3Group 3: scandium, yttrium, and lanthanum542
  • 19.4Group 4: titanium, zirconium, and hafnium543
  • 19.5Group 5: vanadium, niobium, and tantalum545
  • 19.6Group 6: chromium, molybdenum, and tungsten549
  • 19.7Group 7: manganese, technetium, and rhenium554
  • 19.8Group 8: iron, ruthenium, and osmium556
  • 19.9Group 9: cobalt, rhodium, and iridium558
  • 19.10Group 10: nickel, palladium, and platinum559
  • 19.11Group 11: copper, silver, and gold561
  • 19.12Group 12: zinc, cadmium, and mercury563
20d-Metal complexes: electronic structure and properties568
  • Electronic structure568
  • 20.1Crystal-field theory569
  • 20.2Ligand-field theory579
  • Electronic spectra583
  • 20.3Electronic spectra of atoms584
  • 20.4Electronic spectra of complexes588
  • 20.5Charge-transfer bands593
  • 20.6Selection rules and intensities595
  • 20.7Luminescence597
  • Magnetism598
  • 20.8Cooperative magnetism598
  • 20.9Spin-crossover complexes600
21Coordination chemistry: reactions of complexes604
  • Ligand substitution reactions605
  • 21.1Rates of ligand substitution605
  • 21.2The classification of mechanisms606
  • Ligand substitution in square-planar complexes610
  • 21.3The nucleophilicity of the entering group610
  • 21.4The shape of the transition state611
  • Ligand substitution in octahedral complexes614
  • 21.5Rate laws and their interpretation614
  • 21.6The activation of octahedral complexes615
  • 21.7Base hydrolysis619
  • 21.8Stereochemistry619
  • 21.9Isomerization reactions620
  • Redox reactions621
  • 21.10The classification of redox reactions621
  • 21.11The inner-sphere mechanism622
  • 21.12The outer-sphere mechanism624
  • Photochemical reactions627
  • 21.13Prompt and delayed reactions628
  • 21.14d–d and charge-transfer reactions628
  • 21.15Transitions in metal–metal bonded systems629
22d-Metal organometallic chemistry633
  • Bonding635
  • 22.1Stable electron configurations635
  • 22.2Electron-count preference636
  • 22.3Electron counting and oxidation states637
  • 22.4Nomenclature639
  • Ligands640
  • 22.5Carbon monoxide640
  • 22.6Phosphines642
  • 22.7Hydrides and dihydrogen complexes643
  • 22.8η¹-Alkyl, -alkenyl, -alkynyl, and -aryl ligands644
  • 22.9η²-Alkene and -alkyne ligands645
  • 22.10Nonconjugated diene and polyene ligands646
  • 22.11Butadiene, cyclobutadiene, and cyclooctatetraene646
  • 22.12Benzene and other arenes648
  • 22.13The allyl ligand649
  • 22.14Cyclopentadiene and cycloheptatriene650
  • 22.15Carbenes652
  • 22.16Alkanes, agostic hydrogens, and noble gases653
  • 22.17Dinitrogen and nitrogen monoxide653
  • Compounds654
  • 22.18d-Block carbonyls654
  • 22.19Metallocenes660
  • 22.20Metal–metal bonding and metal clusters664
  • Reactions667
  • 22.21Ligand substitution667
  • 22.22Oxidative addition and reductive elimination670
  • 22.23σ-Bond metathesis671
  • 22.241,1-Migratory insertion reactions671
  • 22.251,2-Insertions and β-hydride elimination672
  • 22.26α-, γ-, and δ-Hydride eliminations and cyclometallations673
  • Catalysis673
  • 22.27Alkene metathesis674
  • 22.28Hydrogenation of alkenes675
  • 22.29Hydroformylation677
  • 22.30Wacker oxidation of alkenes679
  • 22.31Palladium-catalysed C–C bond-forming reactions679
  • 22.32Oligomerization and polymerization681
23The f-block elements689
  • The elements690
  • 23.1The valence orbitals690
  • 23.2Occurrence and recovery691
  • 23.3Physical properties and applications692
  • Lanthanoid chemistry693
  • 23.4General trends693
  • 23.5Optical and magnetic properties696
  • 23.6Binary ionic compounds700
  • 23.7Ternary and complex oxides702
  • 23.8Coordination compounds703
  • 23.9Organometallic compounds706
  • Actinoid chemistry709
  • 23.10General trends709
  • 23.11Electronic spectra of the actinoids712
  • 23.12Thorium and uranium713
  • 23.13Neptunium, plutonium, and americium715

Part 3 — Expanding our horizons: advances and applications (p.719)

24Materials chemistry and nanomaterials721
  • Synthesis of materials722
  • 24.1The formation of bulk materials722
  • Defects and ion transport725
  • 24.2Extended defects725
  • 24.3Atom and ion diffusion726
  • 24.4Solid electrolytes727
  • Metal oxides, nitrides, and fluorides731
  • 24.5Monoxides of the 3d metals732
  • 24.6Higher oxides and complex oxides734
  • 24.7Oxide glasses745
  • 24.8Nitrides, fluorides, and mixed-anion phases747
  • Sulfides, intercalation compounds, and metal-rich phases749
  • 24.9Layered MS₂ compounds and intercalation750
  • 24.10Chevrel phases and chalcogenide thermoelectrics753
  • Framework structures and heterogeneous catalysis in porous materials754
  • 24.11Structures based on tetrahedral oxoanions755
  • 24.12Structures based on linked octahedral and tetrahedral metal centres758
  • 24.13Zeolites and microporous structures in heterogeneous catalysis763
  • Hydrides and hydrogen-storage materials765
  • 24.14Metal hydrides766
  • 24.15Other inorganic hydrogen-storage materials768
  • Optical properties of inorganic materials769
  • 24.16Coloured solids770
  • 24.17White and black pigments771
  • 24.18Photocatalysts772
  • Semiconductor chemistry773
  • 24.19Group 14 semiconductors774
  • 24.20Semiconductor systems isoelectronic with silicon775
  • Molecular materials and fullerides776
  • 24.21Fullerides776
  • 24.22Molecular materials chemistry777
  • Nanomaterials781
  • 24.23Nanomaterial terminology and history781
  • 24.24Solution-based synthesis of nanoparticles782
  • 24.25Vapour-phase synthesis of nanoparticles via solutions or solids783
  • 24.26Templated synthesis of nanomaterials using frameworks, supports, and substrates784
  • 24.27Characterization and formation of nanomaterials using microscopy786
  • Nanostructures and properties787
  • 24.28One-dimensional control: carbon nanotubes and inorganic nanowires787
  • 24.29Two-dimensional control: graphene, quantum wells, and solid-state superlattices789
  • 24.30Three-dimensional control: mesoporous materials and composites792
  • 24.31Special optical properties of nanomaterials796
  • Heterogeneous nanoparticle catalysts798
  • 24.32The nature of heterogeneous catalysts799
  • 24.33Reactions involving heterogeneous nanoparticle catalysts803
25Green chemistry809
  • Twelve principles810
  • 25.1Prevention810
  • 25.2Atom economy811
  • 25.3Less hazardous chemical species812
  • 25.4Designing safer chemicals813
  • 25.5Safer solvents and auxiliaries813
  • 25.6Design for energy efficiency815
  • 25.7Use of renewable feedstocks816
  • 25.8Reduce derivatives817
  • 25.9Catalysis818
  • 25.10Design for degradation820
  • 25.11Real-time analysis for pollution prevention821
  • 25.12Inherently safer chemistry for accident prevention821
26Biological inorganic chemistry824
  • The organization of cells825
  • 26.1The physical structure of cells825
  • 26.2The inorganic composition of living organisms825
  • 26.3Biological metal-coordination sites828
  • Metal ions in transport and communication833
  • 26.4Sodium and potassium transport833
  • 26.5Calcium signalling proteins835
  • 26.6Selective transport and storage of iron836
  • 26.7Oxygen transport and storage839
  • 26.8Electron transfer842
  • Catalytic processes848
  • 26.9Acid–base catalysis848
  • 26.10Enzymes dealing with H₂O₂ and O₂855
  • 26.11Enzymes dealing with radicals and alkyl groups864
  • 26.12Oxygen atom transfer by molybdenum and tungsten enzymes868
  • 26.13Hydrogenases, enzymes that activate H₂869
  • 26.14The nitrogen cycle871
  • Metals in gene regulation874
  • 26.15Transcription factors and the role of Zn874
  • 26.16Iron proteins as sensors875
  • 26.17Proteins that sense Cu and Zn levels878
  • 26.18Biomineralization878
  • Perspectives880
  • 26.19The contributions of individual elements880
  • 26.20Future directions881
27Inorganic chemistry in medicine885
  • The chemistry of elements in medicine885
  • 27.1Inorganic complexes in cancer treatment887
  • 27.2Anti-arthritis drugs890
  • 27.3Bismuth in the treatment of gastric ulcers891
  • 27.4Lithium in the treatment of bipolar disorders892
  • 27.5Organometallic drugs in the treatment of malaria892
  • 27.6Metal complexes as antiviral agents893
  • 27.7Metal drugs that slowly release CO: an agent against post-operative stress895
  • 27.8Chelation therapy895
  • 27.9Imaging agents896
  • 27.10Nanoparticles in directed drug delivery898
  • 27.11Outlook899
ResourceResource sections901
  • 1Selected ionic radii901
  • 2Electronic properties of the elements903
  • 3Standard potentials905
  • 4Character tables918
  • 5Symmetry-adapted orbitals922
  • 6Tanabe–Sugano diagrams926

OUP 인쇄 Detailed contents(pp. xiii–xx) 전문을 옮겼다. 번호 없는 회색 소제목은 절 위에 오는 주제 묶음이라 번호 칸을 비워 두었다. 10~19장은 각각 Part A: The essentialsPart B: The detail로 갈라진다. 반도체와 직결되는 곳은 §4.18~4.20(무기 고체의 전도도·원자 궤도 겹침에서 나온 띠·반도체성)과 §24.19~24.20(14족 반도체, 실리콘과 등전자인 반도체계). 장 끝의 FURTHER READING·EXERCISES·TUTORIAL PROBLEMS는 옮기지 않았다. 원본 목차에서 §26.15가 “27.15”로 오식되어 있어 26.15로 바로잡았다.

Principles of Modern Chemistry

4부Oxtoby · Gillis · Butler · 8th ed. · Cengage, 2015  원본 대조

Unit I — Introduction to the Study of Modern Chemistry (p.xxviii)

1The Atom in Modern Chemistry2
  • 1.1The Nature of Modern Chemistry2
  • 1.2Elements: The Building Blocks of Matter5
  • 1.3Indirect Evidence for the Existence of Atoms: Laws of Chemical Combination8
  • 1.4The Physical Structure of Atoms15
  • 1.5Mass Spectrometry, Isotopes, and the Measurement of Relative Mass23
  • 1.6The Mole: Counting Molecules by Weighing26
2Chemical Formulas, Equations, and Reaction Yields35
  • 2.1Empirical and Molecular Formulas36
  • 2.2Chemical Formula and Percentage Composition37
  • 2.3Writing Balanced Chemical Equations39
  • 2.4Mass Relationships in Chemical Reactions43
  • 2.5Limiting Reactant and Percentage Yield45

Unit II — Chemical Bonding and Molecular Structure (p.50)

3Atomic Shells and Classical Models of Chemical Bonding52
  • 3.1Representations of Molecules54
  • 3.2The Periodic Table59
  • 3.3Forces and Potential Energy in Atoms62
  • 3.4Ionization Energies, the Shell Model of the Atom, and Shielding70
  • 3.5Electron Affinity77
  • 3.6Electronegativity: The Tendency of Atoms to Attract Electrons in Molecules79
  • 3.7Forces and Potential Energy in Molecules: Formation of Chemical Bonds83
  • 3.8Ionic Bonding85
  • 3.9Covalent and Polar Covalent Bonding90
  • 3.10Electron Pair Bonds and Lewis Diagrams for Molecules99
  • 3.11The Shapes of Molecules: Valence Shell Electron-Pair Repulsion Theory106
  • 3.12Oxidation Numbers112
  • 3.13Inorganic Nomenclature114
4Introduction to Quantum Mechanics124
  • 4.1Preliminaries: Wave Motion and Light126
  • 4.2Evidence for Energy Quantization in Atoms130
  • 4.3The Bohr Model: Predicting Discrete Energy Levels in Atoms139
  • 4.4Evidence for Wave–Particle Duality142
  • 4.5The Schrödinger Equation154
  • 4.6Quantum Mechanics of Particle-in-a-Box Models158
  • 4.7A DEEPER LOOK · Wave Functions for Particles in Two- and Three-Dimensional Boxes166
5Quantum Mechanics and Atomic Structure177
  • 5.1The Hydrogen Atom178
  • 5.2Shell Model for Many-Electron Atoms196
  • 5.3Aufbau Principle and Electron Configurations201
  • 5.4Shells and the Periodic Table: Photoelectron Spectroscopy206
  • 5.5Periodic Properties and Electronic Structure209
6Quantum Mechanics and Molecular Structure219
  • 6.1Quantum Picture of the Chemical Bond221
  • 6.2Exact Molecular Orbitals for the Simplest Molecule: H₂⁺225
  • 6.3Molecular Orbital Theory and the Linear Combination of Atomic Orbitals Approximation for H₂⁺231
  • 6.4Homonuclear Diatomic Molecules: First-Period Atoms235
  • 6.5Homonuclear Diatomic Molecules: Second-Period Atoms237
  • 6.6Heteronuclear Diatomic Molecules246
  • 6.7Summary Comments for the LCAO Method and Diatomic Molecules252
  • 6.8Valence Bond Theory and the Electron Pair Bond253
  • 6.9Orbital Hybridization for Polyatomic Molecules259
  • 6.10Predicting Molecular Structures and Shapes266
  • 6.11Using the LCAO and Valence Bond Methods Together270
  • 6.12Summary and Comparison of the LCAO and Valence Bond Methods275
  • 6.13A DEEPER LOOK · Properties of the Exact Molecular Orbitals for H₂⁺278
7Bonding in Organic Molecules289
  • 7.1Petroleum Refining and the Hydrocarbons290
  • 7.2The Alkanes291
  • 7.3The Alkenes and Alkynes297
  • 7.4Aromatic Hydrocarbons300
  • 7.5Fullerenes303
  • 7.6Functional Groups and Organic Reactions304
  • 7.7Pesticides and Pharmaceuticals316
8Bonding in Transition Metal Compounds and Coordination Complexes325
  • 8.1Chemistry of the Transition Metals326
  • 8.2Introduction to Coordination Chemistry333
  • 8.3Structures of Coordination Complexes339
  • 8.4Crystal Field Theory: Optical and Magnetic Properties345
  • 8.5Optical Properties and the Spectrochemical Series352
  • 8.6Bonding in Coordination Complexes355

Unit III — Kinetic Molecular Description of the States of Matter (p.368)

9The Gaseous State370
  • 9.1The Chemistry of Gases371
  • 9.2Pressure and Temperature of Gases373
  • 9.3The Ideal Gas Law380
  • 9.4Mixtures of Gases383
  • 9.5The Kinetic Theory of Gases385
  • 9.6Real Gases: Intermolecular Forces394
  • 9.7A DEEPER LOOK · Molecular Collisions and Rate Processes399
10Solids, Liquids, and Phase Transitions414
  • 10.1Bulk Properties of Gases, Liquids, and Solids: Molecular Interpretation415
  • 10.2Intermolecular Forces: Origins in Molecular Structure421
  • 10.3Intermolecular Forces in Liquids426
  • 10.4Phase Equilibrium430
  • 10.5Phase Transitions432
  • 10.6Phase Diagrams434
11Solutions441
  • 11.1Composition of Solutions442
  • 11.2Nature of Dissolved Species445
  • 11.3Reaction Stoichiometry in Solutions: Acid–Base Titrations448
  • 11.4Reaction Stoichiometry in Solutions: Oxidation–Reduction Titrations452
  • 11.5Phase Equilibrium in Solutions: Nonvolatile Solutes459
  • 11.6Phase Equilibrium in Solutions: Volatile Solutes467
  • 11.7Colloidal Suspensions472

Unit IV — Equilibrium in Chemical Reactions (p.478)

12Thermodynamic Processes and Thermochemistry480
  • 12.1Systems, States, and Processes482
  • 12.2The First Law of Thermodynamics: Internal Energy, Work, and Heat485
  • 12.3Heat Capacity, Calorimetry, and Enthalpy492
  • 12.4The First Law and Ideal Gas Processes495
  • 12.5Molecular Contributions to Internal Energy and Heat Capacity498
  • 12.6Thermochemistry504
  • 12.7Reversible Processes in Ideal Gases512
  • 12.8A DEEPER LOOK · Distribution of Energy among Molecules517
13Spontaneous Processes and Thermodynamic Equilibrium526
  • 13.1The Nature of Spontaneous Processes527
  • 13.2Entropy and Spontaneity: A Molecular Statistical Interpretation530
  • 13.3Entropy and Heat: Macroscopic Basis of the Second Law of Thermodynamics535
  • 13.4Entropy Changes in Reversible Processes537
  • 13.5Entropy Changes and Spontaneity541
  • 13.6The Third Law of Thermodynamics544
  • 13.7The Gibbs Free Energy547
  • 13.8A DEEPER LOOK · Carnot Cycles, Efficiency, and Entropy552
14Chemical Equilibrium563
  • 14.1The Nature of Chemical Equilibrium564
  • 14.2The Empirical Law of Mass Action568
  • 14.3Thermodynamic Description of the Equilibrium State574
  • 14.4The Law of Mass Action for Related and Simultaneous Equilibria581
  • 14.5Equilibrium Calculations for Gas-Phase and Heterogeneous Reactions583
  • 14.6The Direction of Change in Chemical Reactions: Empirical Description589
  • 14.7The Direction of Change in Chemical Reactions: Thermodynamic Explanation598
  • 14.8Distribution of a Single Species between Immiscible Phases: Extraction and Separation Processes602
15Acid–Base Equilibria611
  • 15.1Classifications of Acids and Bases612
  • 15.2Properties of Acids and Bases in Aqueous Solutions: The Brønsted–Lowry Scheme619
  • 15.3Acid and Base Strength622
  • 15.4Equilibria Involving Weak Acids and Bases630
  • 15.5Buffer Solutions635
  • 15.6Acid–Base Titration Curves640
  • 15.7Polyprotic Acids645
  • 15.8Organic Acids and Bases: Structure and Reactivity649
  • 15.9A DEEPER LOOK · Exact Treatment of Acid–Base Equilibria655
16Solubility and Precipitation Equilibria667
  • 16.1The Nature of Solubility Equilibria668
  • 16.2Ionic Equilibria between Solids and Solutions671
  • 16.3Precipitation and the Solubility Product674
  • 16.4The Effects of pH on Solubility678
  • 16.5Complex Ions and Solubility680
  • 16.6A DEEPER LOOK · Selective Precipitation of Ions685
17Electrochemistry693
  • 17.1Electrochemical Cells694
  • 17.2Cell Potentials and the Gibbs Free Energy700
  • 17.3Concentration Effects and the Nernst Equation708
  • 17.4Molecular Electrochemistry715
  • 17.5Batteries and Fuel Cells728
  • 17.6Corrosion and Corrosion Prevention736
  • 17.7Electrometallurgy738
  • 17.8A DEEPER LOOK · Electrolysis of Water and Aqueous Solutions744

Unit V — Rates of Chemical and Physical Processes (p.752)

18Chemical Kinetics754
  • 18.1Rates of Chemical Reactions755
  • 18.2Rate Laws758
  • 18.3Reaction Mechanisms766
  • 18.4Reaction Mechanisms and Rate769
  • 18.5Effect of Temperature on Reaction Rates775
  • 18.6Molecular Theories of Elementary Reactions780
  • 18.7Reactions in Solution792
  • 18.8Catalysis794
19Nuclear Chemistry807
  • 19.1Mass–Energy Relationships in Nuclei808
  • 19.2Nuclear Decay Processes812
  • 19.3Kinetics of Radioactive Decay818
  • 19.4Radiation in Biology and Medicine822
  • 19.5Nuclear Fission827
  • 19.6Nuclear Fusion and Nucleosynthesis832
20Molecular Spectroscopy and Photochemistry839
  • 20.1Introduction to Molecular Spectroscopy840
  • 20.2Experimental Methods in Molecular Spectroscopy844
  • 20.3Rotational and Vibrational Spectroscopy850
  • 20.4Nuclear Magnetic Resonance Spectroscopy869
  • 20.5Electronic Spectroscopy and Excited State Relaxation Processes873
  • 20.6Introduction to Atmospheric Chemistry880
  • 20.7Photosynthesis889
  • 20.8A DEEPER LOOK · Lasers895

Unit VI — Materials (p.902)

21Structure and Bonding in Solids904
  • 21.1Crystal Symmetry and the Unit Cell905
  • 21.2Crystal Structure911
  • 21.3Cohesion in Solids916
  • 21.4Defects and Amorphous Solids923
  • 21.5A DEEPER LOOK · Lattice Energies of Crystals927
22Inorganic Materials935
  • 22.1Minerals: Naturally Occurring Inorganic Materials936
  • 22.2Properties of Ceramics941
  • 22.3Silicate Ceramics943
  • 22.4Nonsilicate Ceramics948
  • 22.5Electrical Conduction in Materials953
  • 22.6Band Theory of Conduction957
  • 22.7Semiconductors959
  • 22.8Pigments and Phosphors: Optical Displays962
23Polymeric Materials and Soft Condensed Matter967
  • 23.1Polymerization Reactions for Synthetic Polymers968
  • 23.2Applications for Synthetic Polymers972
  • 23.3Liquid Crystals979
  • 23.4Natural Polymers982
부록 A~GAppendicesA.1
  • AScientific Notation and Experimental ErrorA.2
  • BSI Units, Unit Conversions, and Physics for General ChemistryA.8
  • CMathematics for General ChemistryA.21
  • DStandard Chemical Thermodynamic PropertiesA.37
  • EStandard Reduction Potentials at 25 °CA.45
  • FPhysical Properties of the ElementsA.47
  • GAnswers to Odd-Numbered ProblemsA.56

Cengage 인쇄 목차(pp. v–ix) 전문. 장이 아니라 Unit 여섯 개가 큰 단위이고, 심화 절은 본문에서 A DEEPER LOOK으로 표시된다. 반도체 쪽은 21장(고체의 구조와 결합)과 §22.5~22.7(물질의 전기 전도 · 전도의 띠 이론 · 반도체). 부록 쪽수는 본문과 별도로 A.1부터 매겨진다.

5부 · 양자역학

Introduction to Quantum Mechanics

5부Griffiths · Schroeter · 3rd ed. · Cambridge University Press, 2018  원본 대조

Part I — Theory (p.2)

1The Wave Function3
  • 1.1The Schrödinger Equation3
  • 1.2The Statistical Interpretation3
  • 1.3Probability8
  • 1Discrete Variables8
  • 2Continuous Variables11
  • 1.4Normalization14
  • 1.5Momentum16
  • 1.6The Uncertainty Principle19
2Time-Independent Schrödinger Equation25
  • 2.1Stationary States25
  • 2.2The Infinite Square Well31
  • 2.3The Harmonic Oscillator39
  • 1Algebraic Method40
  • 2Analytic Method48
  • 2.4The Free Particle55
  • 2.5The Delta-Function Potential61
  • 1Bound States and Scattering States61
  • 2The Delta-Function Well63
  • 2.6The Finite Square Well70
3Formalism91
  • 3.1Hilbert Space91
  • 3.2Observables94
  • 1Hermitian Operators94
  • 2Determinate States96
  • 3.3Eigenfunctions of a Hermitian Operator97
  • 1Discrete Spectra98
  • 2Continuous Spectra99
  • 3.4Generalized Statistical Interpretation102
  • 3.5The Uncertainty Principle105
  • 1Proof of the Generalized Uncertainty Principle105
  • 2The Minimum-Uncertainty Wave Packet108
  • 3The Energy-Time Uncertainty Principle109
  • 3.6Vectors and Operators113
  • 1Bases in Hilbert Space113
  • 2Dirac Notation117
  • 3Changing Bases in Dirac Notation121
4Quantum Mechanics in Three Dimensions131
  • 4.1The Schrödinger Equation131
  • 1Spherical Coordinates132
  • 2The Angular Equation134
  • 3The Radial Equation138
  • 4.2The Hydrogen Atom143
  • 1The Radial Wave Function144
  • 2The Spectrum of Hydrogen155
  • 4.3Angular Momentum157
  • 1Eigenvalues157
  • 2Eigenfunctions162
  • 4.4Spin165
  • 1Spin 1/2167
  • 2Electron in a Magnetic Field172
  • 3Addition of Angular Momenta176
  • 4.5Electromagnetic Interactions181
  • 1Minimal Coupling181
  • 2The Aharonov–Bohm Effect182
5Identical Particles198
  • 5.1Two-Particle Systems198
  • 1Bosons and Fermions201
  • 2Exchange Forces203
  • 3Spin206
  • 4Generalized Symmetrization Principle207
  • 5.2Atoms209
  • 1Helium210
  • 2The Periodic Table213
  • 5.3Solids216
  • 1The Free Electron Gas216
  • 2Band Structure220
6Symmetries & Conservation Laws232
  • 6.1Introduction232
  • 1Transformations in Space232
  • 6.2The Translation Operator235
  • 1How Operators Transform235
  • 2Translational Symmetry238
  • 6.3Conservation Laws242
  • 6.4Parity243
  • 1Parity in One Dimension243
  • 2Parity in Three Dimensions244
  • 3Parity Selection Rules246
  • 6.5Rotational Symmetry248
  • 1Rotations About the z Axis248
  • 2Rotations in Three Dimensions249
  • 6.6Degeneracy252
  • 6.7Rotational Selection Rules255
  • 1Selection Rules for Scalar Operators255
  • 2Selection Rules for Vector Operators258
  • 6.8Translations in Time262
  • 1The Heisenberg Picture264
  • 2Time-Translation Invariance266

Part II — Applications (p.277)

7Time-Independent Perturbation Theory279
  • 7.1Nondegenerate Perturbation Theory279
  • 1General Formulation279
  • 2First-Order Theory280
  • 3Second-Order Energies284
  • 7.2Degenerate Perturbation Theory286
  • 1Two-Fold Degeneracy286
  • 2“Good” States291
  • 3Higher-Order Degeneracy294
  • 7.3The Fine Structure of Hydrogen295
  • 1The Relativistic Correction296
  • 2Spin-Orbit Coupling299
  • 7.4The Zeeman Effect304
  • 1Weak-Field Zeeman Effect305
  • 2Strong-Field Zeeman Effect307
  • 3Intermediate-Field Zeeman Effect309
  • 7.5Hyperfine Splitting in Hydrogen311
8The Variational Principle327
  • 8.1Theory327
  • 8.2The Ground State of Helium332
  • 8.3The Hydrogen Molecule Ion337
  • 8.4The Hydrogen Molecule341
9The WKB Approximation354
  • 9.1The “Classical” Region354
  • 9.2Tunneling358
  • 9.3The Connection Formulas362
10Scattering376
  • 10.1Introduction376
  • 1Classical Scattering Theory376
  • 2Quantum Scattering Theory379
  • 10.2Partial Wave Analysis380
  • 1Formalism380
  • 2Strategy383
  • 10.3Phase Shifts385
  • 10.4The Born Approximation388
  • 1Integral Form of the Schrödinger Equation388
  • 2The First Born Approximation391
  • 3The Born Series395
11Quantum Dynamics402
  • 11.1Two-Level Systems403
  • 1The Perturbed System403
  • 2Time-Dependent Perturbation Theory405
  • 3Sinusoidal Perturbations408
  • 11.2Emission and Absorption of Radiation411
  • 1Electromagnetic Waves411
  • 2Absorption, Stimulated Emission, and Spontaneous Emission412
  • 3Incoherent Perturbations413
  • 11.3Spontaneous Emission416
  • 1Einstein’s A and B Coefficients416
  • 2The Lifetime of an Excited State418
  • 3Selection Rules420
  • 11.4Fermi’s Golden Rule422
  • 11.5The Adiabatic Approximation426
  • 1Adiabatic Processes426
  • 2The Adiabatic Theorem428
12Afterword446
  • 12.1The EPR Paradox447
  • 12.2Bell’s Theorem449
  • 12.3Mixed States and the Density Matrix455
  • 1Pure States455
  • 2Mixed States456
  • 3Subsystems458
  • 12.4The No-Clone Theorem459
  • 12.5Schrödinger’s Cat461
부록 ALinear Algebra464
  • A.1Vectors464
  • A.2Inner Products466
  • A.3Matrices468
  • A.4Changing Bases473
  • A.5Eigenvectors and Eigenvalues475
  • A.6Hermitian Transformations482

Cambridge 인쇄 목차 전문 — 소절과 쪽수까지 옮겼다. 들여쓴 소절의 번호는 셋째 자리만 적었다(§1.3.1 → 1). 3판에서 시간 의존 섭동론이 독립 장에서 빠지고 Ch.11 Quantum Dynamics 안으로 들어갔다 — 페르미 황금률은 §11.4. Ch.6 대칭성·보존 법칙의 병진 연산자가 7.7 블로흐 정리의 전제다. 2판과 장 번호가 다르므로 인용 시 판을 명시할 것.

Modern Quantum Mechanics

5부Sakurai · Napolitano · 3rd ed. · Cambridge, 2020  원본 대조

1Fundamental Concepts
  • 1.1The Stern–Gerlach Experiment
  • 1Description of the Experiment
  • 2Sequential Stern–Gerlach Experiments
  • 3Analogy with Polarization of Light
  • 1.2Kets, Bras, and Operators
  • 1Ket Space
  • 2Bra Space and Inner Products
  • 3Operators
  • 4Multiplication
  • 5The Associative Axiom
  • 1.3Base Kets and Matrix Representations
  • 1Eigenkets of an Observable
  • 2Eigenkets as Base Kets
  • 3Matrix Representations
  • 4Spin ½ Systems
  • 1.4Measurements, Observables, and the Uncertainty Relations
  • 1Measurements
  • 2Spin ½ Systems, Once Again
  • 3Compatible Observables
  • 4Incompatible Observables
  • 5The Uncertainty Relation
  • 1.5Change of Basis
  • 1Transformation Operator
  • 2Transformation Matrix
  • 3Diagonalization
  • 4Unitary Equivalent Observables
  • 1.6Position, Momentum, and Translation
  • 1Continuous Spectra
  • 2Position Eigenkets and Position Measurements
  • 3Translation
  • 4Momentum as a Generator of Translation
  • 5The Canonical Commutation Relations
  • 1.7Wave Functions in Position and Momentum Space
  • 1Position-Space Wave Function
  • 2Momentum Operator in the Position Basis
  • 3Momentum-Space Wave Function
  • 4Gaussian Wave Packets
  • 5Generalization to Three Dimensions
2Quantum Dynamics
  • 2.1Time Evolution and the Schrödinger Equation
  • 1Time-Evolution Operator
  • 2The Schrödinger Equation
  • 3Energy Eigenkets
  • 4Time Dependence of Expectation Values
  • 5Spin Precession
  • 6Neutrino Oscillations
  • 7Correlation Amplitude and the Energy-Time Uncertainty Relation
  • 2.2The Schrödinger Versus the Heisenberg Picture
  • 1Unitary Operators
  • 2State Kets and Observables in the Schrödinger and the Heisenberg Pictures
  • 3The Heisenberg Equation of Motion
  • 4Free Particles: Ehrenfest’s Theorem
  • 5Base Kets and Transition Amplitudes
  • 2.3Simple Harmonic Oscillator
  • 1Energy Eigenkets and Energy Eigenvalues
  • 2Time Development of the Oscillator
  • 2.4Schrödinger’s Wave Equation
  • 1Time-Dependent Wave Equation
  • 2The Time-Independent Wave Equation
  • 3Interpretations of the Wave Function
  • 4The Classical Limit
  • 2.5Elementary Solutions to Schrödinger’s Wave Equation
  • 1Free Particle in Three Dimensions
  • 2The Simple Harmonic Oscillator
  • 3The Linear Potential
  • 4The WKB (Semiclassical) Approximation
  • 2.6Propagators and Feynman Path Integrals
  • 1Propagators in Wave Mechanics
  • 2Propagator as a Transition Amplitude
  • 3Path Integrals as the Sum over Paths
  • 4Feynman’s Formulation
  • 2.7Potentials and Gauge Transformations
  • 1Constant Potentials
  • 2Gravity in Quantum Mechanics
  • 3Gauge Transformations in Electromagnetism
  • 4The Aharonov–Bohm Effect
  • 5Magnetic Monopole
3Theory of Angular Momentum
  • 3.1Rotations and Angular Momentum Commutation Relations
  • 1Finite Versus Infinitesimal Rotations
  • 2Infinitesimal Rotations in Quantum Mechanics
  • 3Finite Rotations in Quantum Mechanics
  • 4Commutation Relations for Angular Momentum
  • 3.2Spin ½ Systems and Finite Rotations
  • 1Rotation Operator for Spin ½
  • 2Spin Precession Revisited
  • 3Neutron Interferometry Experiment to Study 2π Rotations
  • 4Pauli Two-Component Formalism
  • 5Rotations in the Two-Component Formalism
  • 3.3SO(3), SU(2), and Euler Rotations
  • 1Orthogonal Group
  • 2Unitary Unimodular Group
  • 3Euler Rotations
  • 3.4Density Operators and Pure Versus Mixed Ensembles
  • 1Polarized Versus Unpolarized Beams
  • 2Ensemble Averages and Density Operator
  • 3Time Evolution of Ensembles
  • 4Continuum Generalizations
  • 5Quantum Statistical Mechanics
  • 3.5Eigenvalues and Eigenstates of Angular Momentum
  • 1Commutation Relations and the Ladder Operators
  • 2Eigenvalues of J² and Jz
  • 3Matrix Elements of Angular-Momentum Operators
  • 4Representations of the Rotation Operator
  • 3.6Orbital Angular Momentum
  • 1Orbital Angular Momentum as Rotation Generator
  • 2Spherical Harmonics
  • 3Spherical Harmonics as Rotation Matrices
  • 3.7Schrödinger’s Equation for Central Potentials
  • 1The Radial Equation
  • 2The Free Particle and Infinite Spherical Well
  • 3The Isotropic Harmonic Oscillator
  • 4The Coulomb Potential
  • 3.8Addition of Angular Momenta
  • 1Simple Examples of Angular-Momentum Addition
  • 2Formal Theory of Angular-Momentum Addition
  • 3Recursion Relations for the Clebsch–Gordan Coefficients
  • 4Clebsch–Gordan Coefficients and Rotation Matrices
  • 3.9Schwinger’s Oscillator Model of Angular Momentum
  • 1Angular Momentum and Uncoupled Oscillators
  • 2Explicit Formula for Rotation Matrices
  • 3.10Spin Correlation Measurements and Bell’s Inequality
  • 1Correlations in Spin-Singlet States
  • 2Einstein’s Locality Principle and Bell’s Inequality
  • 3Quantum Mechanics and Bell’s Inequality
  • 3.11Tensor Operators
  • 1Vector Operator
  • 2Cartesian Tensors Versus Irreducible Tensors
  • 3Product of Tensors
  • 4Matrix Elements of Tensor Operators; the Wigner–Eckart Theorem
4Symmetry in Quantum Mechanics
  • 4.1Symmetries, Conservation Laws, and Degeneracies
  • 1Symmetries in Classical Physics
  • 2Symmetry in Quantum Mechanics
  • 3Degeneracies
  • 4SO(4) Symmetry in the Coulomb Potential
  • 4.2Discrete Symmetries, Parity, or Space Inversion
  • 1Wave Functions under Parity
  • 2Symmetrical Double-Well Potential
  • 3Parity-Selection Rule
  • 4Parity Nonconservation
  • 4.3Lattice Translation as a Discrete Symmetry
  • 4.4The Time-Reversal Discrete Symmetry
  • 1Digression on Symmetry Operations
  • 2Time-Reversal Operator
  • 3Wave Function
  • 4Time Reversal for a Spin ½ System
  • 5Interactions with Electric and Magnetic Fields; Kramers Degeneracy
5Approximation Methods
  • 5.1Time-Independent Perturbation Theory: Nondegenerate Case
  • 1Statement of the Problem
  • 2The Two-State Problem
  • 3Formal Development of Perturbation Expansion
  • 4Wave Function Renormalization
  • 5Elementary Examples
  • 5.2Time-Independent Perturbation Theory: The Degenerate Case
  • 1Linear Stark Effect
  • 5.3Hydrogenlike Atoms: Fine Structure and the Zeeman Effect
  • 1The Relativistic Correction to the Kinetic Energy
  • 2Spin-Orbit Interaction and Fine Structure
  • 3The Zeeman Effect
  • 4Van der Waals’ Interaction
  • 5.4Variational Methods
  • 5.5Time-Dependent Potentials: The Interaction Picture
  • 1Statement of the Problem
  • 2The Interaction Picture
  • 3Time-Dependent Two-State Problems: Nuclear Magnetic Resonance, Masers, and So Forth
  • 4Spin Magnetic Resonance
  • 5Maser
  • 5.6Hamiltonians with Extreme Time Dependence
  • 1Sudden Approximation
  • 2Adiabatic Approximation
  • 3Berry’s Phase
  • 4Example: Berry’s Phase for Spin ½
  • 5Aharonov–Bohm and Magnetic Monopoles Revisited
  • 5.7Time-Dependent Perturbation Theory
  • 1Dyson Series
  • 2Transition Probability
  • 3Constant Perturbation
  • 4Harmonic Perturbation
  • 5.8Applications to Interactions with the Classical Radiation Field
  • 1Absorption and Stimulated Emission
  • 2Electric Dipole Approximation
  • 3Photoelectric Effect
  • 4Spontaneous Emission
  • 5.9Energy Shift and Decay Width
6Scattering Theory
  • 6.1Scattering as a Time-Dependent Perturbation
  • 1Transition Rates and Cross Sections
  • 2Solving for the T Matrix
  • 3Scattering from the Future to the Past
  • 6.2The Scattering Amplitude
  • 1Wave Packet Description
  • 2The Optical Theorem
  • 6.3The Born Approximation
  • 1The Higher-Order Born Approximation
  • 6.4Phase Shifts and Partial Waves
  • 1Free-Particle States
  • 2Partial-Wave Expansion
  • 3Unitarity and Phase Shifts
  • 4Determination of Phase Shifts
  • 5Hard-Sphere Scattering
  • 6.5Eikonal Approximation
  • 1Partial Waves and the Eikonal Approximation
  • 6.6Low-Energy Scattering and Bound States
  • 1Rectangular Well or Barrier
  • 2Zero-Energy Scattering and Bound States
  • 3Bound States as Poles of Sl(k)
  • 6.7Resonance Scattering
  • 6.8Symmetry Considerations in Scattering
  • 6.9Inelastic Electron-Atom Scattering
  • 1Nuclear Form Factor
7Identical Particles
  • 7.1Permutation Symmetry
  • 7.2Symmetrization Postulate
  • 7.3Two-Electron System
  • 7.4The Helium Atom
  • 7.5Multiparticle States
  • 7.6Density Functional Theory
  • 1The Energy Functional for a Single Particle
  • 2The Hohenberg–Kohn Theorem
  • 3The Kohn–Sham Equations
  • 4Models of the Exchange-Correlation Energy
  • 5Application to the Helium Atom
  • 7.7Quantum Fields
  • 1Second Quantization
  • 2Dynamical Variables in Second Quantization
  • 3Example: The Degenerate Electron Gas
  • 7.8Quantization of the Electromagnetic Field
  • 1Maxwell’s Equations in Free Space
  • 2Photons and Energy Quantization
  • 3The Casimir Effect
  • 4Concluding Remarks
8Relativistic Quantum Mechanics
  • 8.1Paths to Relativistic Quantum Mechanics
  • 1Natural Units
  • 2The Energy of a Free Relativistic Particle
  • 3The Klein–Gordon Equation
  • 4An Interpretation of Negative Energies
  • 5The Klein–Gordon Field
  • 6Summary: The Klein–Gordon Equation and the Scalar Field
  • 8.2The Dirac Equation
  • 1The Conserved Current
  • 2Free-Particle Solutions
  • 3Interpretation of Negative Energies
  • 4Electromagnetic Interactions
  • 8.3Symmetries of the Dirac Equation
  • 1Angular Momentum
  • 2Parity
  • 3Charge Conjugation
  • 4Time Reversal
  • 5CPT
  • 8.4Solving with a Central Potential
  • 1The One-Electron Atom
  • 8.5Relativistic Quantum Field Theory
부록 A~FElectromagnetic Units · Elementary Solutions to Schrödinger’s Wave Equation · Hamiltonian for a Charge in an Electromagnetic Field · Proof of the Angular-Momentum Rule (3.358) · Finding Clebsch–Gordan Coefficients · Notes on Complex Variables

Cambridge 인쇄 목차 전문. 이 목차에는 쪽수가 실려 있지 않아 쪽수 칸을 비웠다. 들여쓴 소절의 번호는 셋째 자리만 적었다(§1.4.5 → 5). 대학원 수준이고 디랙 표기와 대칭성 취급이 Griffiths보다 형식적이다. 반도체와 닿는 곳은 §4.3 격자 병진 대칭(블로흐 정리의 군론적 뿌리)과 §7.6~7.7(밀도범함수론 · 양자장과 축퇴 전자 기체).

6부 · 통계역학

Thermal Physics

6부Charles Kittel · Herbert Kroemer · 2nd ed. · W. H. Freeman, 1980  원본 대조

0Introduction1
1States of a Model System5
  • ·BINARY MODEL SYSTEMS10
  • ·Enumeration of States and the Multiplicity Function14
  • ·Binary Alloy System16
  • ·Sharpness of the Multiplicity Function18
  • ·AVERAGE VALUES22
  • ·Energy of the Binary Magnetic System23
  • ·Example: Multiplicity Function for Harmonic Oscillators24
2Entropy and Temperature27
  • ·FUNDAMENTAL ASSUMPTION29
  • ·PROBABILITY30
  • ·Example: Construction of an Ensemble32
  • ·Most Probable Configuration33
  • ·Example: Two Spin Systems in Thermal Contact37
  • ·THERMAL EQUILIBRIUM39
  • ·TEMPERATURE41
  • ·ENTROPY42
  • ·Example: Entropy Increase on Heat Flow44
  • ·Law of Increase of Entropy45
  • ·LAWS OF THERMODYNAMICS48
  • ·Entropy as a Logarithm50
  • ·Example: Perpetual Motion of the Second Kind50
3Boltzmann Distribution and Helmholtz Free Energy55
  • ·BOLTZMANN FACTOR58
  • ·Partition Function61
  • ·Example: Energy and Heat Capacity of a Two State System62
  • ·Definition: Reversible Process64
  • ·PRESSURE64
  • ·Thermodynamic Identity67
  • ·HELMHOLTZ FREE ENERGY68
  • ·Example: Minimum Property of the Free Energy of a Paramagnetic System69
  • ·Differential Relations70
  • ·Maxwell Relation71
  • ·Calculation of F from Z71
  • ·IDEAL GAS: A FIRST LOOK72
  • ·One Atom in a Box72
  • ·Example: N Atoms in a Box74
  • ·Energy76
  • ·Example: Equipartition of Energy77
  • ·Example: Entropy of Mixing78
4Thermal Radiation and Planck Distribution87
  • ·PLANCK DISTRIBUTION FUNCTION89
  • ·PLANCK LAW AND STEFAN-BOLTZMANN LAW91
  • ·Emission and Absorption: Kirchhoff Law96
  • ·Estimation of Surface Temperature97
  • ·Example: Cosmic Black Body Background Radiation98
  • ·ELECTRICAL NOISE98
  • ·PHONONS IN SOLIDS: DEBYE THEORY102
  • ·Number of Phonon Modes104
5Chemical Potential and Gibbs Distribution117
  • ·DEFINITION OF CHEMICAL POTENTIAL119
  • ·Example: Chemical Potential of the Ideal Gas120
  • ·Internal and Total Chemical Potential122
  • ·Example: Variation of Barometric Pressure with Altitude125
  • ·Example: Chemical Potential of Mobile Magnetic Particles in a Magnetic Field127
  • ·Example: Batteries129
  • ·Chemical Potential and Entropy131
  • ·Thermodynamic Identity133
  • ·GIBBS FACTOR AND GIBBS SUM134
  • ·Number of Particles139
  • ·Energy140
  • ·Example: Occupancy Zero or One140
  • ·Example: Impurity Atom Ionization in a Semiconductor143
6Ideal Gas151
  • ·FERMI-DIRAC DISTRIBUTION FUNCTION153
  • ·BOSE-EINSTEIN DISTRIBUTION FUNCTION157
  • ·CLASSICAL LIMIT160
  • ·Chemical Potential161
  • ·Free Energy163
  • ·Pressure164
  • ·Energy164
  • ·Entropy165
  • ·Heat Capacity165
  • ·Example: Experimental Tests of the Sackur-Tetrode Equation167
  • ·Chemical Potential of Ideal Gas with Internal Degrees of Freedom169
  • ·Example: Spin Entropy in Zero Magnetic Field170
  • ·Reversible Isothermal Expansion171
  • ·Reversible Expansion at Constant Entropy173
  • ·Sudden Expansion into a Vacuum175
7Fermi and Bose Gases181
  • ·FERMI GAS183
  • ·Ground State of Fermi Gas in Three Dimensions185
  • ·Density of States186
  • ·Heat Capacity of Electron Gas189
  • ·Fermi Gas in Metals194
  • ·White Dwarf Stars196
  • ·Nuclear Matter198
  • ·BOSON GAS AND EINSTEIN CONDENSATION199
  • ·Chemical Potential Near Absolute Zero199
  • ·Example: Spacing of Lowest and Second Lowest Orbitals of Free Atoms201
  • ·Orbital Occupancy Versus Temperature202
  • ·Einstein Condensation Temperature205
  • ·Liquid ⁴He207
  • ·Phase Relations of Helium210
  • ·Quasiparticles and Superfluidity, ⁴He212
  • ·Superfluid Phases of ³He217
8Heat and Work225
  • ·ENERGY AND ENTROPY TRANSFER: DEFINITION OF HEAT AND WORK227
  • ·HEAT ENGINES: CONVERSION OF HEAT INTO WORK228
  • ·Carnot Inequality228
  • ·Sources of Irreversibility232
  • ·Refrigerators233
  • ·Air Conditioners and Heat Pumps235
  • ·Carnot Cycle236
  • ·Example: Carnot Cycle for an Ideal Gas237
  • ·Energy Conversion and the Second Law of Thermodynamics240
  • ·Path Dependence of Heat and Work240
  • ·Irreversible Work242
  • ·Example: Sudden Expansion of an Ideal Gas243
  • ·HEAT AND WORK AT CONSTANT TEMPERATURE OR CONSTANT PRESSURE245
  • ·Isothermal Work245
  • ·Isobaric Heat and Work245
  • ·Example: Electrolysis and Fuel Cells247
  • ·Chemical Work250
  • ·Example: Chemical Work for an Ideal Gas251
  • ·Magnetic Work and Superconductors252
9Gibbs Free Energy and Chemical Reactions261
  • ·GIBBS FREE ENERGY262
  • ·Example: Comparison of G with F265
  • ·EQUILIBRIUM IN REACTIONS266
  • ·Equilibrium for Ideal Gases267
  • ·Example: Equilibrium of Atomic and Molecular Hydrogen269
  • ·Example: pH and the Ionization of Water269
  • ·Example: Kinetic Model of Mass Action270
10Phase Transformations275
  • ·VAPOR PRESSURE EQUATION276
  • ·Derivation of the Coexistence Curve, p Versus τ278
  • ·Triple Point284
  • ·Latent Heat and Enthalpy284
  • ·Example: Model System for Gas-Solid Equilibrium285
  • ·VAN DER WAALS EQUATION OF STATE287
  • ·Mean Field Method288
  • ·Critical Points for the van der Waals Gas289
  • ·Gibbs Free Energy of the van der Waals Gas291
  • ·Nucleation294
  • ·Ferromagnetism295
  • ·LANDAU THEORY OF PHASE TRANSITIONS298
  • ·Example: Ferromagnets302
  • ·First Order Transitions302
11Binary Mixtures309
  • ·SOLUBILITY GAPS310
  • ·ENERGY AND ENTROPY OF MIXING314
  • ·Example: Binary Alloy with Nearest-Neighbor Interactions318
  • ·Example: Mixture of Two Solids with Different Crystal Structures319
  • ·Example: Liquid ³He–⁴He Mixtures at Low Temperatures320
  • ·Phase Diagrams for Simple Solubility Gaps321
  • ·PHASE EQUILIBRIA BETWEEN LIQUID AND SOLID MIXTURES322
  • ·Advanced Treatment: Eutectics325
12Cryogenics333
  • ·COOLING BY EXTERNAL WORK IN AN EXPANSION ENGINE334
  • ·Gas Liquefaction by the Joule-Thomson Effect337
  • ·Example: Joule-Thomson Effect for van der Waals Gas338
  • ·Linde Cycle339
  • ·Evaporation Cooling: Pumped Helium, to 0.3 K341
  • ·Helium Dilution Refrigerator: Millidegrees342
  • ·ISENTROPIC DEMAGNETIZATION: QUEST FOR ABSOLUTE ZERO346
  • ·Nuclear Demagnetization348
13Semiconductor Statistics353
  • ·ENERGY BANDS; FERMI LEVEL; ELECTRONS AND HOLES355
  • ·Classical Regime358
  • ·Law of Mass Action362
  • ·Intrinsic Fermi Level362
  • ·n-TYPE AND p-TYPE SEMICONDUCTORS363
  • ·Donors and Acceptors363
  • ·Fermi Level in Extrinsic Semiconductors364
  • ·Degenerate Semiconductors365
  • ·Impurity Levels368
  • ·Occupation of Donor Levels369
  • ·Example: Semi-Insulating Gallium Arsenide372
  • ·p–n JUNCTIONS373
  • ·Reverse-Biased Abrupt p–n Junction377
  • ·NONEQUILIBRIUM SEMICONDUCTORS379
  • ·Quasi-Fermi Levels379
  • ·Current Flow: Drift and Diffusion379
  • ·Example: Injection Laser381
  • ·Example: Carrier Recombination Through an Impurity Level383
14Kinetic Theory389
  • ·KINETIC THEORY OF THE IDEAL GAS LAW391
  • ·Maxwell Distribution of Velocities392
  • ·Experimental Verification394
  • ·Collision Cross Sections and Mean Free Paths395
  • ·TRANSPORT PROCESSES397
  • ·Particle Diffusion399
  • ·Thermal Conductivity401
  • ·Viscosity402
  • ·Generalized Forces404
  • ·Einstein Relation406
  • ·KINETICS OF DETAILED BALANCE407
  • ·ADVANCED TREATMENT: BOLTZMANN TRANSPORT EQUATION408
  • ·Particle Diffusion409
  • ·Classical Distribution410
  • ·Fermi-Dirac Distribution411
  • ·Electrical Conductivity413
  • ·LAWS OF RAREFIED GASES413
  • ·Flow of Molecules Through a Hole414
  • ·Example: Flow Through a Long Tube416
  • ·Speed of a Pump417
15Propagation423
  • ·HEAT CONDUCTION EQUATION424
  • ·Dispersion Relation, ω Versus k425
  • ·Penetration of Temperature Oscillation426
  • ·Development of a Pulse427
  • ·Diffusion with a Fixed Boundary Condition at x = 0429
  • ·Time-Independent Distribution429
  • ·PROPAGATION OF SOUND WAVES IN GASES430
  • ·Thermal Relaxation432
  • ·Example: Heat Transfer in a Sound Wave434
부록 ASome Integrals Containing Exponentials439
부록 BTemperature Scales445
부록 CPoisson Distribution453
부록 DPressure459
부록 ENegative Temperature460

인쇄 목차와 각 장 첫 쪽의 절 목록을 대조해 전문을 옮겼다. 절에 번호가 없는 책이라 번호 칸은 가운뎃점으로 두었고, 들여쓴 항목이 바로 위 대문자 절의 하위다. 장 끝의 SUMMARY·PROBLEMS는 옮기지 않았다. 13장이 통째로 반도체 통계(pp. 353–388) — 열물리 교재로는 이례적이며 공저자 Kroemer(헤테로구조 노벨상)의 흔적이다. 통계역학을 먼저, 열역학을 나중에 배치하는 구성이라 복사(4장)가 화학퍼텐셜보다 앞에 온다.

Fundamentals of Statistical and Thermal Physics

6부F. Reif · McGraw-Hill, 1965 · Waveland Press 재간행  원본 대조

1Introduction to statistical methods1
  • 1.1Elementary statistical concepts and examples4
  • 1.2The simple random walk problem in one dimension7
  • 1.3General discussion of mean values11
  • 1.4Calculation of mean values for the random walk problem13
  • 1.5Probability distribution for large N17
  • 1.6Gaussian probability distributions21
  • 1.7Probability distributions involving several variables25
  • 1.8Comments on continuous probability distributions27
  • 1.9General calculation of mean values for the random walk32
  • 1.10✱ Calculation of the probability distribution35
  • 1.11✱ Probability distribution for large N37
2Statistical description of systems of particles47
  • 2.1Specification of the state of a system48
  • 2.2Statistical ensemble52
  • 2.3Basic postulates53
  • 2.4Probability calculations60
  • 2.5Behavior of the density of states61
  • 2.6Thermal interaction66
  • 2.7Mechanical interaction68
  • 2.8General interaction73
  • 2.9Quasi-static processes74
  • 2.10Quasi-static work done by pressure76
  • 2.11Exact and "inexact" differentials78
3Statistical thermodynamics87
  • 3.1Equilibrium conditions and constraints87
  • 3.2Reversible and irreversible processes91
  • 3.3Distribution of energy between systems in equilibrium94
  • 3.4The approach to thermal equilibrium100
  • 3.5Temperature102
  • 3.6Heat reservoirs106
  • 3.7Sharpness of the probability distribution108
  • 3.8Dependence of the density of states on the external parameters112
  • 3.9Equilibrium between interacting systems114
  • 3.10Properties of the entropy117
  • 3.11Thermodynamic laws and basic statistical relations122
  • 3.12Statistical calculation of thermodynamic quantities124
4Macroscopic parameters and their measurement128
  • 4.1Work and internal energy128
  • 4.2Heat131
  • 4.3Absolute temperature133
  • 4.4Heat capacity and specific heat139
  • 4.5Entropy142
  • 4.6Consequences of the absolute definition of entropy145
  • 4.7Extensive and intensive parameters148
5Simple applications of macroscopic thermodynamics152
  • 5.1Equation of state and internal energy153
  • 5.2Specific heats156
  • 5.3Adiabatic expansion or compression158
  • 5.4Entropy160
  • 5.5Derivation of general relations161
  • 5.6Summary of Maxwell relations and thermodynamic functions164
  • 5.7Specific heats166
  • 5.8Entropy and internal energy171
  • 5.9Free expansion of a gas175
  • 5.10Throttling (or Joule-Thomson) process178
  • 5.11Heat engines184
  • 5.12Refrigerators190
6Basic methods and results of statistical mechanics201
  • 6.1Isolated system201
  • 6.2System in contact with a heat reservoir202
  • 6.3Simple applications of the canonical distribution206
  • 6.4System with specified mean energy211
  • 6.5Calculation of mean values in a canonical ensemble212
  • 6.6Connection with thermodynamics214
  • 6.7Ensembles used as approximations219
  • 6.8✱ Mathematical approximation methods221
  • 6.9✱ Grand canonical and other ensembles225
  • 6.10✱ Alternative derivation of the canonical distribution229
7Simple applications of statistical mechanics237
  • 7.1Partition functions and their properties237
  • 7.2Calculation of thermodynamic quantities239
  • 7.3Gibbs paradox243
  • 7.4Validity of the classical approximation246
  • 7.5Proof of the theorem248
  • 7.6Simple applications250
  • 7.7Specific heats of solids253
  • 7.8General calculation of magnetization257
  • 7.9Maxwell velocity distribution262
  • 7.10Related velocity distributions and mean values265
  • 7.11Number of molecules striking a surface269
  • 7.12Effusion273
  • 7.13Pressure and momentum transfer278
8Equilibrium between phases or chemical species288
  • 8.1Isolated system289
  • 8.2System in contact with a reservoir at constant temperature291
  • 8.3System in contact with a reservoir at constant temperature and pressure294
  • 8.4Stability conditions for a homogeneous substance296
  • 8.5Equilibrium conditions and the Clausius-Clapeyron equation301
  • 8.6Phase transformations and the equation of state306
  • 8.7General relations for a system with several components312
  • 8.8Alternative discussion of equilibrium between phases315
  • 8.9General conditions for chemical equilibrium317
  • 8.10Chemical equilibrium between ideal gases319
9Quantum statistics of ideal gases331
  • 9.1Identical particles and symmetry requirements331
  • 9.2Formulation of the statistical problem335
  • 9.3The quantum distribution functions338
  • 9.4Maxwell-Boltzmann statistics343
  • 9.5Photon statistics345
  • 9.6Bose-Einstein statistics346
  • 9.7Fermi-Dirac statistics350
  • 9.8Quantum statistics in the classical limit351
  • 9.9Quantum states of a single particle353
  • 9.10Evaluation of the partition function360
  • 9.11Physical implications of the quantum-mechanical enumeration of states363
  • 9.12✱ Partition functions of polyatomic molecules367
  • 9.13Electromagnetic radiation in thermal equilibrium inside an enclosure373
  • 9.14Nature of the radiation inside an arbitrary enclosure378
  • 9.15Radiation emitted by a body at temperature T381
  • 9.16Consequences of the Fermi-Dirac distribution388
  • 9.17✱ Quantitative calculation of the electronic specific heat393
10Systems of interacting particles404
  • 10.1Lattice vibrations and normal modes407
  • 10.2Debye approximation411
  • 10.3Calculation of the partition function for low densities418
  • 10.4Equation of state and virial coefficients422
  • 10.5Alternative derivation of the van der Waals equation426
  • 10.6Interaction between spins428
  • 10.7Weiss molecular-field approximation430
11Magnetism and low temperatures438
  • 11.1Magnetic work439
  • 11.2Magnetic cooling445
  • 11.3Measurement of very low absolute temperatures452
  • 11.4Superconductivity455
12Elementary kinetic theory of transport processes461
  • 12.1Collision time463
  • 12.2Collision time and scattering cross section467
  • 12.3Viscosity471
  • 12.4Thermal conductivity478
  • 12.5Self-diffusion483
  • 12.6Electrical Conductivity488
13Transport theory using the relaxation time approximation494
  • 13.1Transport processes and distribution functions494
  • 13.2Boltzmann equation in the absence of collisions498
  • 13.3Path integral formulation502
  • 13.4Example: calculation of electrical conductivity504
  • 13.5Example: calculation of viscosity507
  • 13.6Boltzmann differential equation formulation508
  • 13.7Equivalence of the two formulations510
  • 13.8Examples of the Boltzmann equation method511
14Near-exact formulation of transport theory516
  • 14.1Description of two-particle collisions516
  • 14.2Scattering cross sections and symmetry properties520
  • 14.3Derivation of the Boltzmann equation523
  • 14.4Equation of change for mean values525
  • 14.5Conservation equations and hydrodynamics529
  • 14.6Example: simple discussion of electrical conductivity531
  • 14.7Approximation methods for solving the Boltzmann equation534
  • 14.8Example: calculation of the coefficient of viscosity539
15Irreversible processes and fluctuations548
  • 15.1Isolated system548
  • 15.2System in contact with a heat reservoir551
  • 15.3Magnetic resonance553
  • 15.4Dynamic nuclear polarization; Overhauser effect556
  • 15.5Langevin equation560
  • 15.6Calculation of the mean-square displacement565
  • 15.7Relation between dissipation and the fluctuating force567
  • 15.8Correlation functions and the friction constant570
  • 15.9✱ Calculation of the mean-square velocity increment574
  • 15.10✱ Velocity correlation function and mean-square displacement575
  • 15.11✱ The Fokker-Planck equation577
  • 15.12✱ Solution of the Fokker-Planck equation580
  • 15.13Fourier analysis582
  • 15.14Ensemble and time averages583
  • 15.15Wiener-Khintchine relations585
  • 15.16Nyquist's theorem587
  • 15.17Nyquist's theorem and equilibrium conditions589
  • 15.18Fluctuations and Onsager relations594
부록Mathematical appendices A.1~A.13605
  • A.1Review of elementary sums605
  • A.2Evaluation of the integral ∫−∞ e−x² dx606
  • A.3Evaluation of the integral ∫0 e−xxn dx607
  • A.4Evaluation of integrals of the form ∫0 e−αx²xn dx608
  • A.5The error function609
  • A.6Stirling’s formula610
  • A.7The Dirac delta function614
  • A.8The inequality ln x ≤ x − 1618
  • A.9Relations between partial derivatives of several variables619
  • A.10The method of Lagrange multipliers620
  • A.11Evaluation of the integral ∫0 (ex − 1)−1x³ dx622
  • A.12The H theorem and the approach to equilibrium624
  • A.13Liouville’s theorem in classical mechanics626

Waveland Press 재간행본의 인쇄 목차를 절·쪽수까지 그대로 옮겼다. ✱ 표시는 저자가 붙인 것으로, 처음 읽을 때 건너뛰어도 되는 절이다. 절 번호를 가운뎃점(1·1)으로 찍고 절 제목이 문장형 대소문자라 인용할 때 원문 표기를 그대로 쓸 것. 이전에 8장을 “…and Chemical Species”, 12장을 “Elementary Theory of Transport Processes”로 적어 두었으나 인쇄 목차는 각각 or chemical species, Elementary kinetic theory of…다. 12~14장의 수송 이론이 7.11(볼츠만 방정식)의 보조 참고다. 부록 뒤로 Numerical constants(629) · Bibliography(631) · Answers to selected problems(637) · Index(643)가 온다.

II

물질과 재료

7부 · 고체물리

Introduction to Solid State Physics

7부Charles Kittel · 8th ed. · Wiley, 2005 · ISBN 0-471-41526-X  원본 대조

1Crystal Structure1
  • ·Periodic Array of Atoms3
  • ·Lattice Translation Vectors4
  • ·Basis and the Crystal Structure5
  • ·Primitive Lattice Cell6
  • ·Fundamental Types of Lattices6
  • ·Two-Dimensional Lattice Types8
  • ·Three-Dimensional Lattice Types9
  • ·Index Systems for Crystal Planes11
  • ·Simple Crystal Structures (NaCl · CsCl · HCP · Diamond · Cubic ZnS)13
  • ·Direct Imaging of Atomic Structure18
  • ·Nonideal Crystal Structures18
  • ·Random Stacking and Polytypism19
  • ·Crystal Structure Data19
2Wave Diffraction and the Reciprocal Lattice23
  • ·Diffraction of Waves by Crystals; Bragg Law25
  • ·Scattered Wave Amplitude26
  • ·Fourier Analysis27
  • ·Reciprocal Lattice Vectors29
  • ·Diffraction Conditions30
  • ·Laue Equations32
  • ·Brillouin Zones33
  • ·Reciprocal Lattice to sc / bcc / fcc Lattice34
  • ·Fourier Analysis of the Basis39
  • ·Structure Factor of the bcc / fcc Lattice40
  • ·Atomic Form Factor41
3Crystal Binding and Elastic Constants47
  • ·Crystals of Inert Gases49
  • ·Van der Waals–London Interaction53
  • ·Repulsive Interaction56
  • ·Equilibrium Lattice Constants58
  • ·Cohesive Energy59
  • ·Ionic Crystals60
  • ·Electrostatic or Madelung Energy60
  • ·Evaluation of the Madelung Constant64
  • ·Covalent Crystals67
  • ·Metals69
  • ·Hydrogen Bonds70
  • ·Atomic Radii · Ionic Crystal Radii70
  • ·Analysis of Elastic Strains · Dilation · Stress Components73
  • ·Elastic Compliance and Stiffness Constants77
  • ·Elastic Energy Density77
  • ·Elastic Stiffness Constants of Cubic Crystals78
  • ·Bulk Modulus and Compressibility80
  • ·Elastic Waves in Cubic Crystals ([100] · [110])80
4Phonons I: Crystal Vibrations89
  • ·Vibrations of Crystals with Monatomic Basis91
  • ·First Brillouin Zone93
  • ·Group Velocity · Long Wavelength Limit94
  • ·Derivation of Force Constants from Experiment94
  • ·Two Atoms per Primitive Basis95
  • ·Quantization of Elastic Waves99
  • ·Phonon Momentum100
  • ·Inelastic Scattering by Phonons100
5Phonons II: Thermal Properties105
  • ·Phonon Heat Capacity · Planck Distribution107
  • ·Normal Mode Enumeration108
  • ·Density of States in One / Three Dimensions108
  • ·Debye Model for Density of States · Debye T³ Law112
  • ·Einstein Model of the Density of States114
  • ·General Result for D(ω)117
  • ·Anharmonic Crystal Interactions119
  • ·Thermal Expansion120
  • ·Thermal Conductivity · Thermal Resistivity of Phonon Gas121
  • ·Umklapp Processes125
  • ·Imperfections126
6Free Electron Fermi Gas131
  • ·Energy Levels in One Dimension134
  • ·Effect of Temperature on the Fermi-Dirac Distribution136
  • ·Free Electron Gas in Three Dimensions137
  • ·Heat Capacity of the Electron Gas141
  • ·Experimental Heat Capacity of Metals145
  • ·Heavy Fermions147
  • ·Electrical Conductivity and Ohm's Law147
  • ·Experimental Electrical Resistivity of Metals148
  • ·Umklapp Scattering151
  • ·Motion in Magnetic Fields · Hall Effect152
  • ·Thermal Conductivity of Metals156
7Energy Bands161
  • ·Nearly Free Electron Model164
  • ·Origin of the Energy Gap · Magnitude of the Energy Gap165
  • ·Bloch Functions167
  • ·Kronig-Penney Model168
  • ·Wave Equation of Electron in a Periodic Potential169
  • ·Restatement of the Bloch Theorem173
  • ·Crystal Momentum of an Electron173
  • ·Solution of the Central Equation174
  • ·Kronig-Penney Model in Reciprocal Space174
  • ·Empty Lattice Approximation176
  • ·Approximate Solution Near a Zone Boundary177
  • ·Number of Orbitals in a Band180
  • ·Metals and Insulators181
8Semiconductor Crystals185
  • ·Band Gap187
  • ·Equations of Motion191
  • ·Physical Derivation of ħk̇ = F193
  • ·Holes194
  • ·Effective Mass197
  • ·Physical Interpretation of the Effective Mass198
  • ·Effective Masses in Semiconductors200
  • ·Silicon and Germanium202
  • ·Intrinsic Carrier Concentration205
  • ·Intrinsic Mobility208
  • ·Impurity Conductivity · Donor States · Acceptor States209
  • ·Thermal Ionization of Donors and Acceptors213
  • ·Thermoelectric Effects214
  • ·Semimetals215
  • ·Superlattices · Bloch Oscillator · Zener Tunneling216
9Fermi Surfaces and Metals221
  • ·Reduced Zone Scheme · Periodic Zone Scheme223
  • ·Construction of Fermi Surfaces226
  • ·Nearly Free Electrons228
  • ·Electron Orbits, Hole Orbits, and Open Orbits230
  • ·Calculation of Energy Bands232
  • ·Tight Binding Method of Energy Bands232
  • ·Wigner-Seitz Method236
  • ·Cohesive Energy237
  • ·Pseudopotential Methods239
  • ·Experimental Methods in Fermi Surface Studies242
  • ·Quantization of Orbits in a Magnetic Field242
  • ·De Haas-van Alphen Effect · Extremal Orbits244
  • ·Fermi Surface of Copper249
  • ·Magnetic Breakdown251
10Superconductivity257
  • ·Experimental Survey · Occurrence of Superconductivity259
  • ·Meissner Effect262
  • ·Heat Capacity · Energy Gap264
  • ·Isotope Effect269
  • ·Thermodynamics of the Superconducting Transition270
  • ·London Equation · Coherence Length273
  • ·BCS Theory · BCS Ground State277
  • ·Flux Quantization in a Superconducting Ring279
  • ·Type II Superconductors · Vortex State283
  • ·Single Particle Tunneling287
  • ·Josephson Superconductor Tunneling (DC · AC)289
  • ·Macroscopic Quantum Interference292
  • ·High-Temperature Superconductors293
11Diamagnetism and Paramagnetism297
  • ·Langevin Diamagnetism Equation299
  • ·Quantum Theory of Diamagnetism301
  • ·Paramagnetism · Quantum Theory of Paramagnetism302
  • ·Rare Earth Ions · Hund Rules305
  • ·Iron Group Ions · Crystal Field Splitting307
  • ·Quenching of the Orbital Angular Momentum308
  • ·Van Vleck Temperature-Independent Paramagnetism311
  • ·Cooling by Isentropic Demagnetization312
  • ·Paramagnetic Susceptibility of Conduction Electrons315
12Ferromagnetism and Antiferromagnetism321
  • ·Ferromagnetic Order · Curie Point and the Exchange Integral323
  • ·Temperature Dependence of the Saturation Magnetization326
  • ·Magnons · Quantization of Spin Waves330
  • ·Neutron Magnetic Scattering335
  • ·Ferrimagnetic Order · Iron Garnets336
  • ·Antiferromagnetic Order · Antiferromagnetic Magnons340
  • ·Ferromagnetic Domains · Anisotropy Energy346
  • ·Transition Region between Domains · Origin of Domains349
  • ·Coercivity and Hysteresis352
  • ·Single Domain Particles354
  • ·Magnetic Force Microscopy355
13Magnetic Resonance361
  • ·Nuclear Magnetic Resonance · Equations of Motion363
  • ·Line Width · Motional Narrowing370
  • ·Hyperfine Splitting373
  • ·Paramagnetic Point Defects · F Centers in Alkali Halides375
  • ·Donor Atoms in Silicon376
  • ·Knight Shift377
  • ·Nuclear Quadrupole Resonance379
  • ·Ferromagnetic Resonance · Spin Wave Resonance379
  • ·Antiferromagnetic Resonance383
  • ·Electron Paramagnetic Resonance386
  • ·Principle of Maser Action · Lasers386
14Plasmons, Polaritons, and Polarons393
  • ·Dielectric Function of the Electron Gas · Definitions of the Dielectric Function395
  • ·Plasma Optics · Dispersion Relation for Electromagnetic Waves396
  • ·Transverse Optical Modes in a Plasma398
  • ·Transparency of Metals in the Ultraviolet398
  • ·Longitudinal Plasma Oscillations398
  • ·Plasmons401
  • ·Electrostatic Screening403
  • ·Screened Coulomb Potential406
  • ·Pseudopotential Component U(0) · Mott Metal-Insulator Transition407
  • ·Screening and Phonons in Metals409
  • ·Polaritons410
  • ·LST Relation414
  • ·Electron-Electron Interaction · Fermi Liquid · Electron-Electron Collisions417
  • ·Electron-Phonon Interaction: Polarons420
  • ·Peierls Instability of Linear Metals422
15Optical Processes and Excitons427
  • ·Optical Reflectance429
  • ·Kramers-Kronig Relations430
  • ·Mathematical Note432
  • ·Example: Conductivity of Collisionless Electron Gas433
  • ·Electronic Interband Transitions434
  • ·Excitons435
  • ·Frenkel Excitons437
  • ·Alkali Halides · Molecular Crystals440
  • ·Weakly Bound (Mott-Wannier) Excitons441
  • ·Exciton Condensation into Electron-Hole Drops (EHD)441
  • ·Raman Effects in Crystals444
  • ·Electron Spectroscopy with X-Rays447
  • ·Energy Loss of Fast Particles in a Solid448
16Dielectrics and Ferroelectrics453
  • ·Maxwell Equations · Polarization455
  • ·Macroscopic Electric Field456
  • ·Depolarization Field, E₁458
  • ·Local Electric Field at an Atom460
  • ·Lorentz Field, E₂ · Field of Dipoles Inside Cavity, E₃462
  • ·Dielectric Constant and Polarizability463
  • ·Electronic Polarizability464
  • ·Classical Theory of Electronic Polarizability466
  • ·Structural Phase Transitions467
  • ·Ferroelectric Crystals467
  • ·Classification of Ferroelectric Crystals469
  • ·Displacive Transitions471
  • ·Soft Optical Phonons473
  • ·Landau Theory of the Phase Transition474
  • ·Second-Order Transition475
  • ·First-Order Transition477
  • ·Antiferroelectricity · Ferroelectric Domains479
  • ·Piezoelectricity481
17Surface and Interface Physics487
  • ·Reconstruction and Relaxation489
  • ·Surface Crystallography490
  • ·Reflection High-Energy Electron Diffraction493
  • ·Surface Electronic Structure · Work Function494
  • ·Thermionic Emission · Surface States495
  • ·Tangential Surface Transport497
  • ·Magnetoresistance in a Two-Dimensional Channel498
  • ·Integral Quantized Hall Effect (IQHE)499
  • ·IQHE in Real Systems500
  • ·Fractional Quantized Hall Effect (FQHE)503
  • ·p-n Junctions503
  • ·Rectification504
  • ·Solar Cells and Photovoltaic Detectors · Schottky Barrier506
  • ·Heterostructures507
  • ·n-N Heterojunction508
  • ·Semiconductor Lasers510
  • ·Light-Emitting Diodes511
18Nanostructures515
  • ·Imaging Techniques for Nanostructures519
  • ·Electron / Optical Microscopy520
  • ·Scanning Tunneling Microscopy523
  • ·Atomic Force Microscopy526
  • ·Electronic Structure of 1D Systems · One-Dimensional Subbands528
  • ·Spectroscopy of Van Hove Singularities529
  • ·1D Metals — Coulomb Interactions and Lattice Couplings531
  • ·Electrical Transport in 1D533
  • ·Conductance Quantization and the Landauer Formula533
  • ·Two Barriers in Series — Resonant Tunneling536
  • ·Incoherent Addition and Ohm's Law538
  • ·Localization539
  • ·Voltage Probes and the Büttiker-Landauer Formalism540
  • ·Electronic Structure of 0D Systems · Quantized Energy Levels545
  • ·Semiconductor Nanocrystals · Metallic Dots545
  • ·Discrete Charge States549
  • ·Electrical Transport in 0D · Coulomb Oscillations551
  • ·Spin, Mott Insulators, and the Kondo Effect554
  • ·Cooper Pairing in Superconducting Dots556
  • ·Vibrational and Thermal Properties of Nanostructures557
19Noncrystalline Solids565
  • ·Diffraction Pattern · Monatomic Amorphous Materials567
  • ·Radial Distribution Function569
  • ·Structure of Vitreous Silica SiO₂570
  • ·Glasses · Viscosity and the Hopping Rate573
  • ·Amorphous Ferromagnets575
  • ·Amorphous Semiconductors577
  • ·Low Energy Excitations in Amorphous Solids578
  • ·Heat Capacity Calculation · Thermal Conductivity578
  • ·Fiber Optics · Rayleigh Attenuation581
20Point Defects583
  • ·Lattice Vacancies585
  • ·Diffusion588
  • ·Metals591
  • ·Color Centers · F Centers592
  • ·Other Centers in Alkali Halides593
21Dislocations597
  • ·Shear Strength of Single Crystals · Slip599
  • ·Dislocations · Burgers Vectors601
  • ·Stress Fields of Dislocations605
  • ·Low-angle Grain Boundaries607
  • ·Dislocation Densities610
  • ·Dislocation Multiplication and Slip611
  • ·Strength of Alloys613
  • ·Dislocations and Crystal Growth · Whiskers615
  • ·Hardness of Materials617
22Alloys619
  • ·General Considerations621
  • ·Substitutional Solid Solutions — Hume-Rothery Rules624
  • ·Order-Disorder Transformation · Elementary Theory of Order627
  • ·Phase Diagrams · Eutectics632
  • ·Transition Metal Alloys634
  • ·Electrical Conductivity636
  • ·Kondo Effect637
부록 A~JReflection Lines · Ewald Lattice Sums · Phonon Quantization · Fermi-Dirac Distribution · dk/dt 유도 · Boltzmann Transport Equation · Vector Potential and Gauge · Cooper Pairs · Ginzburg-Landau · Electron-Phonon Collisions641

인쇄 목차를 절·쪽수까지 그대로 옮겼다. Kittel은 절에 번호를 붙이지 않는다 — 절 제목과 쪽수만 나열되므로 인용할 때는 “Kittel Ch.8, Effective Mass (p.197)”처럼 적어야 한다. 목차에서 한 칸 들여쓴 하위 항목은 여기서 상위 항목 뒤에 ·로 이어 붙였다. 볼츠만 수송 방정식이 본문이 아니라 부록 F(656)에 있다 — 수송을 다루는 장을 찾다 헤매기 쉬운 지점이다.

Solid State Physics

7부Neil W. Ashcroft · N. David Mermin · Holt, Rinehart and Winston, 1976 · ISBN 0-03-083993-9  장 수준 확보

1The Drude Theory of Metals1
2The Sommerfeld Theory of Metals29
3Failures of the Free Electron Model57
4Crystal Lattices63
5The Reciprocal Lattice85
6Determination of Crystal Structures by X-Ray Diffraction95
7Classification of Bravais Lattices and Crystal Structures111
8Electron Levels in a Periodic Potential: General Properties131
9Electrons in a Weak Periodic Potential151
10The Tight-Binding Method175
11Other Methods for Calculating Band Structure191
12The Semiclassical Model of Electron Dynamics213
13The Semiclassical Theory of Conduction in Metals243
14Measuring the Fermi Surface263
15Band Structure of Selected Metals283
16Beyond the Relaxation-Time Approximation313
17Beyond the Independent Electron Approximation329
18Surface Effects353
19Classification of Solids373
20Cohesive Energy395
21Failures of the Static Lattice Model415
22Classical Theory of the Harmonic Crystal421
23Quantum Theory of the Harmonic Crystal451
24Measuring Phonon Dispersion Relations469
25Anharmonic Effects in Crystals487
26Phonons in Metals511
27Dielectric Properties of Insulators533
28Homogeneous Semiconductors561
29Inhomogeneous Semiconductors589
30Defects in Crystals615
31Diamagnetism and Paramagnetism643
32Electron Interactions and Magnetic Structure671
33Magnetic Ordering693
34Superconductivity725

Appendices757

부록 ASummary of Important Numerical Relations in the Free Electron Theory of Metals757
부록 BThe Chemical Potential759
부록 CThe Sommerfeld Expansion760
부록 DPlane-Wave Expansions of Periodic Functions in More Than One Dimension762
부록 EThe Velocity and Effective Mass of Bloch Electrons765
부록 FSome Identities Related to Fourier Analysis of Periodic Systems767
부록 GThe Variational Principle for Schrödinger's Equation769
부록 HHamiltonian Formulation of the Semiclassical Equations of Motion, and Liouville's Theorem771
부록 IGreen's Theorem for Periodic Functions772
부록 JConditions for the Absence of Interband Transitions in Uniform Electric or Magnetic Fields773
부록 KOptical Properties of Solids776
부록 LQuantum Theory of the Harmonic Crystal780
부록 MConservation of Crystal Momentum784
부록 NTheory of the Scattering of Neutrons by a Crystal790
부록 OAnharmonic Terms and n-Phonon Processes796
부록 PEvaluation of the Landé g-Factor797

인쇄 목차(pp. xi–xiii)를 그대로 옮겼다. 이 책은 본문 절에 번호를 붙이지 않고 목차도 장까지만 싣는다 — Kittel과 같은 사정이라 장 수준 확보로 두었고, 인용은 “Ashcroft·Mermin Ch.13 (p.243–262)”처럼 장 단위로 적는다. 쪽 범위는 다음 장 시작쪽에서 유도되므로 정확도는 떨어지지 않는다. 7부 15장 128절을 Kittel 한 권이 받치고 있던 자리에 들어간다 — 13장(준고전 수송)과 16장(완화시간 근사를 넘어)이 7.12 수송 이론의 정면 근거이고, 12장(준고전 모형)·14장(페르미 면 측정)·17장(독립 전자 근사를 넘어)이 Kittel보다 깊다. 28·29장(균일·불균일 반도체)은 11·12부와 겹치므로 중복 서술을 피할 것. 부록 A~P(757~798)는 본문 유도의 상세판이고 그중 부록 K(고체의 광학적 성질)·L·N이 7.11·7.4에 붙는다.

8부 · 재료과학

Materials Science and Engineering: An Introduction

8부Callister · Rethwisch · 10th ed. · Wiley, 2018 · ISBN 978-1-119-40549-8  원본 대조

1Introduction1
  • 1.1Historical Perspective2
  • 1.2Materials Science and Engineering3
  • 1.3Why Study Materials Science and Engineering?5
  • 1.4Classification of Materials7
  • 1.5Advanced Materials14
  • 1.6Modern Materials’ Needs16
2Atomic Structure and Interatomic Bonding19
  • 2.1Introduction20
  • 2.2Fundamental Concepts20
  • 2.3Electrons in Atoms22
  • 2.4The Periodic Table28
  • 2.5Bonding Forces and Energies30
  • 2.6Primary Interatomic Bonds32
  • 2.7Secondary Bonding or van der Waals Bonding39
  • 2.8Mixed Bonding43
  • 2.9Molecules44
  • 2.10Bonding Type-Material Classification Correlations44
3The Structure of Crystalline Solids48
  • 3.1Introduction49
  • 3.2Fundamental Concepts49
  • 3.3Unit Cells50
  • 3.4Metallic Crystal Structures51
  • 3.5Density Computations57
  • 3.6Polymorphism and Allotropy57
  • 3.7Crystal Systems59
  • 3.8Point Coordinates61
  • 3.9Crystallographic Directions64
  • 3.10Crystallographic Planes70
  • 3.11Linear and Planar Densities76
  • 3.12Close-Packed Crystal Structures77
  • 3.13Single Crystals79
  • 3.14Polycrystalline Materials79
  • 3.15Anisotropy81
  • 3.16X-Ray Diffraction: Determination of Crystal Structures82
  • 3.17Noncrystalline Solids87
4Imperfections in Solids92
  • 4.1Introduction93
  • 4.2Vacancies and Self-Interstitials93
  • 4.3Impurities in Solids95
  • 4.4Specification of Composition98
  • 4.5Dislocations—Linear Defects102
  • 4.6Interfacial Defects105
  • 4.7Bulk or Volume Defects109
  • 4.8Atomic Vibrations109
  • 4.9Basic Concepts of Microscopy110
  • 4.10Microscopic Techniques111
  • 4.11Grain-Size Determination115
5Diffusion121
  • 5.1Introduction122
  • 5.2Diffusion Mechanisms123
  • 5.3Fick’s First Law124
  • 5.4Fick’s Second Law—Nonsteady-State Diffusion126
  • 5.5Factors That Influence Diffusion130
  • 5.6Diffusion in Semiconducting Materials135
  • 5.7Other Diffusion Paths139
6Mechanical Properties of Metals142
  • 6.1Introduction143
  • 6.2Concepts of Stress and Strain144
  • 6.3Stress–Strain Behavior148
  • 6.4Anelasticity151
  • 6.5Elastic Properties of Materials151
  • 6.6Tensile Properties154
  • 6.7True Stress and Strain161
  • 6.8Elastic Recovery After Plastic Deformation164
  • 6.9Compressive, Shear, and Torsional Deformations165
  • 6.10Hardness165
  • 6.11Variability of Material Properties171
  • 6.12Design/Safety Factors173
7Dislocations and Strengthening Mechanisms180
  • 7.1Introduction181
  • 7.2Basic Concepts182
  • 7.3Characteristics of Dislocations184
  • 7.4Slip Systems185
  • 7.5Slip in Single Crystals187
  • 7.6Plastic Deformation of Polycrystalline Materials190
  • 7.7Deformation by Twinning192
  • 7.8Strengthening by Grain Size Reduction193
  • 7.9Solid-Solution Strengthening195
  • 7.10Strain Hardening196
  • 7.11Recovery199
  • 7.12Recrystallization200
  • 7.13Grain Growth204
8Failure209
  • 8.1Introduction210
  • 8.2Fundamentals of Fracture211
  • 8.3Ductile Fracture211
  • 8.4Brittle Fracture213
  • 8.5Principles of Fracture Mechanics215
  • 8.6Fracture Toughness Testing224
  • 8.7Cyclic Stresses229
  • 8.8The S–N Curve231
  • 8.9Crack Initiation and Propagation235
  • 8.10Factors That Affect Fatigue Life237
  • 8.11Environmental Effects239
  • 8.12Generalized Creep Behavior240
  • 8.13Stress and Temperature Effects241
  • 8.14Data Extrapolation Methods244
  • 8.15Alloys for High-Temperature Use245
9Phase Diagrams251
  • 9.1Introduction252
  • 9.2Solubility Limit253
  • 9.3Phases254
  • 9.4Microstructure254
  • 9.5Phase Equilibria254
  • 9.6One-Component (or Unary) Phase Diagrams255
  • 9.7Binary Isomorphous Systems257
  • 9.8Interpretation of Phase Diagrams259
  • 9.9Development of Microstructure in Isomorphous Alloys263
  • 9.10Mechanical Properties of Isomorphous Alloys266
  • 9.11Binary Eutectic Systems266
  • 9.12Development of Microstructure in Eutectic Alloys272
  • 9.13Equilibrium Diagrams Having Intermediate Phases or Compounds279
  • 9.14Eutectoid and Peritectic Reactions282
  • 9.15Congruent Phase Transformations283
  • 9.16Ceramic and Ternary Phase Diagrams284
  • 9.17The Gibbs Phase Rule284
  • 9.18The Iron–Iron Carbide (Fe–Fe₃C) Phase Diagram287
  • 9.19Development of Microstructure in Iron–Carbon Alloys290
  • 9.20The Influence of Other Alloying Elements298
10Phase Transformations: Development of Microstructure and Alteration of Mechanical Properties303
  • 10.1Introduction304
  • 10.2Basic Concepts304
  • 10.3The Kinetics of Phase Transformations305
  • 10.4Metastable Versus Equilibrium States316
  • 10.5Isothermal Transformation Diagrams317
  • 10.6Continuous-Cooling Transformation Diagrams328
  • 10.7Mechanical Behavior of Iron–Carbon Alloys331
  • 10.8Tempered Martensite335
  • 10.9Review of Phase Transformations and Mechanical Properties for Iron–Carbon Alloys338
11Applications and Processing of Metal Alloys347
  • 11.1Introduction348
  • 11.2Ferrous Alloys349
  • 11.3Nonferrous Alloys361
  • 11.4Forming Operations373
  • 11.5Casting375
  • 11.6Miscellaneous Techniques376
  • 11.73D Printing (Additive Manufacturing)378
  • 11.8Annealing Processes382
  • 11.9Heat Treatment of Steels384
  • 11.10Precipitation Hardening394
12Structures and Properties of Ceramics405
  • 12.1Introduction406
  • 12.2Crystal Structures407
  • 12.3Silicate Ceramics415
  • 12.4Carbon419
  • 12.5Imperfections in Ceramics420
  • 12.6Diffusion in Ionic Materials424
  • 12.7Ceramic Phase Diagrams425
  • 12.8Brittle Fracture of Ceramics429
  • 12.9Stress–Strain Behavior433
  • 12.10Mechanisms of Plastic Deformation435
  • 12.11Miscellaneous Mechanical Considerations437
13Applications and Processing of Ceramics442
  • 13.1Introduction443
  • 13.2Glasses444
  • 13.3Glass–Ceramics444
  • 13.4Clay Products446
  • 13.5Refractories446
  • 13.6Abrasives449
  • 13.7Cements451
  • 13.8Ceramic Biomaterials452
  • 13.9Carbons453
  • 13.10Advanced Ceramics456
  • 13.11Fabrication and Processing of Glasses and Glass–Ceramics462
  • 13.12Fabrication and Processing of Clay Products466
  • 13.13Powder Pressing471
  • 13.14Tape Casting473
  • 13.153D Printing of Ceramic Materials474
14Polymer Structures479
  • 14.1Introduction480
  • 14.2Hydrocarbon Molecules480
  • 14.3Polymer Molecules483
  • 14.4The Chemistry of Polymer Molecules483
  • 14.5Molecular Weight487
  • 14.6Molecular Shape490
  • 14.7Molecular Structure492
  • 14.8Molecular Configurations493
  • 14.9Thermoplastic and Thermosetting Polymers496
  • 14.10Copolymers497
  • 14.11Polymer Crystallinity498
  • 14.12Polymer Crystals502
  • 14.13Defects in Polymers504
  • 14.14Diffusion in Polymeric Materials505
15Characteristics, Applications, and Processing of Polymers511
  • 15.1Introduction512
  • 15.2Stress–Strain Behavior512
  • 15.3Macroscopic Deformation515
  • 15.4Viscoelastic Deformation515
  • 15.5Fracture of Polymers519
  • 15.6Miscellaneous Mechanical Characteristics521
  • 15.7Deformation of Semicrystalline Polymers522
  • 15.8Factors That Influence the Mechanical Properties of Semicrystalline Polymers524
  • 15.9Deformation of Elastomers528
  • 15.10Crystallization531
  • 15.11Melting532
  • 15.12The Glass Transition532
  • 15.13Melting and Glass Transition Temperatures532
  • 15.14Factors That Influence Melting and Glass Transition Temperatures534
  • 15.15Plastics536
  • 15.16Elastomers539
  • 15.17Fibers541
  • 15.18Miscellaneous Applications542
  • 15.19Polymeric Biomaterials543
  • 15.20Advanced Polymeric Materials545
  • 15.21Polymerization549
  • 15.22Polymer Additives551
  • 15.23Forming Techniques for Plastics553
  • 15.24Fabrication of Elastomers555
  • 15.25Fabrication of Fibers and Films555
  • 15.263D Printing of Polymers557
16Composites564
  • 16.1Introduction565
  • 16.2Large-Particle Composites567
  • 16.3Dispersion-Strengthened Composites571
  • 16.4Influence of Fiber Length572
  • 16.5Influence of Fiber Orientation and Concentration573
  • 16.6The Fiber Phase581
  • 16.7The Matrix Phase583
  • 16.8Polymer-Matrix Composites583
  • 16.9Metal-Matrix Composites589
  • 16.10Ceramic-Matrix Composites590
  • 16.11Carbon–Carbon Composites592
  • 16.12Hybrid Composites592
  • 16.13Processing of Fiber-Reinforced Composites593
  • 16.14Laminar Composites595
  • 16.15Sandwich Panels597
  • 16.16Nanocomposites600
17Corrosion and Degradation of Materials607
  • 17.1Introduction608
  • 17.2Electrochemical Considerations609
  • 17.3Corrosion Rates615
  • 17.4Prediction of Corrosion Rates617
  • 17.5Passivity624
  • 17.6Environmental Effects625
  • 17.7Forms of Corrosion625
  • 17.8Corrosion Environments633
  • 17.9Corrosion Prevention633
  • 17.10Oxidation636
  • 17.11Swelling and Dissolution640
  • 17.12Bond Rupture642
  • 17.13Weathering643
18Electrical Properties648
  • 18.1Introduction649
  • 18.2Ohm’s Law649
  • 18.3Electrical Conductivity650
  • 18.4Electronic and Ionic Conduction651
  • 18.5Energy Band Structures in Solids651
  • 18.6Conduction in Terms of Band and Atomic Bonding Models653
  • 18.7Electron Mobility655
  • 18.8Electrical Resistivity of Metals656
  • 18.9Electrical Characteristics of Commercial Alloys659
  • 18.10Intrinsic Semiconduction659
  • 18.11Extrinsic Semiconduction662
  • 18.12The Temperature Dependence of Carrier Concentration665
  • 18.13Factors That Affect Carrier Mobility667
  • 18.14The Hall Effect671
  • 18.15Semiconductor Devices673
  • 18.16Conduction in Ionic Materials680
  • 18.17Electrical Properties of Polymers680
  • 18.18Capacitance681
  • 18.19Field Vectors and Polarization683
  • 18.20Types of Polarization686
  • 18.21Frequency Dependence of the Dielectric Constant688
  • 18.22Dielectric Strength689
  • 18.23Dielectric Materials689
  • 18.24Ferroelectricity689
  • 18.25Piezoelectricity690
19Thermal Properties698
  • 19.1Introduction699
  • 19.2Heat Capacity699
  • 19.3Thermal Expansion703
  • 19.4Thermal Conductivity706
  • 19.5Thermal Stresses709
20Magnetic Properties714
  • 20.1Introduction715
  • 20.2Basic Concepts715
  • 20.3Diamagnetism and Paramagnetism719
  • 20.4Ferromagnetism721
  • 20.5Antiferromagnetism and Ferrimagnetism722
  • 20.6The Influence of Temperature on Magnetic Behavior726
  • 20.7Domains and Hysteresis727
  • 20.8Magnetic Anisotropy730
  • 20.9Soft Magnetic Materials731
  • 20.10Hard Magnetic Materials733
  • 20.11Magnetic Storage736
  • 20.12Superconductivity739
21Optical Properties746
  • 21.1Introduction747
  • 21.2Electromagnetic Radiation747
  • 21.3Light Interactions with Solids749
  • 21.4Atomic and Electronic Interactions750
  • 21.5Refraction752
  • 21.6Reflection754
  • 21.7Absorption754
  • 21.8Transmission758
  • 21.9Color758
  • 21.10Opacity and Translucency in Insulators760
  • 21.11Luminescence761
  • 21.12Photoconductivity761
  • 21.13Lasers764
  • 21.14Optical Fibers in Communications768
22Environmental, and Societal Issues in Materials Science and Engineering775
  • 22.1Introduction776
  • 22.2Environmental and Societal Considerations776
  • 22.3Recycling Issues in Materials Science and Engineering779
부록 A~ESI 단위 · 재료 물성 · 원가 · 고분자 반복 단위 · Tg/TmA-1
  • AThe International System of Units (SI)A-1
  • BProperties of Selected Engineering Materials (B.1~B.10)A-3
  • CCosts and Relative Costs for Selected Engineering MaterialsA-32
  • DRepeat Unit Structures for Common PolymersA-37
  • EGlass Transition and Melting Temperatures for Common Polymeric MaterialsA-41

인쇄 목차를 절·쪽수까지 그대로 옮겼다(전 22장 284개 절). 이전에 15·16·17·20장을 절 범위로 묶어 두었던 것을 풀었고, 부록을 A~H로 잘못 적어 둔 것을 A~E로 바로잡았다. 22장 제목은 인쇄 목차에 “Environmental, and Societal Issues…”로 찍혀 있다 — 앞머리 “Economic,”이 빠진 목차 오식으로 보이니, 인용하기 전에 본문 장 제목을 확인할 것. 반도체와 직접 닿는 곳은 5.6(반도체 내 확산)과 18.10~18.15(진성·외인성 반도체, 캐리어 이동도, 홀 효과, 소자)이고, 3D 프린팅 절이 세 곳(11.7 · 13.15 · 15.26)에 흩어져 있다. 각 장은 Summary · Equation Summary · List of Symbols · Important Terms and Concepts · References로 끝난다.

Phase Transformations in Metals and Alloys

8부Porter · Easterling · Sherif · 4th ed. · CRC Press, 2021 · ISBN 978-0-367-43034-4  원본 대조

1Thermodynamics and Phase Diagrams1
  • 1.1Equilibrium1
  • 1.2Single-Component Systems4
  • 1.2.1Gibbs Free Energy as a Function of Temperature4
  • 1.2.2Pressure Effects7
  • 1.2.3The Driving Force for Solidification9
  • 1.3Binary Solutions10
  • 1.3.1The Gibbs Free Energy of Binary Solutions10
  • 1.3.2Ideal Solutions12
  • 1.3.3Chemical Potential15
  • 1.3.4Regular Solutions17
  • 1.3.5Activity20
  • 1.3.6Real Solutions22
  • 1.3.7Ordered Phases23
  • 1.3.8Intermediate Phases25
  • 1.4Equilibrium in Heterogeneous Systems27
  • 1.5Binary Phase Diagrams30
  • 1.5.1A Simple Phase Diagram30
  • 1.5.2Systems with a Miscibility Gap31
  • 1.5.3Ordered Alloys32
  • 1.5.4Simple Eutectic and Peritectic Systems32
  • 1.5.5Phase Diagrams Containing Intermediate Phases33
  • 1.5.6The Gibbs Phase Rule33
  • 1.5.7The Effect of Temperature on Solid Solubility38
  • 1.5.8Equilibrium Vacancy Concentration39
  • 1.6The Influence of Interfaces on Equilibrium41
  • 1.7Ternary Equilibrium44
  • 1.7.1Ternary Phase Diagrams44
  • 1.7.2Solubility Product48
  • 1.7.1Full and Partial Equilibrium53
  • 1.8Additional Thermodynamic Relationships for Binary Solutions55
  • 1.9The Kinetics of Phase Transformations57
  • 1.10Summary of Main Points58
2Diffusion63
  • 2.1Atomic Mechanisms of Diffusion63
  • 2.2Interstitial Diffusion66
  • 2.2.1Interstitial Diffusion as a Random Jump Process66
  • 2.2.2Effect of Temperature – Thermal Activation69
  • 2.2.3Steady-State Diffusion71
  • 2.2.4Nonsteady-State Diffusion72
  • 2.2.5Solutions to the Diffusion Equation74
  • 2.2.5.1Homogenization74
  • 2.2.5.2The Carburization of Steel75
  • 2.3Substitutional Diffusion77
  • 2.3.1Self-Diffusion77
  • 2.3.2Vacancy Diffusion82
  • 2.3.3Diffusion in Substitutional Alloys83
  • 2.3.4Diffusion in Dilute Substitutional Alloys91
  • 2.4Atomic Mobility92
  • 2.5Tracer Diffusion in Binary Alloys94
  • 2.6Diffusion in Ternary Alloys96
  • 2.7High-Diffusivity Paths98
  • 2.7.1Diffusion along Grain Boundaries98
  • 2.7.2Diffusion along Dislocations104
  • 2.8Diffusion in Multiphase Binary Systems105
  • 2.9Summary of Main Points107
3Crystal Interfaces and Microstructure113
  • 3.1Interfacial Free Energy113
  • 3.2Solid/Vapor Interfaces114
  • 3.3Solid/Liquid Interfaces119
  • 3.4Boundaries in Single-Phase Solids121
  • 3.4.1Low-Angle Grain Boundaries123
  • 3.4.2High-Angle and Special Grain Boundaries126
  • 3.4.3Grain Boundary Energy of Pure Metals133
  • 3.4.4Grain Boundary Energy of Dilute Binary Alloys136
  • 3.4.5Equilibrium in Polycrystalline Materials140
  • 3.4.6Thermally Activated Migration of Grain Boundaries144
  • 3.4.7The Kinetics of Grain Growth152
  • 3.5Interphase Interfaces in Solids155
  • 3.5.1Fully Coherent Interfaces155
  • 3.5.2Partly Coherent Interfaces158
  • 3.5.3Incoherent Interfaces161
  • 3.5.4Complex Partly Coherent Interfaces162
  • 3.5.5Interface Migration: Glissile Interfaces168
  • 3.5.6Interface Migration: Non-glissile Interfaces172
  • 3.5.7Second-Phase Shape176
  • 3.5.7.1Interface Energy Effects177
  • 3.5.7.2Strain Energy Effects183
  • 3.5.8Coherency Loss187
  • 3.6Classification of Phase Transformations190
  • 3.7Summary of Main Points191
4Solidification199
  • 4.1Nucleation in Pure Metals199
  • 4.1.1Homogeneous Nucleation200
  • 4.1.2The Homogeneous Nucleation Rate204
  • 4.1.3Heterogeneous Nucleation205
  • 4.1.4Nucleation of Melting210
  • 4.2Growth of a Pure Solid210
  • 4.2.1Continuous Growth210
  • 4.2.2Lateral Growth211
  • 4.2.2.1Surface Nucleation212
  • 4.2.2.2Spiral Growth212
  • 4.2.2.3Growth from Twin Intersections214
  • 4.2.3Heat Flow and Interface Stability214
  • 4.3Alloy Solidification217
  • 4.3.1Solidification of Single-Phase Alloys217
  • 4.3.1.1Equilibrium Solidification218
  • 4.3.1.2No Diffusion in Solid, Perfect Mixing in Liquid219
  • 4.3.1.3No Diffusion in Solid, Diffusional Mixing in Liquid221
  • 4.3.1.4Cellular and Dendritic Solidification222
  • 4.3.2Eutectic Solidification227
  • 4.3.3Off-Eutectic Alloys233
  • 4.3.4Peritectic Solidification237
  • 4.4Solidification Macrostructures and Microstructures238
  • 4.4.1Chill Zone240
  • 4.4.2Columnar Zone240
  • 4.4.3Equiaxed Zone241
  • 4.4.4Shrinkage Effects242
  • 4.4.5Macrosegregation and Microsegregation242
  • 4.5Solidification of Fusion Welds243
  • 4.6Solidification during Quenching from the Melt248
  • 4.7Metallic Glasses249
  • 4.8Case Studies of Some Practical Castings and Welds251
  • 4.8.1Casting of Carbon and Low-Alloy Steels251
  • 4.8.2Casting of High-Speed Steels253
  • 4.8.3Stainless Steel Weld Metal255
  • 4.9Summary of Main Points257
5Diffusional Transformations in Solids263
  • 5.1Homogeneous Nucleation in Solids264
  • 5.2Heterogeneous Nucleation270
  • 5.2.1Heterogeneous Nucleation Sites270
  • 5.2.1.1Grain Boundaries270
  • 5.2.1.2Dislocations273
  • 5.2.1.3Excess Vacancies274
  • 5.2.2Rate of Heterogeneous Nucleation275
  • 5.3Precipitate Growth277
  • 5.3.1Growth behind Planar Incoherent Interfaces277
  • 5.3.2Diffusion-Controlled Lengthening of Plates or Needles280
  • 5.3.3Thickening of Plate-like Precipitates282
  • 5.4Overall Transformation Kinetics – TTT Diagrams284
  • 5.5Precipitation in Age-Hardening Alloys288
  • 5.5.1Precipitation in Aluminum-Copper Alloys288
  • 5.5.1.1GP Zones288
  • 5.5.1.2Transition Phases290
  • 5.5.2Precipitation in Aluminum–Silver Alloys295
  • 5.5.3Quenched-in Vacancies296
  • 5.5.4Age Hardening299
  • 5.5.5Spinodal Decomposition302
  • 5.5.6Particle Coarsening308
  • 5.5.6.1Low γ309
  • 5.5.6.2Low Xₑ310
  • 5.5.6.3Low D310
  • 5.6The Precipitation of Ferrite from Austenite310
  • 5.7Cellular Precipitation318
  • 5.8Eutectoid Transformations320
  • 5.8.1Pearlite in Fe–C Alloys321
  • 5.8.1.1Nucleation of Pearlite322
  • 5.8.1.2Pearlite Growth and Dissipation of Free Energy323
  • 5.8.1.3Pearlite in Off-Eutectoid Fe–C Alloys328
  • 5.8.2Bainite in Fe–C Alloys and Steels328
  • 5.8.2.1Ferrite Growth in Upper Bainite331
  • 5.8.2.2Carbide Morphology in Upper Bainite333
  • 5.8.2.3Lower Bainite334
  • 5.8.2.4Transformation Shears and Stored Energy338
  • 5.8.3The Effect of Alloying Elements338
  • 5.8.4Continuous Cooling Diagrams344
  • 5.8.5Fibrous and Interphase Precipitation in Alloy Steels346
  • 5.9Massive Transformations349
  • 5.10Ordering Transformations353
  • 5.11Case Studies358
  • 5.11.1Titanium Forging Alloys358
  • 5.11.2Aluminum Copper Lithium Alloy (AA2198)361
  • 5.11.3Nanostructured Bainite365
  • 5.12Summary of Main Points368
6Diffusionless Martensitic Transformations375
  • 6.1Introduction to Martensite in Ferrous Systems376
  • 6.2Ferrous Martensite Morphologies and Crystallography378
  • 6.2.1Lath Martensite379
  • 6.2.2Plate Martensite: Thin Plate and Lenticular Plate Martensite383
  • 6.2.3Tetragonality of bcc and bct Martensite386
  • 6.2.4Epsilon Martensite390
  • 6.3Mechanical Twinning in bcc Metals391
  • 6.4Athermal Nucleation and Growth: FCC → HCP395
  • 6.5Athermal Nucleation and Growth: FCC → BCC404
  • 6.5.1Atomic Movements Producing the fcc → bcc/bct Transformation404
  • 6.5.2Nucleation and Early Growth of α′ Martensite410
  • 6.5.3Growth of Athermal α′ Martensite During Cooling416
  • 6.5.3.1Growth of Plate and Lath Martensite416
  • 6.5.3.2Kinetics of Athermal Martensite424
  • 6.5.4The Martensite Start Temperature426
  • 6.5.4.1Lath or Plate Martensite?428
  • 6.5.4.2Empirical Formulae for Mₛ429
  • 6.5.4.3Critical Driving Force431
  • 6.5.4.4The Effect of Grain Size on the Martensite Start Temperature432
  • 6.5.4.5The Effect of Applied Elastic Stress on the Martensite Start Temperature434
  • 6.5.4.6The Effect of Applied Plastic Strain on the Martensite Start Temperature436
  • 6.5.4.7The Effect of Applied Magnetic Field on the Martensite Start Temperature437
  • 6.5.5Strain-Induced Athermal α′-Martensite437
  • 6.6Thermally Activated α′-Martensite446
  • 6.7Carbon Diffusion Phenomena in Ferrous Martensites451
  • 6.7.1Autotempering451
  • 6.7.2Quenched and Partitioned Steels457
  • 6.7.3Tempering after Quenching461
  • 6.7.3.1Tempering of Carbon and Low-Alloy Steel461
  • 6.7.3.2Secondary Hardening467
  • 6.7.3.3Maraging Steels469
  • 6.8Athermal Nucleation and Growth: Ordered Alloys470
  • 6.8.1Thermoelastic Martensite470
  • 6.8.2Superelasticity and Shape Memory472
  • 6.8.2.1Superelasticity472
  • 6.8.2.2Shape Memory473
  • 6.8.3Rubber-Like Behavior476
  • 6.9Phenomenological Theory of Martensite Crystallography477
  • 6.10Case Studies480
  • 6.10.1Martensite in Advanced High-Strength Sheet Steels481
  • 6.10.2Bearing Steel 100Cr6/52100484
  • 6.10.3Martensitic Stainless Steels489
  • 6.10Summary of Main Points493
해답Solutions to Odd-numbered Exercises (1~6장) · Index 545503

4판(CRC Press, 2021)으로 교체했다 — 이전에는 3판(2009) 목차였다. 인쇄 목차를 소절(x.y.z.w)과 쪽수까지 그대로 옮겼다. 3판과 절 번호가 어긋나는 곳이 많다: 3장에 3.3 Solid/Liquid Interfaces가 들어오면서 이후 절이 한 칸씩 밀렸고, 3판 §1.9 Computation of Phase Diagrams가 사라져 1.9가 The Kinetics of Phase Transformations로 당겨졌으며, 6장은 Diffusionless Martensitic Transformations로 제목까지 바뀌어 전면 개편됐다. 인쇄 목차에 번호 오식이 두 군데 있다 — 1.7.3이어야 할 “Full and Partial Equilibrium”이 1.7.1로 중복되어 있고, 6.11이어야 할 “Summary of Main Points”가 6.10으로 중복되어 있다(여기서는 인쇄된 대로 두었다). 각 장은 Exercises · References · Further Reading으로 끝난다.

Computational Thermodynamics: The Calphad Method

8부Hans Lukas · Suzana G. Fries · Bo Sundman · Cambridge University Press, 2007 · ISBN 978-0-521-86811-2  원본 대조

1Introduction1
  • 1.1Computational thermodynamics1
  • 1.2The past and present, the Calphad technique3
  • 1.3The future development of databases and software applications4
  • 1.4The structure of the book5
2Basis7
  • 2.1Thermodynamics7
  • 2.2Crystallography17
  • 2.3Equilibrium calculations23
  • 2.4Optimization methods42
  • 2.5Final remarks45
3First principles and thermodynamic properties47
  • 3.1The density-functional theory (DFT) and its approximations48
  • 3.2The DFT results at 0 K50
  • 3.3Going to higher temperatures, adding the statistics53
  • 3.4Final remarks57
4Experimental data used for optimization58
  • 4.1Thermodynamic data58
  • 4.2Binary phase-diagram data68
  • 4.3Ternary phase-diagram data72
  • 4.4Multicomponent and other types of experimental data75
  • 4.5X-ray and neutron diffraction76
  • 4.6Mössbauer spectroscopy and perturbed angular-correlation measurements76
  • 4.7Final remarks76
5Models for the Gibbs energy79
  • 5.1The general form of the Gibbs-energy model80
  • 5.2Phases with fixed composition81
  • 5.3Variables for composition dependence87
  • 5.4Modeling particular physical phenomena91
  • 5.5Models for the Gibbs energy of solutions94
  • 5.6Models for the excess Gibbs energy103
  • 5.7Modeling using additional constituents114
  • 5.8Modeling using sublattices122
  • 5.9Models for liquids146
  • 5.10Chemical reactions and thermodynamic models155
  • 5.11Final remarks157
6Assessment methodology161
  • 6.1Starting the assessment161
  • 6.2Modeling the Gibbs energy for each phase167
  • 6.3Determining adjustable parameters192
  • 6.4Decisions to be made during the assessment195
  • 6.5Checking results of an optimization198
  • 6.6Publishing an assessed system200
  • 6.7How the experts do assessment200
7Optimization tools203
  • 7.1Common features203
  • 7.2How to use BINGSS206
  • 7.3The PARROT module of Thermo-Calc219
  • 7.4Final remarks240
8Creating thermodynamic databases243
  • 8.1Unary data244
  • 8.2Model compatibility244
  • 8.3Experimental databases245
  • 8.4Naming of phases246
  • 8.5From assessments to databases249
  • 8.6Database management and updating252
  • 8.7Existing thermodynamic databases253
  • 8.8Mobility databases253
  • 8.9Nano-materials254
  • 8.10Examples using databases256
9Case studies264
  • 9.1A complete assessment of the Cu–Mg system264
  • 9.2Checking metastable diagrams: the Ag–Al system274
  • 9.3The Re–W σ phase refit using first-principles data276
  • 9.4A complete binary system: Ca–Mg279
  • 9.5Modeling the γ–γ′ phases: the Al–Ni system285
  • 9.6Assessment of a ternary oxide system287
  • 9.7Some notes on a ternary assessment, the Cr–Fe–Ni system293
부록Websites297

References299

인쇄 목차를 절·쪽수까지 그대로 옮겼다(9개 장 + 부록). 소절(x.y.z)은 싣지 않았다. 목차 PDF의 글리프 흔적을 바로잡았다 — “/UPsigma”는 σ, “/UPgamma”는 γ다. 8.4 상태도 계산(CALPHAD) 한 절이 전사된 59권 어디에도 대응하는 장·절이 없어 들인 책이다 — 2장(열역학·결정학·평형 계산·최적화)과 5장(깁스 에너지 모델 11절: 부격자·용액·과잉 깁스 에너지·액체)이 그 절의 정면 근거이고, 6장(평가 방법론)·7장(BINGSS·Thermo-Calc PARROT)이 “상태도를 계산한다”가 실제로 무슨 작업인지 보여 준다. 3장은 제일원리(DFT) 계산을 열역학 데이터로 잇는 자리라 20부와도 닿고, 8.8 Mobility databases는 8.3(확산)의 확장이다. 9장 사례 일곱 편은 이원계·삼원계 평가를 처음부터 끝까지 따라가는 실습이다.

9부 · 표면·계면과 박막

Materials Science of Thin Films: Deposition and Structure

9부Milton Ohring · 2nd ed. · Academic Press, 2002 · ISBN 978-0-12-524975-1  원본 대조

1A Review of Materials Science1
  • 1.1Introduction1
  • 1.2Structure2
  • 1.3Defects in Solids10
  • 1.4Bonds and Bands in Materials14
  • 1.5Thermodynamics of Materials24
  • 1.6Kinetics36
  • 1.7Nucleation44
  • 1.8An Introduction to Mechanical Behavior47
  • 1.9Conclusion52
2Vacuum Science and Technology57
  • 2.1Introduction57
  • 2.2Kinetic Theory of Gases58
  • 2.3Gas Transport and Pumping63
  • 2.4Vacuum Pumps70
  • 2.5Vacuum Systems81
  • 2.6Conclusion88
3Thin-Film Evaporation Processes95
  • 3.1Introduction95
  • 3.2The Physics and Chemistry of Evaporation97
  • 3.3Film Thickness Uniformity and Purity106
  • 3.4Evaporation Hardware118
  • 3.5Evaporation Processes and Applications128
  • 3.6Conclusion139
4Discharges, Plasmas, and Ion-Surface Interactions145
  • 4.1Introduction145
  • 4.2Plasmas, Discharges, and Arcs147
  • 4.3Fundamentals of Plasma Physics152
  • 4.4Reactions in Plasmas164
  • 4.5Physics of Sputtering170
  • 4.6Ion Bombardment Modification of Growing Films184
  • 4.7Conclusion196
5Plasma and Ion Beam Processing of Thin Films203
  • 5.1Introduction203
  • 5.2DC, AC, and Reactive Sputtering Processes205
  • 5.3Magnetron Sputtering222
  • 5.4Plasma Etching233
  • 5.5Hybrid and Modified PVD Processes252
  • 5.6Conclusion269
6Chemical Vapor Deposition277
  • 6.1Introduction277
  • 6.2Reaction Types281
  • 6.3Thermodynamics of CVD287
  • 6.4Gas Transport293
  • 6.5Film Growth Kinetics303
  • 6.6Thermal CVD Processes312
  • 6.7Plasma-Enhanced CVD Processes323
  • 6.8Some CVD Materials Issues334
  • 6.9Safety347
  • 6.10Conclusion349
7Substrate Surfaces and Thin-Film Nucleation357
  • 7.1Introduction357
  • 7.2An Atomic View of Substrate Surfaces360
  • 7.3Thermodynamic Aspects of Nucleation376
  • 7.4Kinetic Processes in Nucleation and Growth386
  • 7.5Experimental Studies of Nucleation and Growth400
  • 7.6Conclusion409
8Epitaxy417
  • 8.1Introduction417
  • 8.2Manifestations of Epitaxy420
  • 8.3Lattice Misfit and Defects in Epitaxial Films429
  • 8.4Epitaxy of Compound Semiconductors439
  • 8.5High-Temperature Methods for Depositing Epitaxial Semiconductor Films453
  • 8.6Low-Temperature Methods for Depositing Epitaxial Semiconductor Films466
  • 8.7Mechanisms and Characterization of Epitaxial Film Growth476
  • 8.8Conclusion488
9Film Structure495
  • 9.1Introduction495
  • 9.2Structural Morphology of Deposited Films and Coatings497
  • 9.3Computational Simulations of Film Structure510
  • 9.4Grain Growth, Texture, and Microstructure Control in Thin Films520
  • 9.5Constrained Film Structures533
  • 9.6Amorphous Thin Films540
  • 9.7Conclusion552
10Characterization of Thin Films and Surfaces559
  • 10.1Introduction559
  • 10.2Film Thickness562
  • 10.3Structural Characterization of Films and Surfaces583
  • 10.4Chemical Characterization of Surfaces and Films606
  • 10.5Conclusion633
11Interdiffusion, Reactions, and Transformations in Thin Films641
  • 11.1Introduction641
  • 11.2Fundamentals of Diffusion643
  • 11.3Interdiffusion in Thin Metal Films659
  • 11.4Compound Formation and Phase Transformations in Thin Films669
  • 11.5Metal–Semiconductor Reactions682
  • 11.6Mass Transport in Thin Films under Large Driving Forces695
  • 11.7Conclusion704
12Mechanical Properties of Thin Films711
  • 12.1Introduction711
  • 12.2Mechanical Testing and Strength of Thin Films713
  • 12.3Analysis of Internal Stress723
  • 12.4Techniques for Measuring Internal Stress in Films735
  • 12.5Internal Stresses in Thin Films and Their Causes742
  • 12.6Mechanical Relaxation Effects in Stressed Films754
  • 12.7Adhesion764
  • 12.8Conclusion775

인쇄 목차를 절·쪽수까지 그대로 옮겼다. 소절(x.y.z)은 인쇄 목차에 실리지 않아 없다. 모든 장이 Conclusion · Exercises · References로 끝난다. Ch.9(구조 조닝 모델·집합조직), Ch.11(실리사이드 형성·일렉트로마이그레이션), Ch.12(박막 응력·접착)가 Campbell·Plummer가 비워두는 부분을 메운다.

Physical Chemistry of Surfaces

9부Arthur W. Adamson · Alice P. Gast · 6th ed. · Wiley-Interscience, 1997 · ISBN 978-0-471-14873-9  원본 대조

IGeneral Introduction1
IICapillarity4
  • 1Surface Tension and Surface Free Energy4
  • 2The Young–Laplace Equation6
  • 3Some Experiments with Soap Films8
  • 4The Treatment of Capillary Rise10
  • AIntroductory Discussion10
  • BExact Solutions to the Capillary Rise Problem12
  • CExperimental Aspects of the Capillary Rise Method16
  • 5The Maximum Bubble Pressure Method17
  • 6Detachment Methods19
  • AThe Drop Weight Method19
  • BThe Ring Method21
  • CWilhelmy Slide Method23
  • 7Methods Based on the Shape of Static Drops or Bubbles26
  • APendant Drop Method27
  • BSessile Drop or Bubble Method27
  • CSources of Other Deformed Shapes30
  • 8Dynamic Methods of Measuring Surface Tension33
  • AFlow Methods33
  • BCapillary Waves34
  • CMaximum Bubble Pressure Method35
  • 9Surface Tension Values as Obtained by Different Methods35
IIIThe Nature and Thermodynamics of Liquid Interfaces48
  • 1One-Component Systems48
  • ASurface Thermodynamic Quantities for a Pure Substance48
  • BThe Total Surface Energy, ES51
  • CThe Effect of Curvature on Vapor Pressure and Surface Tension53
  • DThe Effect of Pressure on Surface Tension55
  • 2Structural and Theoretical Treatments of Liquid Interfaces56
  • AFurther Development of the Thermodynamic Treatment of the Surface Region58
  • BCalculation of the Surface Energy and Structure of Interfaces61
  • 3Orientation at Interfaces63
  • 4The Surface Tension of Solutions65
  • ABinary Solutions65
  • BThe Surface Tension of Polymeric Systems69
  • 5Thermodynamics of Binary Systems: The Gibbs Equation71
  • ADefinition of Surface Excess71
  • BThe Gibbs Equation73
  • CThe Dividing Surface74
  • DOther Surface Thermodynamic Relationships76
  • 6Determination of Surface Excess Quantities77
  • AExperimental Methods77
  • BHistorical Footnote and Commentary79
  • CTheoretical Calculation of Surface Excess Quantities79
  • 7Gibbs Monolayers80
  • AThe Two-Dimensional Ideal-Gas Law82
  • BNonideal Two-Dimensional Gases83
  • CThe Osmotic Pressure Point of View86
  • DSurface Elasticity89
  • ETraube’s Rule90
  • FSome Further Comments on Gibbs Monolayers91
IVSurface Films on Liquid Substrates101
  • 1Introduction101
  • 2The Spreading of One Liquid on Another104
  • ACriteria for Spreading104
  • BEmpirical and Theoretical Treatments107
  • CKinetics of Spreading Processes110
  • DThe Marangoni Effect111
  • ELenses–Line Tension112
  • 3Experimental Techniques for the Study of Monomolecular Films113
  • AMeasurement of π114
  • BSurface Potentials116
  • CMeasurement of Surface Viscosity118
  • DOptical Properties of Monolayers126
  • EMicroscopic Evaluation of Monolayers128
  • FDiffraction Studies130
  • 4States of Monomolecular Films131
  • AGaseous Films131
  • BGas–Liquid Transitions132
  • CCondensed Phases133
  • DThe Solid State135
  • EMonolayer Collapse136
  • FDomain Shapes and Interactions136
  • 5Mixed Films140
  • 6Evaporation Rates through Monomolecular Films146
  • 7Dissolution of Monolayers148
  • 8Reactions in Monomolecular Films151
  • AKinetics of Reactions in Films151
  • BKinetics of Formation and Hydrolysis of Esters152
  • COther Chemical Reactions155
VElectrical Aspects of Surface Chemistry169
  • 1Introduction169
  • 2The Electrical Double Layer169
  • 3The Stern Layer175
  • 4The Free Energy of a Diffuse Double Layer179
  • 5Repulsion between Two Planar Double Layers180
  • 6The Zeta Potential183
  • AElectrophoresis183
  • BElectroosmosis185
  • CStreaming Potential187
  • DSedimentation Potential188
  • EInterrelationships in Electrokinetic Phenomena188
  • FPotential, Surface Charge, and Colloidal Stability189
  • 7Electrocapillarity192
  • AThermodynamics of the Electrocapillary Effect195
  • BExperimental Methods197
  • CResults for the Mercury–Aqueous Solution Interface199
  • DEffect of Uncharged Solutes and Changes of Solvent200
  • EOther Electrocapillary Systems202
  • 8The Electrified Solid–Liquid Interface202
  • AElectrode–Solution Interface203
  • BElectrochemistry in Dispersed Phases204
  • CPhotoelectrochemistry; Solar Energy Conversion204
  • 9Types of Potentials and the Meaning of Potential Difference When Two Phases Are Involved205
  • AThe Various Types of Potentials205
  • BVolta Potentials, Surface Potential Differences, and the Thermionic Work Function208
  • CElectrode Potentials209
  • DIrreversible Electrode Phenomena212
VILong-Range Forces225
  • 1Introduction225
  • 2Forces between Atoms and Molecules226
  • 3Long-Range Forces232
  • AThe Microscopic Approach232
  • BThe Retarded Dispersion Interaction234
  • CExperimental Measurements236
  • 4Long-Range Forces in Solution239
  • ADispersion Forces in Condensed Media240
  • BElectric Double-Layer Repulsion240
  • CForces Due to Solvent Structure243
  • DThin-Film Viscosity246
  • 5Forces in Biological Systems246
  • 6The Disjoining Pressure247
  • 7Anomalous Water248
  • 8Dipole-Induced Dipole Propagation248
VIISurfaces of Solids257
  • 1Introduction257
  • AThe Surface Mobility of Solids257
  • BEffect of Processing on the Condition of Solid Surfaces259
  • 2Thermodynamics of Crystals259
  • ASurface Tension and Surface Free Energy259
  • BThe Equilibrium Shape of a Crystal261
  • CThe Kelvin Equation262
  • 3Theoretical Estimates of Surface Energies and Free Energies263
  • ACovalently Bonded Crystals263
  • BRare-Gas Crystals264
  • CIonic Crystals267
  • DMolecular Crystals269
  • EMetals269
  • 4Factors Affecting the Surface Energies and Surface Tensions of Actual Crystals271
  • AState of Subdivision271
  • BDeviations from Ideality271
  • CFractal Surfaces272
  • DDislocations275
  • 5Experimental Estimates of Surface Energies and Free Energies278
  • AMethods Depending on the Direct Manifestation of Surface Tensional Forces278
  • BSurface Energies from Heats of Solution280
  • CRelative Surface Tensions from Equilibrium Crystal Shapes280
  • DDependence of Other Physical Properties on Surface Energy Changes at a Solid Interface281
  • 6Reactions of Solid Surfaces282
VIIISurfaces of Solids: Microscopy and Spectroscopy293
  • 1Introduction293
  • 2The Microscopy of Surfaces293
  • AOptical and Electron Microscopy293
  • BScanning Probe Microscopies294
  • CField Emission and Field Ion Microscopies299
  • DLow-Energy Electron Diffraction (LEED)302
  • 3Spectroscopic Methods306
  • AAuger Electron Spectroscopy (AES)306
  • BPhotoelectron Spectroscopy (XPS, ESCA)308
  • CIon Scattering (ISS, LEIS)308
  • 4Other Techniques311
IXThe Formation of a New Phase—Nucleation and Crystal Growth328
  • 1Introduction328
  • 2Classic Nucleation Theory329
  • 3Experimental Nucleation Studies336
  • AOne-Component Systems336
  • BBinary Systems and Solutions338
  • 4Crystal Growth339
  • 5Epitaxial Growth and Surface Nucleation341
XThe Solid–Liquid Interface—Contact Angle347
  • 1Introduction347
  • 2Surface Energies from Solubility Changes347
  • 3Surface Energies from Immersion, Adsorption, and Engulfment Studies348
  • AEnthalpy of Immersion348
  • BSurface Energy and Free Energy Changes from Adsorption Studies350
  • CEngulfment352
  • 4Contact Angle352
  • AYoung’s Equation352
  • 5Contact Angle Hysteresis355
  • AHeterogeneous Surfaces355
  • BSurface Roughness358
  • CLiquid–Surface Interactions: Surface Changes and Autophobicity359
  • DDynamic Contact Angles361
  • 6Experimental Methods and Measurements of Contact Angle362
  • AExperimental Methods to Measure Contact Angle362
  • BResults of Contact Angle Measurements364
  • 7Theories of Contact Angle Phenomena372
  • AThermodynamics of the Young Equation372
  • BSemiempirical Models: The Girifalco–Good–Fowkes–Young Equation375
  • CPotential–Distortion Model377
  • DThe Microscopic Meniscus Profile378
XIThe Solid–Liquid Interface—Adsorption from Solution390
  • 1Adsorption of Nonelectrolytes from Dilute Solution390
  • AIsotherms391
  • BSelf-Assembling Monolayers394
  • CMultilayer Adsorption397
  • 2Polymer Adsorption398
  • 3Irreversible Adsorption404
  • 4Surface Area Determination405
  • 5Adsorption in Binary Liquid Systems406
  • AAdsorption at the Solid–Solution Interface406
  • BHeat of Adsorption at the Solid–Solution Interface411
  • 6Adsorption of Electrolytes412
  • AStern Layer Adsorption412
  • BSurfactant Adsorption414
  • CCounterion Adsorption–Ion Exchange416
  • 7Photophysics and Photochemistry of the Adsorbed State418
  • APhotophysics of Adsorbed Species418
  • BPhotochemistry at the Solid–Solution Interface419
XIIFriction, Lubrication, and Adhesion431
  • 1Introduction431
  • 2Friction between Unlubricated Surfaces431
  • AAmontons’ Law431
  • BNature of the Contact between Two Solid Surfaces432
  • CRole of Shearing and Plowing—Explanation of Amontons’ Law434
  • DStatic and Stick–Slip Friction436
  • ERolling Friction437
  • 3Two Special Cases of Friction437
  • AUse of Skid Marks to Estimate Vehicle Speeds437
  • BIce and Snow438
  • 4Metallic Friction—Effect of Oxide Films439
  • 5Friction between Nonmetals440
  • ARelatively Isotropic Crystals440
  • BLayer Crystals440
  • CPolymers441
  • 6Some Further Aspects of Friction442
  • 7Friction between Lubricated Surfaces443
  • ABoundary Lubrication443
  • BThe Mechanism of Boundary Lubrication447
  • CForces and Friction between Smooth Surfaces450
  • 8Adhesion452
  • AIdeal Adhesion452
  • BPolymer Adhesion455
  • CPractical Adhesion455
XIIIWetting, Flotation, and Detergency465
  • 1Introduction465
  • 2Wetting465
  • AWetting as a Contact Angle Phenomenon465
  • BWetting as a Capillary Action Phenomenon469
  • 3Water Repellency470
  • 4Flotation471
  • AThe Role of Contact Angle in Flotation473
  • BFlotation of Metallic Minerals476
  • CFlotation of Nonmetallic Minerals478
  • 5Properties of Association Colloids—Micelles479
  • 6Detergency484
  • AGeneral Aspects of Soil Removal484
  • BFactors in Detergent Action486
  • CAdsorption of Detergents on Fabrics487
  • DDetergents in Commercial Use488
XIVEmulsions, Foams, and Aerosols500
  • 1Introduction500
  • 2Emulsions—General Properties501
  • 3Factors Determining Emulsion Stabilization503
  • AMacroscopic Theories of Emulsion Stabilization504
  • BSpecific Chemical and Structural Effects505
  • CLong-Range Forces as a Factor in Emulsion Stability506
  • DStabilization of Emulsions by Solid Particles510
  • 4The Aging and Inversion of Emulsions510
  • AFlocculation and Coagulation Kinetics511
  • BInversion and Breaking of Emulsions513
  • 5The Hydrophile–Lipophile Balance513
  • 6Microemulsions516
  • 7Foam Structure519
  • 8Foam Drainage521
  • ADrainage of Single Films521
  • BDrainage of Foams523
  • 9Foam Stability524
  • 10Aerosols525
XVMacromolecular Surface Films, Charged Films, and Langmuir–Blodgett Layers537
  • 1Introduction537
  • 2Langmuir Films of Polymers537
  • AAdsorption and Phase Behavior537
  • BDynamics and Rheology541
  • 3Langmuir Films of Proteins542
  • 4Films of Other Biological Substances544
  • 5Membranes, Bilayers, and Vesicles548
  • 6Films at Liquid–Liquid Interfaces and on Nonaqueous Liquid Surfaces551
  • 7Charged Films553
  • AEquation of State for Charged Films553
  • BInfluence of Subphase pH on the State of Monomolecular Films557
  • 8Langmuir–Blodgett Films557
  • AStructure and Characterization of LB Films558
  • BMixed LB Films and Films of Polymers and Colloids560
  • CStudies of the LB Deposition Process562
XVIThe Solid–Gas Interface—General Considerations571
  • 1Introduction571
  • 2The Surface Area of Solids572
  • AThe Meaning of Surface Area572
  • BSurfaces as Having a Fractal Geometry574
  • CMethods Requiring Knowledge of the Surface Free Energy or Total Energy576
  • DRate of Dissolving577
  • EThe Mercury Porosimeter577
  • FOther Methods of Surface Area Determination580
  • 3The Structure and Chemical Nature of Solid Surfaces581
  • 4The Nature of the Solid–Adsorbate Complex582
  • AEffect of Adsorption on Adsorbate Properties582
  • BEffect of the Adsorbate on the Adsorbent589
  • CThe Adsorbate–Adsorbent Bond591
XVIIAdsorption of Gases and Vapors on Solids599
  • 1Introduction599
  • 2The Adsorption Time601
  • 3The Langmuir Adsorption Isotherm603
  • AKinetic Derivation604
  • BStatistical Thermodynamic Derivation606
  • CAdsorption Entropies609
  • DLateral Interaction613
  • EExperimental Applications of the Langmuir Equation615
  • 4Experimental Procedures615
  • 5The BET and Related Isotherms617
  • ADerivation of the BET Equation618
  • BProperties of the BET Equation620
  • CModifications of the BET Equation621
  • 6Isotherms Based on the Equation of State of the Adsorbed Film622
  • AFilm Pressure–Area Diagrams from Adsorption Isotherms623
  • BAdsorption Isotherms from Two-Dimensional Equations of State623
  • 7The Potential Theory625
  • AThe Polanyi Treatment625
  • BIsotherms Based on an Assumed Variation of Potential with Distance627
  • CThe Polarization Model629
  • 8Comparison of the Surface Areas from the Various Multilayer Models630
  • 9The Characteristic Isotherm and Related Concepts631
  • 10Chemical Physics of Submonolayer Adsorption634
  • 11Phase Transformations in the Multilayer Region639
  • 12Thermodynamics of Adsorption641
  • ATheoretical Considerations641
  • BExperimental Heats and Energies of Adsorption647
  • 13Critical Comparison of the Various Models for Adsorption652
  • AThe Langmuir–BET Model652
  • BTwo-Dimensional Equation of State Treatments653
  • CThe Potential Model654
  • 14Physical Adsorption on Heterogeneous Surfaces655
  • ADistribution of Site Energy Patches655
  • BThermodynamics of Adsorption on Heterogeneous Surfaces659
  • CPoint versus Patch Site Energy Distributions660
  • DGeometric Heterogeneity660
  • 15Rate of Adsorption661
  • 16Adsorption on Porous Solids—Hysteresis662
  • AMolecular Sieves662
  • BCapillary Condensation664
  • CMicropore Analysis669
XVIIIChemisorption and Catalysis685
  • 1Introduction685
  • 2Chemisorption: The Molecular View686
  • ALEED Structures686
  • BSurface Microscopies688
  • CSpectroscopy of Chemisorbed Species689
  • DWork Function and Related Measurements693
  • EProgrammed Desorption694
  • 3Chemisorption Isotherms698
  • AVariable Heat of Adsorption698
  • BEffect of Site and Adsorbate Coordination Number701
  • CAdsorption Thermodynamics702
  • 4Kinetics of Chemisorption703
  • AActivation Energies703
  • BRates of Adsorption705
  • CRates of Desorption707
  • 5Surface Mobility709
  • 6The Chemisorption Bond712
  • ASome General Aspects712
  • BMetals715
  • CSemiconductors717
  • DAcid–Base Systems718
  • 7Mechanisms of Heterogeneous Catalysis720
  • AAdsorption or Desorption as the Rate-Determining Step720
  • BReaction within the Adsorbed Film as the Rate-Determining Step722
  • 8Influence of the Adsorption Isotherm on the Kinetics of Heterogeneous Catalysis724
  • AUnimolecular Surface Reactions724
  • BBimolecular Surface Reactions726
  • 9Mechanisms of a Few Catalyzed Reactions728
  • AAmmonia Synthesis729
  • BFischer–Tropsch Reactions730
  • CHydrogenation of Ethylene733
  • DCatalytic Cracking of Hydrocarbons and Related Reactions734
  • EOxidation of CO735
  • FPhotochemical and Photoassisted Processes at Surfaces738

표면 화학의 고전. 인쇄 목차 원본으로 18개 장 전부를 절·소절·쪽수까지 확인했다. 장은 로마 숫자, 절은 아라비아 숫자, 소절은 알파벳이다. 9부에서 실제로 기대는 곳은 II장(표면장력·Young–Laplace·접촉각 측정법)·VII장(고체 표면 에너지)·X장(고–액 계면과 접촉각 히스테리시스)·XIII장(젖음성)·XVI~XVII장(표면적·Langmuir·BET 흡착 등온식)·XVIII장(화학흡착과 촉매)이다. 각 장 끝의 Problems·General References·Textual References는 싣지 않았다.

Physics at Surfaces

9부Andrew Zangwill · Cambridge University Press, 1988 · ISBN 978-0-521-34752-5  장 수준 확보

0Historical sketch1

Part 1 — Clean surfaces5

1Thermodynamics7
2Chemical analysis20
3Crystal structure28
4Electronic structure54
5Phase transitions110
6Elementary excitations138
7Optical properties163

Part 2 — Adsorption183

8Physisorption185
9Chemisorption204
10Crystal structure232
11Phase transitions257
12Electronic structure292
13Energy transfer328
14Kinetics and dynamics360
15Surface reactions400
16Epitaxy421

References433

9부에 표면물리를 정면으로 다루는 교재가 없어(Ohring은 박막 공정, Adamson은 콜로이드 화학) 들였다. 확보한 것이 케임브리지 온라인 목차라 장까지만 실려 있다 — 절 제목·쪽수가 없어 장 수준 확보로 두고, 인용은 “Zangwill Ch.5 (p.110–137)”처럼 장 단위로 적는다. 청정 표면(1~7장)과 흡착(8~16장)이 같은 주제를 두 번 도는 구성이라 3장·10장(결정 구조), 4장·12장(전자 구조), 5장·11장(상전이)이 짝을 이룬다. 9.1(표면의 구조)은 3장, 9.5(표면 전자 구조)는 4장, 9.6(표면 여기와 광학적 성질)은 6·7장(표면 플라스몬·포논, 표면 광학), 9.7(표면과 흡착층의 상전이)은 5·11장이 근거다. 16장 Epitaxy는 9.9와, 2장 Chemical analysis는 9.13(표면 분석)과 겹친다. 마지막 장을 인용할 때는 References(433)가 끝쪽 경계가 된다.

10부 · 나노소재공학

Nanostructures and Nanomaterials: Synthesis, Properties and Applications

10부Guozhong Cao · 1st ed. · Imperial College Press, 2004 · ISBN 1-86094-415-9  원본 대조

1Introduction1
  • 1.1Introduction1
  • 1.2Emergence of Nanotechnology4
  • 1.3Bottom-Up and Top-Down Approaches7
  • 1.4Challenges in Nanotechnology10
  • 1.5Scope of the Book11
2Physical Chemistry of Solid Surfaces15
  • 2.1Introduction15
  • 2.2Surface Energy17
  • 2.3Chemical Potential as a Function of Surface Curvature26
  • 2.4Electrostatic Stabilization32
  • 2.4.1Surface charge density32
  • 2.4.2Electric potential at the proximity of solid surface33
  • 2.4.3Van der Waals attraction potential36
  • 2.4.4Interactions between two particles: DLVO theory38
  • 2.5Steric Stabilization42
  • 2.5.1Solvent and polymer43
  • 2.5.2Interactions between polymer layers45
  • 2.5.3Mixed steric and electric interactions47
  • 2.6Summary48
3Zero-Dimensional Nanostructures: Nanoparticles51
  • 3.1Introduction51
  • 3.2Nanoparticles through Homogeneous Nucleation53
  • 3.2.1Fundamentals of homogeneous nucleation53
  • 3.2.2Subsequent growth of nuclei58
  • 3.2.2.1Growth controlled by diffusion59
  • 3.2.2.2Growth controlled by surface process59
  • 3.2.3Synthesis of metallic nanoparticles63
  • 3.2.3.1Influences of reduction reagents67
  • 3.2.3.2Influences by other factors69
  • 3.2.3.3Influences of polymer stabilizer72
  • 3.2.4Synthesis of semiconductor nanoparticles74
  • 3.2.5Synthesis of oxide nanoparticles81
  • 3.2.5.1Introduction to sol-gel processing82
  • 3.2.5.2Forced hydrolysis85
  • 3.2.5.3Controlled release of ions87
  • 3.2.6Vapor phase reactions88
  • 3.2.7Solid state phase segregation89
  • 3.3Nanoparticles through Heterogeneous Nucleation93
  • 3.3.1Fundamentals of heterogeneous nucleation93
  • 3.3.2Synthesis of nanoparticles95
  • 3.4Kinetically Confined Synthesis of Nanoparticles96
  • 3.4.1Synthesis inside micelles or using microemulsions96
  • 3.4.2Aerosol synthesis98
  • 3.4.3Growth termination99
  • 3.4.4Spray pyrolysis100
  • 3.4.5Template-based synthesis101
  • 3.5Epitaxial Core-Shell Nanoparticles101
  • 3.6Summary104
4One-Dimensional Nanostructures: Nanowires and Nanorods110
  • 4.1Introduction110
  • 4.2Spontaneous Growth111
  • 4.2.1Evaporation (dissolution)–condensation growth112
  • 4.2.1.1Fundamentals of evaporation (dissolution)–condensation growth112
  • 4.2.1.2Evaporation–condensation growth119
  • 4.2.1.3Dissolution–condensation growth123
  • 4.2.2Vapor (or solution)–liquid–solid (VLS or SLS) growth127
  • 4.2.2.1Fundamental aspects of VLS and SLS growth127
  • 4.2.2.2VLS growth of various nanowires131
  • 4.2.2.3Control of the size of nanowires134
  • 4.2.2.4Precursors and catalysts138
  • 4.2.2.5SLS growth140
  • 4.2.3Stress-induced recrystallization142
  • 4.3Template-Based Synthesis143
  • 4.3.1Electrochemical deposition144
  • 4.3.2Electrophoretic deposition151
  • 4.3.3Template filling157
  • 4.3.3.1Colloidal dispersion filling158
  • 4.3.3.2Melt and solution filling160
  • 4.3.3.3Chemical vapor deposition161
  • 4.3.3.4Deposition by centrifugation161
  • 4.3.4Converting through chemical reactions162
  • 4.4Electrospinning164
  • 4.5Lithography165
  • 4.6Summary168
5Two-Dimensional Nanostructures: Thin Films173
  • 5.1Introduction173
  • 5.2Fundamentals of Film Growth174
  • 5.3Vacuum Science178
  • 5.4Physical Vapor Deposition (PVD)182
  • 5.4.1Evaporation183
  • 5.4.2Molecular beam epitaxy (MBE)185
  • 5.4.3Sputtering186
  • 5.4.4Comparison of evaporation and sputtering188
  • 5.5Chemical Vapor Deposition (CVD)189
  • 5.5.1Typical chemical reactions189
  • 5.5.2Reaction kinetics190
  • 5.5.3Transport phenomena191
  • 5.5.4CVD methods194
  • 5.5.5Diamond films by CVD197
  • 5.6Atomic Layer Deposition (ALD)199
  • 5.7Superlattices204
  • 5.8Self-Assembly205
  • 5.8.1Monolayers of organosilicon or alkylsilane derivatives208
  • 5.8.2Monolayers of alkanethiols and sulfides210
  • 5.8.3Monolayers of carboxylic acids, amines and alcohols212
  • 5.9Langmuir–Blodgett Films213
  • 5.10Electrochemical Deposition218
  • 5.11Sol-Gel Films219
  • 5.12Summary223
6Special Nanomaterials229
  • 6.1Introduction229
  • 6.2Carbon Fullerenes and Nanotubes230
  • 6.2.1Carbon fullerenes230
  • 6.2.2Fullerene-derived crystals232
  • 6.2.3Carbon nanotubes232
  • 6.3Micro and Mesoporous Materials238
  • 6.3.1Ordered mesoporous structures239
  • 6.3.2Random mesoporous structures245
  • 6.3.3Crystalline microporous materials: zeolites249
  • 6.4Core-Shell Structures257
  • 6.4.1Metal-oxide structures257
  • 6.4.2Metal–polymer structures260
  • 6.4.3Oxide–polymer structures261
  • 6.5Organic–Inorganic Hybrids263
  • 6.5.1Class I hybrids263
  • 6.5.2Class II hybrids264
  • 6.6Intercalation Compounds266
  • 6.7Nanocomposites and Nanograined Materials267
  • 6.8Summary268
7Nanostructures Fabricated by Physical Techniques277
  • 7.1Introduction277
  • 7.2Lithography278
  • 7.2.1Photolithography279
  • 7.2.2Phase-shifting photolithography283
  • 7.2.3Electron beam lithography284
  • 7.2.4X-ray lithography287
  • 7.2.5Focused ion beam (FIB) lithography288
  • 7.2.6Neutral atomic beam lithography290
  • 7.3Nanomanipulation and Nanolithography291
  • 7.3.1Scanning tunneling microscopy (STM)292
  • 7.3.2Atomic force microscopy (AFM)294
  • 7.3.3Near-field scanning optical microscopy (NSOM)296
  • 7.3.4Nanomanipulation298
  • 7.3.5Nanolithography303
  • 7.4Soft Lithography308
  • 7.4.1Microcontact printing308
  • 7.4.2Molding310
  • 7.4.3Nanoimprint310
  • 7.4.4Dip-pen nanolithography313
  • 7.5Assembly of Nanoparticles and Nanowires314
  • 7.5.1Capillary forces315
  • 7.5.2Dispersion interactions316
  • 7.5.3Shear force assisted assembly318
  • 7.5.4Electric-field assisted assembly318
  • 7.5.5Covalently linked assembly319
  • 7.5.6Gravitational field assisted assembly319
  • 7.5.7Template-assisted assembly319
  • 7.6Other Methods for Microfabrication321
  • 7.7Summary321
8Characterization and Properties of Nanomaterials329
  • 8.1Introduction329
  • 8.2Structural Characterization330
  • 8.2.1X-ray diffraction (XRD)331
  • 8.2.2Small angle X-ray scattering (SAXS)333
  • 8.2.3Scanning electron microscopy (SEM)336
  • 8.2.4Transmission electron microscopy (TEM)338
  • 8.2.5Scanning probe microscopy (SPM)340
  • 8.2.6Gas adsorption343
  • 8.3Chemical Characterization344
  • 8.3.1Optical spectroscopy345
  • 8.3.2Electron spectroscopy349
  • 8.3.3Ionic spectrometry350
  • 8.4Physical Properties of Nanomaterials352
  • 8.4.1Melting points and lattice constants353
  • 8.4.2Mechanical properties357
  • 8.4.3Optical properties362
  • 8.4.3.1Surface plasmon resonance362
  • 8.4.3.2Quantum size effects367
  • 8.4.4Electrical conductivity371
  • 8.4.4.1Surface scattering371
  • 8.4.4.2Change of electronic structure374
  • 8.4.4.3Quantum transport375
  • 8.4.4.4Effect of microstructure379
  • 8.4.5Ferroelectrics and dielectrics380
  • 8.4.6Superparamagnetism382
  • 8.5Summary384
9Applications of Nanomaterials391
  • 9.1Introduction391
  • 9.2Molecular Electronics and Nanoelectronics392
  • 9.3Nanobots394
  • 9.4Biological Applications of Nanoparticles396
  • 9.5Catalysis by Gold Nanoparticles397
  • 9.6Band Gap Engineered Quantum Devices399
  • 9.6.1Quantum well devices399
  • 9.6.2Quantum dot devices401
  • 9.7Nanomechanics402
  • 9.8Carbon Nanotube Emitters404
  • 9.9Photoelectrochemical Cells406
  • 9.10Photonic Crystals and Plasmon Waveguides409
  • 9.10.1Photonic crystals409
  • 9.10.2Plasmon waveguides411
  • 9.11Summary411
부록Periodic Table · SI Units · Fundamental Physical Constants · 14 Lattice Types · Electromagnetic Spectrum · Greek Alphabet419

판을 1판으로 바로잡았다. 이 항목은 2판(Cao·Wang, World Scientific, 2011) 서지로 적혀 있었으나 확보한 인쇄 목차 원본이 1판이라 1판 기준으로 교체했다 — 판이 바뀌면 절 번호와 쪽수가 모두 달라지므로 인용은 1판으로 고정한다. 9개 장 전부를 4단계(x.y.z.w)까지 확인했다. 10부의 뼈대는 3~5장(0·1·2차원 나노구조)이고, 5.4~5.6(PVD·CVD·ALD)과 7.2(리소그래피)는 18부 공정과 겹치므로 중복 서술을 피할 것. 2장은 9부(표면·계면)의 보조 근거다.

Introduction to Nanotechnology

10부Charles P. Poole Jr. · Frank J. Owens · Wiley-Interscience, 2003 · ISBN 0-471-07935-9  원본 대조

1Introduction1
2Introduction to Physics of the Solid State8
  • 2.1Structure8
  • 2.1.1Size Dependence of Properties8
  • 2.1.2Crystal Structures9
  • 2.1.3Face-Centered Cubic Nanoparticles12
  • 2.1.4Tetrahedrally Bonded Semiconductor Structures15
  • 2.1.5Lattice Vibrations18
  • 2.2Energy Bands20
  • 2.2.1Insulators, Semiconductors, and Conductors20
  • 2.2.2Reciprocal Space22
  • 2.2.3Energy Bonds and Gaps of Semiconductors23
  • 2.2.4Effective Masses28
  • 2.2.5Fermi Surfaces29
  • 2.3Localized Particles30
  • 2.3.1Donors, Acceptors, and Deep Traps30
  • 2.3.2Mobility31
  • 2.3.3Excitons32
3Methods of Measuring Properties35
  • 3.1Introduction35
  • 3.2Structure36
  • 3.2.1Atomic Structures36
  • 3.2.2Crystallography37
  • 3.2.3Particle Size Determination42
  • 3.2.4Surface Structure45
  • 3.3Microscopy46
  • 3.3.1Transmission Electron Microscopy46
  • 3.3.2Field Ion Microscopy51
  • 3.3.3Scanning Microscopy51
  • 3.4Spectroscopy58
  • 3.4.1Infrared and Raman Spectroscopy58
  • 3.4.2Photoemission and X-Ray Spectroscopy62
  • 3.4.3Magnetic Resonance68
4Properties of Individual Nanoparticles72
  • 4.1Introduction72
  • 4.2Metal Nanoclusters74
  • 4.2.1Magic Numbers74
  • 4.2.2Theoretical Modeling of Nanoparticles75
  • 4.2.3Geometric Structure78
  • 4.2.4Electronic Structure81
  • 4.2.5Reactivity83
  • 4.2.6Fluctuations86
  • 4.2.7Magnetic Clusters86
  • 4.2.8Bulk to Nanotransition88
  • 4.3Semiconducting Nanoparticles90
  • 4.3.1Optical Properties90
  • 4.3.2Photofragmentation92
  • 4.3.3Coulombic Explosion93
  • 4.4Rare Gas and Molecular Clusters94
  • 4.4.1Inert-Gas Clusters94
  • 4.4.2Superfluid Clusters95
  • 4.4.3Molecular Clusters96
  • 4.5Methods of Synthesis97
  • 4.5.1RF Plasma97
  • 4.5.2Chemical Methods98
  • 4.5.3Thermolysis99
  • 4.5.4Pulsed Laser Methods100
  • 4.6Conclusion101
5Carbon Nanostructures103
  • 5.1Introduction103
  • 5.2Carbon Molecules103
  • 5.2.1Nature of the Carbon Bond103
  • 5.2.2New Carbon Structures105
  • 5.3Carbon Clusters106
  • 5.3.1Small Carbon Clusters106
  • 5.3.2Discovery of C60107
  • 5.3.3Structure of C60 and Its Crystal110
  • 5.3.4Alkali-Doped C60110
  • 5.3.5Superconductivity in C60112
  • 5.3.6Larger and Smaller Fullerenes113
  • 5.3.7Other Buckyballs113
  • 5.4Carbon Nanotubes114
  • 5.4.1Fabrication114
  • 5.4.2Structure117
  • 5.4.3Electrical Properties118
  • 5.4.4Vibrational Properties122
  • 5.4.5Mechanical Properties123
  • 5.5Applications of Carbon Nanotubes125
  • 5.5.1Field Emission and Shielding125
  • 5.5.2Computers126
  • 5.5.3Fuel Cells127
  • 5.5.4Chemical Sensors128
  • 5.5.5Catalysis129
  • 5.5.6Mechanical Reinforcement130
6Bulk Nanostructured Materials133
  • 6.1Solid Disordered Nanostructures133
  • 6.1.1Methods of Synthesis133
  • 6.1.2Failure Mechanisms of Conventional Grain-Sized Materials137
  • 6.1.3Mechanical Properties139
  • 6.1.4Nanostructured Multilayers141
  • 6.1.5Electrical Properties142
  • 6.1.6Other Properties147
  • 6.1.7Metal Nanocluster Composite Glasses148
  • 6.1.8Porous Silicon150
  • 6.2Nanostructured Crystals153
  • 6.2.1Natural Nanocrystals153
  • 6.2.2Computational Prediction of Cluster Lattices153
  • 6.2.3Arrays of Nanoparticles in Zeolites154
  • 6.2.4Crystals of Metal Nanoparticles157
  • 6.2.5Nanoparticle Lattices in Colloidal Suspensions158
  • 6.2.6Photonic Crystals159
7Nanostructured Ferromagnetism165
  • 7.1Basics of Ferromagnetism165
  • 7.2Effect of Bulk Nanostructuring of Magnetic Properties170
  • 7.3Dynamics of Nanomagnets172
  • 7.4Nanopore Containment of Magnetic Particles176
  • 7.5Nanocarbon Ferromagnets177
  • 7.6Giant and Colossal Magnetoresistance181
  • 7.7Ferrofluids186
8Optical and Vibrational Spectroscopy194
  • 8.1Introduction194
  • 8.2Infrared Frequency Range196
  • 8.2.1Spectroscopy of Semiconductors; Excitons196
  • 8.2.2Infrared Surface Spectroscopy198
  • 8.2.3Raman Spectroscopy203
  • 8.2.4Brillouin Spectroscopy210
  • 8.3Luminescence213
  • 8.3.1Photoluminescence213
  • 8.3.2Surface States215
  • 8.3.3Thermoluminescence221
  • 8.4Nanostructures in Zeolite Cages222
9Quantum Wells, Wires, and Dots226
  • 9.1Introduction226
  • 9.2Preparation of Quantum Nanostructures227
  • 9.3Size and Dimensionality Effects231
  • 9.3.1Size Effects231
  • 9.3.2Conduction Electrons and Dimensionality233
  • 9.3.3Fermi Gas and Density of States234
  • 9.3.4Potential Wells236
  • 9.3.5Partial Confinement241
  • 9.3.6Properties Dependent on Density of States242
  • 9.4Excitons244
  • 9.5Single-Electron Tunneling245
  • 9.6Applications248
  • 9.6.1Infrared Detectors248
  • 9.6.2Quantum Dot Lasers251
  • 9.7Superconductivity253
10Self-Assembly and Catalysis257
  • 10.1Self-Assembly257
  • 10.1.1Process of Self-Assembly257
  • 10.1.2Semiconductor Islands258
  • 10.1.3Monolayers260
  • 10.2Catalysis264
  • 10.2.1Nature of Catalysis264
  • 10.2.2Surface Area of Nanoparticles264
  • 10.2.3Porous Materials268
  • 10.2.4Pillared Clays273
  • 10.2.5Colloids277
11Organic Compounds and Polymers281
  • 11.1Introduction281
  • 11.2Forming and Characterizing Polymers283
  • 11.2.1Polymerization283
  • 11.2.2Sizes of Polymers284
  • 11.3Nanocrystals285
  • 11.3.1Condensed Ring Types285
  • 11.3.2Polydiacetylene Types289
  • 11.4Polymers292
  • 11.4.1Conductive Polymers292
  • 11.4.2Block Copolymers293
  • 11.5Supramolecular Structures295
  • 11.5.1Transition-Metal-Mediated Types295
  • 11.5.2Dendritic Molecules296
  • 11.5.3Supramolecular Dendrimers302
  • 11.5.4Micelles305
12Biological Materials310
  • 12.1Introduction310
  • 12.2Biological Building Blocks311
  • 12.2.1Sizes of Building Blocks and Nanostructures311
  • 12.2.2Polypeptide Nanowire and Protein Nanoparticle314
  • 12.3Nucleic Acids316
  • 12.3.1DNA Double Nanowire316
  • 12.3.2Genetic Code and Protein Synthesis322
  • 12.4Biological Nanostructures324
  • 12.4.1Examples of Proteins324
  • 12.4.2Micelles and Vesicles326
  • 12.4.3Multilayer Films329
13Nanomachines and Nanodevices332
  • 13.1Microelectromechanical Systems (MEMSs)332
  • 13.2Nanoelectromechanical Systems (NEMSs)335
  • 13.2.1Fabrication335
  • 13.2.2Nanodevices and Nanomachines339
  • 13.3Molecular and Supramolecular Switches345
부록 AFormulas for Dimensionality357
  • A.1Introduction357
  • A.2Delocalization357
  • A.3Partial Confinement358
부록 BTabulations of Semiconducting Material Properties361

인쇄 목차 원본으로 13개 장과 부록 A·B를 소절·쪽수까지 확인했다. 이전에 괄호로 묶어 뭉뚱그렸던 소절을 원본 번호대로 풀었다. Ch.2·9는 Kittel(7부)과 상당 부분 겹치며, 고유하게 유용한 것은 Ch.5(탄소 나노구조)·Ch.7(나노 강자성·GMR)·Ch.13(MEMS/NEMS)이다.

Nanophysics and Nanotechnology

10부Edward L. Wolf · 2nd ed. · Wiley-VCH, 2006 · ISBN 3-527-40651-4  원본 대조

1Introduction1
  • 1.1Nanometers, Micrometers, Millimeters3
  • 1.2Moore’s Law7
  • 1.3Esaki’s Quantum Tunneling Diode8
  • 1.4Quantum Dots of Many Colors9
  • 1.5GMR 100 Gb Hard Drive “Read” Heads11
  • 1.6Accelerometers in your Car13
  • 1.7Nanopore Filters14
  • 1.8Nanoscale Elements in Traditional Technologies14
2Systematics of Making Things Smaller, Pre-quantum17
  • 2.1Mechanical Frequencies Increase in Small Systems17
  • 2.2Scaling Relations Illustrated by a Simple Harmonic Oscillator20
  • 2.3Scaling Relations Illustrated by Simple Circuit Elements21
  • 2.4Thermal Time Constants and Temperature Differences Decrease22
  • 2.5Viscous Forces Become Dominant for Small Particles in Fluid Media22
  • 2.6Frictional Forces can Disappear in Symmetric Molecular Scale Systems24
3What are Limits to Smallness?27
  • 3.1Particle (Quantum) Nature of Matter: Photons, Electrons, Atoms, Molecules27
  • 3.2Biological Examples of Nanomotors and Nanodevices28
  • 3.2.1Linear Spring Motors29
  • 3.2.2Linear Engines on Tracks30
  • 3.2.3Rotary Motors33
  • 3.2.4Ion Channels, the Nanotransistors of Biology36
  • 3.3How Small can you Make it?38
  • 3.3.1What are the Methods for Making Small Objects?38
  • 3.3.2How Can you See What you Want to Make?39
  • 3.3.3How Can you Connect it to the Outside World?41
  • 3.3.4If you Can’t See it or Connect to it, Can you Make it Self-assemble and Work on its Own?41
  • 3.3.5Approaches to Assembly of Small Three-dimensional Objects41
  • 3.3.6Use of DNA Strands in Guiding Self-assembly of Nanometer Size Structures45
4Quantum Nature of the Nanoworld49
  • 4.1Bohr’s Model of the Nuclear Atom49
  • 4.1.1Quantization of Angular Momentum50
  • 4.1.2Extensions of Bohr’s Model51
  • 4.2Particle-wave Nature of Light and Matter, DeBroglie Formulas λ = h/p, E = hν52
  • 4.3Wavefunction Ψ for Electron, Probability Density Ψ*Ψ, Traveling and Standing Waves53
  • 4.4Maxwell’s Equations; E and B as Wavefunctions for Photons, Optical Fiber Modes57
  • 4.5The Heisenberg Uncertainty Principle58
  • 4.6Schrodinger Equation, Quantum States and Energies, Barrier Tunneling59
  • 4.6.1Schrodinger Equations in one Dimension60
  • 4.6.2The Trapped Particle in one Dimension61
  • 4.6.3Reflection and Tunneling at a Potential Step63
  • 4.6.4Penetration of a Barrier, Escape Time from a Well, Resonant Tunneling Diode65
  • 4.6.5Trapped Particles in Two and Three Dimensions: Quantum Dot66
  • 4.6.62D Bands and Quantum Wires69
  • 4.6.7The Simple Harmonic Oscillator70
  • 4.6.8Schrodinger Equation in Spherical Polar Coordinates72
  • 4.7The Hydrogen Atom, One-electron Atoms, Excitons72
  • 4.7.1Magnetic Moments76
  • 4.7.2Magnetization and Magnetic Susceptibility77
  • 4.7.3Positronium and Excitons78
  • 4.8Fermions, Bosons and Occupation Rules79
5Quantum Consequences for the Macroworld81
  • 5.1Chemical Table of the Elements81
  • 5.2Nano-symmetry, Di-atoms, and Ferromagnets82
  • 5.2.1Indistinguishable Particles, and their Exchange82
  • 5.2.2The Hydrogen Molecule, Di-hydrogen: the Covalent Bond84
  • 5.3More Purely Nanophysical Forces: van der Waals, Casimir, and Hydrogen Bonding86
  • 5.3.1The Polar and van der Waals Fluctuation Forces87
  • 5.3.2The Casimir Force90
  • 5.3.3The Hydrogen Bond94
  • 5.4Metals as Boxes of Free Electrons: Fermi Level, DOS, Dimensionality95
  • 5.4.1Electronic Conduction, Resistivity, Mean Free Path, Hall Effect, Magnetoresistance98
  • 5.5Periodic Structures (e.g. Si, GaAs, InSb, Cu): Kronig–Penney Model for Electron Bands and Gaps100
  • 5.6Electron Bands and Conduction in Semiconductors and Insulators; Localization vs. Delocalization105
  • 5.7Hydrogenic Donors and Acceptors109
  • 5.7.1Carrier Concentrations in Semiconductors, Metallic Doping110
  • 5.7.2PN Junction, Electrical Diode I(V) Characteristic, Injection Laser114
  • 5.8More about Ferromagnetism, the Nanophysical Basis of Disk Memory119
  • 5.9Surfaces are Different; Schottky Barrier Thickness W = [2εεoVB/eND]1/2122
  • 5.10Ferroelectrics, Piezoelectrics and Pyroelectrics: Recent Applications to Advancing Nanotechnology123
6Self-assembled Nanostructures in Nature and Industry133
  • 6.1Carbon Atom 126C 1s2 2p4 (0.07 nm)134
  • 6.2Methane CH4, Ethane C2H6, and Octane C8H18135
  • 6.3Ethylene C2H4, Benzene C6H6, and Acetylene C2H2136
  • 6.4C60 Buckyball (~0.5 nm)136
  • 6.5C Nanotube (~0.5 nm)137
  • 6.5.1Si Nanowire (~5 nm)139
  • 6.6InAs Quantum Dot (~5 nm)140
  • 6.7AgBr Nanocrystal (0.1–2 μm)142
  • 6.8Fe3O4 Magnetite and Fe3S4 Greigite Nanoparticles in Magnetotactic Bacteria143
  • 6.9Self-assembled Monolayers on Au and Other Smooth Surfaces144
7Physics-based Experimental Approaches to Nanofabrication and Nanotechnology147
  • 7.1Silicon Technology: the INTEL-IBM Approach to Nanotechnology148
  • 7.1.1Patterning, Masks, and Photolithography148
  • 7.1.2Etching Silicon149
  • 7.1.3Defining Highly Conducting Electrode Regions150
  • 7.1.4Methods of Deposition of Metal and Insulating Films150
  • 7.2Lateral Resolution (Linewidths) Limited by Wavelength of Light, now 65 nm152
  • 7.2.1Optical and X-ray Lithography152
  • 7.2.2Electron-beam Lithography153
  • 7.3Sacrificial Layers, Suspended Bridges, Single-electron Transistors153
  • 7.4What is the Future of Silicon Computer Technology?155
  • 7.5Heat Dissipation and the RSFQ Technology156
  • 7.6Scanning Probe (Machine) Methods: One Atom at a Time160
  • 7.7Scanning Tunneling Microscope (STM) as Prototype Molecular Assembler162
  • 7.7.1Moving Au Atoms, Making Surface Molecules162
  • 7.7.2Assembling Organic Molecules with an STM165
  • 7.8Atomic Force Microscope (AFM) Arrays166
  • 7.8.1Cantilever Arrays by Photolithography166
  • 7.8.2Nanofabrication with an AFM167
  • 7.8.3Imaging a Single Electron Spin by a Magnetic-resonance AFM168
  • 7.9Fundamental Questions: Rates, Accuracy and More170
8Quantum Technologies Based on Magnetism, Electron and Nuclear Spin, and Superconductivity173
  • 8.1The Stern–Gerlach Experiment: Observation of Spin ½ Angular Momentum of the Electron176
  • 8.2Two Nuclear Spin Effects: MRI (Magnetic Resonance Imaging) and the “21.1 cm Line”177
  • 8.3Electron Spin ½ as a Qubit for a Quantum Computer: Quantum Superposition, Coherence180
  • 8.4Hard and Soft Ferromagnets183
  • 8.5The Origins of GMR (Giant Magnetoresistance): Spin-dependent Scattering of Electrons184
  • 8.6The GMR Spin Valve, a Nanophysical Magnetoresistance Sensor186
  • 8.7The Tunnel Valve, a Better (TMR) Nanophysical Magnetic Field Sensor188
  • 8.8Magnetic Random Access Memory (MRAM)190
  • 8.8.1Magnetic Tunnel Junction MRAM Arrays190
  • 8.8.2Hybrid Ferromagnet–Semiconductor Nonvolatile Hall Effect Gate Devices191
  • 8.9Spin Injection: the Johnson–Silsbee Effect192
  • 8.9.1Apparent Spin Injection from a Ferromagnet into a Carbon Nanotube195
  • 8.10Magnetic Logic Devices: a Majority Universal Logic Gate196
  • 8.11Superconductors and the Superconducting (Magnetic) Flux Quantum198
  • 8.12Josephson Effect and the Superconducting Quantum Interference Detector (SQUID)200
  • 8.13Superconducting (RSFQ) Logic/Memory Computer Elements203
9Silicon Nanoelectronics and Beyond207
  • 9.1Electron Interference Devices with Coherent Electrons208
  • 9.1.1Ballistic Electron Transport in Stubbed Quantum Waveguides: Experiment and Theory210
  • 9.1.2Well-defined Quantum Interference Effects in Carbon Nanotubes212
  • 9.2Carbon Nanotube Sensors and Dense Nonvolatile Random Access Memories214
  • 9.2.1A Carbon Nanotube Sensor of Polar Molecules, Making Use of the Inherently Large Electric Fields214
  • 9.2.2Carbon Nanotube Cross-bar Arrays for Ultra-dense Ultra-fast Nonvolatile Random Access Memory216
  • 9.3Resonant Tunneling Diodes, Tunneling Hot Electron Transistors220
  • 9.4Double-well Potential Charge Qubits222
  • 9.4.1Silicon-based Quantum Computer Qubits225
  • 9.5Single Electron Transistors226
  • 9.5.1The Radio-frequency Single Electron Transistor (RFSET), a Useful Proven Research Tool229
  • 9.5.2Readout of the Charge Qubit, with Sub-electron Charge Resolution229
  • 9.5.3A Comparison of SET and RTD (Resonant Tunneling Diode) Behaviors231
  • 9.6Experimental Approaches to the Double-well Charge Qubit232
  • 9.6.1Coupling of Two Charge Qubits in a Solid State (Superconducting) Context237
  • 9.7Ion Trap on a GaAs Chip, Pointing to a New Qubit238
  • 9.8Single Molecules as Active Elements in Electronic Circuits240
  • 9.9Hybrid Nanoelectronics Combining Si CMOS and Molecular Electronics: CMOL243
10Looking into the Future247
  • 10.1Drexler’s Mechanical (Molecular) Axle and Bearing247
  • 10.1.1Smalley’s Refutation of Machine Assembly248
  • 10.1.2Van der Waals Forces for Frictionless Bearings?250
  • 10.2The Concept of the Molecular Assembler is Flawed250
  • 10.3Could Molecular Machines Revolutionize Technology or even Self-replicate to Threaten Terrestrial Life?252
  • 10.4What about Genetic Engineering and Robotics?253
  • 10.5Possible Social and Ethical Implications of Biotechnology and Synthetic Biology255
  • 10.6Is there a Posthuman Future as Envisioned by Fukuyama?257

인쇄 목차 원본으로 10개 장을 절·소절·쪽수까지 확인했다(부제: An Introduction to Modern Concepts in Nanoscience). 이전에 한 줄로 합쳐 두었던 절을 원본대로 폈다. Ch.2의 스케일링 법칙(작아질 때 기계 주파수·열 시상수·점성력·마찰이 어떻게 변하는가)이 10.1의 근거다. Ch.8은 스핀트로닉스(GMR·스핀 밸브·TMR·MRAM·스핀 주입). Ch.10의 Drexler–Smalley 논쟁은 백과에 반영하지 않았다.

III

반도체 소자

11부 · 반도체 물리

Advanced Semiconductor Fundamentals

11부Robert F. Pierret · 2nd ed. · Prentice Hall, 2003 (Modular Series on Solid State Devices, Vol. VI)  원본 대조

1Basic Semiconductor Properties1
  • 1.1General Material Properties1
  • 1.2Crystal Structure5
  • 1.2.1The Unit Cell Concept5
  • 1.2.2Simple 3-D Unit Cells7
  • 1.2.3Bravais Lattices and Crystal Systems8
  • 1.2.4Specific Semiconductor Lattices11
  • 1.2.5Miller Indices13
  • 1.2.6Example Use of Miller Indices16
  • ·Wafer Surface Orientation16
  • ·Wafer Flats and Notches17
  • ·Pattern Alignment18
2Elements of Quantum Mechanics23
  • 2.1The Quantum Concept23
  • 2.1.1Blackbody Radiation23
  • 2.1.2The Bohr Atom25
  • 2.1.3Wave-Particle Duality28
  • 2.2Basic Formalism29
  • 2.2.1General Formulation29
  • 2.2.2Time-Independent Formulation31
  • 2.3Simple Problem Solutions32
  • 2.3.1The Free Particle33
  • 2.3.2Particle in a 1-D Box35
  • 2.3.3Finite Potential Well40
3Energy Band Theory51
  • 3.1Preliminary Considerations52
  • 3.1.1Simplifying Assumptions52
  • 3.1.2The Bloch Theorem52
  • 3.2Approximate One-Dimensional Analysis55
  • 3.2.1Kronig–Penney Model55
  • 3.2.2Mathematical Solution55
  • 3.2.3Energy Bands and Brillouin Zones58
  • 3.2.4Particle Motion and Effective Mass62
  • 3.2.5Carriers and Current67
  • 3.3Extrapolation of Concepts to Three Dimensions70
  • 3.3.1Brillouin Zones70
  • 3.3.2E–k Diagrams71
  • 3.3.3Constant-Energy Surfaces74
  • 3.3.4Effective Mass77
  • ·General Considerations77
  • ·Ge, Si, and GaAs78
  • ·Measurement80
  • 3.3.5Band Gap Energy81
4Equilibrium Carrier Statistics87
  • 4.1Density of States88
  • 4.1.1General Derivation89
  • 4.1.2Specific Materials93
  • ·Conduction Band—GaAs94
  • ·Conduction Band—Si, Ge94
  • ·Valence Band—Ge, Si, GaAs95
  • 4.2Fermi Function96
  • ·Introduction96
  • ·Problem Specification97
  • ·Derivation Proper98
  • ·Concluding Discussion100
  • 4.3Supplemental Information101
  • 4.3.1Equilibrium Distribution of Carriers101
  • 4.3.2The Energy Band Diagram102
  • 4.3.3Donors, Acceptors, Band Gap Centers107
  • 4.4Equilibrium Concentration Relationships111
  • 4.4.1Formulas for n and p112
  • 4.4.2ni and the np Product116
  • 4.4.3Charge Neutrality Relationship116
  • 4.4.4Relationships for ND+ and NA118
  • 4.5Concentration and EF Calculations120
  • 4.5.1General Information120
  • 4.5.2Equilibrium Carrier Concentrations122
  • ·Freeze-Out/Extrinsic T122
  • ·Extrinsic/Intrinsic T123
  • 4.5.3Determination of EF125
  • ·Exact Position of Ei125
  • ·Freeze-Out/Extrinsic T126
  • ·Extrinsic/Intrinsic T126
  • 4.5.4Degenerate Semiconductor Considerations127
5Recombination–Generation Processes134
  • 5.1Introduction134
  • 5.1.1Survey of R–G Processes134
  • ·Recombination Processes136
  • ·Generation Processes137
  • 5.1.2Momentum Considerations137
  • 5.2Recombination–Generation Statistics140
  • 5.2.1Definition of Terms140
  • 5.2.2Generalized Rate Relationships141
  • 5.2.3The Equilibrium Simplification144
  • 5.2.4Steady-State Relationship147
  • 5.2.5Specialized Steady-State Relationships149
  • ·Low Level Injection149
  • ·R–G Depletion Region151
  • 5.2.6Physical View of Carrier Capture152
  • 5.3Surface Recombination–Generation154
  • 5.3.1Introductory Comments154
  • 5.3.2General Rate Relationships (Single Level)156
  • 5.3.3Steady-State Relationships157
  • ·Single Level157
  • ·Multi-Level158
  • 5.3.4Specialized Steady-State Relationships159
  • ·Low Level Injection/Flat Band159
  • ·Depleted Surface161
  • 5.4Supplemental R–G Information162
  • ·Multistep Nature of Carrier Capture162
  • ·Manipulation of NT163
  • ·Selected Bulk Parametric Data163
  • ·Doping Dependence165
  • ·Selected Surface Parametric Data (Si/SiO2)165
6Carrier Transport175
  • 6.1Drift175
  • 6.1.1Definition-Visualization175
  • 6.1.2Drift Current176
  • 6.1.3Mobility178
  • ·Basic Information178
  • ·Theoretical Considerations179
  • ·Doping/Temperature Dependence182
  • 6.1.4High-Field/Narrow-Dimension Effects183
  • ·Velocity Saturation183
  • ·Intervalley Carrier Transfer188
  • ·Ballistic Transport/Velocity Overshoot189
  • 6.1.5Related Topics190
  • ·Resistivity190
  • ·Hall Effect192
  • 6.2Diffusion196
  • 6.2.1Definition-Visualization196
  • 6.2.2Diffusion Current197
  • 6.2.3Einstein Relationship200
  • 6.3Equations of State202
  • 6.3.1Current Equations202
  • ·Carrier Currents202
  • ·Dielectric Displacement Current203
  • ·Quasi-Fermi Levels203
  • 6.3.2Continuity Equations205
  • 6.3.3Minority Carrier Diffusion Equations206
  • 6.3.4Equations Summary208

캐리어 통계와 수송의 표준 학부 교재. 인쇄 목차 원본으로 6개 장 전부를 소절·쪽수까지 확인했다(초판 2002 → 2판 2003으로 발행 연도도 바로잡았다). 11부의 기준은 3장(에너지 밴드 이론)·4장(평형 캐리어 통계)·5장(재결합–생성)·6장(드리프트·확산·상태 방정식)이고, 1~2장은 7부·5부와 겹친다. 인쇄 목차에서 번호 없이 들여쓴 소제목은 ·로 표시했다. References·Source Listing·Problems는 싣지 않았다.

12부 · 기본 소자

Integrated Microelectronic Devices: Physics and Modeling

11·12부Jesús A. del Alamo · Pearson, 2018 · ISBN 978-0-13-467090-4  원본 대조

1Electrons, Photons, and Phonons1
  • 1.1Selected Concepts of Quantum Mechanics1
  • 1.1.1The dual nature of the photon1
  • 1.1.2The dual nature of the electron5
  • 1.1.3Electrons in confined environments7
  • 1.2Selected Concepts of Statistical Mechanics9
  • 1.2.1Thermal motion and thermal energy9
  • 1.2.2Thermal equilibrium10
  • 1.2.3Electron statistics12
  • 1.3Selected Concepts of Solid-State Physics17
  • 1.3.1Bonds and bands19
  • 1.3.2Metals, insulators, and semiconductors21
  • 1.3.3Density of states23
  • 1.3.4Lattice vibrations: phonons24
2Carrier Statistics in Equilibrium31
  • 2.1Conduction and Valence Bands; Bandgap; Holes31
  • 2.2Intrinsic Semiconductor36
  • 2.3Extrinsic Semiconductor39
  • 2.3.1Donors and acceptors40
  • 2.3.2Charge neutrality42
  • 2.3.3Equilibrium carrier concentration in a doped semiconductor43
  • 2.4Carrier Statistics in Equilibrium46
  • 2.4.1Conduction and valence band density of states46
  • 2.4.2Equilibrium electron concentration48
  • 2.4.3Equilibrium hole concentration54
  • 2.4.4np product in equilibrium56
  • 2.4.5Location of Fermi level58
  • AT2.1Temperature Dependence of the Bandgap63
  • AT2.2Selected Properties of the Fermi–Dirac Integral65
  • AT2.3Approximations for Strongly Degenerate Semiconductor66
  • AT2.4Statistics of Donor and Acceptor Ionization66
  • AT2.5Carrier Freeze-Out68
  • AT2.6Heavy-Doping Effects70
  • AT2.6.1The Mott transition72
  • AT2.6.2Bandgap narrowing74
3Carrier Generation and Recombination83
  • 3.1Generation and Recombination Mechanisms84
  • 3.2Thermal Equilibrium: Principle of Detailed Balance88
  • 3.3Generation and Recombination Rates in Thermal Equilibrium89
  • 3.3.1Band-to-band optical generation and recombination89
  • 3.3.2Auger generation and recombination91
  • 3.3.3Trap-assisted thermal generation and recombination92
  • 3.4Generation and Recombination Rates Outside Equilibrium96
  • 3.4.1Quasi-neutral low-level injection; recombination lifetime100
  • 3.4.2Extraction; generation lifetime105
  • 3.5Dynamics of Excess Carriers in Uniform Situations108
  • 3.5.1Example 1: Turn-on transient110
  • 3.5.2Example 2: Turn-off transient110
  • 3.5.3Example 3: A pulse of light111
  • 3.6Surface Generation and Recombination115
  • AT3.1Shockley–Read–Hall Model119
  • AT3.1.1Recombination lifetime120
  • AT3.1.2Generation lifetime122
  • AT3.2High-Level Injection123
4Carrier Drift and Diffusion131
  • 4.1Thermal Motion132
  • 4.1.1Thermal velocity132
  • 4.1.2Scattering133
  • 4.2Drift136
  • 4.2.1Drift velocity136
  • 4.2.2Velocity saturation139
  • 4.2.3Drift current140
  • 4.2.4Energy band diagram under electric field144
  • 4.3Diffusion147
  • 4.3.1Fick’s first law147
  • 4.3.2The Einstein relation149
  • 4.3.3Diffusion current150
  • 4.4Transit Time151
  • 4.5Nonuniformly Doped Semiconductor in Thermal Equilibrium153
  • 4.5.1Gauss’ law153
  • 4.5.2The Boltzmann relations156
  • 4.5.3Equilibrium carrier concentration159
  • 4.6Quasi-Fermi Levels and Quasi-Equilibrium168
  • AT4.1Selected Properties of the Gamma Function178
  • AT4.2Hot Carrier Effects178
  • AT4.2.1Energy relaxation versus momentum relaxation179
  • AT4.2.2Hot-electron transport180
  • AT4.2.3Impact ionization181
5Carrier Flow193
  • 5.1Continuity Equations194
  • 5.2Surface Continuity Equations196
  • 5.2.1Free surface196
  • 5.2.2Ohmic contact198
  • 5.3Shockley Equations202
  • 5.4Simplifications of Shockley Equations to One-Dimensional Quasi-Neutral Situations204
  • 5.5Majority Carrier Situations209
  • 5.5.1Example 1: Semiconductor bar under voltage212
  • 5.5.2Example 2: Integrated resistor214
  • 5.6Minority Carrier Situations218
  • 5.6.1Example 3: Diffusion and bulk recombination in a “long” bar220
  • 5.6.2Example 4: Diffusion and surface recombination in a “short” bar225
  • 5.6.3Length scales of minority carrier situations227
  • 5.7Dynamics of Majority Carrier Situations228
  • 5.8Dynamics of Minority Carrier Situations231
  • 5.8.1Example 5: Transient in a bar with S = ∞231
  • 5.9Transport in Space-Charge and High-Resistivity Regions237
  • 5.9.1Example 6: Drift in a high-resistivity region under external electric field239
  • 5.9.2Comparison between SCR and QNR transport241
  • 5.10Carrier Multiplication and Avalanche Breakdown243
  • 5.10.1Example 7: Carrier multiplication in a high-resistivity region with uniform electric field245
  • AT5.1Continuity Equations in Integral Form250
  • AT5.2Dielectric Relaxation251
  • AT5.3Advanced Topics Regarding Minority Carrier Situations253
  • AT5.3.1Advanced Example 1: Diffusion, drift, and recombination in a short bar with internal field253
  • AT5.3.2More on length scales of minority carrier situations255
  • AT5.3.3Advanced Example 2: Transient in a bar with finite surface recombination258
  • AT5.4Carrier Multiplication and Avalanche Breakdown Under Nonuniform Electric Field261
6PN Junction Diode281
  • 6.1The Ideal PN Junction Diode282
  • 6.2Ideal PN Junction in Thermal Equilibrium284
  • 6.3Current–Voltage Characteristics of the Ideal PN Diode291
  • 6.3.1Electrostatics under bias291
  • 6.3.2I–V characteristics: qualitative discussion292
  • 6.3.3I–V characteristics: quantitative models295
  • 6.4Charge–Voltage Characteristics of Ideal PN Diode308
  • 6.4.1Depletion charge309
  • 6.4.2Minority carrier charge310
  • 6.5Equivalent Circuit Models of the Ideal PN Diode313
  • 6.6Nonideal and Second-Order Effects320
  • 6.6.1Short diode320
  • 6.6.2Space-charge generation and recombination322
  • 6.6.3Series resistance326
  • 6.6.4Breakdown voltage328
  • 6.6.5Nonuniform doping distributions331
  • 6.6.6High-injection effects337
  • 6.7Integrated PN Diode340
  • 6.7.1Isolation340
  • 6.7.2Series resistance343
  • 6.7.3High–low junction345
  • AT6.1Validity of the depletion approximation349
  • AT6.2Quasi-neutral region resistance in ideal diode350
  • AT6.3Equivalent circuit model for circuit design351
  • AT6.4Switching characteristics of PN diode353
7Schottky Diode and Ohmic Contact369
  • 7.1The Ideal Schottky Diode370
  • 7.2Ideal Schottky Diode in Thermal Equilibrium372
  • 7.2.1A simpler system: a metal–metal junction372
  • 7.2.2Energy band lineup of metal–semiconductor junction376
  • 7.2.3Electrostatics of metal–semiconductor junction in equilibrium380
  • 7.3Current–Voltage Characteristics of Ideal Schottky Diode384
  • 7.3.1Electrostatics under bias384
  • 7.3.2I–V characteristics: qualitative discussion387
  • 7.3.3I–V characteristics: thermionic emission model390
  • 7.4Charge–Voltage Characteristics of Ideal Schottky Diode399
  • 7.5Equivalent Circuit Models for the Ideal Schottky Diode400
  • 7.6Nonideal and Second-Order Effects401
  • 7.6.1Series resistance401
  • 7.6.2Breakdown voltage404
  • 7.7Integrated Schottky Diode405
  • 7.8Ohmic Contacts407
  • 7.8.1Lateral ohmic contact: transmission-line model411
  • 7.8.2Boundary conditions imposed by ohmic contacts414
  • AT7.1Nonideal Schottky barrier height of metal–semiconductor junctions416
  • AT7.2Drift-diffusion model for I–V characteristics420
  • AT7.3Equivalent circuit model of Schottky diode for circuit design423
  • AT7.4Switching characteristics of Schottky diode424
8The Si Surface and the Metal–Oxide–Semiconductor Structure435
  • 8.1The Semiconductor Surface436
  • 8.2The Ideal Metal–Oxide–Semiconductor Structure441
  • 8.3The Ideal Metal–Oxide–Semiconductor Structure at Zero Bias442
  • 8.3.1General relations for the electrostatics of the ideal MOS structure444
  • 8.3.2Electrostatic of the MOS structure under zero bias447
  • 8.4The Ideal Metal–Oxide–Semiconductor Structure Under Bias451
  • 8.4.1Depletion453
  • 8.4.2Flatband455
  • 8.4.3Accumulation456
  • 8.4.4Threshold457
  • 8.4.5Inversion459
  • 8.4.6Summary of charge–voltage characteristics463
  • 8.5Dynamics of the MOS Structure465
  • 8.5.1Quasi-static C–V characteristics465
  • 8.5.2High-frequency C–V characteristics469
  • 8.5.3Deep depletion471
  • 8.6Weak Inversion and the Subthreshold Regime476
  • 8.7Three-Terminal MOS Structure479
  • AT8.1Surface states486
  • AT8.2Nonideal effects in MOS structure489
  • AT8.2.1Oxide charge489
  • AT8.2.2Interface states493
  • AT8.3Poisson–Boltzmann formulation of MOS electrostatics498
  • AT8.3.1Approximations for depletion511
  • AT8.3.2Approximations for accumulation512
  • AT8.3.3Approximations for inversion514
9The “Long” Metal–Oxide–Semiconductor Field-Effect Transistor531
  • 9.1The Ideal MOSFET534
  • 9.2Qualitative Operation of the Ideal MOSFET536
  • 9.3Inversion Layer Transport in the Ideal MOSFET538
  • 9.4Current–Voltage Characteristics of the Ideal MOSFET541
  • 9.4.1The cut-off regime541
  • 9.4.2The linear regime542
  • 9.4.3The saturation regime548
  • 9.4.4DC large-signal equivalent-circuit model of ideal MOSFET552
  • 9.4.5Energy band diagrams554
  • 9.5Charge–Voltage Characteristics of the Ideal MOSFET555
  • 9.5.1Depletion charge556
  • 9.5.2Inversion charge558
  • 9.6Small-Signal Behavior of Ideal MOSFET563
  • 9.6.1Small-signal equivalent circuit model of ideal MOSFET564
  • 9.6.2Short-circuit current-gain cut-off frequency, fT, of ideal MOSFET in saturation567
  • 9.7Nonideal Effects in MOSFET571
  • 9.7.1Body effect571
  • 9.7.2Effect of back bias576
  • 9.7.3Channel-length modulation580
  • 9.7.4The subthreshold regime584
  • 9.7.5Source and drain resistance590
  • AT9.1A More Detailed Study of Inversion Layer Transport595
  • AT9.1.1The sheet-charge approximation596
  • AT9.1.2The gradual-channel approximation597
  • AT9.1.3Validity of approximations599
10The “Short” Metal–Oxide–Semiconductor Field-Effect Transistor613
  • 10.1MOSFET Short-Channel Effects: Transport614
  • 10.1.1Mobility degradation614
  • 10.1.2Velocity saturation620
  • 10.2MOSFET Short-Channel Effects: Electrostatics627
  • 10.2.1Threshold voltage dependence on gate length: VT rolloff628
  • 10.2.2Threshold voltage dependence on VDS: drain-induced barrier lowering (DIBL)632
  • 10.2.3Subthreshold swing dependence on gate length and VDS636
  • 10.3MOSFET Short-Channel Effects: Gate Stack Scaling638
  • 10.3.1Gate capacitance638
  • 10.3.2Gate leakage current644
  • 10.4MOSFET High-Field Effects647
  • 10.4.1Electrostatics of velocity saturation region647
  • 10.4.2Impact ionization and substrate current651
  • 10.4.3Output conductance657
  • 10.4.4Gate-induced drain leakage661
  • 10.5MOSFET Scaling665
  • 10.5.1The MOSFET as a switch667
  • 10.5.2Constant field scaling of the ideal MOSFET670
  • 10.5.3Constant voltage scaling of the ideal MOSFET672
  • 10.5.4Generalized scaling of short MOSFETs673
  • 10.5.5MOSFET scaling: a historical perspective675
  • 10.5.6Evolution of MOSFET design681
  • AT10.1Electrostatics of Short MOSFET Around Threshold694
  • AT10.2Electrostatics of the Velocity Saturation Region697
11The Bipolar Junction Transistor707
  • 11.1The Ideal BJT709
  • 11.2Current–Voltage Characteristics of the Ideal BJT711
  • 11.2.1The forward-active regime716
  • 11.2.2The reverse regime723
  • 11.2.3The cut-off regime725
  • 11.2.4The saturation regime727
  • 11.2.5Output I–V characteristics729
  • 11.3Charge–Voltage Characteristics of Ideal BJT730
  • 11.3.1Depletion charge731
  • 11.3.2Minority carrier charge732
  • 11.4Small-Signal Behavior of the Ideal BJT in Forward-Active Regime736
  • 11.4.1Small-signal equivalent circuit model736
  • 11.4.2Common-emitter short-circuit current-gain cut-off frequency, fT737
  • 11.5Nonideal Effects in BJT746
  • 11.5.1Base-width modulation747
  • 11.5.2Emitter-base space-charge region recombination755
  • 11.5.3Impact ionization757
  • 11.5.4Breakdown voltage759
  • 11.5.5High collector current effects769
  • 11.5.6Parasitic resistance780
  • 11.5.7Nonuniform doping levels786
  • 11.6Evolution of BJT Design790
  • AT11.1Bipolar issues in MOSFETs796
  • AT11.1.1Latch-up796
  • AT11.1.2Floating-body effects in SOI MOSFETs798
  • AT11.1.3MOSFET breakdown and snap-back801

모든 장이 Summary·Further Reading으로 끝나고(절 번호가 붙어 있지만 목록에서는 생략했다), 그 뒤에 AT(Advanced Topics) 절이 따로 붙는다 — 이 책만의 층이라 그대로 실었다. 출판사 배포 목차가 11.3.2에서 끊겨 있던 부분(11.4~AT11.1.3)을 원서 인쇄 목차로 채웠다. 소자 장(6·7·9·11)이 같은 절 골격(이상 소자 → 열평형 → I–V → Q–V → 등가회로 → 비이상 효과 → 집적 소자)을 반복하는 것이 구조적 특징이고, 그 골격이 백과의 소자 장 템플릿이 됐다.

Solid State Electronic Devices

12부Ben G. Streetman · Sanjay Kumar Banerjee · 7th ed. · Pearson, 2015 · ISBN 978-1-292-06055-2 (Global Ed.)  원본 대조

1Crystal Properties and Growth of Semiconductors21
  • 1.1Semiconductor Materials21
  • 1.2Crystal Lattices23
  • 1.2.1Periodic Structures23
  • 1.2.2Cubic Lattices25
  • 1.2.3Planes and Directions27
  • 1.2.4The Diamond Lattice29
  • 1.3Bulk Crystal Growth32
  • 1.3.1Starting Materials32
  • 1.3.2Growth of Single-Crystal Ingots33
  • 1.3.3Wafers35
  • 1.3.4Doping36
  • 1.4Epitaxial Growth37
  • 1.4.1Lattice-Matching in Epitaxial Growth38
  • 1.4.2Vapor-Phase Epitaxy40
  • 1.4.3Molecular Beam Epitaxy42
  • 1.5Wave Propagation in Discrete, Periodic Structures44
2Atoms and Electrons52
  • 2.1Introduction to Physical Models53
  • 2.2Experimental Observations54
  • 2.2.1The Photoelectric Effect54
  • 2.2.2Atomic Spectra56
  • 2.3The Bohr Model57
  • 2.4Quantum Mechanics61
  • 2.4.1Probability and the Uncertainty Principle61
  • 2.4.2The Schrödinger Wave Equation63
  • 2.4.3Potential Well Problem65
  • 2.4.4Tunneling68
  • 2.5Atomic Structure and the Periodic Table69
  • 2.5.1The Hydrogen Atom70
  • 2.5.2The Periodic Table72
3Energy Bands and Charge Carriers in Semiconductors83
  • 3.1Bonding Forces and Energy Bands in Solids83
  • 3.1.1Bonding Forces in Solids84
  • 3.1.2Energy Bands86
  • 3.1.3Metals, Semiconductors, and Insulators89
  • 3.1.4Direct and Indirect Semiconductors90
  • 3.1.5Variation of Energy Bands with Alloy Composition92
  • 3.2Charge Carriers in Semiconductors94
  • 3.2.1Electrons and Holes94
  • 3.2.2Effective Mass99
  • 3.2.3Intrinsic Material103
  • 3.2.4Extrinsic Material104
  • 3.2.5Electrons and Holes in Quantum Wells107
  • 3.3Carrier Concentrations109
  • 3.3.1The Fermi Level109
  • 3.3.2Electron and Hole Concentrations at Equilibrium112
  • 3.3.3Temperature Dependence of Carrier Concentrations117
  • 3.3.4Compensation and Space Charge Neutrality119
  • 3.4Drift of Carriers in Electric and Magnetic Fields120
  • 3.4.1Conductivity and Mobility120
  • 3.4.2Drift and Resistance125
  • 3.4.3Effects of Temperature and Doping on Mobility126
  • 3.4.4High-Field Effects129
  • 3.4.5The Hall Effect129
  • 3.5Invariance of the Fermi Level at Equilibrium131
4Excess Carriers in Semiconductors142
  • 4.1Optical Absorption142
  • 4.2Luminescence145
  • 4.2.1Photoluminescence146
  • 4.2.2Electroluminescence148
  • 4.3Carrier Lifetime and Photoconductivity148
  • 4.3.1Direct Recombination of Electrons and Holes149
  • 4.3.2Indirect Recombination; Trapping151
  • 4.3.3Steady State Carrier Generation; Quasi-Fermi Levels154
  • 4.3.4Photoconductive Devices156
  • 4.4Diffusion of Carriers157
  • 4.4.1Diffusion Processes158
  • 4.4.2Diffusion and Drift of Carriers; Built-in Fields160
  • 4.4.3Diffusion and Recombination; The Continuity Equation163
  • 4.4.4Steady State Carrier Injection; Diffusion Length165
  • 4.4.5The Haynes–Shockley Experiment167
  • 4.4.6Gradients in the Quasi-Fermi Levels170
5Junctions179
  • 5.1Fabrication of p–n Junctions179
  • 5.1.1Thermal Oxidation180
  • 5.1.2Diffusion181
  • 5.1.3Rapid Thermal Processing183
  • 5.1.4Ion Implantation184
  • 5.1.5Chemical Vapor Deposition (CVD)187
  • 5.1.6Photolithography188
  • 5.1.7Etching191
  • 5.1.8Metallization193
  • 5.2Equilibrium Conditions194
  • 5.2.1The Contact Potential195
  • 5.2.2Equilibrium Fermi Levels200
  • 5.2.3Space Charge at a Junction200
  • 5.3Forward- and Reverse-Biased Junctions; Steady State Conditions205
  • 5.3.1Qualitative Description of Current Flow at a Junction205
  • 5.3.2Carrier Injection209
  • 5.3.3Reverse Bias218
  • 5.4Reverse-Bias Breakdown220
  • 5.4.1Zener Breakdown221
  • 5.4.2Avalanche Breakdown222
  • 5.4.3Rectifiers225
  • 5.4.4The Breakdown Diode228
  • 5.5Transient and A-C Conditions229
  • 5.5.1Time Variation of Stored Charge229
  • 5.5.2Reverse Recovery Transient232
  • 5.5.3Switching Diodes236
  • 5.5.4Capacitance of p–n Junctions236
  • 5.5.5The Varactor Diode241
  • 5.6Deviations from the Simple Theory242
  • 5.6.1Effects of Contact Potential on Carrier Injection243
  • 5.6.2Recombination and Generation in the Transition Region245
  • 5.6.3Ohmic Losses247
  • 5.6.4Graded Junctions248
  • 5.7Metal–Semiconductor Junctions251
  • 5.7.1Schottky Barriers251
  • 5.7.2Rectifying Contacts253
  • 5.7.3Ohmic Contacts255
  • 5.7.4Typical Schottky Barriers257
  • 5.8Heterojunctions258
6Field-Effect Transistors277
  • 6.1Transistor Operation278
  • 6.1.1The Load Line278
  • 6.1.2Amplification and Switching279
  • 6.2The Junction FET280
  • 6.2.1Pinch-off and Saturation281
  • 6.2.2Gate Control283
  • 6.2.3Current–Voltage Characteristics285
  • 6.3The Metal–Semiconductor FET287
  • 6.3.1The GaAs MESFET287
  • 6.3.2The High Electron Mobility Transistor (HEMT)288
  • 6.3.3Short Channel Effects290
  • 6.4The Metal–Insulator–Semiconductor FET291
  • 6.4.1Basic Operation and Fabrication291
  • 6.4.2The Ideal MOS Capacitor295
  • 6.4.3Effects of Real Surfaces306
  • 6.4.4Threshold Voltage309
  • 6.4.5MOS Capacitance–Voltage Analysis311
  • 6.4.6Time-Dependent Capacitance Measurements315
  • 6.4.7Current–Voltage Characteristics of MOS Gate Oxides316
  • 6.5The MOS Field-Effect Transistor319
  • 6.5.1Output Characteristics319
  • 6.5.2Transfer Characteristics322
  • 6.5.3Mobility Models325
  • 6.5.4Short Channel MOSFET I–V Characteristics327
  • 6.5.5Control of Threshold Voltage329
  • 6.5.6Substrate Bias Effects—the “body” effect332
  • 6.5.7Subthreshold Characteristics336
  • 6.5.8Equivalent Circuit for the MOSFET338
  • 6.5.9MOSFET Scaling and Hot Electron Effects341
  • 6.5.10Drain-Induced Barrier Lowering345
  • 6.5.11Short Channel Effect and Narrow Width Effect347
  • 6.5.12Gate-Induced Drain Leakage349
  • 6.6Advanced MOSFET Structures350
  • 6.6.1Metal Gate-High-k350
  • 6.6.2Enhanced Channel Mobility Materials and Strained Si FETs351
  • 6.6.3SOI MOSFETs and FinFETs353
7Bipolar Junction Transistors368
  • 7.1Fundamentals of BJT Operation368
  • 7.2Amplification with BJTs372
  • 7.3BJT Fabrication375
  • 7.4Minority Carrier Distributions and Terminal Currents378
  • 7.4.1Solution of the Diffusion Equation in the Base Region379
  • 7.4.2Evaluation of the Terminal Currents381
  • 7.4.3Approximations of the Terminal Currents384
  • 7.4.4Current Transfer Ratio386
  • 7.5Generalized Biasing387
  • 7.5.1The Coupled-Diode Model388
  • 7.5.2Charge Control Analysis393
  • 7.6Switching395
  • 7.6.1Cutoff396
  • 7.6.2Saturation397
  • 7.6.3The Switching Cycle398
  • 7.6.4Specifications for Switching Transistors399
  • 7.7Other Important Effects400
  • 7.7.1Drift in the Base Region401
  • 7.7.2Base Narrowing402
  • 7.7.3Avalanche Breakdown403
  • 7.7.4Injection Level; Thermal Effects405
  • 7.7.5Base Resistance and Emitter Crowding406
  • 7.7.6Gummel–Poon Model408
  • 7.7.7Kirk Effect411
  • 7.8Frequency Limitations of Transistors414
  • 7.8.1Capacitance and Charging Times414
  • 7.8.2Transit Time Effects417
  • 7.8.3Webster Effect418
  • 7.8.4High-Frequency Transistors418
  • 7.9Heterojunction Bipolar Transistors420
8Optoelectronic Devices430
  • 8.1Photodiodes430
  • 8.1.1Current and Voltage in an Illuminated Junction431
  • 8.1.2Solar Cells434
  • 8.1.3Photodetectors437
  • 8.1.4Gain, Bandwidth, and Signal-to-Noise Ratio of Photodetectors439
  • 8.2Light-Emitting Diodes442
  • 8.2.1Light-Emitting Materials443
  • 8.2.2Fiber-Optic Communications447
  • 8.3Lasers450
  • 8.4Semiconductor Lasers454
  • 8.4.1Population Inversion at a Junction455
  • 8.4.2Emission Spectra for p–n Junction Lasers457
  • 8.4.3The Basic Semiconductor Laser458
  • 8.4.4Heterojunction Lasers459
  • 8.4.5Materials for Semiconductor Lasers462
  • 8.4.6Quantum Cascade Lasers464
9Integrated Circuits472
  • 9.1Background473
  • 9.1.1Advantages of Integration473
  • 9.1.2Types of Integrated Circuits475
  • 9.2Evolution of Integrated Circuits476
  • 9.3Monolithic Device Elements479
  • 9.3.1CMOS Process Integration479
  • 9.3.2Integration of Other Circuit Elements494
  • 9.4Charge Transfer Devices500
  • 9.4.1Dynamic Effects in MOS Capacitors501
  • 9.4.2The Basic CCD502
  • 9.4.3Improvements on the Basic Structure503
  • 9.4.4Applications of CCDs504
  • 9.5Ultra Large-Scale Integration (ULSI)505
  • 9.5.1Logic Devices507
  • 9.5.2Semiconductor Memories517
  • 9.6Testing, Bonding, and Packaging530
  • 9.6.1Testing531
  • 9.6.2Wire Bonding531
  • 9.6.3Flip-Chip Techniques535
  • 9.6.4Packaging535
10High-Frequency, High-Power and Nanoelectronic Devices541
  • 10.1Tunnel Diodes541
  • 10.1.1Degenerate Semiconductors541
  • 10.2The IMPATT Diode545
  • 10.3The Gunn Diode548
  • 10.3.1The Transferred-Electron Mechanism548
  • 10.3.2Formation and Drift of Space Charge Domains551
  • 10.4The p–n–p–n Diode553
  • 10.4.1Basic Structure553
  • 10.4.2The Two-Transistor Analogy554
  • 10.4.3Variation of α with Injection555
  • 10.4.4Forward-Blocking State556
  • 10.4.5Conducting State557
  • 10.4.6Triggering Mechanisms558
  • 10.5The Semiconductor-Controlled Rectifier559
  • 10.5.1Turning off the SCR560
  • 10.6Insulated-Gate Bipolar Transistor561
  • 10.7Nanoelectronic Devices564
  • 10.7.1Zero-Dimensional Quantum Dots564
  • 10.7.2One-Dimensional Quantum Wires566
  • 10.7.3Two-Dimensional Layered Crystals567
  • 10.7.4Spintronic Memory568
  • 10.7.5Nanoelectronic Resistive Memory570

학부 소자 표준 교재. Global Edition이라 쪽수가 미국판과 다르다 — 1장이 21쪽에서 시작하므로 미국판 쪽수와 섞지 말 것. 5.1이 pn 접합을 만드는 단위 공정(산화·확산·RTP·이온주입·CVD·리소그래피·식각·금속화)을 먼저 훑고 소자로 들어가는 구성이라 18부와 12부를 잇는 다리로 쓸 수 있다. 9.5.2(반도체 메모리)와 10.7(양자점·양자선·2D 결정·스핀트로닉·저항 변화 메모리)은 각각 15부와 10부까지 뻗는다.

Physics of Semiconductor Devices

12부S. M. Sze · Yiming Li · Kwok K. Ng · 4th ed. · Wiley, 2021  원본 대조

Part I — Semiconductor Physics

1Physics and Properties of Semiconductors — A Review
  • 1.1Introduction
  • 1.2Crystal Structure
  • 1.3Energy Bands and Energy Gap
  • 1.4Carrier Concentration at Thermal Equilibrium
  • 1.5Carrier-Transport Phenomena
  • 1.6Phonon, Optical, and Thermal Properties
  • 1.7Heterojunctions and Nanostructures
  • 1.8Basic Equations and Examples

Part II — Device Building Blocks

2p–n Junctions
  • 2.1Introduction
  • 2.2Depletion Region
  • 2.3Current–Voltage Characteristics
  • 2.4Junction Breakdown
  • 2.5Transient Behavior and Noise
  • 2.6Terminal Functions
  • 2.7Heterojunctions
3Metal–Semiconductor Contacts
  • 3.1Introduction
  • 3.2Formation of Barrier
  • 3.3Current Transport Processes
  • 3.4Measurement of Barrier Height
  • 3.5Device Structures
  • 3.6Ohmic Contact
4Metal–Insulator–Semiconductor Capacitors
  • 4.1Introduction
  • 4.2Ideal MIS Capacitor
  • 4.3Silicon MOS Capacitor
  • 4.4Carrier Transport in MOS Capacitor

Part III — Transistors

5Bipolar Transistors
  • 5.1Introduction
  • 5.2Static Characteristics
  • 5.3Compact Models of Bipolar Transistors
  • 5.4Microwave Characteristics
  • 5.5Related Device Structures
  • 5.6Heterojunction Bipolar Transistor
  • 5.7Self-Heating Effects
6MOSFETs
  • 6.1Introduction
  • 6.2Basic Device Characteristics
  • 6.3Nonuniform Doping and Buried-Channel Device
  • 6.4Device Scaling and Short-Channel Effects
  • 6.5MOSFET Structures
  • 6.6Circuit Applications
  • 6.7NCFET and TFET
  • 6.8Single-Electron Transistor
7Nonvolatile Memory Devices
  • 7.1Introduction
  • 7.2The Concept of Floating Gate
  • 7.3Device Structures
  • 7.4Compact Model of Floating-Gate Memory Cells
  • 7.5Multi-Level Cells and 3-Dimensional Structures
  • 7.6Applications and Scaling Challenges
  • 7.7Alternative Structures
8JFETs, MESFETs, and MODFETs
  • 8.1Introduction
  • 8.2JFET and MESFET
  • 8.3MODFET

Part IV — Negative-Resistance and Power Devices

9Tunnel Devices
  • 9.1Introduction
  • 9.2Tunnel Diode
  • 9.3Related Tunnel Devices
  • 9.4Resonant-Tunneling Diode
10IMPATT Diodes, TED, and RST Devices
  • 10.1Introduction
  • 10.2IMPATT Diodes
  • 10.3Transferred-Electron Devices
  • 10.4Real-Space-Transfer Devices
11Thyristors and Power Devices
  • 11.1Introduction
  • 11.2Thyristor Characteristics
  • 11.3Thyristor Variations
  • 11.4Other Power Devices

Part V — Photonic Devices and Sensors

12LEDs and Lasers
  • 12.1Introduction
  • 12.2Radiative Transitions
  • 12.3Light-Emitting Diode (LED)
  • 12.4Laser Physics
  • 12.5Laser Operating Characteristics
  • 12.6Specialty Lasers
13Photodetectors and Solar Cells
  • 13.1Introduction
  • 13.2Photoconductor
  • 13.3Photodiodes
  • 13.4Avalanche Photodiode
  • 13.5Phototransistor
  • 13.6Charge-Coupled Device (CCD)
  • 13.7Metal–Semiconductor–Metal Photodetector
  • 13.8Quantum-Well Infrared Photodetector (QWIP)
  • 13.9Solar Cell
14Sensors
  • 14.1Introduction
  • 14.2Thermal Sensors
  • 14.3Mechanical Sensors
  • 14.4Magnetic Sensors
  • 14.5Chemical Sensors
  • 14.6Biosensors

3판(2007) 기준이던 항목을 4판(2021)으로 교체했다 — 저자에 Yiming Li가 합류했고 절 구성이 3판과 다르므로 인용할 때 판을 반드시 함께 적는다. 출판사 전자책 목차라 쪽수가 없고 소절(x.y.z)도 실려 있지 않다. 5부 14장 구성이고 각 장이 References·Problems로 끝난다. 12부의 표준 레퍼런스이자 15부(7장 비휘발성 메모리)·17부(12~14장 광소자·센서)의 1차 참조다.

13·14부 · MOS 소자

Fundamentals of Modern VLSI Devices

13·14부Yuan Taur · Tak H. Ning · 3rd ed. · Cambridge University Press, 2022 · ISBN 978-1-108-48002-4  원본 대조

1Introduction1
  • 1.1Evolution of VLSI Device Technology1
  • 1.1.1Historical Perspective1
  • 1.1.2Recent Developments3
  • 1.2Scope and Brief Description of the Book5
2Basic Device Physics9
  • 2.1Energy Bands in Silicon9
  • 2.1.1Bandgap of Silicon9
  • 2.1.2Density of States10
  • 2.1.3Distribution Function: Fermi Level12
  • 2.1.4Carrier Concentration13
  • 2.2n-Type and p-Type Silicon15
  • 2.2.1Donors and Acceptors15
  • 2.2.2Fermi Level in Extrinsic Silicon17
  • 2.2.3Degenerately Doped Silicon20
  • 2.3Carrier Transport in Silicon21
  • 2.3.1Drift Current: Mobility22
  • 2.3.2Velocity Saturation25
  • 2.3.3Diffusion Current25
  • 2.3.4Einstein Relations27
  • 2.4Basic Equations for Device Operation28
  • 2.4.1Poisson’s Equation: Electrostatic Potential28
  • 2.4.2Current–Density Equations32
  • 2.4.3Generation and Recombination35
  • 2.4.4Current Continuity Equations38
3p–n Junctions and Metal–Silicon Contacts43
  • 3.1p–n Junctions43
  • 3.1.1Energy-Band Diagrams and Built-in Potential for a p–n Diode44
  • 3.1.2Depletion Approximation45
  • 3.1.3Spatial Variation of Quasi-Fermi Potentials53
  • 3.1.4The Diode Equation62
  • 3.1.5Current–Voltage Characteristics Governed by the Diode Equation65
  • 3.1.6Space-Charge-Region Current67
  • 3.1.7Measured Diode Current and Ideality Factor70
  • 3.1.8Temperature Dependence and Magnitude of Diode Leakage Currents71
  • 3.1.9Minority-Carrier Mobility, Lifetime, and Diffusion Length72
  • 3.2Metal–Silicon Contacts74
  • 3.2.1Static Characteristics of a Schottky Diode74
  • 3.2.2Current–Voltage Characteristics of a Schottky Diode82
  • 3.2.3Ohmic Contacts87
  • 3.3High-Field Effects in Reverse-Biased Diodes89
  • 3.3.1Impact Ionization and Avalanche Breakdown90
  • 3.3.2Band-to-Band Tunneling93
4MOS Capacitors99
  • 4.1Energy Band Diagram of an MOS System99
  • 4.1.1Free Electron Level, Work Function, and Flatband Voltage99
  • 4.1.2Gate Voltage, Surface Potential, and Charge in Silicon102
  • 4.1.3Accumulation, Depletion, and Inversion103
  • 4.2Electrostatic Potential and Charge Distribution in Silicon106
  • 4.2.1Solving Poisson’s Equation106
  • 4.2.2Surface Potential and Charge Density as a Function of Gate Voltage112
  • 4.3Capacitance–Voltage Characteristics of MOS Capacitors114
  • 4.3.1Measurement Setup114
  • 4.3.2Capacitance Components in MOS114
  • 4.3.3C–V Characteristics in Different Bias Regions115
  • 4.3.4Split C–V Measurement119
  • 4.3.5Polysilicon Gate: Work Function and Depletion Effects121
  • 4.3.6MOS under Nonequilibrium125
  • 4.4Quantum Mechanical Effects in MOS129
  • 4.4.1Coupled Poisson–Schrödinger’s Equations129
  • 4.4.2Quantum Effect on Inversion-Layer Depth129
  • 4.4.3Quantum-Mechanical Solution in Weak Inversion131
  • 4.5Interface States and Charge Traps in Oxide136
  • 4.5.1Effect of Oxide Charge on Flatband Voltage137
  • 4.5.2Interface–State Capacitance and Conductance138
  • 4.5.3Distributed Circuit Model for Oxide Traps147
  • 4.6High-Field Effects in Oxide and Oxide Degradation149
  • 4.6.1Tunneling into and through Silicon Dioxide149
  • 4.6.2Injection of Hot Carriers from Silicon into Silicon Dioxide158
  • 4.6.3High-Field Effects in Gated Diodes160
  • 4.6.4Dielectric Breakdown162
5MOSFETs: Long Channel171
  • 5.1MOSFET I–V Characteristics172
  • 5.1.1Gradual Channel Approximation173
  • 5.1.2Charge Sheet Model176
  • 5.1.3Regional I–V Models178
  • 5.1.4Non-GCA Model for the Saturation Region187
  • 5.1.5pMOSFET I–V Characteristics192
  • 5.2MOSFET Channel Mobility192
  • 5.2.1Empirical Universal Mobility192
  • 5.2.2Strain Effect on Mobility196
  • 5.3MOSFET Threshold Voltage198
  • 5.3.1Substrate Sensitivity (Body Effect)198
  • 5.3.2Temperature Dependence of Threshold Voltage199
  • 5.3.3Quantum Effect on Threshold Voltage201
  • 5.4MOSFET Capacitance202
6MOSFETs: Short Channel206
  • 6.1Short-Channel Effect206
  • 6.1.1Threshold Voltage Roll-off206
  • 6.1.2Analytic Solutions to 2-D Poisson’s Equation in Subthreshold210
  • 6.2High-Field Transport219
  • 6.2.1Velocity Saturation219
  • 6.2.2Nonlocal Transport229
  • 6.3MOSFET Threshold Voltage and Channel Profile Design236
  • 6.3.1Threshold Voltage Requirement237
  • 6.3.2Channel Profile Design241
  • 6.3.3Nonuniform Channel Doping246
  • 6.3.4Discrete Dopant Effects on Threshold Voltage253
  • 6.4MOSFET Degradation and Breakdown at High Fields256
  • 6.4.1Hot-Carrier Effects257
  • 6.4.2Negative-Bias-Temperature Instability259
  • 6.4.3MOSFET Breakdown260
7Silicon-on-Insulator and Double-Gate MOSFETs264
  • 7.1SOI MOSFETs265
  • 7.1.1Long-Channel SOI MOSFETs265
  • 7.1.2Short-Channel SOI MOSFETs271
  • 7.2Double-Gate and Nanowire MOSFETs276
  • 7.2.1Analytic Potential Model for Symmetric DG MOSFETs277
  • 7.2.2Short-Channel DG MOSFETs281
  • 7.2.3Nanowire MOSFETs287
  • 7.2.4Scaling Limits of DG and Nanowire MOSFETs291
8CMOS Performance Factors295
  • 8.1MOSFET Scaling295
  • 8.1.1Constant-Field Scaling295
  • 8.1.2Nonscaling Factors297
  • 8.2Basic CMOS Circuit Elements298
  • 8.2.1CMOS Inverters299
  • 8.2.2CMOS NAND and NOR Gates309
  • 8.2.3Inverter and NAND Layouts313
  • 8.3Parasitic Elements316
  • 8.3.1Source–Drain Resistance317
  • 8.3.2Parasitic Capacitances321
  • 8.3.3Gate Resistance324
  • 8.3.4Interconnect R and C326
  • 8.4Sensitivity of CMOS Delay to Device Parameters332
  • 8.4.1Propagation Delay and Delay Equation333
  • 8.4.2Delay Sensitivity to Channel Width, Length, and Gate Oxide Thickness339
  • 8.4.3Sensitivity of Delay to Power-Supply Voltage and Threshold Voltage343
  • 8.4.4Sensitivity of Delay to Parasitic Resistance and Capacitance344
  • 8.4.5Effect of Transport Parameters on CMOS Delay348
  • 8.4.6Delay of Two-Way NAND Gates349
  • 8.5Performance Factors of MOSFETs in RF Circuits352
  • 8.5.1Small-Signal Equivalent Circuit353
  • 8.5.2Unity-Current-Gain Frequency354
  • 8.5.3Power Gain Condition of a Two-Port Network354
  • 8.5.4Unity Power-Gain Frequency355
9Bipolar Devices361
  • 9.1Basic Operation of a Bipolar Transistor365
  • 9.1.1Modifying the Simple Diode Theory for Describing Bipolar Transistors365
  • 9.2Ideal Current–Voltage Characteristics370
  • 9.2.1Intrinsic-Base Resistance and Emitter Current Crowding371
  • 9.2.2Collector Current375
  • 9.2.3Base Current378
  • 9.2.4Current Gains382
  • 9.2.5Ideal IC–VCE Characteristics384
  • 9.3Measured Characteristics of Typical n–p–n Transistors385
  • 9.3.1Effect of Emitter and Base Series Resistances386
  • 9.3.2Effect of Base–Collector Voltage on Collector Current389
  • 9.3.3Collector-Current Falloff392
  • 9.3.4Excess Base Current Associated with Extrinsic-Base–Emitter Junction396
  • 9.4Base Transit Time400
  • 9.5Diffusion Capacitance in an Emitter–Base Diode401
  • 9.5.1Small-Signal Current in a Forward-Biased Diode401
  • 9.5.2Low-Frequency [ωτpE < 1 and ωtB < 1] Diffusion Capacitance405
  • 9.5.3Diffusion Capacitance at High Frequencies [ωτpE > 1]406
  • 9.6Bipolar Device Models for Circuit Analyses407
  • 9.6.1Basic Steady-State Model407
  • 9.6.2Basic ac Model409
  • 9.7Breakdown Voltages416
  • 9.7.1Common-Base Current Gain in the Presence of Base–Collector Junction Avalanche417
  • 9.7.2Saturation Currents in a Transistor418
  • 9.7.3Relation between BVCEO and BVCBO419
  • 9.7.4Breakdown Voltages of Symmetric Lateral Bipolar Transistors on SOI421
10Bipolar Device Design425
  • 10.1Design of the Emitter of a Vertical Bipolar Transistor425
  • 10.1.1Diffused or Implanted-and-Diffused Emitter426
  • 10.1.2Polysilicon Emitter427
  • 10.2Design of the Base Region of a Vertical Bipolar Transistor427
  • 10.2.1Base Sheet Resistivity and Collector Current Density429
  • 10.2.2Ion-Implanted versus Epitaxially Grown Intrinsic Base430
  • 10.2.3General Expression for Base Transit Time433
  • 10.3Design of the Vertical Bipolar Transistor Collector Region434
  • 10.3.1Collector Design for Low-Injection Operation435
  • 10.3.2Collector Design for High-Injection Operation436
  • 10.4SiGe-Base Vertical Bipolar Transistors437
  • 10.4.1SiGe-Base Vertical Transistors Having Linearly Graded Base Bandgap438
  • 10.4.2Base Current When Ge Is Present in the Emitter443
  • 10.4.3Transistors Having a Trapezoidal Ge Distribution in the Base447
  • 10.4.4Transistors Having a Constant Ge Distribution in the Base451
  • 10.4.5Some Optimal Ge Profiles454
  • 10.4.6Base-Width Modulation by VBE459
  • 10.4.7Reverse-Mode I–V Characteristics462
  • 10.4.8Heterojunction Nature of a SiGe-Base Vertical Bipolar Transistor465
  • 10.4.9SiGe-Base Vertical Bipolar Transistor on Thin SOI467
  • 10.5Design of Symmetric Lateral Bipolar Transistors on SOI468
  • 10.5.1Relationship Governing Emitter-to-Collector Spacing and Base Width470
  • 10.5.2Analytic Model for Collector and Base Currents471
  • 10.5.3Analytic Ebers-Moll Model Equations473
  • 10.5.4Early Voltage and Emitter–Collector Spacing475
  • 10.5.5Analytic Model for the Transit Times475
  • 10.5.6On the Fabrication of Thin-Base Symmetric Lateral Transistors476
  • 10.5.7SiGe-on-Insulator Symmetric lateral n–p–n Transistors477
  • 10.5.8Symmetric Si-Emitter/Collector SiGe-Base Lateral HBT478
11Bipolar Performance Factors485
  • 11.1Figures of Merit of a Bipolar Transistor485
  • 11.1.1Cutoff Frequency486
  • 11.1.2Maximum Oscillation Frequency488
  • 11.1.3Logic Gate Delay489
  • 11.2ECL Circuit and Delay Components489
  • 11.2.1Transit-Time Delay Component491
  • 11.2.2Intrinsic-Base-Resistance Delay Component492
  • 11.2.3Parasitic-Resistance Delay Components492
  • 11.2.4Load-Resistance Delay Component492
  • 11.2.5Diffusion-Capacitance Delay Component493
  • 11.3Speed-versus-Current Characteristics of Bipolar Transistors493
  • 11.3.1fT and fmax as a Function of Collector Current493
  • 11.3.2Logic Gate Delay as a Function of Collector Current495
  • 11.4Vertical-Transistor Optimization from Data Analyses496
  • 11.5Bipolar Device Scaling for Logic Circuits498
  • 11.5.1Vertical-Transistor Scaling for ECL498
  • 11.5.2Symmetric-Lateral-Transistor Scaling for Logic Circuits499
  • 11.5.3Power-Dissipation Issues with Resister-Load Bipolar Logic Circuits500
  • 11.6Vertical-Transistor Design Optimization for RF and Analog Circuits502
  • 11.6.1The Single-Transistor Amplifier502
  • 11.6.2Maximizing fT of a Vertical Transistor503
  • 11.6.3Minimizing rbi of a Vertical Transistor504
  • 11.6.4Maximizing fmax of a Vertical Transistor505
  • 11.6.5Maximizing VA of a Vertical Transistor505
  • 11.6.6Examples of Vertical-Transistor RF and Analog Design Tradeoffs505
  • 11.7Symmetric-Lateral-Transistor Design Tradeoffs and Optimization for RF and Analog Circuits507
  • 11.7.1Calculated Low-Injection fT and fmax of Symmetric Lateral n–p–n507
  • 11.7.2Fin-Structure Symmetric Lateral Transistors for fmax > 1 THz509
  • 11.7.3Noise Reduction with Substrate Bias510
  • 11.8Unique Opportunities from Symmetric Lateral Bipolar Transistors511
  • 11.8.1Symmetric Lateral Bipolar Transistor as a High-Drive-Current Device511
  • 11.8.2Revisit Integrated Injection Logic Circuits and SRAM513
  • 11.8.3Complementary Bipolar Logic Circuits514
  • 11.8.4Performance-On-Demand Designs with I2L or CBipolar Circuits516
12Memory Devices521
  • 12.1Static Random-Access Memory523
  • 12.1.1CMOS SRAM Cell523
  • 12.1.2Other Bistable MOSFET SRAM Cells532
  • 12.1.3Bipolar SRAM Cell533
  • 12.2Dynamic Random-Access Memory541
  • 12.2.1Basic DRAM Cell and Its Operation541
  • 12.2.2Device Design and Scaling Considerations for a DRAM Cell545
  • 12.3Nonvolatile Memory546
  • 12.3.1MOSFET Nonvolatile Memory Devices547
  • 12.3.2Flash Memory Arrays554
  • 12.3.3Devices for a NOR Array559

3판 인쇄 목차와 대조해 절 제목을 원문대로 맞췄다(3.1.1·3.1.5 등이 줄여 적혀 있었다). 모든 장이 Exercises로 끝나고 참고문헌은 책 끝에 한데 모여 있다(565). 2판과 장 구성이 다르다 — 3판에서 7장(SOI·이중 게이트·나노와이어)과 대칭 측면 BJT(10.5·11.7·11.8)가 들어왔다. 13·14부의 기준 교재이고 8장이 21.6, 12장이 15부의 소자 쪽 근거다.

Modern Semiconductor Devices for Integrated Circuits

13·14부Chenming Calvin Hu · Prentice Hall, 2010 · ISBN 978-0-13-608525-6  절 수준 확보

1Electrons and Holes in Semiconductors
  • 1.1Silicon Crystal Structure
  • 1.2Bond Model of Electrons and Holes
  • 1.3Energy Band Model
  • 1.3.1Energy Band Diagram
  • 1.3.2Donors and Acceptors in the Band Model
  • 1.4Semiconductors, Insulators, and Conductors
  • 1.5Electrons and Holes
  • 1.5.1Effective Mass
  • 1.5.2How to Measure the Effective Mass
  • 1.6Density of States
  • 1.7Thermal Equilibrium and the Fermi Function
  • 1.8Electron and Hole Concentrations
  • 1.8.1Derivation of n and p from D(E) and f(E)
  • 1.8.2Fermi Level and the Carrier Concentrations
  • 1.8.3The np Product and the Intrinsic Carrier Concentration
  • 1.9General Theory of n and p
  • 1.10Carrier Concentrations at Extremely High and Low Temperatures
2Motion and Recombination of Electrons and Holes
  • 2.1Thermal Motion
  • 2.2Drift
  • 2.2.1Electron and Hole Mobilities
  • 2.2.2Mechanisms of Carrier Scattering
  • 2.2.3Drift Current and Conductivity
  • 2.3Diffusion Current
  • 2.4Relation Between the Energy Diagram and V, ℰ
  • 2.5Einstein Relationship Between D and µ
  • 2.6Electron–Hole Recombination
  • 2.7Thermal Generation
  • 2.8Quasi-Equilibrium and Quasi-Fermi Levels
3Device Fabrication Technology
  • 3.1Introduction to Device Fabrication
  • 3.2Oxidation of Silicon
  • 3.3Lithography (Wet · Electron · Nanoimprint)
  • 3.4Pattern Transfer — Etching
  • 3.5Doping (Ion Implantation · Gas-Source · Solid-Source Diffusion)
  • 3.6Dopant Diffusion
  • 3.7Thin-Film Deposition (Sputtering · CVD · Epitaxy)
  • 3.8Interconnect — The Back-End Process
  • 3.9Testing, Assembly, and Qualification
  • 3.10Chapter Summary — A Device Fabrication Example
4PN and Metal–Semiconductor Junctions
  • ·Part I: PN Junction
  • 4.1Building Blocks of the PN Junction Theory
  • 4.1.1Energy Band Diagram and Depletion Layer of a PN Junction
  • 4.1.2Built-In Potential
  • 4.1.3Poisson's Equation
  • 4.2Depletion-Layer Model
  • 4.2.1Field and Potential in the Depletion Layer
  • 4.2.2Depletion-Layer Width
  • 4.3Reverse-Biased PN Junction
  • 4.4Capacitance-Voltage Characteristics
  • 4.5Junction Breakdown
  • 4.5.1Peak Electric Field
  • 4.5.2Tunneling Breakdown
  • 4.5.3Avalanche Breakdown
  • 4.6Carrier Injection Under Forward Bias — Quasi-Equilibrium Boundary Condition
  • 4.7Current Continuity Equation
  • 4.8Excess Carriers in Forward-Biased PN Junction
  • 4.9PN Diode IV Characteristics
  • 4.10Charge Storage
  • 4.11Small-Signal Model of the Diode
  • ·Part II: Application to Optoelectronic Devices
  • 4.12Solar Cells
  • 4.13Light-Emitting Diodes and Solid-State Lighting
  • 4.14Diode Lasers
  • 4.15Photodiodes
  • ·Part III: Metal–Semiconductor Junction
  • 4.16Schottky Barriers
  • 4.17Thermionic Emission Theory
  • 4.18Schottky Diodes
  • 4.19Applications of Schottky Diodes
  • 4.20Quantum Mechanical Tunneling
  • 4.21Ohmic Contacts
5MOS Capacitor
  • 5.1Flat-Band Condition and Flat-Band Voltage
  • 5.2Surface Accumulation
  • 5.3Surface Depletion
  • 5.4Threshold Condition and Threshold Voltage
  • 5.5Strong Inversion Beyond Threshold
  • 5.6MOS C–V Characteristics
  • 5.7Oxide Charge — A Modification to Vfb and Vt
  • 5.8Poly-Si Gate Depletion — Effective Increase in Tox
  • 5.9Inversion and Accumulation Charge-Layer Thicknesses — Quantum Mechanical Effect
  • 5.10CCD Imager and CMOS Imager
6MOS Transistor
  • 6.1Introduction to the MOSFET
  • 6.2Complementary MOS (CMOS) Technology
  • 6.3Surface Mobilities and High-Mobility FETs
  • 6.3.1Surface Mobilities
  • 6.3.2GaAs MESFET
  • 6.3.3HEMT
  • 6.3.4JFET
  • 6.4MOSFET Vt, Body Effect, and Steep Retrograde Doping
  • 6.5Qinv in MOSFET
  • 6.6Basic MOSFET IV Model
  • 6.7CMOS Inverter — A Circuit Example
  • 6.7.1Voltage Transfer Curve (VTC)
  • 6.7.2Inverter Speed — The Importance of Ion
  • 6.7.3Power Consumption
  • 6.8Velocity Saturation
  • 6.9MOSFET IV Model with Velocity Saturation
  • 6.10Parasitic Source-Drain Resistance
  • 6.11Extraction of the Series Resistance and the Effective Channel Length
  • 6.12Velocity Overshoot and Source Velocity Limit
  • 6.13Output Conductance
  • 6.14High-Frequency Performance
  • 6.15MOSFET Noises
  • 6.15.1Thermal Noise of a Resistor
  • 6.15.2MOSFET Thermal Noise
  • 6.15.3MOSFET Flicker Noise
  • 6.15.4Signal to Noise Ratio, Noise Factor, Noise Figure
  • 6.16SRAM, DRAM, Nonvolatile (Flash) Memory Devices
7MOSFETs in ICs — Scaling, Leakage, and Other Topics
  • 7.1Technology Scaling — For Cost, Speed, and Power Consumption
  • 7.1.1Innovations Enable Scaling
  • 7.1.2Strained Silicon and Other Innovations
  • 7.2Subthreshold Current — "Off" Is Not Totally "Off"
  • 7.3Vt Roll-Off — Short-Channel MOSFETs Leak More
  • 7.4Reducing Gate-Insulator Electrical Thickness and Tunneling Leakage
  • 7.5How to Reduce Wdep
  • 7.6Shallow Junction and Metal Source/Drain MOSFET
  • 7.7Trade-Off Between Ion and Ioff and Design for Manufacturing
  • 7.8Ultra-Thin-Body SOI and Multigate MOSFETs
  • 7.8.1Ultra-Thin-Body MOSFET and SOI
  • 7.8.2FinFET — Multigate MOSFET
  • 7.9Output Conductance
  • 7.10Device and Process Simulation
  • 7.11MOSFET Compact Model for Circuit Simulation
8Bipolar Transistor
  • 8.1Introduction to the BJT
  • 8.2Collector Current
  • 8.3Base Current
  • 8.4Current Gain
  • 8.4.1Emitter Band Gap Narrowing
  • 8.4.2Narrow Band-Gap Base and Heterojunction BJT
  • 8.4.3Poly-Silicon Emitter
  • 8.4.4Gummel Plot and βF Fall-Off at High and Low IC
  • 8.5Base-Width Modulation by Collector Voltage
  • 8.6Ebers–Moll Model
  • 8.7Transit Time and Charge Storage
  • 8.7.1Base Charge Storage and Base Transit Time
  • 8.7.2Drift Transistor — Built-In Base Field
  • 8.7.3Emitter-to-Collector Transit Time and Kirk Effect
  • 8.8Small-Signal Model
  • 8.9Cutoff Frequency
  • 8.10Charge Control Model
  • 8.11Model for Large-Signal Circuit Simulation
부록 I~IIIDerivation of the Density of States · Derivation of the Fermi–Dirac Distribution Function · Self-Consistencies of Minority Carrier Assumptions

저자가 8개 장 PDF를 무료 배포한다(chu.berkeley.edu). 이 책만 목차 원본을 구하지 못해 절 목록을 따로 대조했고, 4.16~4.22·6.17까지 일치를 확인해 확정했다. §7.11 MOSFET Compact Model for Circuit Simulation이 BSIM — 저자가 BSIM 개발자다. 4장이 PN 접합 / 광전자 소자 / 금속-반도체 접합의 3개 Part로 나뉜 것이 이 책의 특징.

Operation and Modeling of the MOS Transistor

13·14부Yannis Tsividis · Colin McAndrew · 3rd ed. · Oxford University Press, 2011  원본 대조

1Semiconductors, Junctions, and MOSFET Overview1
  • 1.1Introduction1
  • 1.2Semiconductors1
  • 1.2.1Intrinsic Semiconductors, Free Electrons, and Holes2
  • 1.2.2Extrinsic Semiconductors4
  • 1.2.3Equilibrium in the Absence of Electric Field7
  • 1.2.4Equilibrium in the Presence of Electric Field10
  • 1.2.5Nonequilibrium; Quasi-Fermi Levels12
  • 1.2.6Relations between Charge Density, Electric Field, and Potential; Poisson’s Equation13
  • 1.3Conduction15
  • 1.3.1Transit Time15
  • 1.3.2Drift17
  • 1.3.3Diffusion22
  • 1.3.4Total Current25
  • 1.4Contact Potentials26
  • 1.5The pn Junction32
  • 1.6Overview of the MOS Transistor43
  • 1.6.1Basic Structure43
  • 1.6.2A Qualitative Description of MOS Transistor Operation47
  • 1.6.3A Fluid Dynamical Analog49
  • 1.6.4MOS Transistor Characteristics52
  • 1.7Fabrication Processes and Device Features54
  • 1.8A Brief Overview of This Book60
2The Two-Terminal MOS Structure65
  • 2.1Introduction65
  • 2.2The Flatband Voltage66
  • 2.3Potential Balance and Charge Balance73
  • 2.4Effect of Gate–Body Voltage on Surface Condition75
  • 2.4.1Flatband Condition75
  • 2.4.2Accumulation75
  • 2.4.3Depletion and Inversion76
  • 2.4.4General Analysis80
  • 2.5Accumulation and Depletion86
  • 2.6Inversion88
  • 2.6.1General Relations and Regions of Inversion88
  • 2.6.2Strong Inversion94
  • 2.6.3Weak Inversion98
  • 2.6.4Moderate Inversion101
  • 2.7Small-Signal Capacitance102
  • 2.8Summary of Properties of the Regions of Inversion111
3The Three-Terminal MOS Structure115
  • 3.1Introduction115
  • 3.2Contacting the Inversion Layer115
  • 3.3The Body Effect131
  • 3.4Regions of Inversion132
  • 3.4.1Approximate Limits132
  • 3.4.2Strong Inversion136
  • 3.4.3Weak Inversion138
  • 3.4.4Moderate Inversion141
  • 3.5A “VCB Control” Point of View141
  • 3.5.1Fundamentals141
  • 3.5.2The “Pinchoff Voltage”145
  • 3.6Uses for Three-Terminal MOS Structures147
4The Four-Terminal MOS Transistor151
  • 4.1Introduction151
  • 4.2Transistor Regions of Operation156
  • 4.3Complete All-Region Model158
  • 4.4Simplified All-Region Models172
  • 4.4.1Linearizing the Depletion Region Charge172
  • 4.4.2Body-Referenced Simplified All-Region Models173
  • 4.4.3Source-Referenced Simplified All-Region Models176
  • 4.4.4Charge Formulation of Simplified All-Region Models177
  • 4.5Models Based on Quasi-Fermi Potentials181
  • 4.6Regions of Inversion in Terms of Terminal Voltages183
  • 4.7Strong Inversion186
  • 4.7.1Complete Strong-Inversion Model186
  • 4.7.2Body-Referenced Simplified Strong-Inversion Model192
  • 4.7.3Source-Referenced Simplified Strong-Inversion Model192
  • 4.7.4Model Origin Summary203
  • 4.8Weak Inversion204
  • 4.8.1Special Conditions in Weak Inversion204
  • 4.8.2Body-Referenced Model205
  • 4.8.3Source-Referenced Model206
  • 4.9Moderate-Inversion and Single-Piece Models208
  • 4.10Source-Referenced vs. Body-Referenced Modeling210
  • 4.11Effective Mobility212
  • 4.12Effect of Extrinsic Source and Drain Series Resistances222
  • 4.13Temperature Effects224
  • 4.14Breakdown226
  • 4.15The p-Channel MOS Transistor228
  • 4.16Enhancement-Mode and Depletion-Mode Transistors230
  • 4.17Model Parameter Values, Model Accuracy, and Model Comparison231
5Small-Dimension Effects243
  • 5.1Introduction243
  • 5.2Carrier Velocity Saturation244
  • 5.3Channel Length Modulation253
  • 5.4Charge Sharing259
  • 5.4.1Introduction259
  • 5.4.2Short-Channel Devices261
  • 5.4.3Narrow-Channel Devices266
  • 5.4.4Limitations of Charge-Sharing Models270
  • 5.5Drain-Induced Barrier Lowering271
  • 5.6Punchthrough275
  • 5.7Combining Several Small-Dimension Effects into One Model — A Strong-Inversion Example277
  • 5.8Hot Carrier Effects; Impact Ionization280
  • 5.9Velocity Overshoot and Ballistic Operation285
  • 5.10Polysilicon Depletion288
  • 5.11Quantum Mechanical Effects293
  • 5.12DC Gate Current295
  • 5.13Junction Leakage; Band-to-Band Tunneling; GIDL302
  • 5.14Leakage Currents — Particular Cases305
  • 5.15The Quest for Ever-Smaller Devices307
  • 5.15.1Introduction307
  • 5.15.2Classical Scaling308
  • 5.15.3Modern Scaling312
6The MOS Transistor in Dynamic Operation — Large-Signal Modeling329
  • 6.1Introduction329
  • 6.2Quasi-Static Operation330
  • 6.3Terminal Currents in Quasi-Static Operation334
  • 6.4Evaluation of Intrinsic Charges in Quasi-Static Operation341
  • 6.4.1Introduction341
  • 6.4.2Strong Inversion342
  • 6.4.3Moderate Inversion348
  • 6.4.4Weak Inversion348
  • 6.4.5All-Region Model350
  • 6.4.6Depletion and Accumulation352
  • 6.4.7Plots of Charges vs. VGS353
  • 6.4.8Use of Intrinsic Charges in Evaluating the Terminal Currents354
  • 6.5Transit Time under DC Conditions355
  • 6.6Limitations of the Quasi-Static Model357
  • 6.7Non-Quasi-Static Modeling363
  • 6.7.1Introduction363
  • 6.7.2The Continuity Equation364
  • 6.7.3Non-Quasi-Static Analysis365
  • 6.8Extrinsic Parasitics371
  • 6.8.1Extrinsic Capacitances371
  • 6.8.2Extrinsic Resistances374
  • 6.8.3Temperature Dependence378
  • 6.8.4Simplified Models378
7Small-Signal Modeling for Low and Medium Frequencies385
  • 7.1Introduction385
  • 7.2A Low-Frequency Small-Signal Model for the Intrinsic Part386
  • 7.2.1Introduction386
  • 7.2.2Small-Signal Model for the Drain-to-Source Current386
  • 7.2.3Small-Signal Model for the Gate and Body Currents390
  • 7.2.4Complete Low-Frequency Small-Signal Model for the Intrinsic Part393
  • 7.2.5Strong Inversion396
  • 7.2.6Weak Inversion407
  • 7.2.7Moderate Inversion409
  • 7.2.8All-Region Models409
  • 7.3A Medium-Frequency Small-Signal Model for the Intrinsic Part414
  • 7.3.1Introduction414
  • 7.3.2Intrinsic Capacitances414
  • 7.4Including the Extrinsic Part435
  • 7.5Noise436
  • 7.5.1Introduction436
  • 7.5.2White Noise440
  • 7.5.3Flicker Noise450
  • 7.5.4Noise in Extrinsic Resistances456
  • 7.5.5Including Noise in Small-Signal Circuits456
  • 7.6All-Region Models456
8High-Frequency Small-Signal Models473
  • 8.1Introduction473
  • 8.2A Complete Quasi-Static Model for the Intrinsic Part474
  • 8.2.1Complete Description of Intrinsic Capacitance Effects474
  • 8.2.2Small-Signal Equivalent Circuit Topologies478
  • 8.2.3Evaluation of Capacitances484
  • 8.2.4Frequency Region of Validity491
  • 8.3y-Parameter Models492
  • 8.4Non-Quasi-Static Models499
  • 8.4.1Introduction499
  • 8.4.2A Non-Quasi-Static Strong-Inversion Model500
  • 8.4.3Other Approximations and Higher-Order Models519
  • 8.4.4Model Comparison522
  • 8.5High-Frequency Noise524
  • 8.6Considerations in MOSFET Modeling for RF Applications529
9Substrate Nonuniformity and Other Structural Effects547
  • 9.1Introduction547
  • 9.2Ion Implantation and Substrate Nonuniformity548
  • 9.3Substrate Transverse Nonuniformity551
  • 9.3.1Preliminaries551
  • 9.3.2Threshold Voltage555
  • 9.3.3Drain Current564
  • 9.3.4Buried-Channel Devices566
  • 9.4Substrate Lateral Nonuniformity571
  • 9.5Well Proximity Effect577
  • 9.6Stress Effects581
  • 9.7Statistical Variability584
10Modeling for Circuit Simulation600
  • 10.1Introduction600
  • 10.2Types of Models601
  • 10.2.1Models for Device Analysis and Design601
  • 10.2.2Device Models for Circuit Simulation602
  • 10.3Attributes of Good Compact Models606
  • 10.4Model Formulation608
  • 10.4.1General Consideration and Choices609
  • 10.5Model Implementation in Circuit Simulators615
  • 10.6Model Testing618
  • 10.7Parameter Extraction618
  • 10.8Simulation and Extraction for RF Applications635
  • 10.9Common MOSFET Models Available in Circuit Simulators638
  • 10.9.1BSIM638
  • 10.9.2EKV640
  • 10.9.3PSP640
  • 10.9.4Other Models642

MOS 소자 모델링의 표준 레퍼런스. 2장(2단자) → 3장(3단자) → 4장(4단자)으로 단자를 하나씩 늘려가며 쌓는 구성이 이 책의 특징이고, 약반전·중간반전·강반전을 같은 층위로 다루는 점(2.6·3.4·4.7~4.9)이 다른 교재와 다르다. 10.9가 BSIM·EKV·PSP를 비교해 14.9 컴팩트 모델의 1차 근거가 된다. 본문 유도의 상세판인 부록 A~K(653~712)는 목록에서 생략했다.

15부 · 메모리 소자

Nonvolatile Memory Technologies with Emphasis on Flash

15부Joe E. Brewer · Manzur Gill (eds.) · Wiley-IEEE Press, 2008  원본 대조

1Introduction to Nonvolatile Memory1
  • 1.1Introduction1
  • 1.2Elementary Memory Concepts2
  • 1.3Unique Aspects of Nonvolatile Memory9
  • 1.3.1Storage9
  • 1.3.2Storage Mechanisms12
  • 1.3.3Retention12
  • 1.3.4Endurance13
  • 1.4Flash Memory and Flash Cell Variations13
  • 1.5Semiconductor Device Technology Generations16
2Flash Memory Applications19
  • 2.1Introduction19
  • 2.1.1Spectrum of Memory Devices20
  • 2.1.2Evolving from EPROMs21
  • 2.1.3NOR and NAND22
  • 2.1.4Evolution of Flash Usage Models23
  • 2.1.5Understanding Flash Attributes25
  • 2.2Code Storage38
  • 2.2.1Execute-in-Place39
  • 2.2.2Store and Download43
  • 2.2.3Contrasting Execute-in-Place Versus Store and Download45
  • 2.2.4Future Code Storage Applications45
  • 2.3Data Storage46
  • 2.3.1Why Use Flash to Store Data?46
  • 2.3.2Architectural Decisions46
  • 2.3.3Embedded Flash Storage49
  • 2.3.4Removable Media50
  • 2.4Code+Data Storage54
  • 2.4.1Relevant Attributes for Code+Data55
  • 2.4.2Fitting the Pieces Together for Code+Data58
  • 2.4.3Benefits of Code+Data61
  • 2.5Conclusion62
3Memory Circuit Technologies63
  • 3.1Introduction63
  • 3.2Flash Cell Basic Operation63
  • 3.2.1Cell Programming64
  • 3.2.2Cell Erase64
  • 3.2.3Compaction65
  • 3.2.4Read65
  • 3.3Flash Memory Architecture66
  • 3.3.1Memory Cell Array69
  • 3.3.2Analog Blocks71
  • 3.3.3Control Logic73
  • 3.4Redundancy75
  • 3.4.1Defectivity and Process Variations75
  • 3.4.2Yield Improvement75
  • 3.4.3Yield Simulator77
  • 3.4.4Redundancy Fuses Design78
  • 3.4.5Row Redundancy Design79
  • 3.4.6Column Redundancy Design80
  • 3.4.7Advanced Redundancy Design81
  • 3.5Error Correction Coding (ECC)87
  • 3.5.1On-Chip ECC and Endurance/Retention in Flash Memories88
  • 3.5.2On-Chip ECC and Multilevel Flash Memories89
  • 3.6Design for Testability (DFT)89
  • 3.6.1Test Entry and Organization91
  • 3.6.2Fuse Cell92
  • 3.6.3Sense Amplifier Reference Trimming and Monitor93
  • 3.6.4High Voltages Trimming94
  • 3.6.5Timings Trimming and External Control96
  • 3.6.6Internal State Machine Algorithm Skips and Monitor97
  • 3.6.7Address Path Configuration98
  • 3.6.8Data Path Configuration and Trimming99
  • 3.6.9High Voltages External Forcing and Monitor101
  • 3.6.10Array Direct Access and Stresses103
  • 3.6.11Internal Pattern Write and Verify105
  • 3.6.12Data Compression106
  • 3.7Flash-Specific Circuit Techniques108
  • 3.7.1Voltage Level Shifting109
  • 3.7.2Sensing112
  • 3.7.3Voltage Multiplication114
  • 3.7.4Reference Voltage Generation118
  • 3.7.5Voltage Regulation119
  • 3.7.6I/O Signal Buffering122
4Physics of Flash Memories129
  • 4.1Introduction129
  • 4.2Basic Operating Principles and Memory Characteristics130
  • 4.2.1Floating-Gate Principle130
  • 4.2.2Basic Definitions with Examples131
  • 4.2.3Basic Equations and Models140
  • 4.3Physics of Programming and Erase Mechanisms143
  • 4.3.1Fowler–Nordheim Tunneling145
  • 4.3.2Polyoxide Conduction148
  • 4.3.3Channel Hot-Electron Injection (CHEI)150
  • 4.3.4Substrate Hot-Electron Injection (SHEI)153
  • 4.3.5Source-Side Injection (SSI)155
  • 4.3.6Secondary Impact Ionization Initiated Channel Hot-Electron Injection156
  • 4.4Physics of Degradation and Disturb Mechanisms158
  • 4.4.1Band-to-Band Tunneling158
  • 4.4.2Oxide Degradation159
  • 4.4.3Oxide Breakdown168
  • 4.5Conclusion171
5NOR Flash Stacked and Split-Gate Memory Technology179
  • 5.1Introduction179
  • 5.2ETOX Flash Cell Technology180
  • 5.2.1Introduction180
  • 5.2.2Cell Structure180
  • 5.2.3Read (Sensing)182
  • 5.2.4Programming183
  • 5.2.5Erasing183
  • 5.2.6Array Operation186
  • 5.2.7Erase Threshold Control187
  • 5.2.8Process and Scaling Issues190
  • 5.2.9Key Circuits and Circuit/Technology Interactions200
  • 5.2.10Multilevel Cell Technology Circuits206
  • 5.3SST SuperFlash EEPROM Cell Technology206
  • 5.3.1Introduction206
  • 5.3.2Cell Cross Sections and Layout207
  • 5.3.3Charge Transfer Mechanisms208
  • 5.3.4Erase209
  • 5.3.5Programming210
  • 5.3.6Cell Array Architecture and Operation212
  • 5.3.7Erase Threshold Control and Distribution214
  • 5.3.8Process Scaling Issues214
  • 5.3.9Key Circuit Interactions215
  • 5.3.10Multilevel Cell Implementation216
  • 5.4Reliability Issues and Solutions216
  • 5.4.1Oxide Integrity216
  • 5.4.2Contact Integrity217
  • 5.4.3Data Retention217
  • 5.4.4Endurance218
  • 5.4.5Disturbs219
  • 5.4.6Life Test (Dynamic Burn-in)220
  • 5.5Applications220
6NAND Flash Memory Technology223
  • 6.1Overview of NAND EEPROM223
  • 6.2NAND Cell Operation227
  • 6.2.1Cell Structure227
  • 6.2.2Erase Operation227
  • 6.2.3Program Operation228
  • 6.2.4Program Disturb229
  • 6.2.5Read Operation230
  • 6.3NAND Array Architecture and Operation231
  • 6.3.1Staggered Row Decoder231
  • 6.3.2Self-Boosted Erase Inhibit Scheme233
  • 6.3.3Self-Boosted Program Inhibit Scheme235
  • 6.3.4Read Operation237
  • 6.4Program Threshold Control and Program Vt Spread Reduction237
  • 6.4.1Bit-by-Bit Verify Circuit237
  • 6.4.2Sophisticated Bit-by-Bit Verify Circuit242
  • 6.4.3Overprogram Elimination Scheme247
  • 6.5Process and Scaling Issues252
  • 6.5.1Shallow Trench Isolation NAND Technology (256-Mbit NAND)252
  • 6.5.2Booster Plate Technology256
  • 6.5.3Channel Boost Capacitance Cell258
  • 6.5.4Negative Vth Cell263
  • 6.5.5Free Wordline Spacing Cell268
  • 6.6Key Circuits and Circuit/Technology Interactions270
  • 6.6.1Shielded Bitline Sensing Method270
  • 6.6.2Full Chip Burst Read Operation272
  • 6.6.3Symmetric Sense Amplifier with Page Copy Function273
  • 6.6.4Source Line Programming Scheme278
  • 6.7Multilevel NAND283
  • 6.7.1Multilevel Circuit Technology283
  • 6.7.2Array Noise Suppression Technology286
  • 6.7.3Side-Wall Transfer Transistor Cell293
  • 6.7.4Three-Level NAND297
  • 6.7.5High-Speed Programming301
7DINOR Flash Memory Technology313
  • 7.1Introduction313
  • 7.2DINOR Operation and Array Architecture313
  • 7.2.1DINOR Operation313
  • 7.2.2DINOR Cell Characteristics314
  • 7.2.3DINOR Array Architecture316
  • 7.2.4DINOR Advanced Array Architecture316
  • 7.2.5VGA-DINOR Device Structure and Fabrication317
  • 7.2.6Characteristics of the Cell with Asymmetrical Offset Source/Drain Structure318
  • 7.3DINOR Technology Features320
  • 7.3.1Low-Voltage Read320
  • 7.3.2Fast Read Access321
  • 7.4DINOR Circuit for Low-Voltage Operation321
  • 7.4.1High-Voltage Generation [7]321
  • 7.4.2Wordline Boost Scheme326
  • 7.5Background Operation Function327
  • 7.5.1Background Operation and DINOR327
  • 7.5.2Emulating Electrically Erasable Programmable Read-Only Memory (EEPROM) and Static Random-Access Memory (SRAM)327
  • 7.5.3Background Operation Fast Erase328
  • 7.6P-Channel DINOR Architecture328
  • 7.6.1Introduction328
  • 7.6.2Band-to-Band Hot-Electron Injection Cell Operation329
  • 7.6.3DINOR BBHE Programmed Cell332
  • 7.6.4P-Channel DINOR Summary334
8P-Channel Flash Memory Technology337
  • 8.1Introduction337
  • 8.2Device Structure338
  • 8.3Operations of P-Channel Flash338
  • 8.4Array Architecture of P-Channel Flash343
  • 8.4.1NOR-Type Array Architecture343
  • 8.4.2NAND-Type Array Architecture344
  • 8.5Evolution of P-Channel Flash345
  • 8.5.1Hsu et al. [1]345
  • 8.5.2Ohnakado et al. [4]349
  • 8.5.3Ohnakado et al. [5]350
  • 8.5.4Shen et al. [6]353
  • 8.5.5Chung et al. [7]353
  • 8.5.6Sarin et al. [8]354
  • 8.5.7Wang et al. [9]357
  • 8.5.8Ohnakado et al. [2]359
  • 8.5.9For Further Study362
  • 8.6Processing Technology for P-Channel Flash366
  • 8.6.1NOR-Type Array Architecture367
  • 8.6.2NAND-Type Array Architecture368
9Embedded Flash Memory373
  • 9.1Introduction373
  • 9.2Embedded Flash Versus Stand-Alone Flash Memory375
  • 9.2.1Advantages of Embedded over Stand-Alone Flash Memory375
  • 9.2.2Disadvantages of Embedded over Stand-Alone Flash Memory376
  • 9.3Embedded Flash Memory Applications377
  • 9.3.1Applications by Device Type377
  • 9.3.2Applications by Function379
  • 9.3.3Applications by End Product380
  • 9.3.4Applications by Usage382
  • 9.4Embedded Flash Memory Cells383
  • 9.4.1Special Requirements and Considerations383
  • 9.4.2Cell Selection for Embedded Applications385
  • 9.5Embedded Flash Memory Design394
  • 9.5.1Special Requirements and Consideration394
  • 9.5.2Flash Module Design for Embedded Applications396
  • 9.5.3Design Techniques for Embedded Flash Module398
10Tunnel Dielectrics for Scaled Flash Memory Cells407
  • 10.1Introduction407
  • 10.2SiO₂ as Tunnel Dielectric—Historical Perspective408
  • 10.3Early Work on Silicon Nitride as a Tunnel Dielectric409
  • 10.4Jet-Vapor Deposition Silicon Nitride Deposition410
  • 10.5Properties of Gate-Quality JVD Silicon Nitride Films411
  • 10.6Deposited Silicon Nitride as Tunnel Dielectric417
  • 10.7N-Channel Floating-Gate Device with Deposited Silicon Nitride Tunnel Dielectric425
  • 10.8P-Channel Floating-Gate Device with Deposited Silicon Nitride Tunnel Dielectric429
  • 10.9Reliability Concerns Associated with Hot-Hole Injection432
  • 10.10Tunnel Dielectric for SONOS Cell432
  • 10.11Prospects for High-K Dielectrics434
  • 10.12Tunnel Barrier Engineering with Multiple Barriers437
  • 10.12.1Crested Barrier437
  • 10.12.2U-Shaped Barrier439
  • 10.13Summary440
11Flash Memory Reliability445
  • 11.1Introduction445
  • 11.2Cycling-Induced Degradations in Flash Memories447
  • 11.2.1Overview of Cycling-Induced Degradations447
  • 11.2.2Channel Hot-Electron Programming-Induced Oxide Degradation449
  • 11.2.3Tunnel-Erase-Induced Oxide Degradation456
  • 11.2.4Erratic Erase462
  • 11.3Flash Memory Data Retention466
  • 11.3.1Activation Energy and Accelerated Data Retention Bake Tests467
  • 11.3.2Charge-Loss and Gain Mechanisms in EPROMs and Flash EPROMs473
  • 11.3.3Flash EEPROM Cycling-Induced Data Retention Issues477
  • 11.3.4Data Retention Characteristics Related to Tunnel Oxide and Floating-Gate Poly Texture481
  • 11.3.5Soft Errors484
  • 11.4Flash Memory Disturbs487
  • 11.4.1Read Disturb and the Effects of Cycling487
  • 11.4.2Program Disturb491
  • 11.4.3Erase Disturb495
  • 11.4.4Block-to-Block Disturbs495
  • 11.5Stress-Induced Tunnel Oxide Leakage Current496
  • 11.5.1Uniform SILC in Thin Oxide497
  • 11.5.2SILC in Thin Oxide after Bipolarity Stress502
  • 11.5.3Microscopic Characteristics of Stress-Induced Leakage Current (mSILC)508
  • 11.5.4Stress-Induced Leakage Current in Oxynitride510
  • 11.5.5Stress-Induced Leakage Current as the Limiting Factor for Tunnel Oxide Scaling511
  • 11.6Special Reliability Issues for Poly-to-Poly Erase and Source-Side Injection Program512
  • 11.6.1Poly-to-Poly Erase and Its Reliability Issues512
  • 11.6.2Source-Side Injection and Its Reliability Issues517
  • 11.7Process Impacts on Flash Memory Reliability525
  • 11.7.1Tunnel Oxide Process and Nitrogen Incorporation526
  • 11.7.2Effects of Floating-Gate Process and Morphology526
  • 11.7.3Stacked Gate SAS (Self-Aligned Source) Etch Process and Erase Distribution528
  • 11.7.4In-Line Plasma Charging Damage530
  • 11.7.5Impacts of Intermetal Dielectric and Passivation Films on Flash Memory Reliability533
  • 11.8High-Voltage Periphery Transistor Reliability536
  • 11.8.1High-Voltage Transistor Technology536
  • 11.8.2Reliability of HV Transistors in Flash Memory Products537
  • 11.8.3Process Defects: The Role of Cycling and Burn-in539
  • 11.9Design and System Impacts on Flash Memory Reliability543
  • 11.9.1Embedded Erase and Program Algorithm544
  • 11.9.2Redundancy and Defect Mapping547
  • 11.9.3Error Correction Concepts and Techniques548
  • 11.9.4Wear Leveling552
  • 11.10Flash Memory Reliability Screening and Qualification552
  • 11.10.1Introduction to Reliability Testing and Screening552
  • 11.10.2Classification of Flash Memory Reliability Tests554
  • 11.10.3Acceleration Models of the Reliability Tests557
  • 11.10.4Flash Memory Sort and Reliability Test Flow559
  • 11.10.5Flash Memory Product Qualification Flow561
  • 11.10.6Burn-In and Reliability Monitoring Program564
  • 11.10.7Failure Rate Calculations565
  • 11.11For Further Study570
  • 11.11.1Introduction570
  • 11.11.2Erratic Erase570
  • 11.11.3Stress-Induced-Leakage-Current Related Retention Effects571
  • 11.11.4Detrapping-Related Retention Effects572
  • 11.11.5Qualification Methods573
  • 11.11.6Flash Memory Floating-Gate to Floating-Gate Coupling574
  • 11.11.7New Program Disturb Phenomenon in NAND Flash Memory575
  • 11.11.8Impacts of Random Telegraph Signals and Few-Electron Phenomena on the Scaling of Flash Memories576
12Multilevel Cell Digital Memories591
  • 12.1Introduction591
  • 12.2Pursuit of Low-Cost Memory592
  • 12.3Multibit Storage Breakthrough594
  • 12.3.1Intel StrataFlash Technology594
  • 12.3.2Evolution of MLC Memory Technology Development596
  • 12.3.3Multilevel Cell Concept596
  • 12.4View of MLC Today599
  • 12.4.1Multilevel Cell Key Features599
  • 12.4.2Flash Cell Structure and Operation599
  • 12.4.3Multilevel Cell Operation603
  • 12.4.4Mixed Signal Design Implementation608
  • 12.5Low-Cost Design Implementation611
  • 12.6Low-Cost Process Manufacturing612
  • 12.7Standard Product Feature Set612
  • 12.7.1Programming Speed613
  • 12.7.2Read Speed613
  • 12.7.3Power Supply613
  • 12.7.4Reliability613
  • 12.8Further Reading: Multilevel Flash Memory and Technology Scaling614
  • 12.9Conclusion614
13Alternative Memory Technologies617
  • 13.1Introduction617
  • 13.2Limitations of Flash Memory619
  • 13.2.1Introduction619
  • 13.2.2Programming Voltage619
  • 13.2.3Programming Speed623
  • 13.2.4Endurance623
  • 13.2.5Scaling623
  • 13.3NROM Memories624
  • 13.3.1Introduction625
  • 13.3.2Memory Cell and Array; Structure and Operation625
  • 13.3.3Storage Mechanism632
  • 13.3.4Reliability638
  • 13.3.5Quad NROM Technology645
  • 13.3.6Fabrication650
  • 13.3.7Scaling652
  • 13.3.8Products655
  • 13.3.9Summary658
  • 13.4Ferroelectric Memories658
  • 13.4.1Introduction658
  • 13.4.2Storage Mechanism660
  • 13.4.3Memory Cells and Arrays664
  • 13.4.4Fabrication670
  • 13.4.5Nonvolatile Characteristics671
  • 13.4.6Scaling673
  • 13.4.7Reliability674
  • 13.4.8Die and Test Cost675
  • 13.4.9Ferroelectric Products676
  • 13.4.10Ferroelectric Memory Summary677
  • 13.5Magnetic Memories678
  • 13.5.1Introduction678
  • 13.5.2Magnetic Random-Access Memory with Giant Magnetoresistive Devices679
  • 13.5.3Magnetic Random-Access Memory with Magnetic Tunnel Junction Devices684
  • 13.5.4Programming Characteristics685
  • 13.5.5Fabrication686
  • 13.5.6Nonvolatile Characteristics687
  • 13.5.7Scaling687
  • 13.5.8Reliability688
  • 13.5.9Die and Test Cost688
  • 13.5.10Magnetic Memory Summary689
  • 13.6Single-Electron and Few-Electron Memories689
  • 13.6.1Introduction689
  • 13.6.2Electric Charge Quantization in Solids689
  • 13.6.3Single-Electron Effects in Memory Cells691
  • 13.6.4Single-Electron Memories693
  • 13.6.5Few-Electron Memories693
  • 13.7Resistive and Hybrid CMOS/Nanodevice Memories696
  • 13.7.1Introduction696
  • 13.7.2Programmable Diode Technologies698
  • 13.7.3Hybrid CMOS/Nanodevice Resistive Memories700
  • 13.7.4Expected Performance701
  • 13.7.5Resistive Memory Summary703
  • 13.8NOVORAM/FRAM Cell and Architecture703
  • 13.8.1Introduction703
  • 13.8.2Crested Tunnel Barriers703
  • 13.8.3NOVORAM/FGRAM Cell and Architecture706
  • 13.8.4NOVORAM/FGRAM Summary707
  • 13.9Phase Change Memories707
  • 13.9.1Introduction707
  • 13.9.2Storage Mechanism709
  • 13.9.3GST Phase Change Material709
  • 13.9.4Memory Cell712
  • 13.9.5Memory Array and Support Circuitry720
  • 13.9.6Fabrication721
  • 13.9.7Scaling722
  • 13.9.8Reliability725
  • 13.9.9Products727
  • 13.9.10Summary728

13개 장을 저자가 각각 다르게 쓴 편저다. 4장 Physics of Flash Memories가 FN 터널링·CHEI·SSI·SHEI를 한자리에 모아 15.5의 뼈대가 되고, 11장 Flash Memory Reliability는 145쪽짜리 한 장으로 SILC·리텐션·디스터브·스크리닝을 전부 훑는다. 5장(NOR)과 6장(NAND)이 셀·어레이 수준에서 갈라지는 지점을 나란히 보여 준다. 13장이 NROM·FeRAM·MRAM·PCM을 다뤄 15.8의 출발점이 되지만 2008년 책이라 3D NAND(15.6)와 SSD 컨트롤러(15.7)는 없다 — 그쪽은 학회 자료로 채운다.

DRAM Circuit Design: Fundamental and High-Speed Topics

15부Brent Keeth · R. Jacob Baker 외 · 2nd ed. · Wiley-IEEE Press, 2007  원본 대조

1An Introduction to DRAM
  • 1.1DRAM Types and Operation1
  • 1.1.1The 1k DRAM (First Generation)1
  • 1.1.2The 4k–64 Meg DRAM (Second Generation)7
  • 1.1.3Synchronous DRAM (Third Generation)15
  • 1.2DRAM Basics22
  • 1.2.1Access and Sense Operations24
  • 1.2.2Write Operation28
  • 1.2.3Opening a Row (Summary)29
  • 1.2.4Open/Folded DRAM Array Architectures31
2The DRAM Array
  • 2.1The Mbit Cell33
  • 2.2The Sense Amp44
  • 2.2.1Equilibration and Bias Circuits44
  • 2.2.2Isolation Devices46
  • 2.2.3Input/Output Transistors46
  • 2.2.4Nsense and Psense Amplifiers47
  • 2.2.5Rate of Activation49
  • 2.2.6Configurations49
  • 2.2.7Operation52
  • 2.3Row Decoder Elements54
  • 2.3.1Bootstrap Wordline Driver55
  • 2.3.2NOR Driver57
  • 2.3.3CMOS Driver58
  • 2.3.4Address Decode Tree58
  • 2.3.5Static Tree59
  • 2.3.6P&E Tree59
  • 2.3.7Predecoding60
  • 2.3.8Pass Transistor Tree61
  • 2.4Discussion61
3Array Architectures
  • 3.1Array Architectures65
  • 3.1.1Open Digitline Array Architecture65
  • 3.1.2Folded Array Architecture75
  • 3.2Design Examples: Advanced Bilevel DRAM Architecture83
  • 3.2.1Array Architecture Objectives84
  • 3.2.2Bilevel Digitline Construction85
  • 3.2.3Bilevel Digitline Array Architecture88
  • 3.2.4Architectural Comparison93
4The Peripheral Circuitry
  • 4.1Column Decoder Elements99
  • 4.2Column and Row Redundancy102
  • 4.2.1Row Redundancy104
  • 4.2.2Column Redundancy107
5Global Circuitry and Considerations
  • 5.1Data Path Elements111
  • 5.1.1Data Input Buffer111
  • 5.1.2Data Write Muxes115
  • 5.1.3Write Driver Circuit116
  • 5.1.4Data Read Path118
  • 5.1.5DC Sense Amplifier (DCSA)119
  • 5.1.6Helper Flip-Flop (HFF)121
  • 5.1.7Data Read Muxes122
  • 5.1.8Output Buffer Circuit124
  • 5.1.9Test Modes125
  • 5.2Address Path Elements126
  • 5.2.1Row Address Path126
  • 5.2.2Row Address Buffer127
  • 5.2.3CBR Counter127
  • 5.2.4Predecode Logic128
  • 5.2.5Refresh Rate128
  • 5.2.6Array Buffers130
  • 5.2.7Phase Drivers131
  • 5.2.8Column Address Path131
  • 5.2.9Address Transition Detection132
  • 5.3Synchronization in DRAMs135
  • 5.3.1The Phase Detector137
  • 5.3.2The Basic Delay Element137
  • 5.3.3Control of the Shift Register138
  • 5.3.4Phase Detector Operation139
  • 5.3.5Experimental Results140
  • 5.3.6Discussion142
6Voltage Converters
  • 6.1Internal Voltage Regulators147
  • 6.1.1Voltage Converters147
  • 6.1.2Voltage References148
  • 6.1.3Bandgap Reference153
  • 6.1.4The Power Stage154
  • 6.2Pumps and Generators158
  • 6.2.1Pumps158
  • 6.2.2DVC2 Generator165
  • 6.3Discussion165
7An Introduction to High-Speed DRAM
  • 7.1The Performance Paradigm167
  • 7.2Performance for DRAM Memory Devices169
  • 7.3Underlying Technology Improvements171
8High-Speed Die Architectures
  • 8.1Introduction: Optimizing DRAM Architecture for High Performance173
  • 8.2Architectural Features: Bandwidth, Latency, and Cycle Time175
  • 8.2.1Architectural Limiters: The Array Data Path176
  • 8.2.2Architectural Limiters: The Read Data Path183
  • 8.2.3Architectural Limiters: Latency186
  • 8.3Conclusion: Designing for High Performance190
9Input Circuit Paths
  • 9.1Introduction193
  • 9.2Input Receivers196
  • 9.3Matched Routing200
  • 9.4Capture Latches203
  • 9.5Input Timing Adjustments206
  • 9.6Current Mode Logic (CML)212
10Output Circuit Paths
  • 10.1Transmission Line, Impedance, and Termination220
  • 10.2Impedance Control224
  • 10.3Simultaneous Switching Noise (SSN)230
  • 10.4Signal Return Path Shift (SRPS)238
  • 10.5Electrostatic Discharge (ESD)242
  • 10.6Parallel-to-Serial Conversion244
  • 10.7Emerging Memory I/O Features248
11Timing Circuits
  • 11.1Introduction251
  • 11.2All-Digital Clock Synchronization Design254
  • 11.2.1Timing Analysis255
  • 11.2.2Digital Delay Line259
  • 11.2.3Phase Detector (PD)267
  • 11.2.4Test and Debug273
  • 11.2.5Dual-Loop Architecture274
  • 11.3Mixed-Mode Clock Synchronization Design275
  • 11.3.1Analog Delay Line276
  • 11.3.2Charge-Pump Phase Detector (CPPD)283
  • 11.3.3Dual-Loop Analog DLL286
  • 11.3.4Mixed-Mode DLL and Its Applications289
  • 11.4What's Next for Timing291
12Control Logic Design
  • 12.1Introduction295
  • 12.2DRAM Logic Styles298
  • 12.2.1Process Limitations298
  • 12.2.2Array Operation301
  • 12.2.3Performance Requirements304
  • 12.2.4Delay-Chain Logic Style306
  • 12.2.5Domino Logic309
  • 12.2.6Testability314
  • 12.3Command and Address Control317
  • 12.3.1Command Decoder318
  • 12.3.2Read and Write Data Address Registers324
  • 12.3.3Column Access Control328
  • 12.4Write Data Latency Timing and Data Demultiplexing330
  • 12.4.1Write Latency Timing332
  • 12.4.2Write Data Demultiplexing338
  • 12.5Read Data Latency Timing and Data Multiplexing346
  • 12.5.1Read Data FIFO350
  • 12.5.2Read Latency (CL) Tracking359
  • 12.6Comments on Future Direction for DRAM Logic Design367
13Power Delivery
  • 13.1Power Delivery Network Design373
  • 13.2Device/Package Co-design376
  • 13.3Full-Chip Simulations380

14Future Work in High-Performance Memory385

1~6장이 초판 A Tutorial(2001)의 DRAM 회로 기초이고, 7~14장이 2판에서 새로 붙은 고속 주제다 — 입출력 경로, DLL·타이밍, 제어 로직, 파워 딜리버리. 2.1 The Mbit Cell과 2.2 The Sense Amp가 15.3에, 3장 어레이 구조와 4~6장 주변 회로가 15.4에 그대로 대응한다. 9~11장은 15.9 HBM의 I/O·타이밍 배경으로 읽으면 된다. 이 책의 인쇄 목차에는 장 시작 쪽수가 없어 절 쪽수만 실었다.

IEDM · ISSCC · VLSI Symposium 자료

15부연례 학회 논문 — HBM·3D NAND·차세대 메모리의 1차 자료  미확보

목차 미확보직접 확인해 채워 넣을 것

메모리 제품 기술은 교재보다 학회 자료가 앞선다. /references/papers에서 관리할 대상.

16부 · 디스플레이 소자

Introduction to Flat Panel Displays

16부Jiun-Haw Lee · I-Chun Cheng · Hong Hua · Shin-Tson Wu · 2nd ed. · Wiley, 2020  원본 대조

1Flat Panel Displays1
  • 1.1Introduction1
  • 1.2Emissive and non-emissive Displays4
  • 1.3Display Specifications4
  • 1.3.1Physical Parameters5
  • 1.3.2Brightness and Color7
  • 1.3.3Contrast Ratio8
  • 1.3.4Spatial and Temporal Characteristics8
  • 1.3.5Efficiency and Power Consumption9
  • 1.3.6Flexible Displays9
  • 1.4Applications of Flat Panel Displays9
  • 1.4.1Liquid Crystal Displays10
  • 1.4.2Light-Emitting Diodes10
  • 1.4.3Organic Light-Emitting Devices11
  • 1.4.4Reflective Displays11
  • 1.4.5Head-Mounted Displays12
  • 1.4.6Touch Panel Technologies12
2Color Science and Engineering15
  • 2.1Introduction15
  • 2.2Photometry16
  • 2.3The Eye18
  • 2.4Colorimetry22
  • 2.4.1Trichromatic Space22
  • 2.4.2CIE 1931 Colormetric Observer24
  • 2.4.3CIE 1976 Uniform Color System27
  • 2.4.4CIECAM 02 Color Appearance Model30
  • 2.4.5Color Gamut31
  • 2.4.6Light Sources32
  • 2.4.6.1Sunlight and Blackbody Radiators32
  • 2.4.6.2Light Sources for Transmissive, Reflective, and Projection Displays33
  • 2.4.6.3Color Rendering Index34
  • 2.5Production and Reproduction of Colors34
  • 2.6Display Measurements35
3Thin Film Transistors39
  • 3.1Introduction39
  • 3.2Basic Concepts of Crystalline Semiconductor Materials39
  • 3.2.1Band Structure of Crystalline Semiconductors40
  • 3.2.2Intrinsic and Extrinsic Semiconductors43
  • 3.3Classification of Silicon Materials46
  • 3.4Hydrogenated Amorphous Silicon (a-Si:H)46
  • 3.4.1Electronic Structure of a:Si-H47
  • 3.4.2Carrier Transport in a-Si:H48
  • 3.4.3Fabrication of a-Si:H48
  • 3.5Polycrystalline Silicon49
  • 3.5.1Carrier Transport in Polycrystalline Silicon49
  • 3.5.2Fabrication of Polycrystalline-Silicon50
  • 3.6Thin-Film Transistors52
  • 3.6.1Fundamentals of TFTs52
  • 3.6.2a-Si:H TFTs55
  • 3.6.3Poly-Si TFTs55
  • 3.6.4Organic TFTs56
  • 3.6.5Oxide Semiconductor TFTs57
  • 3.6.6Flexible TFT Technology59
  • 3.7PM and AM Driving Schemes61
4Liquid Crystal Displays71
  • 4.1Introduction71
  • 4.2Transmissive LCDs72
  • 4.3Liquid Crystal Materials74
  • 4.3.1Phase Transition Temperatures75
  • 4.3.2Eutectic Mixtures75
  • 4.3.3Dielectric Constants77
  • 4.3.4Elastic Constants78
  • 4.3.5Rotational Viscosity79
  • 4.3.6Optical Properties80
  • 4.3.7Refractive Indices80
  • 4.3.7.1Wavelength Effect80
  • 4.3.7.2Temperature Effect82
  • 4.4Liquid Crystal Alignment83
  • 4.5Homogeneous Cell84
  • 4.5.1Phase Retardation Effect85
  • 4.5.2Voltage Dependent Transmittance86
  • 4.6Twisted Nematic (TN)87
  • 4.6.1Optical Transmittance87
  • 4.6.2Viewing Angle89
  • 4.6.3Film-Compensated TN90
  • 4.7In-Plane Switching (IPS)91
  • 4.7.1Device Structure92
  • 4.7.2Voltage-Dependent Transmittance92
  • 4.7.3Viewing Angle92
  • 4.7.4Phase Compensation Films93
  • 4.8Fringe Field Switching (FFS)95
  • 4.8.1Device Configurations95
  • 4.8.2n-FFS versus p-FFS96
  • 4.9Vertical Alignment (VA)98
  • 4.9.1Voltage-Dependent Transmittance98
  • 4.9.2Response Time99
  • 4.9.3Overdrive and Undershoot Addressing101
  • 4.9.4Multi-domain Vertical Alignment (MVA)102
  • 4.10Ambient Contrast Ratio103
  • 4.10.1Modeling of Ambient Contrast Ratio103
  • 4.10.2Ambient Contrast Ratio of LCD103
  • 4.10.3Ambient Contrast Ratio of OLED104
  • 4.10.4Simulated ACR for Mobile Displays105
  • 4.10.5Simulated ACR for TVs105
  • 4.10.6Simulated Ambient Isocontrast Contour106
  • 4.10.6.1Mobile Displays106
  • 4.10.6.2Large-Sized TVs108
  • 4.10.7Improving LCD's ACR109
  • 4.10.8Improving OLED's ACR110
  • 4.11Motion Picture Response Time (MPRT)112
  • 4.12Wide Color Gamut114
  • 4.12.1Material Synthesis and Characterizations115
  • 4.12.2Device Configurations116
  • 4.13High Dynamic Range118
  • 4.13.1Mini-LED Backlit LCDs118
  • 4.13.2Dual-Panel LCDs120
  • 4.14Future Directions121
5Light-Emitting Diodes135
  • 5.1Introduction135
  • 5.2Material Systems138
  • 5.2.1AlGaAs and AlGaInP Material Systems for Red and Yellow LEDs140
  • 5.2.2GaN-Based Systems for Green, Blue, UV and UV LEDs141
  • 5.2.3White LEDs143
  • 5.3Diode Characteristics146
  • 5.3.1p- and n-Layer147
  • 5.3.2Depletion Region148
  • 5.3.3J–V Characteristics150
  • 5.3.4Heterojunction Structures152
  • 5.3.5Quantum-Well, -Wire, and -Dot Structures152
  • 5.4Light-Emitting Characteristics154
  • 5.4.1Recombination Model154
  • 5.4.2L-J Characteristics155
  • 5.4.3Spectral Characteristics156
  • 5.4.4Efficiency Droop159
  • 5.5Device Fabrication160
  • 5.5.1Epitaxy161
  • 5.5.2Process Flow and Device Structure Design165
  • 5.5.3Extraction Efficiency Improvement166
  • 5.5.4Packaging168
  • 5.6Applications169
  • 5.6.1Traffic Signals, Electronic Signage and Huge Displays169
  • 5.6.2LCD Backlight170
  • 5.6.3General Lighting172
  • 5.6.4Micro-LEDs173
6Organic Light-Emitting Devices179
  • 6.1Introduction179
  • 6.2Energy States in Organic Materials180
  • 6.3Photophysical Processes182
  • 6.3.1Franck–Condon Principle182
  • 6.3.2Fluorescence and Phosphorescence183
  • 6.3.3Jablonski Diagram185
  • 6.3.4Intermolecular Processes186
  • 6.3.4.1Energy Transfer Processes186
  • 6.3.4.2Excimer and Exciplex Formation188
  • 6.3.4.3Quenching Processes188
  • 6.3.5Quantum Yield Calculation189
  • 6.4Carrier Injection, Transport, and Recombination191
  • 6.4.1Richardson–Schottky Thermionic Emission192
  • 6.4.2SCLC, TCLC, and P–F Mobility193
  • 6.4.3Charge Recombination195
  • 6.4.4Electromagnetic Wave Radiation195
  • 6.5Structure, Fabrication and Characterization197
  • 6.5.1Device Structure of Organic Light-Emitting Device198
  • 6.5.1.1Two-Layer Organic Light-Emitting Device198
  • 6.5.1.2Matrix Doping in the EML200
  • 6.5.1.3HIL, EIL, and p-i-n Structure202
  • 6.5.1.4Top-Emission and Transparent OLEDs204
  • 6.5.2Polymer OLED205
  • 6.5.3Device Fabrication206
  • 6.5.3.1Thin-film Formation207
  • 6.5.3.2Encapsulation and Passivation210
  • 6.5.3.3Device Structures for AM Driving211
  • 6.5.4Electrical and Optical Characteristics212
  • 6.5.5Degradation Mechanisms214
  • 6.6Triplet Exciton Utilization219
  • 6.6.1Phosphorescent OLEDs219
  • 6.6.2Triplet-Triplet Annihilation OLED221
  • 6.6.3Thermally Activated Delayed Fluorescence222
  • 6.6.4Exciplex-Based OLED223
  • 6.7Tandem Structure224
  • 6.8Improvement of Extraction Efficiency226
  • 6.9White OLEDs229
  • 6.10Quantum-Dot Light-Emitting Diode231
  • 6.11Applications233
  • 6.11.1Mobile OLED Display233
  • 6.11.2OLED TV234
  • 6.11.3OLED Lighting235
  • 6.11.4Flexible OLEDs235
  • 6.11.5Novel Displays236
7Reflective Displays245
  • 7.1Introduction245
  • 7.2Electrophoretic Displays245
  • 7.3Reflective Liquid Crystal Displays249
  • 7.4Reflective Display Based on Optical Interference (Mirasol Display)253
  • 7.5Electrowetting Display254
  • 7.6Comparison of Different Reflective Display Technologies256
8Fundamentals of Head-Mounted Displays for Virtual and Augmented Reality259
  • 8.1Introduction259
  • 8.2Human Visual System262
  • 8.3Fundamentals of Head-mounted Displays265
  • 8.3.1Paraxial Optical Specifications265
  • 8.3.2Microdisplay Sources272
  • 8.3.3HMD Optics Principles and Architectures275
  • 8.3.4Optical Combiner280
  • 8.4HMD Optical Designs and Performance Specifications286
  • 8.4.1HMD Optical Designs286
  • 8.4.2HMD Optical Performance Specifications290
  • 8.5Advanced HMD Technologies298
  • 8.5.1Eyetracked and Fovea-Contingent HMDs299
  • 8.5.2Dynamic Range Enhancement302
  • 8.5.3Addressable Focus Cues in HMDs305
  • 8.5.3.1Extended Depth of Field Displays307
  • 8.5.3.2Vari-Focal Plane (VFP) Displays308
  • 8.5.3.3Multi-Focal Plane (MFP) Displays309
  • 8.5.3.4Head-Mounted Light Field (LF) Displays315
  • 8.5.4Head-Mounted Light Field Displays316
  • 8.5.4.1InI-Based Head-Mounted Light Field Displays317
  • 8.5.4.2Computational Multi-Layer Head-Mounted Light Field Displays321
  • 8.5.5Mutual Occlusion Capability323
9Touch Panel Technology337
  • 9.1Introduction337
  • 9.2Resistive Touch Panel338
  • 9.3Capacitive Touch Panel339
  • 9.4On-Cell and In-Cell Touch Panel344
  • 9.5Optical Sensing for Large Panels347

16부의 기본 교재. 3장 Thin Film Transistors가 a-Si:H·poly-Si·유기·산화물 TFT를 한 장에 모아 16.2와 거의 그대로 겹치고, 4장(LCD)·5장(LED)·6장(OLED)이 각각 16.3·16.5·16.4의 뼈대다. 5.6.4 Micro-LEDs와 8장(HMD)·9장(터치 패널)이 16.6 쪽 재료가 된다. 2판에서 미니 LED 백라이트와 듀얼 패널 HDR(4.13), AR/VR 광학(8장)이 새로 들어왔다.

Materials for Solid State Lighting and Displays

16부Adrian Kitai (ed.) · Wiley, 2017  원본 대조

1Principles of Solid State Luminescence1
  • 1.1Introduction to Radiation from an Accelerating Charge1
  • 1.2Radiation from an Oscillating Dipole4
  • 1.3Quantum Description of an Electron during a Radiation Event5
  • 1.4The Exciton7
  • 1.5Two-Electron Atoms10
  • 1.6Molecular Excitons16
  • 1.7Band-to-Band Transitions19
  • 1.8Photometric Units23
  • 1.9The Light Emitting Diode28
2Quantum Dots for Displays and Solid State Lighting31
  • 2.1Introduction31
  • 2.2Nanostructured Materials34
  • 2.3Quantum Dots35
  • 2.3.1History of Quantum Dots36
  • 2.3.2Structure and Properties Relationship36
  • 2.3.3Quantum Confinement Effects on Band Gap38
  • 2.4Relaxation Process of Excitons41
  • 2.4.1Radiative Relaxation42
  • 2.4.2Nonradiative Relaxation Process45
  • 2.5Blinking Effect46
  • 2.6Surface Passivation47
  • 2.6.1Organically Capped QDs47
  • 2.6.2Inorganically Passivated QDs48
  • 2.7Synthesis Processes49
  • 2.7.1Top-Down Synthesis49
  • 2.7.2Bottom-Up Approach50
  • 2.8Optical Properties and Applications53
  • 2.8.1Displays53
  • 2.8.2Solid State Lighting73
  • 2.8.3Biological Applications78
  • 2.9Perspective81
3Color Conversion Phosphors for Light Emitting Diodes91
  • 3.1Introduction91
  • 3.2Disadvantages of Using LEDs Without Color Conversion Phosphors93
  • 3.3Phosphors for Converting the Color of Light Emitted by LEDs95
  • 3.3.1General Considerations95
  • 3.3.2Requirements of Color Conversion Phosphors95
  • 3.3.3Commonly Used Activators in Color Conversion Phosphors97
  • 3.3.4Strategies for Generating White Light from LEDs97
  • 3.3.5Outstanding Problems with Color Conversion Phosphors for LEDs98
  • 3.4Survey of the Synthesis and Properties of Some Currently Available Color Conversion Phosphors99
  • 3.4.1Phosphor synthesis99
  • 3.4.2Metal Oxide Based Phosphors99
  • 3.4.3Metal Sulfide Based Phosphors113
  • 3.4.4Metal Nitrides117
  • 3.4.5Alkaline Earth Metal Oxo-Nitrides120
  • 3.4.6Metal Fluoride Phosphors121
  • 3.5Multi-Phosphor pcLEDs122
  • 3.6Quantum Dots123
  • 3.7Laser Diodes124
  • 3.8Conclusions125
4Nitride and Oxynitride Phosphors for Light Emitting Diodes135
  • 4.1Introduction135
  • 4.2Synthesis of Nitride and Oxynitride Phosphors138
  • 4.2.1Solid State Reaction Method138
  • 4.2.2Gas Reduction and Nitridation139
  • 4.2.3Carbothermal Reduction and Nitridation140
  • 4.2.4Alloy Nitridation140
  • 4.2.5Ammonothermal Synthesis141
  • 4.3Photoluminescence Properties of Nitride and Oxynitride Phosphors142
  • 4.3.1Luminescence Spectra of Typical Activators142
  • 4.4Emerging Nitride Phosphors and Their Synthesis165
  • 4.4.1Narrow-Band Red Nitride Phosphors165
  • 4.4.2Narrow-Band Green Nitride Phosphors167
  • 4.5Applications of Nitride Phosphors169
  • 4.5.1General Lighting169
  • 4.5.2LCD Backlight172
5Organic Light Emitting Device Materials for Displays183
  • 5.1Introduction to OLEDs and Organic Electroluminscent Materials184
  • 5.2OLED Light Emitting Materials186
  • 5.2.1Neat Emitters187
  • 5.2.2Guest Emitters192
  • 5.2.3Aggregate-Induced Emission201
  • 5.3OLED Displays203
  • 5.3.1RGB Color Patterning Approaches203
  • 5.3.2Display Addressing Approaches204
  • 5.3.3FMM Technology207
  • 5.3.4Alternative Fabrication Techniques208
  • 5.3.5Outlook on OLED Display Commercialization212
  • 5.4Quantum Dot Light Emitting Devices213
  • 5.4.1QD Optimization by Core–Shell Morphology214
  • 5.4.2Organic Charge Transport QD-LEDs215
  • 5.4.3Hybrid Organic–Inorganic Charge Transport QD-LEDs217
  • 5.4.4Energy Transfer Enhanced QD-LEDs219
  • 5.4.5QD-LED Lifetime220
6White-Light Emitting Materials for Organic Light-Emitting Diode-Based Displays and Lighting231
  • 6.1Introduction231
  • 6.2White Organic Light-Emitting Diodes233
  • 6.3Photometry and Radiometry236
  • 6.3.1OLED Efficiencies239
  • 6.3.2Color Stimulus Specification239
  • 6.3.3Color Correlated Temperature240
  • 6.3.4Color Rendering Index241
  • 6.3.5White Light241
  • 6.4Device Optics242
  • 6.4.1Optical Properties of Thin Films242
  • 6.4.2Optical Outcoupling245
  • 6.4.3Top-Emitting OLEDs247
  • 6.4.4Simulation Tools248
  • 6.5Materials for Efficient White Electroluminescence248
  • 6.5.1Spin Statistics for Electroluminescence248
  • 6.5.2Fluorescence-Emitting Molecules249
  • 6.5.3Advanced Concepts Comprising Fluorescent Emitters251
  • 6.5.4Phosphorescence-Emitting Molecules251
  • 6.5.5Single White-Light Emitting Phosphorescent Materials256
  • 6.5.6Thermally Activated Delayed Fluorescence-Based Emitters257
  • 6.5.7Phosphorescence Versus Thermally Activated Delayed Fluorescence261
  • 6.5.8TADF Assisted Fluorescence (TAF) Emitters263
  • 6.6Polymer Concepts263
  • 6.6.1Various Concepts Involving Polymer Materials265
  • 6.6.2Learning from High Performance Small Molecules for High Efficiency Polymers267
  • 6.7Summary and Outlook268
7Light Emitting Diode Materials and Devices273
  • 7.1Introduction273
  • 7.2Light Emitting Diode Basics273
  • 7.2.1Construction273
  • 7.2.2Recombination Processes275
  • 7.2.3Heterojunctions277
  • 7.2.4Quantum Wells278
  • 7.2.5Current Injection278
  • 7.2.6Forward voltage280
  • 7.3Material Systems280
  • 7.3.1Ga(As,P)280
  • 7.3.2Ga(As,P):N281
  • 7.3.3(Al,Ga)As282
  • 7.3.4(Al,Ga)InP282
  • 7.3.5(Ga,In)N283
  • 7.3.6White Light Generation285
  • 7.4Packaging Technologies288
  • 7.4.1Low Power288
  • 7.4.2Mid Power288
  • 7.4.3High Power289
  • 7.4.4Chip-On-Board LEDs290
  • 7.4.5Multi-Color LEDs290
  • 7.4.6Electrostatic Discharge Protection290
  • 7.5Performance291
  • 7.5.1Light Extraction Efficiency291
  • 7.5.2Monochromatic Performance292
  • 7.5.3White-Emitting Performance298
  • 7.5.4Temperature Effects306
  • 7.5.5Reliability306
8Alternating Current Thin Film and Powder Electroluminescence313
  • 8.1Introduction313
  • 8.2Background of TFEL314
  • 8.2.1Thick Film Dielectric EL Structure315
  • 8.2.2Ceramic Sheet Dielectric EL316
  • 8.2.3Sphere-Supported TFEL316
  • 8.3Theory of Operation317
  • 8.4Electroluminescent Phosphors324
  • 8.5Thin Film Double-Insulating EL Devices325
  • 8.6Current Status of TFEL327
  • 8.7Background of AC Powder EL328
  • 8.8Mechanism of Light Emission in AC Powder EL329
  • 8.9Electroluminescence Characteristics of AC Powder EL Materials333
  • 8.10Emission Spectra of AC Powder EL334
  • 8.11Luminance Degradation335
  • 8.12Moisture and Operating Environment336
  • 8.13Current Status and Limitations of Powder EL336
  • 8.14Research Directions in AC Powder EL and TFEL336

소자가 아니라 발광 소재가 축인 편저 8장이다. 2장(양자점)과 3~4장(색변환·질화물 형광체)이 16.5의 소재 근거이고, 5~6장이 OLED 발광층과 백색 OLED를 다뤄 16.4를 보강한다. 1장 Principles of Solid State Luminescence는 엑시톤부터 광도 단위까지 발광 기구 자체를 세우는 장이라 16.1과 17.3 양쪽에 걸친다. 8장의 AC 박막·분말 EL은 지금 쓰이는 기술은 아니다.

Flexible Electronics: Materials and Applications

16부William S. Wong · Alberto Salleo (eds.) · Springer, 2009 · ISBN 978-0-387-74362-2  원본 대조

1Overview of Flexible Electronics Technology1
  • 1.1History of Flexible Electronics1
  • 1.2Materials for Flexible Electronics3
  • 1.3Fabrication Technology for Flexible Electronics18
  • 1.4Outlook20
2Mechanical Theory of the Film-on-Substrate-Foil Structure: Curvature and Overlay Alignment in Amorphous Silicon Thin-Film Devices Fabricated on Free-Standing Foil Substrates29
  • 2.1Introduction29
  • 2.2Theory32
  • 2.3Applications36
  • 2.4Conclusions50
3Low-temperature Amorphous and Nanocrystalline Silicon Materials and Thin-film Transistors53
  • 3.1Introduction53
  • 3.2Low-temperature Amorphous and Nanocrystalline Silicon Materials55
  • 3.3Low-temperature Dielectrics57
  • 3.4Low-temperature Thin-film Transistor Devices59
  • 3.5Device Stability67
  • 3.6Conclusions and Future Prospective70
4Amorphous Silicon: Flexible Backplane and Display Application75
  • 4.1Introduction75
  • 4.2Enabling Technologies for Flexible Backplanes and Displays76
  • 4.3Flexible Active Matrix Backplane Requirements for OLED Displays91
  • 4.4Flexible AMOLED Displays Using a-Si TFT Backplanes95
  • 4.5Flexible Electrophoretic Displays Fabricated using a-Si TFT Backplanes102
  • 4.6Outlook for Low-Temperature a-Si TFT for Flexible Electronics Manufacturing102
5Flexible Transition Metal Oxide Electronics and Imprint Lithography107
  • 5.1Introduction107
  • 5.2Previous Work108
  • 5.3Properties of Transistor Materials113
  • 5.4Device Structures117
  • 5.5Fabrication on Flexible Substrates119
  • 5.6Flexible TMO Device Results128
  • 5.7Future Problems and Areas of Research133
  • 5.8Summary138
6Materials and Novel Patterning Methods for Flexible Electronics143
  • 6.1Introduction143
  • 6.2Materials Considerations for Flexible Electronics145
  • 6.3Print-Processing Options for Device Fabrication150
  • 6.4Performance and Characterization of Electronic Devices157
  • 6.5Printed Flexible Electronics170
  • 6.6Conclusions and Future Prospects176
7Sheet-Type Sensors and Actuators183
  • 7.1Introduction183
  • 7.2Sheet-type Image Scanners184
  • 7.3Sheet-Type Braille Displays201
  • 7.4Summary212
8Organic and Polymeric TFTs for Flexible Displays and Circuits215
  • 8.1Introduction215
  • 8.2Important Organic TFT Parameters for Electronic Systems216
  • 8.3Active Matrix Displays227
  • 8.4Active Matrix OLED Displays236
  • 8.5Using Organic TFTs for Electronic Circuits242
  • 8.6Conclusion256
9Semiconducting Polythiophenes for Field-Effect Transistor Devices in Flexible Electronics: Synthesis and Structure Property Relationships261
  • 9.1Introduction261
  • 9.2Polymerization of Thiophene Monomers264
  • 9.3Poly(3-Alkylthiophenes)273
  • 9.4Polythiophene Structural Analogues279
  • 9.5Thienothiophene Polymers286
  • 9.6Summary292
10Solution Cast Films of Carbon Nanotubes for Transparent Conductors and Thin Film Transistors297
  • 10.1Introduction: Nanoscale Carbon for Electronics, the Value Proposition297
  • 10.2Carbon NT Film Properties298
  • 10.3Fabrication Technologies305
  • 10.4Carbon NT Films as Conducting and Optically Transparent Material309
  • 10.5TFTs with Carbon Nanotube Conducting Channels313
  • 10.6Conclusions324
11Physics and Materials Issues of Organic Photovoltaics329
  • 11.1Introduction329
  • 11.2Basic Operation329
  • 11.3Organic and Hybrid Solar Cell Architectures332
  • 11.4Materials334
  • 11.5Light Absorption334
  • 11.6Exciton Harvesting338
  • 11.7Exciton Dissociation349
  • 11.8Dissociating Geminate Pairs351
  • 11.9Heterojunction Energy Offsets355
  • 11.10Charge Transport and Recombination357
  • 11.11Nanostructures364
  • 11.12Efficiency Limits and Outlook367
12Bulk Heterojunction Solar Cells for Large-Area PV Fabrication on Flexible Substrates373
  • 12.1Introduction and Motivation373
  • 12.2The Concept of Bulk Heterojunction Solar Cells377
  • 12.3Challenges for Large-Area Processing401
  • 12.4Conclusions408
13Substrates and Thin-Film Barrier Technology for Flexible Electronics413
  • 13.1Introduction413
  • 13.2Barrier Requirements414
  • 13.3Thin-Film Barrier Technology419
  • 13.4Barrier–Device Integration437
  • 13.5Concluding Remarks442

Index451

인쇄 목차를 절·쪽수까지 그대로 옮겼다(13개 장). 장마다 저자가 다른 편저라 목차에 장 저자가 함께 실려 있는데 여기서는 싣지 않았다. 합자(fi)는 풀어 적었다. 16.9 차세대 디스플레이의 플렉시블·스트레처블·투명 세 절이 학회 자료만으로 서 있던 자리를 받는다 — 2장이 포일 기판 위 박막 구조의 곡률과 중립면을 정면으로 유도하고(16.9.1의 유일한 서적 근거), 13장이 기판과 배리어(수분·산소 투과)를 다뤄 소재·공정의 과제에 대응한다. 3~5장(저온 a-Si·나노결정 실리콘 · 산화물 TMO TFT)과 8장(유기·고분자 TFT)은 16.3 박막 트랜지스터의 IGZO·유기 TFT 절을 받치고, 4장은 플렉시블 AMOLED·전기영동 백플레인이다. 6장(인쇄 공정)·10장(CNT 투명 전극)은 10부와 겹치고, 11~12장(유기 태양전지 · 대면적 인쇄 공정)은 17.7에 유기·페로브스카이트 태양전지 두 절을 여는 근거가 됐다. 2009년 책이라 폴더블 상용화 이후의 적층·중립면 설계는 여기 없다 — 그쪽은 학회 자료로 채운다.

17부 · 광·전력·센서 소자

Fundamentals of Power Semiconductor Devices

17부B. Jayant Baliga · 2nd ed. · Springer, 2019  원본 대조

1Introduction1
  • 1.1Ideal and Typical Power-Switching Waveforms3
  • 1.2Ideal and Typical Power Device Characteristics5
  • 1.3Unipolar Power Devices8
  • 1.4Bipolar Power Devices10
  • 1.5MOS-Bipolar Power Devices10
  • 1.6Ideal Drift Region for Unipolar Power Devices14
  • 1.7Charge-Coupled Structures: Ideal Specific On-Resistance16
  • 1.8Summary20
2Material Properties and Transport Physics23
  • 2.1Fundamental Properties23
  • 2.1.1Intrinsic Carrier Concentration24
  • 2.1.2Bandgap Narrowing26
  • 2.1.3Built-in Potential30
  • 2.1.4Zero-Bias Depletion Width32
  • 2.1.5Impact Ionization Coefficients32
  • 2.1.6Carrier Mobility35
  • 2.2Resistivity51
  • 2.2.1Intrinsic Resistivity51
  • 2.2.2Extrinsic Resistivity51
  • 2.2.3Neutron Transmutation Doping54
  • 2.3Recombination Lifetime59
  • 2.3.1Shockley-Read-Hall Recombination60
  • 2.3.2Low-Level Lifetime63
  • 2.3.3Space-Charge Generation Lifetime64
  • 2.3.4Recombination Level Optimization66
  • 2.3.5Lifetime Control75
  • 2.3.6Auger Recombination80
  • 2.4Ohmic Contacts82
  • 2.5Summary83
3Breakdown Voltage89
  • 3.1Avalanche Breakdown90
  • 3.1.1Power Law Approximations for the Impact Ionization Coefficients90
  • 3.1.2Multiplication Coefficient92
  • 3.2Abrupt One-Dimensional Diode94
  • 3.2.1Temperature Dependence99
  • 3.3Ideal Specific On-Resistance99
  • 3.4Abrupt Punch-Through Diode100
  • 3.5Linearly Graded Junction Diode102
  • 3.6Edge Terminations106
  • 3.6.1Planar Junction Termination106
  • 3.6.2Planar Junction with Floating Field Ring119
  • 3.6.3Planar Junction with Multiple Floating Field Rings129
  • 3.6.4Planar Junction with Field Plate131
  • 3.6.5Planar Junction with Field Plates and Field Rings136
  • 3.6.6Bevel Edge Terminations136
  • 3.6.7Etch Terminations147
  • 3.6.8Junction Termination Extension148
  • 3.7Open-Base Transistor Breakdown153
  • 3.7.1Composite Bevel Termination158
  • 3.7.2Double-Positive Bevel Termination159
  • 3.8Surface Passivation161
  • 3.9Silicon Carbide Edge Terminations162
  • 3.9.1Argon-Implanted Edge Termination162
  • 3.9.2Multiple-Floating-Zone Junction Termination Extension163
  • 3.9.3Hybrid Junction Termination Extension163
  • 3.9.4Multiple Floating Field Ring Design164
  • 3.9.5Orthogonal Positive Bevel Termination166
  • 3.10Summary167
4Schottky Rectifiers171
  • 4.1Power Schottky Rectifier Structure172
  • 4.2Metal-Semiconductor Contact173
  • 4.3Forward Conduction175
  • 4.4Reverse Blocking183
  • 4.4.1Leakage Current184
  • 4.4.2Schottky Barrier Lowering185
  • 4.4.3Pre-breakdown Avalanche Multiplication188
  • 4.4.4Silicon Carbide Rectifiers189
  • 4.5Device Capacitance191
  • 4.6Thermal Considerations192
  • 4.7Fundamental Trade-Off Analysis196
  • 4.8Device Technology198
  • 4.9Barrier Height Adjustment199
  • 4.10Edge Terminations201
  • 4.11Reverse Recovery Current202
  • 4.12Summary203
5P-i-N Rectifiers207
  • 5.1One-Dimensional Structure208
  • 5.1.1Recombination Current209
  • 5.1.2Low-Level Injection Current210
  • 5.1.3High-Level Injection Current212
  • 5.1.4Injection into the End Regions221
  • 5.1.5Carrier-Carrier Scattering Effect223
  • 5.1.6Auger Recombination Effect223
  • 5.1.7Forward Conduction Characteristics225
  • 5.2Silicon Carbide P-i-N Rectifiers234
  • 5.3Reverse Blocking236
  • 5.4Switching Performance240
  • 5.4.1Forward Recovery240
  • 5.4.2Reverse Recovery247
  • 5.5P-i-N Rectifier Structure with Buffer Layer265
  • 5.6Non-Punch-Through P-i-N Rectifier Structure266
  • 5.7P-i-N Rectifier Trade-Off Curves273
  • 5.7.1Lifetime Control276
  • 5.8Safe Operating Area277
  • 5.9Maximum Allowable [dJ/dt]279
  • 5.10Summary280
6Power MOSFETs283
  • 6.1Ideal Specific On-Resistance284
  • 6.2Device Cell Structure and Operation286
  • 6.2.1The V-MOSFET Structure287
  • 6.2.2The VD-MOSFET Structure288
  • 6.2.3The U-MOSFET Structure289
  • 6.3Basic Device Characteristics291
  • 6.4Blocking Voltage293
  • 6.4.1Impact of Edge Termination294
  • 6.4.2Impact of Graded Doping Profile295
  • 6.4.3Impact of Parasitic Bipolar Transistor296
  • 6.4.4Impact of Cell Pitch297
  • 6.4.5Impact of Gate Shape300
  • 6.4.6Impact of Cell Surface Topology303
  • 6.5Forward Conduction Characteristics305
  • 6.5.1MOS Interface Physics305
  • 6.5.2MOS Surface Charge Analysis309
  • 6.5.3Maximum Depletion Width314
  • 6.5.4Threshold Voltage316
  • 6.5.5Channel Resistance326
  • 6.6Power VD-MOSFET On-Resistance331
  • 6.6.1Source Contact Resistance334
  • 6.6.2Source Region Resistance335
  • 6.6.3Channel Resistance336
  • 6.6.4Accumulation Resistance337
  • 6.6.5JFET Resistance338
  • 6.6.6Drift Region Resistance339
  • 6.6.7N+ Substrate Resistance344
  • 6.6.8Drain Contact Resistance344
  • 6.6.9Total On-Resistance345
  • 6.7Power VD-MOSFET Cell Optimization348
  • 6.7.1Optimization of Gate Electrode Width348
  • 6.7.2Impact of Breakdown Voltage350
  • 6.7.3Impact of Design Rules353
  • 6.7.4Impact of Cell Topology355
  • 6.8Power U-MOSFET On-Resistance363
  • 6.8.1Source Contact Resistance364
  • 6.8.2Source Region Resistance366
  • 6.8.3Channel Resistance366
  • 6.8.4Accumulation Resistance367
  • 6.8.5Drift Region Resistance368
  • 6.8.6N+ Substrate Resistance370
  • 6.8.7Drain Contact Resistance370
  • 6.8.8Total On-Resistance370
  • 6.9Power U-MOSFET Cell Optimization373
  • 6.9.1Orthogonal P-Base Contact Structure373
  • 6.9.2Impact of Breakdown Voltage375
  • 6.9.3Ruggedness Improvement377
  • 6.10Square-Law Transfer Characteristics378
  • 6.11Superlinear Transfer Characteristics382
  • 6.12Output Characteristics387
  • 6.13Device Capacitances391
  • 6.13.1Basic MOS Capacitance391
  • 6.13.2Power VD-MOSFET Structure Capacitances394
  • 6.13.3Power U-MOSFET Structure Capacitances403
  • 6.13.4Equivalent Circuit413
  • 6.14Gate Charge414
  • 6.14.1Charge Extraction415
  • 6.14.2Voltage and Current Dependence422
  • 6.14.3VD-MOSFET Versus U-MOSFET Structure425
  • 6.14.4Impact of VD-MOSFET and U-MOSFET Cell Pitch428
  • 6.15Optimization for High-Frequency Operation432
  • 6.15.1Input Switching Power Loss432
  • 6.15.2Output Switching Power Loss438
  • 6.15.3Gate Propagation Delay440
  • 6.16Switching Characteristics441
  • 6.16.1Turn-On Transient443
  • 6.16.2Turn-Off Transient446
  • 6.16.3Switching Power Losses448
  • 6.16.4[dV/dt] Capability449
  • 6.17Safe Operating Area453
  • 6.17.1Bipolar Second Breakdown455
  • 6.17.2MOS Second Breakdown457
  • 6.18Integral Body Diode458
  • 6.18.1Reverse Recovery Enhancement459
  • 6.18.2Impact of Parasitic Bipolar Transistor460
  • 6.19High-Temperature Characteristics460
  • 6.19.1Threshold Voltage461
  • 6.19.2On-Resistance462
  • 6.19.3Saturation Transconductance463
  • 6.20Complementary Devices464
  • 6.20.1P-channel Structure464
  • 6.20.2On-Resistance465
  • 6.20.3Deep-Trench Structure465
  • 6.21Silicon Power MOSFET Process Technology466
  • 6.21.1Planar VD-MOSFET Process466
  • 6.21.2Trench U-MOSFET Process469
  • 6.22Silicon Carbide Devices471
  • 6.22.1The Baliga-Pair Configuration471
  • 6.22.2Planar Power MOSFET Structure482
  • 6.22.3Shielded Planar Power MOSFET Structures488
  • 6.22.4Shielded Trench-Gate Power MOSFET Structure496
  • 6.22.5JBSFET Structure506
  • 6.22.6Bidirectional Field-Effect Transistor507
  • 6.23Unclamped Inductive Load Turn-Off511
  • 6.24Summary514
7Bipolar Junction Transistors521
  • 7.1Power Bipolar Junction Transistor Structure522
  • 7.2Basic Operating Principles524
  • 7.3Static Blocking Characteristics527
  • 7.3.1Open-Emitter Breakdown Voltage527
  • 7.3.2Open-Base Breakdown Voltage528
  • 7.3.3Shorted Base-Emitter Operation530
  • 7.4Current Gain533
  • 7.4.1Emitter Injection Efficiency536
  • 7.4.2Emitter Injection Efficiency with Recombination in the Depletion Region540
  • 7.4.3Emitter Injection Efficiency with High-Level Injection in the Base541
  • 7.4.4Base Transport Factor547
  • 7.4.5Base Widening at High Collector Current Density550
  • 7.5Emitter Current Crowding564
  • 7.5.1Low-Level Injection in the Base565
  • 7.5.2High-Level Injection in the Base569
  • 7.5.3Emitter Geometry573
  • 7.6Output Characteristics574
  • 7.7On-State Characteristics579
  • 7.7.1Saturation Region581
  • 7.7.2Quasi-Saturation Region585
  • 7.8Switching Characteristics589
  • 7.8.1Turn-On Transition589
  • 7.8.2Turn-Off Transition601
  • 7.9Safe Operating Area624
  • 7.9.1Forward Biased Second Breakdown625
  • 7.9.2Reverse Biased Second Breakdown628
  • 7.9.3Boundary for Safe Operating Area632
  • 7.10Darlington Configuration633
  • 7.11Summary636
8Thyristors641
  • 8.1Power Thyristor Structure and Operation644
  • 8.2Blocking Characteristics648
  • 8.2.1Reverse Blocking Capability648
  • 8.2.2Forward Blocking Capability652
  • 8.2.3Cathode Shorting657
  • 8.2.4Cathode Shorting Geometry660
  • 8.3On-State Characteristics667
  • 8.3.1On-State Operation669
  • 8.3.2Gate Triggering Current671
  • 8.3.3Holding Current674
  • 8.4Switching Characteristics679
  • 8.4.1Turn-On Time679
  • 8.4.2Gate Design688
  • 8.4.3Amplifying Gate Design689
  • 8.4.4[dV/dt] Capability692
  • 8.4.5Turn-Off Process699
  • 8.5Light-Activated Thyristors702
  • 8.5.1[dI/dt] Capability702
  • 8.5.2Gate Region Design704
  • 8.5.3Optically Generated Current Density705
  • 8.5.4Amplifying Gate Design706
  • 8.6Self-Protected Thyristors707
  • 8.6.1Forward Breakdown Protection707
  • 8.6.2[dV/dt] Turn-On Protection711
  • 8.7The Gate Turn-Off Thyristor Structure714
  • 8.7.1Basic Structure and Operation715
  • 8.7.2One-Dimensional Turn-Off Criterion718
  • 8.7.3One-Dimensional Storage Time Analysis720
  • 8.7.4Two-Dimensional Storage Time Model720
  • 8.7.5One-Dimensional Voltage Rise-Time Model722
  • 8.7.6One-Dimensional Current Fall-Time Model725
  • 8.7.7Switching Energy Loss737
  • 8.7.8Maximum Turn-Off Current739
  • 8.7.9Cell Design and Layout741
  • 8.8The Triac Structure743
  • 8.8.1Basic Structure and Operation744
  • 8.8.2Gate Triggering Mode 1747
  • 8.8.3Gate Triggering Mode 2747
  • 8.8.4[dV/dt] Capability748
  • 8.9Summary749
9Insulated Gate Bipolar Transistors755
  • 9.1Basic Device Structures759
  • 9.2Device Operation and Output Characteristics763
  • 9.3Device Equivalent Circuits765
  • 9.4Blocking Characteristics766
  • 9.4.1Symmetric Structure Forward Blocking Capability767
  • 9.4.2Symmetric Structure Reverse Blocking Capability770
  • 9.4.3Symmetric Structure Leakage Current772
  • 9.4.4Asymmetric Structure Forward Blocking Capability778
  • 9.4.5Asymmetric Structure Reverse Blocking Capability785
  • 9.4.6Asymmetric Structure Leakage Current787
  • 9.5On-State Characteristics794
  • 9.5.1On-State Model795
  • 9.5.2On-State Carrier Distribution: Symmetric Structure802
  • 9.5.3On-State Voltage Drop: Symmetric Structure809
  • 9.5.4On-State Carrier Distribution: Asymmetric Structure813
  • 9.5.5On-State Voltage Drop: Asymmetric Structure820
  • 9.5.6On-State Carrier Distribution: Transparent Emitter Structure825
  • 9.5.7On-State Voltage Drop: Transparent Emitter Structure831
  • 9.6Current Saturation Model833
  • 9.6.1Carrier Distribution: Symmetric Structure838
  • 9.6.2Output Characteristics: Symmetric Structure846
  • 9.6.3Output Resistance: Symmetric Structure851
  • 9.6.4Carrier Distribution: Asymmetric Structure852
  • 9.6.5Output Characteristics: Asymmetric Structure862
  • 9.6.6Output Resistance: Asymmetric Structure866
  • 9.6.7Carrier Distribution: Transparent Emitter Structure867
  • 9.6.8Output Characteristics: Transparent Emitter Structure870
  • 9.6.9Output Resistance: Transparent Emitter Structure874
  • 9.7Switching Characteristics874
  • 9.7.1Turn-On Physics: Forward Recovery876
  • 9.7.2Turn-Off Physics: No-Load Conditions883
  • 9.7.3Turn-Off Physics: Resistive Load885
  • 9.7.4Turn-Off Physics: Inductive Load894
  • 9.7.5Energy Loss per Cycle922
  • 9.8Power-Loss Optimization925
  • 9.8.1Symmetric Structure925
  • 9.8.2Asymmetric Structure927
  • 9.8.3Transparent Emitter Structure928
  • 9.8.4Comparison of Trade-Off Curves930
  • 9.9Complementary (p-Channel) Structure931
  • 9.9.1On-State Characteristics934
  • 9.9.2Switching Characteristics936
  • 9.9.3Power-Loss Optimization938
  • 9.10Latch-Up Suppression939
  • 9.10.1Deep P+ Diffusion940
  • 9.10.2Shallow P+ Layer946
  • 9.10.3Reduced Gate Oxide Thickness949
  • 9.10.4Bipolar Current Bypass954
  • 9.10.5Diverter Structure958
  • 9.10.6Cell Topology960
  • 9.10.7Latch-Up Proof Structure966
  • 9.11Safe Operating Area969
  • 9.11.1Forward-Biased Safe Operating Area970
  • 9.11.2Reverse-Biased Safe Operating Area974
  • 9.11.3Short-Circuit Safe Operating Area978
  • 9.12Trench-Gate Structure984
  • 9.12.1Blocking Mode985
  • 9.12.2On-State Carrier Distribution986
  • 9.12.3On-State Voltage Drop988
  • 9.12.4Switching Characteristics990
  • 9.12.5Safe Operating Area991
  • 9.12.6Modified Structures996
  • 9.13Blocking Voltage Scaling998
  • 9.13.1N-Base Design998
  • 9.13.2Power MOSFET Baseline1000
  • 9.13.3On-State Characteristics1000
  • 9.13.4Trade-Off Curve1003
  • 9.14High-Temperature Operation1004
  • 9.14.1On-State Characteristics1004
  • 9.14.2Latch-Up Characteristics1007
  • 9.15Lifetime Control Techniques1009
  • 9.15.1Electron Irradiation1010
  • 9.15.2Neutron Irradiation1011
  • 9.15.3Helium Irradiation1012
  • 9.16Cell Optimization1012
  • 9.16.1Planar-Gate Structure1013
  • 9.16.2Trench-Gate Structure1017
  • 9.17Reverse Conducting Structure1024
  • 9.18Soft Switching1032
  • 9.19Summary1036
10Synopsis1045
  • 10.1Typical H-Bridge Topology1045
  • 10.2Power-Loss Analysis1047
  • 10.3Low DC-Bus Voltage Applications1050
  • 10.4Medium DC-Bus Voltage Applications1054
  • 10.5High DC-Bus Voltage Applications1058
  • 10.6Social Impact1062
  • 10.7Summary1064

17.8~17.10 전력 소자의 표준. 3장 Breakdown Voltage가 3.6 에지 터미네이션 한 절에만 50쪽 가까이 쓰는 것이 이 책의 성격을 보여 준다. 6장(파워 MOSFET, 230쪽)과 9장(IGBT, 290쪽)은 사실상 각각 단행본이고, 6.22가 SiC 소자 — 2판에서 JBSFET(6.22.5)와 양방향 FET(6.22.6)가 들어왔다. 목차를 대조해 보니 슈퍼정션 전용 장은 없고 1.7 Charge-Coupled Structures가 그 자리를 대신하며, GaN도 다루지 않는다 — 이전 메모의 "슈퍼정션·GaN"은 이 대조로 정정한다.

The Physics of Solar Cells

17부Jenny Nelson · Imperial College Press, 2003  원본 대조

1Introduction1
  • 1.1Photons In, Electrons Out: The Photovoltaic Effect1
  • 1.2Brief History of the Solar Cell2
  • 1.3Photovoltaic Cells and Power Generation4
  • 1.3.1Photovoltaic cells, modules and systems4
  • 1.3.2Some important definitions6
  • 1.4Characteristics of the Photovoltaic Cell: A Summary7
  • 1.4.1Photocurrent and quantum efficiency7
  • 1.4.2Dark current and open circuit voltage9
  • 1.4.3Efficiency11
  • 1.4.4Parasitic resistances13
  • 1.4.5Non-ideal diode behaviour15
  • 1.5Summary15
2Photons In, Electrons Out: Basic Principles of PV17
  • 2.1Introduction17
  • 2.2The Solar Resource17
  • 2.3Types of Solar Energy Converter22
  • 2.4Detailed Balance24
  • 2.4.1In equilibrium24
  • 2.4.2Under illumination26
  • 2.5Work Available from a Photovoltaic Device28
  • 2.5.1Photocurrent28
  • 2.5.2Dark current30
  • 2.5.3Limiting efficiency31
  • 2.5.4Effect of band gap33
  • 2.5.5Effect of spectrum on efficiency34
  • 2.6Requirements for the Ideal Photoconverter35
  • 2.7Summary38
3Electrons and Holes in Semiconductors41
  • 3.1Introduction41
  • 3.2Basic Concepts42
  • 3.2.1Bonds and bands in crystals42
  • 3.2.2Electrons, holes and conductivity44
  • 3.3Electron States in Semiconductors46
  • 3.3.1Band structure46
  • 3.3.2Conduction band48
  • 3.3.3Valence band49
  • 3.3.4Direct and indirect band gaps50
  • 3.3.5Density of states51
  • 3.3.6Electron distribution function54
  • 3.3.7Electron and hole currents55
  • 3.4Semiconductor in Equilibrium56
  • 3.4.1Fermi Dirac statistics56
  • 3.4.2Electron and hole densities in equilibrium57
  • 3.4.3Boltzmann approximation58
  • 3.4.4Electron and hole currents in equilibrium60
  • 3.5Impurities and Doping61
  • 3.5.1Intrinsic semiconductors61
  • 3.5.2n type doping62
  • 3.5.3p type doping63
  • 3.5.4Effects of heavy doping65
  • 3.5.5Imperfect and amorphous crystals65
  • 3.6Semiconductor under Bias66
  • 3.6.1Quasi thermal equilibrium66
  • 3.6.2Electron and hole densities under bias68
  • 3.6.3Current densities under bias69
  • 3.7Drift and Diffusion72
  • 3.7.1Current equations in terms of drift and diffusion72
  • 3.7.2Validity of the drift-diffusion equations75
  • 3.7.3Current equations for non-crystalline solids76
  • 3.8Summary77
4Generation and Recombination79
  • 4.1Introduction: Semiconductor Transport Equations79
  • 4.2Generation and Recombination81
  • 4.3Quantum Mechanical Description of Transition Rates83
  • 4.3.1Fermi’s Golden Rule83
  • 4.3.2Optical processes in a two level system85
  • 4.4Photogeneration87
  • 4.4.1Photogeneration rate88
  • 4.4.2Thermalisation89
  • 4.4.3Microscopic description of absorption90
  • 4.4.4Direct gap semiconductors93
  • 4.4.5Indirect gap semiconductors94
  • 4.4.6Other types of behaviour96
  • 4.4.7Examples and data98
  • 4.5Recombination99
  • 4.5.1Types of recombination99
  • 4.5.2Radiative recombination99
  • 4.5.3Simplified expressions for radiative recombination102
  • 4.5.4Auger recombination105
  • 4.5.5Shockley Read Hall recombination106
  • 4.5.6Surface and grain boundary recombination110
  • 4.5.7Traps versus recombination centres111
  • 4.6Formulation of the Transport Problem112
  • 4.6.1Comments on the transport problem113
  • 4.6.2Transport equations in a crystal114
  • 4.7Summary115
5Junctions119
  • 5.1Introduction119
  • 5.2Origin of Photovoltaic Action120
  • 5.3Work Function and Types of Junction124
  • 5.4Metal-Semiconductor Junction125
  • 5.4.1Establishing a field125
  • 5.4.2Behaviour in the light126
  • 5.4.3Behaviour in the dark127
  • 5.4.4Ohmic contacts129
  • 5.4.5Limitations of the Schottky barrier junction130
  • 5.5Semiconductor-Semiconductor Junctions131
  • 5.5.1p–n junction131
  • 5.5.2p–i–n junction132
  • 5.5.3p–n heterojunction133
  • 5.6Electrochemical Junction133
  • 5.7Junctions in Organic Materials137
  • 5.8Surface and Interface States139
  • 5.8.1Surface states on free surfaces139
  • 5.8.2Effect of interface states on junctions141
  • 5.9Summary143
6Analysis of the p–n Junction145
  • 6.1Introduction145
  • 6.2The p–n Junction146
  • 6.2.1Formation of p–n junction146
  • 6.2.2Outline of approach147
  • 6.3Depletion Approximation149
  • 6.3.1Calculation of depletion width150
  • 6.4Calculation of Carrier and Current Densities152
  • 6.4.1Currents and carrier densities in the neutral regions152
  • 6.4.2Currents and carrier densities in the space charge region154
  • 6.4.3Total current density156
  • 6.5General Solution for J(V)156
  • 6.6p–n Junction in the Dark160
  • 6.6.1At equilibrium160
  • 6.6.2Under applied bias160
  • 6.7p–n Junction under Illumination165
  • 6.7.1Short circuit165
  • 6.7.2Photocurrent and QE in special cases167
  • 6.7.3p–n junction as a photovoltaic cell169
  • 6.8Effects on p–n Junction Characteristics172
  • 6.8.1Effects of parasitic resistances172
  • 6.8.2Effect of irradiation172
  • 6.8.3Effect of temperature173
  • 6.8.4Other device structures174
  • 6.8.5Validity of the approximations174
  • 6.9Summary175
7Monocrystalline Solar Cells177
  • 7.1Introduction: Principles of Cell Design177
  • 7.2Material and Design Issues178
  • 7.2.1Material dependent factors178
  • 7.2.2Design factors179
  • 7.2.3General design features of p–n junction cells180
  • 7.3Silicon Material Properties180
  • 7.3.1Band structure and optical absorption180
  • 7.3.2Doping181
  • 7.3.3Recombination182
  • 7.3.4Carrier transport185
  • 7.4Silicon Solar Cell Design186
  • 7.4.1Basic silicon solar cell186
  • 7.4.2Cell fabrication186
  • 7.4.3Optimisation of silicon solar cell design188
  • 7.4.4Strategies to enhance absorption190
  • 7.4.5Strategies to reduce surface recombination191
  • 7.4.6Strategies to reduce series resistance194
  • 7.4.7Evolution of silicon solar cell design194
  • 7.4.8Future directions in silicon cell design197
  • 7.4.9Alternatives to silicon198
  • 7.5III-V Semiconductor Material Properties198
  • 7.5.1III-V semiconductor band structure and optical absorption198
  • 7.5.2Gallium arsenide200
  • 7.5.3Doping201
  • 7.5.4Recombination202
  • 7.5.5Carrier transport203
  • 7.5.6Reflectivity203
  • 7.6GaAs Solar Cell Design204
  • 7.6.1Basic GaAs solar cell204
  • 7.6.2Optimisation of GaAs solar cell design204
  • 7.6.3Strategies to reduce front surface recombination205
  • 7.6.4Strategies to reduce series resistance207
  • 7.6.5Strategies to reduce substrate cost208
  • 7.7Summary208
8Thin Film Solar Cells211
  • 8.1Introduction211
  • 8.2Thin Film Photovoltaic Materials213
  • 8.2.1Requirements for suitable materials213
  • 8.3Amorphous Silicon213
  • 8.3.1Materials properties213
  • 8.3.2Defects in amorphous material215
  • 8.3.3Absorption217
  • 8.3.4Doping217
  • 8.3.5Transport219
  • 8.3.6Stability220
  • 8.3.7Related alloys221
  • 8.4Amorphous Silicon Solar Cell Design221
  • 8.4.1Amorphous silicon p–i–n structures221
  • 8.4.2p–i–n solar cell device physics222
  • 8.4.3Fabrication of a-Si solar cells227
  • 8.4.4Strategies to improve a-Si cell performance227
  • 8.5Defects in Polycrystalline Thin Film Materials229
  • 8.5.1Grain boundaries230
  • 8.5.2Effects of grain boundaries on transport233
  • 8.5.3Depletion approximation model for grain boundary234
  • 8.5.4Majority carrier transport236
  • 8.5.5Effect of illumination239
  • 8.5.6Minority carrier transport240
  • 8.5.7Effects of grain boundary recombination on solar cell performance242
  • 8.6CuInSe₂ Thin Film Solar Cells243
  • 8.6.1Materials properties243
  • 8.6.2Heterojunctions in thin film solar cell design244
  • 8.6.3CuInGaSe₂ solar cell design245
  • 8.7CdTe Thin Film Solar Cells246
  • 8.7.1Materials properties246
  • 8.7.2CdTe solar cell design247
  • 8.8Thin Film Silicon Solar Cells248
  • 8.8.1Materials properties248
  • 8.8.2Microcrystalline silicon solar cell design248
  • 8.9Summary249
9Managing Light253
  • 9.1Introduction253
  • 9.2Photon Flux: A Review and Overview of Light Management255
  • 9.2.1Routes to higher photon flux257
  • 9.3Minimising Reflection258
  • 9.3.1Optical properties of semiconductors258
  • 9.3.2Antireflection coatings260
  • 9.4Concentration263
  • 9.4.1Limits to concentration263
  • 9.4.2Practical concentrators264
  • 9.5Effects of Concentration on Device Physics266
  • 9.5.1Low injection266
  • 9.5.2High injection267
  • 9.5.3Limits to efficiency under concentration269
  • 9.5.4Temperature270
  • 9.5.5Series resistance270
  • 9.5.6Concentrator cell design270
  • 9.5.7Concentrator cell materials271
  • 9.6Light Confinement272
  • 9.6.1Light paths and ray tracing272
  • 9.6.2Mirrors274
  • 9.6.3Randomising surfaces275
  • 9.6.4Textured surfaces276
  • 9.6.5Practical schemes278
  • 9.6.6Light confining structures: restricted acceptance areas and external cavities280
  • 9.6.7Effects of light trapping on device physics281
  • 9.7Photon Recycling282
  • 9.7.1Theory of photon recycling282
  • 9.7.2Practical schemes285
  • 9.8Summary286
10Over the Limit: Strategies for High Efficiency289
  • 10.1Introduction289
  • 10.2How Much is Out There? Thermodynamic Limits to Efficiency291
  • 10.3Detailed Balance Limit to Efficiency, Reviewed292
  • 10.4Multiple Band Gaps297
  • 10.5Tandem Cells298
  • 10.5.1Principles of tandem cells298
  • 10.5.2Analysis300
  • 10.5.3Practical tandem systems301
  • 10.6Intermediate Band and Multiple Band Cells302
  • 10.6.1Principles of intermediate and multiple band cells302
  • 10.6.2Conditions303
  • 10.6.3Practical strategies306
  • 10.7Increasing the Work Per Photon using ‘Hot’ Carriers309
  • 10.7.1Principles of cooling and ‘hot’ carriers309
  • 10.7.2Analysis of the hot carrier solar cell311
  • 10.7.3Practical strategies316
  • 10.8Impact Ionisation Solar Cells318
  • 10.8.1Analysis of impact ionisation solar cell320
  • 10.9Summary323
후미Exercises · Solutions to the Exercises · Index327
  • ·Exercises327
  • ·Solutions to the Exercises337
  • ·Index355

원본 인쇄 목차(pp. vii~xiv)로 대조 완료 — 미확보에서 곧바로 원본 대조로 올라왔다. 10장, 절 78개와 소절 166개, 쪽수 포함. 태양전지 책의 형태를 한 반도체 물리 교재다 — 3장(전자·정공, 32개 소절)과 4장(생성·재결합, 20개 소절)만으로 100쪽 가까이 쓰고, 6장에서 공핍 근사부터 J(V)까지 pn 접합을 처음부터 끝까지 손으로 푼다(§6.3 공핍 근사 → §6.4 중성 영역·공간전하 영역의 캐리어와 전류 → §6.5 J(V) 일반해). 8부·9부의 접합 해석과 그대로 겹치므로 태양전지를 건너뛰더라도 3~6장은 읽을 값이 있다. §4.5는 복사·오제·SRH·표면 재결합을 한 절에 모아 두었고, §4.3.1 Fermi’s Golden Rule이 흡수계수의 출발점이다. 9장 Managing Light(반사 방지막 · 집광 · 광 가둠 · 광자 재활용)와 10장(열역학 한계 · 탠덤 · 중간 밴드 · 핫 캐리어 · 충돌 이온화)이 17부의 뼈대다.

IV

공정과 구현

Physics of Photonic Devices

17부Shun Lien Chuang · 2nd ed. · Wiley, 2009 · ISBN 978-0-470-29319-5  원본 대조

1Introduction1
  • 1.1Basic Concepts of Semiconductor Band and Bonding Diagrams1
  • 1.2The Invention of Semiconductor Lasers4
  • 1.3The Field of Optoelectronics8
  • 1.4Overview of the Book15

Part I — Fundamentals25

2Basic Semiconductor Electronics27
  • 2.1Maxwell's Equations and Boundary Conditions27
  • 2.2Semiconductor Electronics Equations30
  • 2.3Generation and Recombination in Semiconductors40
  • 2.4Examples and Applications to Optoelectronic Devices48
  • 2.5Semiconductor p-N and n-P Heterojunctions53
  • 2.6Semiconductor n-N Heterojunctions and Metal-Semiconductor Junctions69
3Basic Quantum Mechanics77
  • 3.1Schrödinger Equation78
  • 3.2The Square Well80
  • 3.3The Harmonic Oscillator90
  • 3.4The Hydrogen Atom and Exciton in 2D and 3D95
  • 3.5Time-Independent Perturbation Theory97
  • 3.6Time-Dependent Perturbation Theory104
  • 부록 3ALöwdin's Renormalization Method107
4Theory of Electronic Band Structures in Semiconductors113
  • 4.1The Bloch Theorem and the k · p Method for Simple Bands113
  • 4.2Kane's Model for Band Structure: The k · p Method with the Spin-Orbit Interaction118
  • 4.3Luttinger-Kohn Model: The k · p Method for Degenerate Bands126
  • 4.4The Effective Mass Theory for a Single Band and Degenerate Bands130
  • 4.5Strain Effects on Band Structures132
  • 4.6Electronic States in an Arbitrary One-Dimensional Potential144
  • 4.7Kronig-Penney Model for a Superlattice152
  • 4.8Band Structures of Semiconductor Quantum Wells158
  • 4.9Band Structures of Strained Semiconductor Quantum Wells168

Part II — Propagation of Light179

5Electromagnetics and Light Propagation181
  • 5.1Time-Harmonic Fields and Duality Principle181
  • 5.2Poynting's Theorem and Reciprocity Relations183
  • 5.3Plane Wave Solutions for Maxwell's Equations in Homogeneous Media186
  • 5.4Light Propagation in Isotropic Media186
  • 5.5Wave Propagation in Lossy Media: Lorentz Oscillator Model and Metal Plasma189
  • 5.6Plane Wave Reflection from a Surface197
  • 5.7Matrix Optics202
  • 5.8Propagation Matrix Approach for Plane Wave Reflection from a Multilayered Medium206
  • 5.9Wave Propagation in Periodic Media210
  • 부록 5AKramers-Kronig Relations220
6Light Propagation in Anisotropic Media and Radiation227
  • 6.1Light Propagation in Uniaxial Media227
  • 6.2Wave Propagation in Gyrotropic Media: Magnetooptic Effects239
  • 6.3General Solutions to Maxwell's Equations and Gauge Transformations246
  • 6.4Radiation and the Far-Field Pattern249
7Optical Waveguide Theory257
  • 7.1Symmetric Dielectric Slab Waveguides257
  • 7.2Asymmetric Dielectric Slab Waveguides268
  • 7.3Ray Optics Approach to Waveguide Problems271
  • 7.4Rectangular Dielectric Waveguides273
  • 7.5The Effective Index Method279
  • 7.6Wave Guidance in a Lossy or Gain Medium281
  • 7.7Surface Plasmon Waveguides285
8Coupled-Mode Theory295
  • 8.1Waveguide Couplers295
  • 8.2Coupled Optical Waveguides300
  • 8.3Applications of Optical Waveguide Couplers307
  • 8.4Optical Ring Resonators and Add-Drop Filters311
  • 8.5Distributed Feedback (DFB) Structures322
  • 부록 8ACoupling Coefficients for Parallel Waveguides332
  • 부록 8BImproved Coupled-Mode Theory333

Part III — Generation of Light345

9Optical Processes in Semiconductors347
  • 9.1Optical Transitions Using Fermi's Golden Rule347
  • 9.2Spontaneous and Stimulated Emissions353
  • 9.3Interband Absorption and Gain of Bulk Semiconductors360
  • 9.4Interband Absorption and Gain in a Quantum Well365
  • 9.5Interband Momentum Matrix Elements of Bulk and Quantum-Well Semiconductors371
  • 9.6Quantum Dots and Quantum Wires375
  • 9.7Intersubband Absorption384
  • 9.8Gain Spectrum in a Quantum-Well Laser with Valence-Band Mixing Effects391
  • 부록 9ACoordinate Transformation of the Basis Functions and the Momentum Matrix Elements398
10Fundamentals of Semiconductor Lasers411
  • 10.1Double-Heterojunction Semiconductor Lasers412
  • 10.2Gain-Guided and Index-Guided Semiconductor Lasers428
  • 10.3Quantum-Well Lasers432
  • 10.4Strained Quantum-Well Lasers446
  • 10.5Strained Quantum-Dot Lasers457
11Advanced Semiconductor Lasers487
  • 11.1Distributed Feedback Lasers487
  • 11.2Vertical Cavity Surface-Emitting Lasers502
  • 11.3Microcavity and Photonic Crystal Lasers515
  • 11.4Quantum-Cascade Lasers530
  • 11.5GaN-Based Blue-Green Lasers and LEDs548
  • 11.6Coupled Laser Arrays571
  • 부록 11AHamiltonian for Strained Wurtzite Crystals578
  • 부록 11BBand-Edge Optical Transition Matrix Elements581

Part IV — Modulation of Light603

12Direct Modulation of Semiconductor Lasers605
  • 12.1Rate Equations and Linear Gain Analysis605
  • 12.2High-Speed Modulation Response with Nonlinear Gain Saturation611
  • 12.3Transport Effects on Quantum-Well Lasers: Electrical versus Optical Modulation614
  • 12.4Semiconductor Laser Spectral Linewidth and the Linewidth Enhancement Factor622
  • 12.5Relative Intensity Noise Spectrum629
13Electrooptic and Acoustooptic Modulators639
  • 13.1Electrooptic Effects and Amplitude Modulators639
  • 13.2Phase Modulators648
  • 13.3Electrooptic Effects in Waveguide Devices652
  • 13.4Scattering of Light by Sound: Raman-Nath and Bragg Diffractions658
  • 13.5Coupled-Mode Analysis for Bragg Acoustooptic Wave Couplers661
14Electroabsorption Modulators669
  • 14.1General Formulation for Optical Absorption Due to an Electron-Hole Pair670
  • 14.2Franz-Keldysh Effect: Photon-Assisted Tunneling673
  • 14.3Exciton Effect677
  • 14.4Quantum Confined Stark Effect (QCSE)683
  • 14.5Electroabsorption Modulator691
  • 14.6Integrated Electroabsorption Modulator-Laser (EML)693
  • 14.7Self-Electrooptic Effect Devices (SEEDs)702
  • 부록 14ATwo-Particle Wave Function and the Effective Mass Equation705
  • 부록 14BSolution of the Electron-Hole Effective-Mass Equation with Excitonic Effects709

Part V — Detection of Light and Solar Cells721

15Photodetectors and Solar Cells723
  • 15.1Photoconductors723
  • 15.2p-n Junction Photodiodes734
  • 15.3p-i-n Photodiodes740
  • 15.4Avalanche Photodiodes744
  • 15.5Intersubband Quantum-Well Photodetectors756
  • 15.6Solar Cells761

Appendices787

부록 ASemiconductor Heterojunction Band Lineups in the Model-Solid Theory787
부록 BOptical Constants of GaAs and InP797
부록 CElectronic Properties of Si, Ge, and a Few Binary, Ternary, and Quaternary Compounds801
부록 DParameters for InN, GaN, AlN, and Their Ternary Compounds807

Index811

인쇄 목차를 절·쪽수까지 그대로 옮겼다(15개 장 · 5개 Part). 장 끝의 Problems·References는 번호가 없어 싣지 않았고, 장 안의 Appendix(3A·5A·8A·8B·9A·11A·11B·14A·14B)는 부록 5A 꼴로 실었다. 확보한 목차 PDF의 OCR 흔적 몇 개를 바로잡았다 — “Isotropie/Anisotropie”는 Isotropic/Anisotropic, “Appendix 1 IB”는 11B, “AIN”은 AlN이다. 17부에서 레이저 8절(17.4)을 Sze Ch.12 하나가 받치고 있던 자리가 이 책의 몫이다 — 10장(기본)·11장(DFB·VCSEL·광결정·양자 캐스케이드·GaN)이 17.4의 절과 거의 일대일로 붙고, 9장(반도체의 광학 과정)이 11.8과 17.3의 근거다. 4장(k·p·변형·양자우물 밴드 구조)과 2.5~2.6(헤테로접합)은 12.7과 겹치고, 15장은 17.1(광검출)·17.6(태양전지)를 Sze·Nelson과 다른 각도에서 받친다. 5~8장(전파·이방성 매질·도파로·결합모드)과 12~14장(직접 변조·전기광학/음향광학·전기흡수 변조기)은 이 책을 들이면서 백과에 대응하는 장이 없다는 것이 드러나 17.5 광도파로와 광변조기를 새로 열었다 — 그 장의 13개 절이 여기서 나온다. 2009년 책이라 실리콘 포토닉스와 광집적은 없다.

Microsystem Design

17부Stephen D. Senturia · Kluwer Academic, 2001 · ISBN 0-7923-7246-8  원본 대조

Part I — Getting Started

1Introduction3
  • 1.1Microsystems vs. MEMS3
  • 1.2Markets for Microsystems and MEMS8
  • 1.3Case Studies9
  • 1.4Looking Ahead12
2An Approach to MEMS Design15
  • 2.1Design: The Big Picture15
  • 2.2Modeling Levels19
  • 2.3Example: A Position-Control System24
  • 2.4Going Forward From Here26
3Microfabrication29
  • 3.1Overview29
  • 3.2Wafer-Level Processes30
  • 3.3Pattern Transfer50
  • 3.4Conclusion77
4Process Integration79
  • 4.1Developing a Process79
  • 4.2Basic Principles of Process Design85
  • 4.3Sample Process Flows91
  • 4.4Moving On98

Part II — Modeling Strategies

5Lumped Modeling103
  • 5.1Introduction103
  • 5.2Conjugate Power Variables104
  • 5.3One-Port Elements106
  • 5.4Circuit Connections in the Convention114
  • 5.5Formulation of Dynamic Equations116
  • 5.6Transformers and Gyrators118
6Energy-Conserving Transducers125
  • 6.1Introduction125
  • 6.2The Parallel-Plate Capacitor125
  • 6.3The Two-Port Capacitor129
  • 6.4Electrostatic Actuator130
  • 6.5The Magnetic Actuator139
  • 6.6Equivalent Circuits for Linear Transducers142
  • 6.7The Position Control System – Revisited145
7Dynamics149
  • 7.1Introduction149
  • 7.2Linear System Dynamics150
  • 7.3Nonlinear Dynamics164

Part III — Domain-Specific Details

8Elasticity183
  • 8.1Introduction183
  • 8.2Constitutive Equations of Linear Elasticity184
  • 8.3Thermal Expansion and Thin-Film Stress193
  • 8.4Selected Mechanical Property Data196
  • 8.5Material Behavior at Large Strains196
9Structures201
  • 9.1Overview201
  • 9.2Axially Loaded Beams201
  • 9.3Bending of Beams207
  • 9.4Anticlastic Curvature218
  • 9.5Bending of Plates219
  • 9.6Effects of Residual Stresses and Stress Gradients222
  • 9.7Plates With In-Plane Stress235
  • 9.8What about large deflections?237
10Energy Methods239
  • 10.1Elastic Energy240
  • 10.2The Principle of Virtual Work243
  • 10.3Variational Methods244
  • 10.4Large Deflections of Elastic Structures249
  • 10.5Rayleigh-Ritz Methods260
11Dissipation and the Thermal Energy Domain267
  • 11.1Dissipation is Everywhere267
  • 11.2Electrical Resistance267
  • 11.3Charging a Capacitor269
  • 11.4Dissipative Processes271
  • 11.5The Thermal Energy Domain272
  • 11.6Self-Heating of a Resistor278
  • 11.7Other Dissipation Mechanisms286
  • 11.8Irreversible Thermodynamics: Coupled Flows291
  • 11.9Modeling Time-Dependent Dissipative Processes296
12Lumped Modeling of Dissipative Processes299
  • 12.1Overview299
  • 12.2The Generalized Heat-Flow Equation299
  • 12.3The DC Steady State: The Poisson Equation300
  • 12.4Finite-Difference Solution of the Poisson Equation301
  • 12.5Eigenfunction Solution of the Poisson Equation305
  • 12.6Transient Response: Finite-Difference Approach307
  • 12.7Transient Response: Eigenfunction Method307
  • 12.8One-Dimensional Example308
  • 12.9Equivalent Circuit for a Single Mode309
  • 12.10Equivalent Circuit Including All Modes311
13Fluids317
  • 13.1What Makes Fluids Difficult?317
  • 13.2Basic Fluid Concepts318
  • 13.3Incompressible Laminar Flow326
  • 13.4Squeezed-Film Damping332
  • 13.5Electrolytes and Electrokinetic Effects339

Part IV — Circuit and System Issues

14Electronics353
  • 14.1Introduction353
  • 14.2Elements of Semiconductor Physics353
  • 14.3The Semiconductor Diode357
  • 14.4The Diffused Resistor363
  • 14.5The Photodiode364
  • 14.6The Bipolar Junction Transistor365
  • 14.7The MOSFET365
  • 14.8MOSFET Amplifiers372
  • 14.9Operational Amplifiers381
  • 14.10Dynamic Effects383
  • 14.11Basic Op-Amp Circuits384
  • 14.12Charge-Measuring Circuits391
15Feedback Systems397
  • 15.1Introduction397
  • 15.2Basic Feedback Concepts397
  • 15.3Feedback in Linear Systems398
  • 15.4Feedback in Nonlinear Systems411
  • 15.5Resonators and Oscillators413
16Noise425
  • 16.1Introduction425
  • 16.2The Interference Problem426
  • 16.3Characterization of Signals430
  • 16.4Characterization of Random Noise433
  • 16.5Noise Sources436
  • 16.6Example: A Resistance Thermometer442
  • 16.7Drifts447

Part V — Case Studies

17Packaging453
  • 17.1Introduction to the Case Studies453
  • 17.2Packaging, Test, and Calibration454
  • 17.3An Approach to Packaging455
  • 17.4A Commercial Pressure-Sensor Case Study459
18A Piezoresistive Pressure Sensor469
  • 18.1Sensing Pressure469
  • 18.2Piezoresistance470
  • 18.3The Motorola MAP Sensor481
19A Capacitive Accelerometer497
  • 19.1Introduction497
  • 19.2Fundamentals of Quasi-Static Accelerometers498
  • 19.3Position Measurement With Capacitance500
  • 19.4A Capacitive Accelerometer Case Study513
  • 19.5Position Measurement With Tunneling Tips525
20Electrostatic Projection Displays531
  • 20.1Introduction531
  • 20.2Electromechanics of the DMD Device536
  • 20.3Electromechanics of Electrostatically Actuated Beams541
  • 20.4The Grating-Light-Valve Display544
  • 20.5A Comparison558
21A Piezoelectric Rate Gyroscope561
  • 21.1Introduction561
  • 21.2Kinematics of Rotation561
  • 21.3The Coriolis Rate Gyroscope563
  • 21.4Piezoelectricity570
  • 21.5A Quartz Rate Gyroscope Case Study578
22DNA Amplification605
  • 22.1Introduction605
  • 22.2Polymerase Chain Reaction (PCR)606
  • 22.3Microsystem Approaches to PCR611
  • 22.4Thermal Model of the Batch Reactor616
  • 22.5Thermal Model of the Continuous Flow Reactor621
  • 22.6A Comparison625
23A Microbridge Gas Sensor629
  • 23.1Overview629
  • 23.2System-Level Issues630
  • 23.3First-Order Device and System Models632
  • 23.4A Practical Device and Fabrication Process639
  • 23.5Sensor Performance643
  • 23.6Advanced Modeling646
  • 23.7Epilogue648

Appendices651

References665

인쇄 목차를 절·쪽수까지 옮겼다(23개 장 · 5개 Part). 목차가 장 제목을 전부 대문자로 싣는데 여기서는 일반 표기로 바꿨고, 소절(x.y.z)은 싣지 않았다 — 인용은 절(x.y) 단위면 충분하다. 센서와 MEMS 11절이 Campbell Ch.19 하나로 버티던 자리를 이 책이 받는다 — 받을 것이 한 장에 담기지 않아 17.11 MEMS의 역학과 모델링17.12 MEMS 공정과 센서 소자 두 장으로 갈랐다. 5~13장(탄성·구조·에너지법·정전 작동·회로 모델·동역학)이 17.11의 뼈대이고 8.3이 박막 응력, 6장(에너지 보존 변환기)과 19.3이 기계-전기 변환이다. 3~4장(벌크·표면 마이크로머시닝과 공정 통합)과 17~23장은 17.12로 간다. 그 17~23장이 사례 연구 일곱 편(패키징 · 압저항 압력 센서 · 정전 가속도계 · DMD/GLV 디스플레이 · 압전 자이로 · PCR · 가스 센서)으로, 그중 22장 DNA 증폭23장 마이크로브리지 가스 센서가 화학·바이오 센서 절의 유일한 서적 근거다. 14장(전자회로)·15장(되먹임)·16장(잡음)은 CMOS-MEMS 이종 집적과 신호 처리 쪽 배경이고 22부와 겹친다. 20장(DMD·GLV)은 16부 디스플레이와도 닿는다.

18부 · 반도체 공정

Fabrication Engineering at the Micro- and Nanoscale

18부Stephen A. Campbell · 3rd ed. · Oxford University Press, 2008  원본 대조

Part I — Overview and Materials1

1An Introduction to Microelectronic Fabrication3
  • 1.1Microelectronic Technologies: A Simple Example5
  • 1.2Unit Processes and Technologies7
  • 1.3A Roadmap for the Course8
  • 1.4Summary9
2Semiconductor Substrates10
  • 2.1Phase Diagrams and Solid Solubility °10
  • 2.2Crystallography and Crystal Structure °14
  • 2.3Crystal Defects16
  • 2.4Czochralski Growth22
  • 2.5Bridgman Growth of GaAs30
  • 2.6Float Zone Growth32
  • 2.7Wafer Preparation and Specifications33
  • 2.8Summary and Future Trends35

Part II — Unit Processes I: Hot Processing and Ion Implantation41

3Diffusion43
  • 3.1Fick’s Diffusion Equation in One Dimension43
  • 3.2Atomistic Models of Diffusion45
  • 3.3Analytic Solutions of Fick’s Law50
  • 3.4Diffusion Coefficients for Common Dopants53
  • 3.5Analysis of Diffused Profiles56
  • 3.6Diffusion in SiO₂62
  • 3.7Simulations of Diffusion Profiles64
  • 3.8Summary69
4Thermal Oxidation74
  • 4.1The Deal–Grove Model of Oxidation74
  • 4.2The Linear and Parabolic Rate Coefficients77
  • 4.3The Initial Oxidation Regime81
  • 4.4The Structure of SiO₂83
  • 4.5Oxide Characterization84
  • 4.6The Effects of Dopants During Oxidation and Polysilicon Oxidation91
  • 4.7Silicon Oxynitrides94
  • 4.8Alternative Gate Insulators ⁺95
  • 4.9Oxidation Systems97
  • 4.10Numeric Oxidations ⁺99
  • 4.11Summary101
5Ion Implantation107
  • 5.1Idealized Ion Implantation Systems108
  • 5.2Coulomb Scattering °113
  • 5.3Vertical Projected Range114
  • 5.4Channeling and Lateral Projected Range120
  • 5.5Implantation Damage122
  • 5.6Shallow Junction Formation ⁺126
  • 5.7Buried Dielectrics ⁺128
  • 5.8Ion Implantation Systems: Problems and Concerns130
  • 5.9Numerical Implanted Profiles132
  • 5.10Summary134
6Rapid Thermal Processing140
  • 6.1Gray Body Radiation, Heat Exchange, and Optical Absorption °141
  • 6.2High Intensity Optical Sources and Chamber Design144
  • 6.3Temperature Measurement147
  • 6.4Thermoplastic Stress °151
  • 6.5Rapid Thermal Activation of Impurities152
  • 6.6Rapid Thermal Processing of Dielectrics154
  • 6.7Silicidation and Contact Formation155
  • 6.8Alternative Rapid Thermal Processing Systems156
  • 6.9Summary157

Part III — Unit Processes 2: Pattern Transfer163

7Optical Lithography165
  • 7.1Lithography Overview165
  • 7.2Diffraction °169
  • 7.3The Modulation Transfer Function and Optical Exposures172
  • 7.4Source Systems and Spatial Coherence175
  • 7.5Contact/Proximity Printers179
  • 7.6Projection Printers183
  • 7.7Advanced Mask Concepts ⁺189
  • 7.8Surface Reflections and Standing Waves192
  • 7.9Alignment194
  • 7.10Summary195
8Photoresists199
  • 8.1Photoresist Types199
  • 8.2Organic Materials and Polymers °200
  • 8.3Typical Reactions of DQN Positive Photoresist202
  • 8.4Contrast Curves204
  • 8.5The Critical Modulation Transfer Function207
  • 8.6Applying and Developing Photoresist207
  • 8.7Second-Order Exposure Effects211
  • 8.8Advanced Photoresists and Photoresist Processes ⁺215
  • 8.9Summary219
9Nonoptical Lithographic Techniques ⁺224
  • 9.1Interactions of High Energy Beams with Matter °225
  • 9.2Direct-Write Electron Beam Lithography Systems227
  • 9.3Direct-Write Electron Beam Lithography: Summary and Outlook233
  • 9.4X-ray Sources °235
  • 9.5Proximity X-ray Exposure Systems238
  • 9.6Membrane Masks240
  • 9.7Projection X-ray Lithography242
  • 9.8Projection Electron Beam Lithography (SCALPEL)244
  • 9.9E-beam and X-ray Resists245
  • 9.10Radiation Damage in MOS Devices247
  • 9.11Soft Lithography and Nanoimprint Lithography249
  • 9.12Summary252
10Vacuum Science and Plasmas259
  • 10.1The Kinetic Theory of Gases °259
  • 10.2Gas Flow and Conductance262
  • 10.3Pressure Ranges and Vacuum Pumps265
  • 10.4Vacuum Seals and Pressure Measurement271
  • 10.5The DC Glow Discharge °273
  • 10.6RF Discharges275
  • 10.7High Density Plasmas277
  • 10.8Summary280
11Etching283
  • 11.1Wet Etching284
  • 11.2Chemical Mechanical Polishing289
  • 11.3Basic Regimes of Plasma Etching291
  • 11.4High Pressure Plasma Etching292
  • 11.5Ion Milling300
  • 11.6Reactive Ion Etching303
  • 11.7Damage in Reactive Ion Etching ⁺307
  • 11.8High Density Plasma (HDP) Etching308
  • 11.9Liftoff310
  • 11.10Summary311

Part IV — Unit Processes 3: Thin Films321

12Physical Deposition: Evaporation and Sputtering323
  • 12.1Phase Diagrams: Sublimation and Evaporation °324
  • 12.2Deposition Rates325
  • 12.3Step Coverage329
  • 12.4Evaporator Systems: Crucible Heating Techniques331
  • 12.5Multicomponent Films334
  • 12.6An Introduction to Sputtering335
  • 12.7Physics of Sputtering °336
  • 12.8Deposition Rate: Sputter Yield337
  • 12.9High Density Plasma Sputtering339
  • 12.10Morphology and Step Coverage341
  • 12.11Sputtering Methods345
  • 12.12Sputtering of Specific Materials346
  • 12.13Stress in Deposited Layers349
  • 12.14Summary350
13Chemical Vapor Deposition356
  • 13.1A Simple CVD System for the Deposition of Silicon356
  • 13.2Chemical Equilibrium and the Law of Mass Action °358
  • 13.3Gas Flow and Boundary Layers °361
  • 13.4Evaluation of the Simple CVD System366
  • 13.5Atmospheric CVD of Dielectrics367
  • 13.6Low Pressure CVD of Dielectrics and Semiconductors in Hot Wall Systems368
  • 13.7Plasma-enhanced CVD of Dielectrics373
  • 13.8Metal CVD ⁺377
  • 13.9Atomic Layer Deposition380
  • 13.10Electroplating Copper382
  • 13.11Summary384
14Epitaxial Growth391
  • 14.1Wafer Cleaning and Native Oxide Removal392
  • 14.2The Thermodynamics of Vapor Phase Growth396
  • 14.3Surface Reactions400
  • 14.4Dopant Incorporation401
  • 14.5Defects in Epitaxial Growth402
  • 14.6Selective Growth ⁺405
  • 14.7Halide Transport GaAs Vapor Phase Epitaxy405
  • 14.8Incommensurate and Strained Layer Heteroepitaxy406
  • 14.9Metal Organic Chemical Vapor Deposition (MOCVD)409
  • 14.10Advanced Silicon Vapor Phase Epitaxial Growth Techniques414
  • 14.11Molecular Beam Epitaxy Technology417
  • 14.12BCF Theory ⁺422
  • 14.13Gas Source MBE and Chemical Beam Epitaxy ⁺427
  • 14.14Summary428

Part V — Process Integration435

15Device Isolation, Contacts, and Metallization437
  • 15.1Junction and Oxide Isolation437
  • 15.2LOCOS Methods440
  • 15.3Trench Isolation443
  • 15.4Silicon-on-Insulator Isolation Techniques446
  • 15.5Semi-insulating Substrates447
  • 15.6Schottky Contacts449
  • 15.7Implanted Ohmic Contacts453
  • 15.8Alloyed Contacts456
  • 15.9Multilevel Metallization457
  • 15.10Planarization and Advanced Interconnect462
  • 15.11Summary467
16CMOS Technologies475
  • 16.1Basic Long-Channel Device Behavior475
  • 16.2Early MOS Technologies477
  • 16.3The Basic 3-μm Technology478
  • 16.4Device Scaling483
  • 16.5Hot Carrier Effects and Drain Engineering490
  • 16.6Latchup493
  • 16.7Shallow Source/Drains and Tailored Channel Doping496
  • 16.8The Universal Curve and Advanced CMOS498
  • 16.9Summary500
17Other Transistor Technologies509
  • 17.1Basic MESFET Operation509
  • 17.2Basic MESFET Technology510
  • 17.3Digital Technologies511
  • 17.4MMIC Technologies515
  • 17.5MODFETs518
  • 17.6Review of Bipolar Devices: Ideal and Quasi-ideal Behavior519
  • 17.7Performance of BJTs521
  • 17.8Early Bipolar Processes523
  • 17.9Advanced Bipolar Processes526
  • 17.10BiCMOS533
  • 17.11Thin Film Transistors536
  • 17.12Summary538
18Optoelectronic Technologies547
  • 18.1Optoelectronic Devices Overview547
  • 18.2Direct-Gap Inorganic LEDs549
  • 18.3Polymer/Organic Light-Emitting Diodes551
  • 18.4Lasers553
  • 18.9Summary554
19MEMS555
  • 19.1Fundamentals of Mechanics556
  • 19.2Stress in Thin Films558
  • 19.3Mechanical-to-Electrical Transduction559
  • 19.4Mechanics of Common MEMS Devices563
  • 19.5Bulk Micromachining Etching Techniques567
  • 19.6Bulk Micromachining Process Flow575
  • 19.7Surface Micromachining Basics579
  • 19.8Surface Micromachining Process Flow583
  • 19.9MEMS Actuators586
  • 19.10High Aspect Ratio Microsystems Technology (HARMST)591
  • 19.11Summary593
20Integrated Circuit Manufacturing599
  • 20.1Yield Prediction and Yield Tracking600
  • 20.2Particle Control605
  • 20.3Statistical Process Control607
  • 20.4Full Factorial Experiments and ANOVA609
  • 20.5Design of Experiments612
  • 20.6Computer-integrated Manufacturing615
  • 20.7Summary617
부록Appendices I~VI620
  • IAcronyms and Common Symbols620
  • IIProperties of Selected Semiconductor Materials626
  • IIIPhysical Constants627
  • IVConversion Factors629
  • VSome Properties of the Error Function632
  • VIF Values636

원본 인쇄 목차(pp. v~xi)로 대조 완료 — 5부 20장 + 부록 6종, 절 193개, 쪽수 포함. 인용 판을 3판(2008)으로 확정한다 — 원본 목차를 확보한 판이 3판이고, 판이 바뀌면 절 번호가 어긋나므로 서지도 3판으로 맞췄다. 4판(2013, ISBN 978-0-19-986122-4)은 5부 20장 골격이 같고 18장 제목이 “Optoelectronic and Solar Technologies”로 바뀐 것으로 보이나 목차 원본을 확인하지 못했다. 절 제목 뒤의 °는 배경 지식 절, ⁺는 심화 절(강의에서 빼도 기본 내용에 지장이 없다는 뜻)로 원서 각주 표기를 그대로 옮긴 것이다 — 어느 절이 선수 지식이고 어느 절이 곁가지인지를 저자가 직접 표시해 둔 셈이라 읽는 순서를 짤 때 쓸 수 있다. 18.5~18.8은 인쇄 목차 자체에 없다 — 18.4 Lasers(553) 다음이 곧바로 18.9 Summary(554)로, 웹 출처에서 확보 실패로 남겨 두었던 항목이 원본의 누락으로 확인됐다. Ch.10 Vacuum Science and Plasmas가 이 책의 가장 특징적인 장이고(진공·기체 유동·글로 방전을 한 장에 모아 식각·스퍼터링·CVD의 공통 바닥을 깐다), Ch.19 MEMS가 11개 절로 가장 두껍다.

Silicon VLSI Technology: Fundamentals, Practice and Modeling

18부Plummer · Deal · Griffin · Prentice Hall, 2000 · ISBN 0-13-085037-3  원본 대조

1Introduction and Historical Perspective1
  • 1.1Introduction1
  • 1.2Integrated Circuits and the Planar Process — Key Inventions That Made It All Possible7
  • 1.3Semiconductors13
  • 1.4Semiconductor Devices33
  • 1.4.1PN Diodes33
  • 1.4.2MOS Transistors36
  • 1.4.3Bipolar Junction Transistors39
  • 1.5Semiconductor Technology Families41
  • 1.6Modern Scientific Discovery — Experiments, Theory, and Computer Simulation43
  • 1.7The Plan For This Book45
  • 1.8Summary of Key Ideas46
  • 1.9References46
  • 1.10Problems47
2Modern CMOS Technology49
  • 2.1Introduction49
  • 2.2CMOS Process Flow50
  • 2.2.1The Beginning — Choosing a Substrate51
  • 2.2.2Active Region Formation52
  • 2.2.3Process Option for Device Isolation — Shallow Trench Isolation57
  • 2.2.4N and P Well Formation60
  • 2.2.5Process Options for Active Region and Well Formation63
  • 2.2.6Gate Formation71
  • 2.2.7Tip or Extension (LDD) Formation76
  • 2.2.8Source/Drain Formation80
  • 2.2.9Contact and Local Interconnect Formation82
  • 2.2.10Multilevel Metal Formation84
  • 2.3Summary of Key Ideas90
  • 2.4Probems91
3Crystal Growth, Wafer Fabrication and Basic Properties of Silicon Wafers93
  • 3.1Introduction93
  • 3.2Historical Development and Basic Concepts93
  • 3.2.1Crystal Structure94
  • 3.2.2Defects in Crystals97
  • 3.2.3Raw Materials and Purification101
  • 3.2.4Czochralski and Float-Zone Crystal Growth Methods102
  • 3.2.5Wafer Preparation and Specification105
  • 3.3Manufacturing Methods and Equipment109
  • 3.4Measurement Methods111
  • 3.4.1Electrical Measurements111
  • 3.4.1.1Hot Point Probe112
  • 3.4.1.2Sheet Resistance113
  • 3.4.1.3Hall Effect Measurements115
  • 3.4.2Physical Measurements117
  • 3.4.2.1Defect Etches117
  • 3.4.2.2Fourier Transform Infrared Spectroscopy (FTIR)118
  • 3.4.2.3Electron Microscopy119
  • 3.5Models and Simulation121
  • 3.5.1Czochralski Crystal Growth122
  • 3.5.2Dopant Incorporation during CZ Crystal Growth125
  • 3.5.3Zone Refining and FZ Growth128
  • 3.5.4Point Defects131
  • 3.5.5Oxygen in Silicon138
  • 3.5.6Carbon in Silicon142
  • 3.5.7Simulation143
  • 3.6Limits and Future Trends in Technologies and Models144
  • 3.7Summary of Key Ideas146
  • 3.8References147
  • 3.9Problems148
4Semiconductor Manufacturing — Clean Rooms, Wafer Cleaning, and Gettering151
  • 4.1Introduction151
  • 4.2Historical Development and Basic Concepts154
  • 4.2.1Level 1 Contamination Reduction: Clean Factories157
  • 4.2.2Level 2 Contamination Reduction: Wafer Cleaning159
  • 4.2.3Level 3 Contamination Reduction: Gettering161
  • 4.3Manufacturing Methods and Equipment165
  • 4.3.1Level 1 Contamination Reduction: Clean Factories165
  • 4.3.2Level 2 Contamination Reduction: Wafer Cleaning166
  • 4.3.3Level 3 Contamination Reduction: Gettering167
  • 4.4Measurement Methods169
  • 4.4.1Level 1 Contamination Reduction: Clean Factories169
  • 4.4.2Level 2 Contamination Reduction: Wafer Cleaning173
  • 4.4.3Level 3 Contamination Reduction: Gettering176
  • 4.5Models and Simulation180
  • 4.5.1Level 1 Contamination Reduction: Clean Factories181
  • 4.5.2Level 2 Contamination Reduction: Wafer Cleaning184
  • 4.5.3Level 3 Contamination Reduction: Gettering186
  • 4.5.3.1Step 1: Making the Metal Atoms Mobile186
  • 4.5.3.2Step 2: Metal Diffusion to the Gettering Site187
  • 4.5.3.3Step 3: Trapping the Metal Atoms at the Gettering Site190
  • 4.6Limits and Future Trends in Technologies and Models193
  • 4.7Summary of Key Ideas196
  • 4.8References196
  • 4.9Problems198
5Lithography201
  • 5.1Introduction201
  • 5.2Historical Development and Basic Concepts203
  • 5.2.1Light Sources206
  • 5.2.2Wafer Exposure Systems208
  • 5.2.2.1Optics Basics — Ray Tracing and Diffraction209
  • 5.2.2.2Projection Systems (Fraunhofer Diffraction)212
  • 5.2.2.3Contact and Proximity Systems (Fresnel Diffraction)219
  • 5.2.3Photoresists221
  • 5.2.3.1g-line and i-line Resists223
  • 5.2.3.2Deep Ultraviolet (DUV) Resists225
  • 5.2.3.3Basic Properties and Characterization of Resists227
  • 5.2.4Mask Engineering — Optical Proximity Correction and Phase Shifting230
  • 5.3Manufacturing Methods and Equipment234
  • 5.3.1Wafer Exposure Systems234
  • 5.3.2Photoresists238
  • 5.4Measurement Methods241
  • 5.4.1Measurement of Mask Features and Defects242
  • 5.4.2Measurement of Resist Patterns244
  • 5.4.3Measurement of Etched Features244
  • 5.5Models and Simulation246
  • 5.5.1Wafer Exposure Systems247
  • 5.5.2Optical Intensity Pattern in the Photoresist253
  • 5.5.3Photoresist Exposure259
  • 5.5.3.1g-line and i-line DNQ Resists259
  • 5.5.3.2DUV Resists263
  • 5.5.4Postexposure Bake (PEB)264
  • 5.5.4.1g-line and i-line DNQ Resists264
  • 5.5.4.2DUV Resists266
  • 5.5.5Photoresist Developing267
  • 5.5.6Photoresist Postbake270
  • 5.5.7Advanced Mask Engineering271
  • 5.6Limits and Future Trends in Technologies and Models272
  • 5.6.1Electron Beam Lithography273
  • 5.6.2X-ray Lithography275
  • 5.6.3Advanced Mask Engineering277
  • 5.6.4New Resists278
  • 5.7Summary of Key Ideas281
  • 5.8References281
  • 5.9Problems283
6Thermal Oxidation and the Si/SiO₂ Interface287
  • 6.1Introduction287
  • 6.2Historical Development and Basic Concepts290
  • 6.3Manufacturing Methods and Equipment296
  • 6.4Measurement Methods298
  • 6.4.1Physical Measurements299
  • 6.4.2Optical Measurements299
  • 6.4.3Electrical Measurements — The MOS Capacitor301
  • 6.5Models and Simulation312
  • 6.5.1First-Order Planar Growth Kinetic — The Linear Parabolic Model313
  • 6.5.2Other Models for Planar Oxidation Kinetics322
  • 6.5.3Thin Oxide SiO₂ Growth Kinetics326
  • 6.5.4Dependence of Growth Kinetics on Pressure328
  • 6.5.5Dependence of Growth Kinetics on Crystal Orientation329
  • 6.5.6Mixed Ambient Growth Kinetics332
  • 6.5.72D SiO₂ Growth Kinetics333
  • 6.5.8Advanced Point Defect Based Models for Oxidation339
  • 6.5.9Substrate Doping Effects343
  • 6.5.10Polysilicon Oxidation345
  • 6.5.11Si₃N₄ Growth and Oxidation Kinetics347
  • 6.5.12Silicide Oxidation350
  • 6.5.13Si/SiO₂ Interface Charges352
  • 6.5.14Complete Oxidation Module Simulation357
  • 6.6Limits and Future Trends in Technologies and Models359
  • 6.7Summary of Key Ideas361
  • 6.8References361
  • 6.9Problems364
7Dopant Diffusion371
  • 7.1Introduction371
  • 7.2Historical Development and Basic Concepts374
  • 7.2.1Dopant Solid Solubility375
  • 7.2.2Diffusion from a Macroscopic Viewpoint377
  • 7.2.3Analytic Solutions of the Diffusion Equation379
  • 7.2.4Gaussian Solution in an Infinite Medium380
  • 7.2.5Gaussian Solution Near a Surface381
  • 7.2.6Error-Function Solution in an Infinite Medium382
  • 7.2.7Error-Function Solution Near a Surface384
  • 7.2.8Intrinsic Diffusion Coefficients of Dopants in Silicon386
  • 7.2.9Effect of Successive Diffusion Steps388
  • 7.2.10Design and Evaluation of Diffused Layers389
  • 7.2.11Summary of Basic Diffusion Concepts392
  • 7.3Manufacturing Methods and Equipment392
  • 7.4Measurement Methods395
  • 7.4.1SIMS396
  • 7.4.2Spreading Resistance397
  • 7.4.3Sheet Resistance398
  • 7.4.4Capacitance Voltage399
  • 7.4.5TEM Cross Section399
  • 7.4.62D Electrical Measurements Using Scanning Probe Microscopy400
  • 7.4.7Inverse Electrical Measurements402
  • 7.5Models and Simulation403
  • 7.5.1Numerical Solutions of the Diffusion Equation403
  • 7.5.2Modifications to Fick’s Laws to Account for Electric Field Effects406
  • 7.5.3Modifications to Fick’s Laws to Account for Concentration-Dependent Diffusion409
  • 7.5.4Segregation413
  • 7.5.5Interfacial Dopant Pileup415
  • 7.5.6Summary of the Macroscopic Diffusion Approach417
  • 7.5.7The Physical Basis for Diffusion at an Atomic Scale417
  • 7.5.8Oxidation-Enhanced or -Retarded Diffusion419
  • 7.5.9Dopant Diffusion Occurs by Both I and V422
  • 7.5.10Activation Energy for Self-Diffusion and Dopant Diffusion426
  • 7.5.11Dopant-Defect Interactions426
  • 7.5.12Chemical Equilibrium Formulation for Dopant-Defect Interactions432
  • 7.5.13Simplified Expression for Modeling434
  • 7.5.14Charge State Effects436
  • 7.6Limits and Future Trends in Technologies and Models439
  • 7.6.1Doping Methods440
  • 7.6.2Advanced Dopant Profile Modeling — Fully Kinetic Description of Dopant-Defect Interactions440
  • 7.7Summary of Key Ideas442
  • 7.8References443
  • 7.9Problems445
8Ion Implantation451
  • 8.1Introduction451
  • 8.2Historical Development and Basic Concepts451
  • 8.2.1Implants in Real Silicon — The Role of the Crystal Structure461
  • 8.3Manufacturing Methods and Equipment463
  • 8.3.1High-Energy Implants466
  • 8.3.2Ultralow Energy Implants468
  • 8.3.3Ion Beam Heating469
  • 8.4Measurement Methods469
  • 8.5Models and Simulations470
  • 8.5.1Nuclear Stopping471
  • 8.5.2Nonlocal Electronic Stopping473
  • 8.5.3Local Electronic Stopping474
  • 8.5.4Total Stopping Powers475
  • 8.5.5Damage Production476
  • 8.5.6Damage Annealing479
  • 8.5.7Solid-Phase Epitaxy482
  • 8.5.8Dopant Activation484
  • 8.5.9Transient-Enhanced Diffusion486
  • 8.5.10Atomic-Level Understanding of TED488
  • 8.5.11Effects on Devices497
  • 8.6Limits and Future Trends in Technologies and Models499
  • 8.7Summary of Key Ideas500
  • 8.8References500
  • 8.9Problems502
9Thin Film Deposition509
  • 9.1Introduction509
  • 9.2Historical Development and Basic Concepts511
  • 9.2.1Chemical Vapor Deposition (CVD)512
  • 9.2.1.1Atmospheric Pressure Chemical Vapor Deposition (APCVD)513
  • 9.2.1.2Low-Pressure Chemical Vapor Deposition (LPCVD)525
  • 9.2.1.3Plasma-Enhanced Chemical Vapor Deposition (PECVD)527
  • 9.2.1.4High-Density Plasma Chemical Vapor Deposition (HDPCVD)530
  • 9.2.2Physical Vapor Deposition (PVD)530
  • 9.2.2.1Evaporation531
  • 9.2.2.2Sputter Deposition539
  • 9.3Manufacturing Methods554
  • 9.3.1Epitaxial Silicon Deposition556
  • 9.3.2Polycrystalline Silicon Deposition558
  • 9.3.3Silicon Nitride Deposition561
  • 9.3.4Silicon Dioxide Deposition563
  • 9.3.5Al Deposition565
  • 9.3.6Ti and Ti-W Deposition566
  • 9.3.7W Deposition567
  • 9.3.8TiSi₂ and WSi₂ Deposition567
  • 9.3.9TiN Deposition568
  • 9.3.10Cu Deposition570
  • 9.4Measurement Methods572
  • 9.5Models and Simulation573
  • 9.5.1Models for Deposition Simulations573
  • 9.5.1.1Models in Physically Based Simulators Such as SPEEDIE574
  • 9.5.1.2Models for Different Types of Deposition Systems582
  • 9.5.1.3Comparing CVD and PVD and Typical Parameter Values587
  • 9.5.2Simulations of Deposition Using a Physically Based Simulator, SPEEDIE590
  • 9.5.3Other Deposition Simulations598
  • 9.6Limits and Future Trends in Technologies and Models601
  • 9.7Summary of Key Ideas602
  • 9.8References603
  • 9.9Problems605
10Etching609
  • 10.1Introduction609
  • 10.2Historical Development and Basic Concepts612
  • 10.2.1Wet Etching612
  • 10.2.2Plasma Etching619
  • 10.2.2.1Plasma Etching Mechanisms621
  • 10.2.2.2Types of Plasma Etch Systems628
  • 10.2.2.3Summary of Plasma Systems and Mechanisms636
  • 10.3Manufacturing Methods637
  • 10.3.1Plasma Etching Conditions and Issues638
  • 10.3.2Plasma Etch Methods for Various Films643
  • 10.3.2.1Plasma Etching Silicon Dioxide644
  • 10.3.2.2Plasma Etching Polysilicon647
  • 10.3.2.3Plasma Etching Aluminum649
  • 10.4Measurement Methods650
  • 10.5Models and Simulation653
  • 10.5.1Models for Etching Simulation653
  • 10.5.2Etching Models — Linear Etch Model656
  • 10.5.3Etching Models — Saturation/Adsorption Model for Ion-Enhanced Etching663
  • 10.5.4Etching Models — More Advanced Models669
  • 10.5.5Other Etching Simulations671
  • 10.6Limits and Future Trends in Technologies and Models675
  • 10.7Summary of Key Ideas676
  • 10.8References677
  • 10.9Problems679
11Back-End Technology681
  • 11.1Introduction681
  • 11.2Historical Development and Basic Concepts687
  • 11.2.1Contacts688
  • 11.2.2Interconnects and Vias695
  • 11.2.3Dielectrics707
  • 11.3Manufacturing Methods and Equipment715
  • 11.3.1Silicided Gates and Source/Drain Regions716
  • 11.3.2First-level Dielectric Processing718
  • 11.3.3Contact Formation719
  • 11.3.4Global Interconnects721
  • 11.3.5IMD Deposition and Planarization723
  • 11.3.6Via Formation724
  • 11.3.7Final Steps725
  • 11.4Measurement Methods725
  • 11.4.1Morphological Measurements726
  • 11.4.2Electrical Measurements726
  • 11.4.3Chemical and Structural Measurements732
  • 11.4.4Mechanical Measurements734
  • 11.5Models and Simulation737
  • 11.5.1Silicide Formation738
  • 11.5.2Chemical-Mechanical Polishing744
  • 11.5.3Reflow746
  • 11.5.4Grain Growth753
  • 11.5.5Diffusion in Polycrystalline Materials762
  • 11.5.6Electromigration765
  • 11.6Limits and Future Trends in Technologies and Models776
  • 11.7Summary of Key Ideas780
  • 11.8References781
  • 11.9Problems784
부록Appendices787
  • A.1Standard Prefixes787
  • A.2Useful Conversions787
  • A.3Physical Constants788
  • A.4Physical Properties of Silicon788
  • A.5Properties of Insulators Used in Silicon Technology789
  • A.6Color Chart for Deposited Si₃N₄ Films Observed Perpendicularly under Daylight Fluorescent Lighting789
  • A.7Color Chart for Thermally Grown SiO₂ Films Observed Perpendicularly under Daylight Fluorescent Lighting790
  • A.8Irwin Curves791
  • A.9Error Function793
  • A.10List of Important Symbols797
  • A.11List of Common Acronyms798
  • A.12Tables in Text801
  • A.13Answers to Selected Problems802

원본 인쇄 목차(pp. iii~x)로 대조 완료 — 11장 + 부록 13종, 절 95개와 소절 203개, 쪽수 포함. 4단 깊이(§3.4.1.1)까지 인쇄 목차에 실린다. 스캔이 휘어 유도선이 기울어 있어 항목 순서와 쪽번호 순서를 1:1로 맞춰 확정했고, 1~805쪽이 한 번도 역행하지 않는 것으로 검산했다. 이 책의 진짜 특징은 3장부터 11장까지 모든 장이 같은 다섯 단계로 짜였다는 것 — Historical Development and Basic Concepts → Manufacturing Methods and Equipment → Measurement Methods → Models and Simulation → Limits and Future Trends. 즉 물리 · 장비 · 계측 · 시뮬레이션이 장마다 한 세트로 붙어 있어 18부 각 장의 절 구성을 그대로 본뜰 수 있다. §7.5(확산 모델 14절)와 §8.5(주입 모델 11절)가 TCAD 파트(20부)의 이론적 바닥이고, §6.5.1 Linear Parabolic Model이 Deal–Grove다. 4장(클린룸·웨이퍼 세정·게터링)은 다른 교재에 거의 없는 장이다. 인쇄 목차의 오기 두 개도 그대로 옮겼다 — §2.4 “Probems”(Problems), 4장의 4.7이 두 번(Summary of Key Ideas와 References가 모두 4.7이고 4.8이 없다).

Fundamentals of Semiconductor Fabrication

18부Gary S. May · Simon M. Sze · Wiley, 2004 · ISBN 0-471-23279-3  원본 대조

1Introduction1
  • 1.1Semiconductor Materials2
  • 1.2Semiconductor Devices2
  • 1.3Semiconductor Process Technology5
  • 1.3.1Key Semiconductor Technologies5
  • 1.3.2Technology Trends8
  • 1.4Basic Fabrication Steps11
  • 1.4.1Oxidation11
  • 1.4.2Photolithography and Etching13
  • 1.4.3Diffusion and Ion Implantation14
  • 1.4.4Metallization14
  • 1.5Summary14
2Crystal Growth17
  • 2.1Silicon Crystal Growth from the Melt18
  • 2.1.1Starting Material18
  • 2.1.2The Czochralski Technique18
  • 2.1.3Distribution of Dopant19
  • 2.1.4Effective Segregation Coefficient22
  • 2.2Silicon Float-Zone Process24
  • 2.3GaAs Crystal Growth Techniques26
  • 2.3.1Starting Materials26
  • 2.3.2Crystal Growth Techniques30
  • 2.4Material Characterization31
  • 2.4.1Wafer Shaping31
  • 2.4.2Crystal Characterization33
  • 2.5Summary38
3Silicon Oxidation41
  • 3.1Thermal Oxidation Process42
  • 3.1.1Kinetics of Growth42
  • 3.1.2Thin Oxide Growth49
  • 3.2Impurity Redistribution During Oxidation50
  • 3.3Masking Properties of Silicon Dioxide51
  • 3.4Oxide Quality53
  • 3.5Oxide Thickness Characterization54
  • 3.6Oxidation Simulation54
  • 3.7Summary57
4Photolithography60
  • 4.1Optical Lithography60
  • 4.1.1The Clean Room60
  • 4.1.2Exposure Tools62
  • 4.1.3Masks65
  • 4.1.4Photoresist67
  • 4.1.5Pattern Transfer70
  • 4.1.6Resolution Enhancement Techniques72
  • 4.2Next-Generation Lithographic Methods73
  • 4.2.1Electron Beam Lithography73
  • 4.2.2Extreme Ultraviolet Lithography76
  • 4.2.3X-Ray Lithography78
  • 4.2.4Ion Beam Lithography79
  • 4.2.5Comparison of Various Lithographic Methods80
  • 4.3Photolithography Simulation81
  • 4.4Summary83
5Etching85
  • 5.1Wet Chemical Etching85
  • 5.1.1Silicon Etching86
  • 5.1.2Silicon Dioxide Etching87
  • 5.1.3Silicon Nitride and Polysilicon Etching88
  • 5.1.4Aluminum Etching88
  • 5.1.5Gallium Arsenide Etching88
  • 5.2Dry Etching89
  • 5.2.1Plasma Fundamentals90
  • 5.2.2Etch Mechanism, Plasma Diagnostics, and End-Point Control91
  • 5.2.3Reactive Plasma Etching Techniques and Equipment93
  • 5.2.4Reactive Plasma Etching Applications97
  • 5.3Etch Simulation101
  • 5.4Summary102
6Diffusion105
  • 6.1Basic Diffusion Process106
  • 6.1.1Diffusion Equation107
  • 6.1.2Diffusion Profiles109
  • 6.1.3Evaluation of Diffused Layers113
  • 6.2Extrinsic Diffusion114
  • 6.2.1Concentration-Dependent Diffusivity115
  • 6.2.2Diffusion Profiles117
  • 6.3Lateral Diffusion118
  • 6.4Diffusion Simulation120
  • 6.5Summary121
7Ion Implantation124
  • 7.1Range of Implanted Ions125
  • 7.1.1Ion Distribution125
  • 7.1.2Ion Stopping127
  • 7.1.3Ion Channeling130
  • 7.2Implant Damage and Annealing131
  • 7.2.1Implant Damage131
  • 7.2.2Annealing134
  • 7.3Implantation-Related Processes136
  • 7.3.1Multiple Implantation and Masking136
  • 7.3.2Tilt-Angle Ion Implantation138
  • 7.3.3High-Energy and High-Current Implantation139
  • 7.4Ion Implantation Simulation140
  • 7.5Summary141
8Film Deposition144
  • 8.1Epitaxial Growth Techniques144
  • 8.1.1Chemical Vapor Deposition145
  • 8.1.2Molecular Beam Epitaxy148
  • 8.2Structures and Defects in Epitaxial Layers152
  • 8.2.1Lattice-Matched and Strained-Layer Epitaxy152
  • 8.2.2Defects in Epitaxial Layers153
  • 8.3Dielectric Deposition155
  • 8.3.1Silicon Dioxide156
  • 8.3.2Silicon Nitride160
  • 8.3.3Low-Dielectric-Constant Materials162
  • 8.3.4High-Dielectric-Constant Materials164
  • 8.4Polysilicon Deposition165
  • 8.5Metallization167
  • 8.5.1Physical Vapor Deposition167
  • 8.5.2Chemical Vapor Deposition168
  • 8.5.3Aluminum Metallization169
  • 8.5.4Copper Metallization173
  • 8.5.5Silicide175
  • 8.6Deposition Simulation177
  • 8.7Summary177
9Process Integration182
  • 9.1Passive Components184
  • 9.1.1The Integrated Circuit Resistor184
  • 9.1.2The Integrated Circuit Capacitor185
  • 9.1.3The Integrated Circuit Inductor187
  • 9.2Bipolar Technology188
  • 9.2.1The Basic Fabrication Process189
  • 9.2.2Dielectric Isolation192
  • 9.2.3Self-Aligned Double-Polysilicon Bipolar Structures193
  • 9.3MOSFET Technology196
  • 9.3.1The Basic Fabrication Process196
  • 9.3.2Memory Devices199
  • 9.3.3CMOS Technology203
  • 9.3.4BiCMOS Technology210
  • 9.4MESFET Technology212
  • 9.5MEMS Technology212
  • 9.5.1Bulk Micromachining215
  • 9.5.2Surface Micromachining215
  • 9.5.3LIGA Process215
  • 9.6Process Simulation218
  • 9.7Summary223
10IC Manufacturing226
  • 10.1Electrical Testing227
  • 10.1.1Test Structures227
  • 10.1.2Final Test228
  • 10.2Packaging228
  • 10.2.1Die Separation230
  • 10.2.2Package Types230
  • 10.2.3Attachment Methodologies232
  • 10.3Statistical Process Control237
  • 10.3.1Control Charts for Attributes237
  • 10.3.2Control Charts for Variables239
  • 10.4Statistical Experimental Design242
  • 10.4.1Comparing Distributions242
  • 10.4.2Analysis of Variance243
  • 10.4.3Factorial Designs246
  • 10.5Yield250
  • 10.5.1Functional Yield250
  • 10.5.2Parametric Yield254
  • 10.6Computer-Integrated Manufacturing256
  • 10.7Summary257
11Future Trends and Challenges259
  • 11.1Challenges for Integration259
  • 11.1.1Ultrashallow Junction Formation261
  • 11.1.2Ultrathin Oxide261
  • 11.1.3Silicide Formation261
  • 11.1.4New Materials for Interconnection261
  • 11.1.5Power Limitations261
  • 11.1.6SOI Integration262
  • 11.2System-on-a-Chip262
  • 11.3Summary264
부록Appendices A~L265
  • AList of Symbols265
  • BInternational System of Units (SI Units)267
  • CUnit Prefixes269
  • DGreek Alphabet271
  • EPhysical Constants273
  • FProperties of Si and GaAs at 300 K275
  • GSome Properties of the Error Function277
  • HBasic Kinetic Theory of Gases281
  • ISUPREM Commands283
  • JRunning PROLITH287
  • KPercentage Points of the t Distribution289
  • LPercentage Points of the F Distribution291

원본 인쇄 목차(pp. xi~xiii)로 대조 완료 — 11장 + 부록 12종, 절 59개와 소절 93개, 쪽수 포함. 웹 출처로는 절(x.y)까지만 잡혀 있던 것을 소절(x.y.z)과 쪽수까지 채웠다. 절판·이식이 잦은 판이라 인용 판을 2004년 Wiley 초판으로 고정한다. 공정 순서가 아니라 물리 순서로 짜인 교재다 — 결정성장 → 산화 → 리소그래피 → 식각 → 확산 → 이온주입 → 증착 → 집적 → 제조. 각 장이 마지막에서 두 번째 절로 시뮬레이션 절(§3.6·§4.3·§5.3·§6.4·§7.4·§8.6·§9.6)을 두고 SUPREM·PROLITH를 실제로 돌리게 하는 구성이 이 책의 성격이고, 부록 I·J가 그 명령어다 — 20부 TCAD와 바로 이어진다. §10.3~10.5(SPC · 실험계획법 · 수율)가 19부의 뼈대이고, §9.5 MEMS와 §8.3.3~8.3.4(low-k / high-k)는 이 두께의 교재 치고 드물게 들어 있는 절이다.

Semiconductor Manufacturing Technology

18부Michael Quirk · Julian Serda · Prentice Hall, 2001 · ISBN 0-13-081520-9  원본 대조

1Introduction to the Semiconductor Industry1
  • ·Introduction2
  • ·Development of an Industry2
  • ·Industry Roots2
  • ·The Solid State3
  • ·Circuit Integration4
  • ·Integration Eras5
  • ·IC Fabrication6
  • ·Wafer Fab7
  • ·Stages of IC Fabrication7
  • ·Semiconductor Trends9
  • ·Increase in Chip Performance9
  • ·Increase in Chip Reliability12
  • ·Reduction in Chip Price12
  • ·The Electronic Era14
  • ·The 1950s: Transistor Technology14
  • ·The 1960s: Process Technology14
  • ·The 1970s: Competition14
  • ·The 1980s: Automation15
  • ·The 1990s: Volume Production15
  • ·Careers in Semiconductor Manufacturing16
  • ·Technician16
  • ·Job Descriptions18
2The Characteristics of Semiconductor Materials21
  • ·Introduction21
  • ·Atomic Structure22
  • ·Electrons22
  • ·The Periodic Table24
  • ·Ionic Bonds26
  • ·Covalent Bonds28
  • ·Classifying Materials28
  • ·Conductors29
  • ·Insulators30
  • ·Semiconductors32
  • ·Silicon33
  • ·Pure Silicon33
  • ·Why Silicon?33
  • ·Doped Silicon34
  • ·pn Junctions39
  • ·Alternative Semiconductor Materials39
  • ·Gallium Arsenide (GaAs)40
3Device Technologies43
  • ·Introduction43
  • ·Circuit Types44
  • ·Analog Circuits44
  • ·Digital Circuits44
  • ·Passive Component Structures45
  • ·IC Resistor Structures45
  • ·IC Capacitor Structures46
  • ·Active Component Structures46
  • ·The pn Junction Diode46
  • ·The Bipolar Junction Transistor49
  • ·Schottky Diode51
  • ·Bipolar IC Technology52
  • ·CMOS IC Technology52
  • ·Enhancement and Depletion-Mode MOSFETs58
  • ·Latchup in CMOS Devices59
  • ·Integrated Circuit Products59
  • ·Linear IC Product Types60
  • ·Digital IC Product Types60
4Silicon and Wafer Preparation67
  • ·Introduction67
  • ·Semiconductor-Grade Silicon68
  • ·Crystal Structure68
  • ·Amorphous Materials69
  • ·Unit Cells69
  • ·Polycrystal and Monocrystal Structures70
  • ·Crystal Orientation71
  • ·Monocrystal Silicon Growth72
  • ·CZ Method72
  • ·Float-Zone Method75
  • ·Reasons for Larger Ingot Diameters76
  • ·Crystal Defects in Silicon78
  • ·Point Defects78
  • ·Dislocations79
  • ·Gross Defects80
  • ·Wafer Preparation80
  • ·Shaping Operations81
  • ·Wafer Slicing82
  • ·Wafer Lapping and Edge Contour82
  • ·Etching83
  • ·Polishing83
  • ·Cleaning84
  • ·Wafer Evaluation84
  • ·Packaging84
  • ·Quality Measures84
  • ·Physical Dimensions85
  • ·Flatness86
  • ·Microroughness86
  • ·Oxygen Content86
  • ·Crystal Defects87
  • ·Particles87
  • ·Bulk Resistivity87
  • ·Epitaxial Layer87
5Chemicals in Semiconductor Fabrication91
  • ·Introduction91
  • ·States of Matter91
  • ·Properties of Materials92
  • ·Chemical Properties for Semiconductor Manufacturing93
  • ·Process Chemicals99
  • ·Liquids99
  • ·Gases103
6Contamination Control in Wafer Fabs113
  • ·Introduction113
  • ·Clean Background114
  • ·Types of Contamination114
  • ·Particles115
  • ·Metallic Impurities116
  • ·Organic Contamination117
  • ·Native Oxides118
  • ·Electrostatic Discharge119
  • ·Sources and Control of Contamination120
  • ·Air120
  • ·Humans121
  • ·Facility123
  • ·Water126
  • ·Process Chemicals130
  • ·Production Equipment131
  • ·Workstation Design131
  • ·Wafer Wet Cleaning135
  • ·Wet-Cleaning Overview135
  • ·Wet-Clean Equipment138
  • ·Alternatives to RCA Clean142
7Metrology and Defect Inspection149
  • ·Introduction149
  • ·IC Metrology150
  • ·Measurement Equipment151
  • ·Yield151
  • ·Data Management152
  • ·Quality Measures152
  • ·Film Thickness153
  • ·Film Stress158
  • ·Refractive Index158
  • ·Dopant Concentration159
  • ·Unpatterned Surface Defects161
  • ·Patterned Surface Defects164
  • ·Critical Dimension (CD)165
  • ·Step Coverage167
  • ·Overlay Registration167
  • ·Capacitance-Voltage (C-V) Test168
  • ·Contact Angle171
  • ·Analytical Equipment171
  • ·Secondary-Ion Mass Spectrometry (SIMS)171
  • ·Atomic Force Microscope (AFM)173
  • ·Auger Electron Spectroscopy (AES)174
  • ·X-Ray Photoelectron Spectroscopy (XPS)174
  • ·Transmission Electron Microscope (TEM)175
  • ·Energy- and Wavelength-Dispersive Spectrometer (EDX and WDX)176
  • ·Focused Ion Beam (FIB)176
8Gas Control in Process Chambers181
  • ·Introduction181
  • ·Vacuum183
  • ·Vacuum Ranges183
  • ·Mean Free Path184
  • ·Vacuum Pumps184
  • ·Roughing Pump185
  • ·High Vacuum Pump186
  • ·Vacuum in Integrated Tools188
  • ·Process Chamber Gas Flow189
  • ·Mass Flow Controllers189
  • ·Residual Gas Analyzer (RGA)190
  • ·RGA Basics190
  • ·RGA as Real-Time Monitor191
  • ·Plasma192
  • ·Glow Discharge193
  • ·Process Chamber Contamination195
9IC Fabrication Process Overview199
  • ·Introduction199
  • ·CMOS Process Flow199
  • ·Overview of Areas in a Wafer Fab200
  • ·CMOS Manufacturing Steps205
  • 1Twin Well Process205
  • 2Shallow Trench Isolation Process207
  • 3Poly Gate Structural Process210
  • 4Lightly Doped Drain (LDD) Implant Process211
  • 5Sidewall Spacer Formation212
  • 6Source/Drain (S/D) Implant Processes213
  • 7Contact Formation214
  • 8Local Interconnect (LI) Process214
  • 9Via-1 and Plug-1 Formation216
  • 10Metal-1 Interconnect Formation217
  • 11Via-2 and Plug-1 Formation218
  • 12Metal-2 Interconnect Formation219
  • 13Metal-3 to Pad Etch and Alloy220
  • 14Parametric Testing221
10Oxidation225
  • ·Introduction225
  • ·Oxide Film226
  • ·Nature of Oxide Film226
  • ·Uses of Oxide Film227
  • ·Thermal Oxidation Growth231
  • ·Chemical Reaction for Oxidation231
  • ·Oxidation Growth Model232
  • ·Furnace Equipment239
  • ·Horizontal Versus Vertical Furnaces240
  • ·Vertical Furnace241
  • ·Fast Ramp Vertical Furnace245
  • ·Rapid Thermal Processor246
  • ·Oxidation Process248
  • ·Pre Oxidation Cleaning248
  • ·Oxidation Process Recipe249
  • ·Quality Measurements250
  • ·Oxidation Troubleshooting252
11Deposition257
  • ·Introduction257
  • ·Film Layering Terminology258
  • ·Film Deposition260
  • ·Thin-Film Characteristics260
  • ·Film Growth263
  • ·Film Deposition Techniques264
  • ·Chemical Vapor Deposition265
  • ·CVD Chemical Processes265
  • ·CVD Reaction266
  • ·CVD Deposition Systems269
  • ·CVD Equipment Design270
  • ·APCVD (Atmospheric Pressure CVD)271
  • ·LPCVD (Low Pressure CVD)273
  • ·Plasma-Assisted CVD277
  • ·Dielectrics and Performance282
  • ·Dielectric Constant282
  • ·Device Isolation286
  • ·Spin-On-Dielectrics287
  • ·Spin-On-Glass (SOG)287
  • ·Spin-On-Dielectric (SOD)288
  • ·Epitaxy289
  • ·Epitaxy Growth Methods290
  • ·CVD Quality Measures292
  • ·CVD Troubleshooting292
12Metallization299
  • ·Introduction300
  • ·Types of Metals302
  • ·Aluminum302
  • ·Aluminum-Copper Alloys305
  • ·Copper305
  • ·Barrier Metals307
  • ·Silicides309
  • ·Metal Plugs312
  • ·Metal Deposition Systems313
  • ·Evaporation313
  • ·Sputtering314
  • ·Metal CVD320
  • ·Copper Electroplate323
  • ·Metallization Schemes325
  • ·Traditional Aluminum Structure325
  • ·Copper Damascene Structure326
  • ·Metallization Quality Measures329
  • ·Metallization Troubleshooting330
13Photolithography: Vapor Prime to Soft Bake335
  • ·Introduction336
  • ·Photolithography Concepts336
  • ·Photolithography Processes339
  • ·Negative Lithography339
  • ·Positive Lithography340
  • ·Eight Basic Steps of Photolithography342
  • 1Vapor Prime343
  • 2Spin Coat343
  • 3Soft Bake344
  • 4Alignment and Exposure344
  • 5Post-Exposure Bake (PEB)344
  • 6Develop344
  • 7Hard Bake344
  • 8Develop Inspect345
  • ·Vapor Prime345
  • ·Wafer Cleaning345
  • ·Dehydration Bake346
  • ·Wafer Priming346
  • ·Spin Coat348
  • ·Photoresist348
  • ·Photoresist Physical Properties349
  • ·Conventional I-Line Photoresists351
  • ·Deep UV (DUV) Photoresists354
  • ·Photoresist Dispensing Methods357
  • ·Soft Bake360
  • ·Soft Bake Equipment360
  • ·Process Characterization361
  • ·Photoresist Quality Measures362
  • ·Photoresist Troubleshooting363
14Photolithography: Alignment and Exposure367
  • ·Introduction367
  • ·Importance of Alignment and Exposure368
  • ·Optical Lithography370
  • ·Light370
  • ·Exposure Sources372
  • ·Optics376
  • ·Resolution385
  • ·Photolithography Equipment388
  • ·Contact Aligner388
  • ·Proximity Aligner389
  • ·Scanning Projection Aligner390
  • ·Step-and-Repeat Aligner (Stepper)390
  • ·Step-and-Scan System393
  • ·Reticles394
  • ·Optical Enhancement Techniques398
  • ·Alignment400
  • ·Environmental Conditions404
  • ·Comparison of Photo Tools405
  • ·Mix and Match406
  • ·Alignment and Exposure Quality Measures407
  • ·Alignment and Exposure Troubleshooting408
15Photolithography: Photoresist Development and Advanced Lithography413
  • ·Introduction413
  • ·Advanced Lithography414
  • ·Post-Exposure Bake414
  • ·DUV Post-Exposure Bake (PEB)415
  • ·Conventional I-Line PEB416
  • ·Develop416
  • ·Negative Resist417
  • ·Positive Resist418
  • ·Development Methods419
  • ·Resist Development Parameters421
  • ·Hard Bake422
  • ·Develop Inspect422
  • ·Advanced Lithography424
  • ·Next-Generation Lithography424
  • ·Advanced Resist Processing428
  • ·Develop Quality Measures429
  • ·Develop Troubleshooting431
16Etch435
  • ·Introduction435
  • ·Etch Processes436
  • ·Etch Parameters437
  • ·Etch Rate437
  • ·Etch Profile438
  • ·Etch Bias439
  • ·Selectivity440
  • ·Uniformity441
  • ·Residues441
  • ·Polymer Formation442
  • ·Plasma-Induced Damage442
  • ·Particle Contamination443
  • ·Dry Etch443
  • ·Etching Action444
  • ·Potential Distribution444
  • ·Plasma Etch Reactors446
  • ·Barrel Plasma Etcher446
  • ·Parallel Plate (Planar) Reactor447
  • ·Downstream Etch Systems448
  • ·Triode Planar Reactor448
  • ·Ion Beam Milling448
  • ·Reactive Ion Etch (RIE)450
  • ·High-Density Plasma Etchers450
  • ·Etch System Review453
  • ·Endpoint Detection455
  • ·Vacuum for Etch Chambers456
  • ·Dry Etch Applications456
  • ·Dielectric Dry Etch457
  • ·Silicon Dry Etch459
  • ·Metal Dry Etch462
  • ·Wet Etch464
  • ·Types of Wet Etch465
  • ·Historical Perspective466
  • ·Photoresist Removal466
  • ·Plasma Ashing466
  • ·Etch Inspection469
  • ·Etch Inspection Quality Measures469
  • ·Dry Etch Troubleshooting470
17Ion Implant475
  • ·Introduction475
  • ·Doped Regions477
  • ·Diffusion479
  • ·Diffusion Principles479
  • ·Diffusion Process481
  • ·Ion Implantation482
  • ·Overview483
  • ·Ion Implant Parameters484
  • ·Ion Implanters488
  • ·Ion Source488
  • ·Extraction and Ion Analyzer490
  • ·Acceleration Column491
  • ·Scanning System494
  • ·Process Chamber498
  • ·Annealing499
  • ·Channeling501
  • ·Particles502
  • ·Ion Implant Trends in Process Integration503
  • ·Deep Buried Layers503
  • ·Retrograde Wells503
  • ·Punchthrough Stoppers504
  • ·Threshold Voltage Adjustment504
  • ·Lightly Doped Drain505
  • ·Source/Drain Implants505
  • ·Polysilicon Gate506
  • ·Trench Capacitor506
  • ·Ultrashallow Junctions506
  • ·Silicon-On-Insulator (SOI)507
  • ·Ion Implant Quality Measures508
  • ·Ion Implant Troubleshooting509
18Chemical Mechanical Planarization515
  • ·Introduction515
  • ·Traditional Planarization518
  • ·Etchback518
  • ·Glass Reflow519
  • ·Spin-On Films520
  • ·Chemical Mechanical Planarization520
  • ·CMP Planarity521
  • ·Advantages of CMP522
  • ·CMP Mechanisms523
  • ·CMP Slurry and Pad526
  • ·CMP Equipment529
  • ·CMP Clean532
  • ·CMP Equipment Manufacturers534
  • ·CMP Applications535
  • ·STI Oxide Polish535
  • ·LI Oxide Polish535
  • ·LI Tungsten Polish536
  • ·ILD Oxide Polish536
  • ·Tungsten Plug Polish536
  • ·Dual-Damascene Copper Polish537
  • ·CMP Quality Measures538
  • ·CMP Troubleshooting540
19Wafer Test545
  • ·Introduction545
  • ·IC Electrical Tests546
  • ·Wafer Test547
  • ·In-Line Parametric Test547
  • ·Wafer Sort555
  • ·Yield560
  • ·Wafer Sort Yield Models563
  • ·Test Quality Measures565
  • ·Test Troubleshooting567
20Assembly and Packaging571
  • ·Introduction571
  • ·Packaging Levels573
  • ·Traditional Assembly574
  • ·Backgrind574
  • ·Die Separation575
  • ·Die Attach575
  • ·Wirebonding577
  • ·Traditional Packaging580
  • ·Plastic Packaging581
  • ·Ceramic Packaging584
  • ·Final Test586
  • ·Advanced Assembly and Packaging586
  • ·Flip Chip587
  • ·Ball Grid Array (BGA)589
  • ·Chip on Board (COB)590
  • ·Tape Automated Bonding (TAB)591
  • ·Multichip Module (MCM)591
  • ·Chip Scale Packaging (CSP)592
  • ·Wafer-Level Packaging592
  • ·Assembly and Packaging Quality Measures596
  • ·IC Packaging Troubleshooting597
부록 A~FChemicals and Safety · Contamination Controls in Cleanrooms · Units · Color as a Function of Oxide Thickness · Overview of Photoresist Chemistry · Etch Chemistry601

원본 인쇄 목차(pp. iii~x)로 대조 완료 — 20장 + 부록 6종, 절 129개와 소절 293개, 쪽수 포함. 이 책은 절 번호를 매기지 않는다 — 대문자 표제(A단)와 들여쓴 표제(B단)의 조판 위계가 전부여서 번호 자리를 `·`로 채웠고, 장마다 반복되는 Objectives·Summary·Key Terms·Review Questions·Web Sites·References는 싣지 않았다. 웹 출처로 잡아 두었던 장 제목 중 7·9·13·15·17·18·19장이 실제 제목과 달랐다(예: “IC Fabrication Metrology” → Metrology and Defect Inspection, “Doping” → Ion Implant, “Wafer Sort” → Wafer Test). 리소그래피를 트랙 공정 순서대로 세 장(13·14·15)에 나눈 것이 이 책의 특징이며, 10~19장은 각각 품질 지표(Quality Measures)와 트러블슈팅 절로 끝난다 — 이 두 절이 물리 교재에는 아예 없는 부분이다. 5~8장(화학물질·오염 제어·계측·가스 제어)도 마찬가지. 9장의 CMOS 14단계 흐름은 19부·20부의 뼈대로 그대로 쓸 수 있다. 목차 11번 항목의 “Via-2 and Plug-1 Formation”은 인쇄 목차 그대로다(본문 기준 Plug-2로 보이는 오기).

Introduction to Semiconductor Manufacturing Technology

18부Hong Xiao · 2nd ed. · SPIE Press, 2012  원본 대조

1Introduction1
  • 1.1Brief History of Integrated Circuits2
  • 1.1.1First transistor2
  • 1.1.2First integrated circuit3
  • 1.1.3Moore’s law5
  • 1.1.4Feature and wafer size5
  • 1.1.5Definition of the integrated circuit technology node10
  • 1.1.6Moore’s law or the law of more11
  • 1.2Brief Overview of Integrated Circuits12
  • 1.2.1Manufacturing materials12
  • 1.2.2Processing equipment12
  • 1.2.3Metrology tools13
  • 1.2.4Wafer manufacturing13
  • 1.2.5Circuit design14
  • 1.2.6Mask formation16
  • 1.2.7Wafer processing19
  • 1.3Summary19
  • 1.4Bibliography20
  • 1.5Review Questions21
2Introduction to Integrated Circuit Fabrication23
  • 2.1Introduction23
  • 2.2Yield25
  • 2.2.1Definition of yield25
  • 2.2.2Yield and profit margin26
  • 2.2.3Defects and yield27
  • 2.3Cleanroom Basics28
  • 2.3.1Definition of a cleanroom29
  • 2.3.2Contamination control and yield30
  • 2.3.3Basic cleanroom structure32
  • 2.3.4Basic cleanroom gowning procedures33
  • 2.3.5Basic cleanroom protocols35
  • 2.4Basic Structure of an Integrated Circuit Fabrication Facility36
  • 2.4.1Wafer processing area (Wet bay · Diffusion bay · Photo bay · Etch bay · Implant bay · Thin-film bay · Chemical mechanical polishing bay)37
  • 2.4.2Equipment area45
  • 2.4.3Facility area45
  • 2.5Testing and Packaging46
  • 2.5.1Die testing47
  • 2.5.2Chip packaging47
  • 2.5.3Final test52
  • 2.5.43D packaging53
  • 2.6Future Trends53
  • 2.7Summary55
  • 2.8Bibliography56
  • 2.9Review Questions56
3Semiconductor Basics59
  • 3.1What Is a Semiconductor?59
  • 3.1.1Bandgap59
  • 3.1.2Crystal structure61
  • 3.1.3Doping semiconductor61
  • 3.1.4Dopant concentration and conductivity63
  • 3.1.5Summary of semiconductors64
  • 3.2Basic Devices64
  • 3.2.1Resistor64
  • 3.2.2Capacitor66
  • 3.2.3Diode69
  • 3.2.4Bipolar transistor70
  • 3.2.5Metal-oxide-semiconductor field effect transistor72
  • 3.3Integrated Circuit Chips74
  • 3.3.1Memory (Dynamic random access memory · Static random access memory · Erasable programmable read-only memory, electric erasable programmable read-only memory, and flash)75
  • 3.3.2Microprocessor78
  • 3.3.3Application-specific integrated circuits79
  • 3.4Basis Integrated Circuit Processes79
  • 3.4.1Conventional bipolar transistor process80
  • 3.4.2p-Channel metal-oxide-semiconductor process (1960s technology)81
  • 3.4.3n-Channel metal-oxide-semiconductor process (1970s technology)82
  • 3.5Complementary Metal-Oxide Semiconductor82
  • 3.5.1Complementary metal-oxide-semiconductor circuit85
  • 3.5.2Complementary metal-oxide-semiconductor circuit process (1980s technology)87
  • 3.5.3Complementary metal-oxide-semiconductor process (1990s technology)89
  • 3.6Technology Trends after 200089
  • 3.7Summary90
  • 3.8Bibliography92
  • 3.9Review Questions93
4Wafer Manufacturing, Epitaxy, and Substrate Engineering95
  • 4.1Introduction95
  • 4.2Why Silicon?96
  • 4.3Crystal Structures and Defects97
  • 4.3.1Crystal orientation97
  • 4.3.2Crystal defects99
  • 4.4Sand to Wafer100
  • 4.4.1Crude silicon100
  • 4.4.2Silicon purification101
  • 4.4.3Crystal pulling (Czochralski method · Floating zone method)102
  • 4.4.4Wafering105
  • 4.4.5Wafer finishing107
  • 4.5Epitaxial Silicon Deposition108
  • 4.5.1Gas phase epitaxy110
  • 4.5.2Epitaxial growth process111
  • 4.5.3Epitaxy hardware112
  • 4.5.4Epitaxy process114
  • 4.5.5Future trends of epitaxy115
  • 4.5.6Selective epitaxy116
  • 4.6Substrate Engineering116
  • 4.6.1Silicon-on-insulator wafer116
  • 4.6.2Hybrid orientation technology118
  • 4.6.3Strained silicon wafer119
  • 4.6.4Strained silicon-on-insulator wafer119
  • 4.6.5Strained silicon in integrated circuit manufacturing120
  • 4.7Summary120
  • 4.8Bibliography122
  • 4.9Review Questions122
5Thermal Processes125
  • 5.1Introduction125
  • 5.2Thermal Process Hardware126
  • 5.2.1Introduction126
  • 5.2.2Control system127
  • 5.2.3Gas delivery system128
  • 5.2.4Loading system128
  • 5.2.5Exhaust system129
  • 5.2.6Processing tube129
  • 5.3Oxidation129
  • 5.3.1Applications131
  • 5.3.2Preoxidation cleaning135
  • 5.3.3Oxidation rate137
  • 5.3.4Dry oxidation139
  • 5.3.5Wet oxidation142
  • 5.3.6High-pressure oxidation145
  • 5.3.7Oxide measurement146
  • 5.3.8Recent oxidation trends149
  • 5.4Diffusion150
  • 5.4.1Deposition and drive-in152
  • 5.4.2Doping measurement154
  • 5.5Annealing156
  • 5.5.1Postimplantation annealing156
  • 5.5.2Alloy annealing157
  • 5.5.3Reflow158
  • 5.6High-Temperature Chemical Vapor Deposition159
  • 5.6.1Epitaxial silicon deposition159
  • 5.6.2Selective epitaxial growth processes160
  • 5.6.3Polycrystalline silicon deposition160
  • 5.6.4Silicon nitride deposition164
  • 5.7Rapid Thermal Processing167
  • 5.7.1Rapid thermal annealing168
  • 5.7.2Rapid thermal oxidation171
  • 5.7.3Rapid thermal chemical vapor deposition173
  • 5.8Recent Developments174
  • 5.9Summary176
  • 5.10Bibliography177
  • 5.11Review Questions177
6Photolithography179
  • 6.1Introduction179
  • 6.2Photoresist181
  • 6.3Photolithography Process184
  • 6.3.1Wafer cleaning185
  • 6.3.2Preparation187
  • 6.3.3Photoresist coating188
  • 6.3.4Soft bake193
  • 6.3.5Alignment and exposure (Contact and proximity printers · Projection printer · Stepper/scanner · Exposure light sources · Exposure control)194
  • 6.3.6Postexposure bake201
  • 6.3.7Development203
  • 6.3.8Hard bake205
  • 6.3.9Metrology and defect inspection206
  • 6.3.10Track-stepper integration system211
  • 6.4Lithographic Technology Trends212
  • 6.4.1Resolution and depth of focus212
  • 6.4.2Mercury lamps and excimer lasers215
  • 6.4.3Resolution enhancement techniques (Phase shift mask · Optical proximity correction · Off-axis illumination)216
  • 6.4.4Immersion lithography221
  • 6.4.5Double, triple, and multiple patterning222
  • 6.4.6Extreme-ultraviolet lithography226
  • 6.4.7Nanoimprint lithography228
  • 6.4.8X-ray lithography229
  • 6.4.9Electron beam lithography230
  • 6.4.10Ion beam lithography231
  • 6.5Safety232
  • 6.6Summary233
  • 6.7Bibliography234
  • 6.8Review questions235
7Plasma Basics237
  • 7.1Introduction237
  • 7.2Definition of Plasma237
  • 7.2.1Components of plasma238
  • 7.2.2Generation of plasma238
  • 7.3Collisions in Plasma239
  • 7.3.1Ionization239
  • 7.3.2Excitation-relaxation240
  • 7.3.3Dissociation241
  • 7.3.4Other collisions243
  • 7.4Plasma Parameters243
  • 7.4.1Mean free path244
  • 7.4.2Thermal velocity245
  • 7.4.3Magnetic field247
  • 7.4.4Boltzmann distribution248
  • 7.5Ion Bombardment248
  • 7.6Direct-Current Bias250
  • 7.7Advantage of Plasma Processes253
  • 7.7.1Chemical vapor deposition (Plasma-enhanced chemical vapor deposition · Stress control · Chamber cleaning · Gap fill)254
  • 7.7.2Plasma etch (Etch profile control · Etch rate and selectivity · Endpoint · Chemical use)256
  • 7.7.3Sputtering deposition257
  • 7.8Plasma-Enhanced Chemical Vapor Deposition and Plasma Etch Chambers257
  • 7.8.1Processing differences257
  • 7.8.2Chemical vapor deposition chamber design258
  • 7.8.3Etch chamber design258
  • 7.9Remote Plasma Processes260
  • 7.9.1Photoresist strip260
  • 7.9.2Remote plasma etch260
  • 7.9.3Remote plasma cleaning261
  • 7.9.4Remote plasma chemical vapor deposition262
  • 7.10High-Density Plasma262
  • 7.10.1Inductively coupled plasma263
  • 7.10.2Electron cyclotron resonance264
  • 7.11Summary264
  • 7.12Bibliography265
  • 7.13Review Questions265
8Ion Implantation267
  • 8.1Introduction267
  • 8.1.1Brief history267
  • 8.1.2Advantages of implantation270
  • 8.1.3Applications271
  • 8.2Ion Implantation Basics272
  • 8.2.1Stopping mechanisms272
  • 8.2.2Ion range275
  • 8.2.3Channeling effect278
  • 8.2.4Damage and annealing281
  • 8.3Ion Implantation Hardware284
  • 8.3.1Gas system284
  • 8.3.2Electrical system284
  • 8.3.3Vacuum system285
  • 8.3.4Control system285
  • 8.3.5Beam line system (Ion source · Extraction system · Mass analyzer · Postacceleration · Charge neutralization system · Wafer handler · Beam stop)285
  • 8.4Ion Implantation Process294
  • 8.4.1Device applications294
  • 8.4.2Other ion implantation applications299
  • 8.4.3Processing issues (Wafer charging · Particle contamination · Elemental contamination)302
  • 8.4.4Process evaluation (Secondary ion mass spectroscopy · Four-point probe · Thermal wave · Optical-electrical sheet resistance measurement)305
  • 8.5Safety308
  • 8.5.1Chemical hazards308
  • 8.5.2Electrical hazards309
  • 8.5.3Radiation hazards310
  • 8.5.4Mechanical hazards310
  • 8.6Recent Developments and Applications310
  • 8.7Summary312
  • 8.8Bibliography312
  • 8.9Review Questions313
9Etch315
  • 9.1Introduction315
  • 9.2Etch Basics317
  • 9.2.1Etch rate317
  • 9.2.2Uniformity318
  • 9.2.3Selectivity320
  • 9.2.4Profile320
  • 9.2.5Etch bias321
  • 9.2.6Loading effects (Macroloading · Microloading)321
  • 9.2.7Overetch321
  • 9.2.8Residue324
  • 9.3Wet Etch Process325
  • 9.3.1Introduction325
  • 9.3.2Oxide wet etch325
  • 9.3.3Silicon etch327
  • 9.3.4Nitride etch328
  • 9.3.5Metal etch329
  • 9.4Plasma (Dry) Etch330
  • 9.4.1Introduction330
  • 9.4.2Plasma review330
  • 9.4.3Chemical, physical, and reactive ion etches331
  • 9.4.4Etch mechanisms333
  • 9.4.5Plasma etch chamber335
  • 9.4.6Endpoint340
  • 9.5Plasma Etch Processes341
  • 9.5.1Dielectric etch341
  • 9.5.2Single-crystal silicon etch349
  • 9.5.3Polysilicon etch353
  • 9.5.4Metal etch357
  • 9.5.5Photoresist strip358
  • 9.5.6Dry chemical etch processes359
  • 9.5.7Blanket dry etch processes360
  • 9.5.8Plasma etch safety360
  • 9.6Process Trends361
  • 9.7Recent Developments362
  • 9.8Summary365
  • 9.9Bibliography365
  • 9.10Review Questions366
10Chemical Vapor Deposition and Dielectric Thin Films369
  • 10.1Introduction369
  • 10.2Chemical Vapor Deposition371
  • 10.2.1Chemical vapor deposition process description372
  • 10.2.2Chemical vapor deposition reactor types (Atmospheric pressure chemical vapor deposition · Low-pressure chemical vapor deposition · Plasma-enhanced chemical vapor deposition)374
  • 10.2.3Chemical vapor deposition basics (Step coverage · Gap fill)377
  • 10.2.4Surface adsorption (Chemisorption · Physisorption)382
  • 10.2.5Chemical vapor deposition precursors and their adsorption (Sticking coefficient)383
  • 10.2.6Chemical vapor deposition kinetics (Chemical reaction rate · Surface-reaction-limited regime · Mass-transport-limited regime · Chemical vapor deposition reactor deposition regime)387
  • 10.3Applications of Dielectric Thin Films390
  • 10.3.1Shallow trench isolation391
  • 10.3.2Sidewall spacer391
  • 10.3.3Interlayer dielectric-0392
  • 10.3.4Interlayer dielectric-1 and up396
  • 10.3.5Passivation dielectrics398
  • 10.4Dielectric thin-film characteristics398
  • 10.4.1Refractive index (Ellipsometry · Prism coupler)398
  • 10.4.2Thickness (Color chart · Spectroreflectometry · Deposition rate · Wet etch rate · Shrinkage · Uniformity)402
  • 10.4.3Stress408
  • 10.5Dielectric Chemical Vapor Deposition Processes411
  • 10.5.1Thermal silane chemical vapor definition process411
  • 10.5.2Thermal tetraethoxysilane chemical vapor deposition process412
  • 10.5.3Plasma-enhanced chemical vapor deposition silane process (Passivation · Interlayer dielectric-0 barrier layer · Dielectric antireflective coating)412
  • 10.5.4Plasma-enhanced chemical vapor deposition tetraethoxysilane process416
  • 10.5.5Dielectric etchback process418
  • 10.5.6Ozone-tetraethoxysilane process (Ozonator · Ozone-tetraethoxysilane undoped silicate glass process · Ozone-tetraethoxysilane phosphosilicate glass and borophosphosilicate glass processes)421
  • 10.6Spin-On Glass424
  • 10.7High-Density Plasma Chemical Vapor Deposition426
  • 10.8Dielectric Chemical Vapor Deposition Chamber Cleaning428
  • 10.8.1Radio-frequency plasma cleaning428
  • 10.8.2Remote plasma cleaning431
  • 10.9Process Trends and Troubleshooting433
  • 10.9.1Silane plasma-enhanced chemical vapor deposition processing trends433
  • 10.9.2Plasma-enhanced tetraethylorthosilicate trends434
  • 10.9.3Ozone-tetraethoxysilane trends435
  • 10.9.4Troubleshooting guide437
  • 10.10Recent Developments439
  • 10.10.1Low-κ dielectrics441
  • 10.10.2Air gap441
  • 10.10.3Atomic layer deposition443
  • 10.10.4High-κ dielectrics444
  • 10.11Summary446
  • 10.12Bibliography448
  • 10.13Review Questions449
11Metallization451
  • 11.1Introduction451
  • 11.2Conducting Thin Films454
  • 11.2.1Polysilicon454
  • 11.2.2Silicides454
  • 11.2.3Aluminum455
  • 11.2.4Titanium458
  • 11.2.5Titanium nitride459
  • 11.2.6Tungsten461
  • 11.2.7Copper462
  • 11.2.8Tantalum464
  • 11.2.9Cobalt464
  • 11.2.10Nickel465
  • 11.3Metal Thin-Film Characteristics465
  • 11.3.1Thickness and deposition rate467
  • 11.3.2Uniformity469
  • 11.3.3Stress470
  • 11.3.4Reflectivity472
  • 11.3.5Sheet resistance472
  • 11.4Metal Chemical Vapor Deposition475
  • 11.4.1Introduction475
  • 11.4.2Tungsten477
  • 11.4.3Tungsten silicide480
  • 11.4.4Titanium481
  • 11.4.5Titanium nitride481
  • 11.4.6Aluminum483
  • 11.5Physical Vapor Deposition483
  • 11.5.1Introduction483
  • 11.5.2Evaporation processes (Thermal evaporation · Electron beam evaporation)485
  • 11.5.3Sputtering487
  • 11.5.4Basic metallization processes (Degas · Preclean · Titanium physical vapor deposition · Titanium nitride physical vapor deposition · Aluminum–copper physical vapor deposition)490
  • 11.6Copper Metallization497
  • 11.6.1Precleaning497
  • 11.6.2Barrier layer499
  • 11.6.3Copper seed layer499
  • 11.6.4Copper electrochemical plating500
  • 11.6.5Copper chemical vapor deposition502
  • 11.7Safety503
  • 11.8Summary503
  • 11.9Bibliography504
  • 11.10Review Questions505
12Chemical Mechanical Polishing507
  • 12.1Introduction507
  • 12.1.1Overview508
  • 12.1.2Definition of planarization511
  • 12.1.3Other planarization methods511
  • 12.1.4Necessity of chemical mechanical polishing514
  • 12.1.5Advantages of chemical mechanical polishing515
  • 12.1.6Applications of chemical mechanical polishing516
  • 12.2Chemical Mechanical Polishing Hardware519
  • 12.2.1Introduction519
  • 12.2.2Polishing pad519
  • 12.2.3Polishing head521
  • 12.2.4Pad conditioner521
  • 12.3Chemical Mechanical Polishing Slurries522
  • 12.3.1Oxide slurry523
  • 12.3.2Metal polishing slurry525
  • 12.3.3Tungsten slurry526
  • 12.3.4Aluminum and copper slurries527
  • 12.4Chemical Mechanical Polishing Basics528
  • 12.4.1Removal rate528
  • 12.4.2Uniformity529
  • 12.4.3Selectivity529
  • 12.4.4Defects530
  • 12.5Chemical Mechanical Polishing Processes534
  • 12.5.1Oxide chemical mechanical polishing534
  • 12.5.2Tungsten chemical mechanical polishing535
  • 12.5.3Copper chemical mechanical polishing537
  • 12.5.4Chemical mechanical polishing endpoint detection538
  • 12.5.5Post-chemical-mechanical-polishing wafer cleaning540
  • 12.5.6Process issues542
  • 12.6Recent Developments543
  • 12.7Summary545
  • 12.8Bibliography546
  • 12.9Review Questions547
13Process Integration549
  • 13.1Introduction549
  • 13.2Wafer Preparation550
  • 13.3Isolations551
  • 13.3.1Blanket field oxide551
  • 13.3.2Local oxidation of silicon552
  • 13.3.3Shallow trench isolation554
  • 13.3.4Self-aligned shallow trench isolation557
  • 13.4Well Formation557
  • 13.4.1Single well557
  • 13.4.2Self-aligned twin wells557
  • 13.4.3Twin wells559
  • 13.5Transistor Formation559
  • 13.5.1Metal gate process559
  • 13.5.2Self-aligned source/drain process560
  • 13.5.3Lightly doped drain561
  • 13.5.4Threshold adjustment563
  • 13.5.5Anti-punch-through564
  • 13.6Metal-Oxide-Semiconductor Field-Effect Transistors with High-κ and Metal Gates564
  • 13.6.1Gate-first process565
  • 13.6.2Gate-last process567
  • 13.6.3Hybrid high-κ metal gates570
  • 13.7Interconnections570
  • 13.7.1Local interconnections570
  • 13.7.2Early interconnections572
  • 13.7.3Aluminum alloy multilevel interconnections573
  • 13.7.4Copper interconnections574
  • 13.7.5Copper and low-κ dielectrics576
  • 13.8Passivation577
  • 13.9Summary578
  • 13.10Bibliography580
  • 13.11Review Questions580
14Integrated Circuit Processing Technologies581
  • 14.1Introduction581
  • 14.2Complementary Metal-Oxide-Semiconductor Process Flow of the Early 1980s581
  • 14.3Complementary Metal-Oxide-Semiconductor Process Flow with 1990s Technology582
  • 14.3.1Comments583
  • 14.4Complementary Metal-Oxide-Semiconductor Process Flow with Technology after 2000598
  • 14.5Complementary Metal-Oxide-Semiconductor Process Flow with Technology after 2010616
  • 14.6Memory Chip Manufacturing Processes625
  • 14.6.1Dynamic random access memory process flow627
  • 14.6.2Stacked dynamic random access memory process flow629
  • 14.6.3NAND flash process636
  • 14.7Summary646
  • 14.8Bibliography647
  • 14.9Review Questions648
15Future Trends and Summary649
  • 15.1Bibliography655

원본 목차 PDF로 대조 완료 — 15장 136개 절과 288개 소절, 쪽수 포함(4단계 77개 항목은 괄호로 합쳤다). 전에 SPIE 챕터 DOI로 복원해 둔 14장 목록은 틀렸다 — 실제로는 15장이고, 5장이 Thermal Processes·7장이 Plasma Basics로 순서도 다르며 15장(Future Trends)이 통째로 빠져 있었다. Ch.2가 수율·클린룸·팹 배치(웨트/디퓨전/포토/에치/임플란트/박막/CMP 베이)를 절 단위로 쪼개 18.1~18.2의 골격을 그대로 준다. 공정 장이 장비 구조 절(§5.2 · §8.3 · §12.2 Hardware)과 안전 절(§6.5 · §8.5 · §11.7 Safety)로 끝나는 것이 이 책의 강점 — 물리 중심 교재가 통째로 생략하는 부분이다. §10.9.4 Troubleshooting guide는 표 한 장으로 CVD 불량 원인을 정리한다.

Semiconductor Advanced Packaging

15·18·23부John H. Lau · Springer, 2022 · ISBN 978-981-16-8183-3  원본 대조

1Advanced Packaging1
  • 1.1Introduction1
  • 1.2Semiconductor Applications1
  • 1.3System-Technology Drivers1
  • 1.4Advanced Packaging4
  • 1.52D Fan-Out (Chip-First) IC Integration5
  • 1.62D Flip Chip IC Integration7
  • 1.7PoP, SiP, and Heterogeneous Integration7
  • 1.82D Fan-Out (Chip-Last) IC Integration9
  • 1.92.1D Flip Chip IC Integration9
  • 1.102.1D Flip Chip IC Integration with Bridges11
  • 1.112.1D Fan-Out IC Integration with Bridges11
  • 1.122.3D Fan-Out (Chip-First) IC Integration12
  • 1.132.3D Flip Chip IC Integration12
  • 1.142.3D Fan-Out (Chip-Last) IC Integration13
  • 1.152.5D (C4 Bump) IC Integration13
  • 1.162.5D (C2 Bump) IC Integration14
  • 1.17µBump 3D IC Integration14
  • 1.18µBump Chiplets 3D IC Integration15
  • 1.19Bumpless 3D IC Integration15
  • 1.20Bumpless Chiplets 3D IC Integration17
  • 1.21Summary and Recommendation18
2System-in-Package (SiP)27
  • 2.1Introduction27
  • 2.2SoC (System-on-Chip)27
  • 2.3System-in-Package (SiP)29
  • 2.4Intention of SiP29
  • 2.5Actual Applications of SiP29
  • 2.6SiP Examples29
  • 2.7SMT32
  • 2.8Flip Chip Technology45
3Fan-In Wafer/Panel-Level Chip-Scale Packages75
  • 3.1Introduction75
  • 3.2Fan-In Wafer-Level Chip-Scale Packages (WLCSPs)78
  • 3.3Fan-In Panel-Level Chip-Scale Packages (PLCSPs)88
  • 3.4Six-Side Molded Wafer-Level Chip-Scale Packages115
  • 3.5Six-Side Molded Panel-Level Chip-Scale Packages120
4Fan-Out Wafer/Panel-Level Packaging147
  • 4.1Introduction147
  • 4.2Fan-Out (Chip-First and Face-Down) Wafer-Level Packaging (FOWLP)147
  • 4.3Fan-Out (Chip-First and Face-Down) Panel-Level Packaging (FOPLP)163
  • 4.4Fan-Out (Chip-First and Face-Up) Wafer-Level Packaging173
  • 4.5Fan-Out (Chip-First and Face-up) Panel-Level Packaging175
  • 4.6Fan-Out (Chip-Last or RDL-First) Wafer-Level Packaging176
  • 4.7Fan-Out (Chip-Last or RDL-First) Panel-Level Packaging182
  • 4.8Fan-Out Panel-Level Packaging of Mini-LED RGB Display209
52D, 2.1D, and 2.3D IC Integration239
  • 5.1Introduction239
  • 5.22D IC Integration—Wire Bonging239
  • 5.32D IC Integration—Flip Chip239
  • 5.42D IC Integration—Wire Bonging and Flip Chip240
  • 5.5RDLs241
  • 5.62D IC Integration—Fan-Out (Chip-First)242
  • 5.72D IC Integration—Fan-Out (Chip-Last)245
  • 5.82.1D IC Integration249
  • 5.92.3D IC Integration257
  • 5.102.3D IC Integration with SAP/PCB Method259
  • 5.112.3D IC Integration with Fan-Out (Chip-First) Method263
  • 5.122.3D IC Integration with Fan-Out (Chip-Last) Method268
  • 5.13Summary and Recommendation294
62.5D IC Integration299
  • 6.1Introduction299
  • 6.2Leti’s SoW (the Origin of 2.5D IC Integration)299
  • 6.3IME’s 2.5D IC Integration299
  • 6.4HKUST’s TSV-Interposer with Chips on Both Sides308
  • 6.5ITRI’s 2.5D IC Integration308
  • 6.6TSMC’s CoWoS320
  • 6.7Xilinx/TSMC’s 2.5D IC Integration322
  • 6.8Altera/TSMC’s 2.5D IC Integration326
  • 6.9AMD/UMC’s 2.5D IC Integration326
  • 6.10NVidia/TSMC’s 2.5D IC Integration328
  • 6.11TSMC’s CoWoS Roadmap329
  • 6.12Recent Advances in 2.5D IC Integration329
  • 6.13Summary and Recommendation334
73D IC Integration and 3D IC Packaging343
  • 7.1Introduction343
  • 7.23D IC Packaging343
  • 7.33D IC Integration362
8Hybrid Bonding379
  • 8.1Introduction379
  • 8.2Cu–Cu TCB380
  • 8.3Cu–Cu TCB at Room Temperature383
  • 8.4SiO₂–SiO₂ TCB384
  • 8.5Low Temperature DBI387
  • 8.6Recent Developments of Low Temperature Hybrid Bonding394
  • 8.7Summary and Recommendation407
9Chiplet Heterogeneous Integration413
  • 9.1Introduction413
  • 9.2DARPA’s Efforts in Chipet Heterogeneous Integration413
  • 9.3SoC (System-on-Chip)414
  • 9.4Chiplet Heterogeneous Integration416
  • 9.5Advantages and Disadvantages of Chiplet Heterogeneous Integration417
  • 9.6Advanced Packaging for Chiplet Heterogeneous Integration418
  • 9.7AMD’s Chiplet Heterogeneous Integration427
  • 9.8Intel’s Chiplet Heterogeneous Integration429
  • 9.9TSMC’s Chiplet Heterogeneous Integration431
  • 9.10Summary and Recommendation434
10Low Loss Dielectric Materials441
  • 10.1Introduction441
  • 10.2Why Need Low Dk and Df Dielectric Materials?442
  • 10.3Why Need Low CTE Dielectric Materials?442
  • 10.4NAMICS’s Dk and Df443
  • 10.5Arakawa’s Dk and Df445
  • 10.6DuPont’s Dk and Df446
  • 10.7Hitachi/DuPont MicroSystems’ Dk and Df447
  • 10.8JSR’s Dk and Df448
  • 10.9Toray’s Dk and Df452
  • 10.10Fujitsu’s Dk and Df452
  • 10.11Kayaku’s Dk and Df453
  • 10.12Mitsubishi’s Dk and Df456
  • 10.13TAITO INK’s Dk and Df457
  • 10.14Zhejiang University’s Dk and Df460
  • 10.15Summary and Recommendation461
11Advanced Packaging Trends465
  • 11.1Introduction465
  • 11.2The Impact of COVID-19 on Semiconductor Industry465
  • 11.3The Impact of COVID-19 on Foundry Industry466
  • 11.4The Impact of COVID-19 on the Semiconductor Customers466
  • 11.5The Impact of COVID-19 on Packaging Industry468
  • 11.6Drivers, Semiconductor, and Advanced Packaging469
  • 11.7Assembly Process for Advanced Packaging470
  • 11.8Fan-Out Chip-First (Face-up), Chip-First (Face-Down), and Chip-Last477
  • 11.9Bridges Versus TSV-Interposer478
  • 11.10SoC Versus Chiplets481
  • 11.11Material Requirement for HS/HF Applications486
  • 11.12Summary and Recommendation487

Index491

인쇄 목차를 절·쪽수까지 옮겼다(11개 장). 소절(x.y.z)과 장 끝 References는 싣지 않았다. 인쇄 목차의 “Wire Bonging”(5.2·5.4)은 오식으로 보이나 인쇄된 대로 두었다. 15.12 고대역폭 메모리(6절)와 23.5 첨단 패키징과 칩렛(5절)이 서적 근거 없이 학회 자료만으로 서 있던 자리를 이 책이 받는다 — 1장이 2D부터 범프리스 3D까지 스무 가지 집적 형태를 한 장에 정렬해 놓아 용어의 기준이 되고, 6장(2.5D·TSV 인터포저·CoWoS)과 7장(3D IC·HBM)이 HBM의 구조·본딩·인터포저를, 8장 Hybrid Bonding이 Cu–Cu TCB·DBI·저온 하이브리드 본딩을, 9장이 칩렛 이종 집적과 DARPA·AMD·Intel·TSMC의 구현을 다룬다. 18.26(웨이퍼·패널 레벨 패키징)의 팬아웃·WLCSP는 3·4장, 11부의 배선·유전체 쪽은 10장(저손실 유전체 — Dk·Df·CTE)이다. 2022년 책이라 하이브리드 본딩과 칩렛이 최신 상태로 들어 있고, 11장은 업계 동향이라 23부와 겹친다. 이 책의 열한 장을 18.24 한 장이 다 받지 못해 18부 뒤를 18.24 웨이퍼 테스트와 다이 준비 · 18.25 조립과 상호연결 · 18.26 웨이퍼·패널 레벨 패키징 · 18.27 2.xD·3D 집적 · 18.28 하이브리드 본딩 · 18.29 패키지 소재와 최종 테스트 여섯 장으로 폈다.

19부 · 계측·수율·공정 제어

Fundamentals of Semiconductor Manufacturing and Process Control

19부Gary S. May · Costas J. Spanos · Wiley-IEEE Press, 2006 · ISBN 0-471-78406-0  원본 대조

1Introduction to Semiconductor Manufacturing1
  • 1.1Historical Evolution2
  • 1.1.1Manufacturing and Quality Control3
  • 1.1.2Semiconductor Processes5
  • 1.1.3Integrated Circuit Manufacturing7
  • 1.2Modern Semiconductor Manufacturing8
  • 1.2.1Unit Processes9
  • 1.2.2Process Sequences11
  • 1.2.3Information Flow12
  • 1.2.4Process Organization14
  • 1.3Goals of Manufacturing15
  • 1.3.1Cost15
  • 1.3.2Quality17
  • 1.3.3Variability17
  • 1.3.4Yield17
  • 1.3.5Reliability18
  • 1.4Manufacturing Systems18
  • 1.4.1Continuous Flow (Batch Processes · Single Workpiece)19
  • 1.4.2Discrete Parts21
  • 1.5Outline for Remainder of the Book21
2Technology Overview25
  • 2.1Unit Processes25
  • 2.1.1Oxidation (Growth Kinetics · Thin Oxide Growth · Oxide Quality)26
  • 2.1.2Photolithography (Exposure Tools · Masks · Photoresist · Pattern Transfer · E-Beam Lithography · X-Ray Lithography)34
  • 2.1.3Etching (Wet Chemical Etching · Dry Etching)47
  • 2.1.4Doping (Diffusion · Ion Implantation)51
  • 2.1.5Deposition (Physical Vapor Deposition · Chemical Vapor Deposition)58
  • 2.1.6Planarization61
  • 2.2Process Integration61
  • 2.2.1Bipolar Technology63
  • 2.2.2CMOS Technology (Basic NMOS Fabrication Sequence · CMOS Fabrication Sequence)66
  • 2.2.3BiCMOS Technology74
  • 2.2.4Packaging (Die Separation · Package Types · Attachment Methods)75
3Process Monitoring82
  • 3.1Process Flow and Key Measurement Points83
  • 3.2Wafer State Measurements84
  • 3.2.1Blanket Thin Film (Interferometry · Ellipsometry · Quartz Crystal Monitor · Four-Point Probe)85
  • 3.2.2Patterned Thin Film (Profilometry · Atomic Force Microscopy · Scanning Electron Microscopy · Scatterometry · Electrical Linewidth Measurement)93
  • 3.2.3Particle/Defect Inspection (Cleanroom Air Monitoring · Product Monitoring)98
  • 3.2.4Electrical Testing (Test Structures · Final Test)102
  • 3.3Equipment State Measurements107
  • 3.3.1Thermal Operations (Temperature · Pressure · Gas Flow)109
  • 3.3.2Plasma Operations (Temperature · Pressure · Gas Flow · Residual Gas Analysis · Optical Emission Spectroscopy · Fourier Transform Infrared Spectroscopy · RF Monitors)111
  • 3.3.3Lithography Operations116
  • 3.3.4Implantation117
  • 3.3.5Planarization118
4Statistical Fundamentals122
  • 4.1Probability Distributions123
  • 4.1.1Discrete Distributions (Hypergeometric · Binomial · Poisson · Pascal)124
  • 4.1.2Continuous Distributions (Normal · Exponential)128
  • 4.1.3Useful Approximations (Poisson Approximation to the Binomial · Normal Approximation to the Binomial)132
  • 4.2Sampling from a Normal Distribution133
  • 4.2.1Chi-Square Distribution134
  • 4.2.2t Distribution134
  • 4.2.3F Distribution135
  • 4.3Estimation136
  • 4.3.1Confidence Interval for the Mean with Known Variance137
  • 4.3.2Confidence Interval for the Mean with Unknown Variance137
  • 4.3.3Confidence Interval for Variance137
  • 4.3.4Confidence Interval for the Difference between Two Means, Known Variance138
  • 4.3.5Confidence Interval for the Difference between Two Means, Unknown Variances138
  • 4.3.6Confidence Interval for the Ratio of Two Variances139
  • 4.4Hypothesis Testing140
  • 4.4.1Tests on Means with Known Variance141
  • 4.4.2Tests on Means with Unknown Variance142
  • 4.4.3Tests on Variance143
5Yield Modeling147
  • 5.1Definitions of Yield Components148
  • 5.2Functional Yield Models149
  • 5.2.1Poisson Model151
  • 5.2.2Murphy’s Yield Integral152
  • 5.2.3Negative Binomial Model154
  • 5.3Functional Yield Model Components156
  • 5.3.1Defect Density156
  • 5.3.2Critical Area157
  • 5.3.3Global Yield Loss158
  • 5.4Parametric Yield159
  • 5.5Yield Simulation161
  • 5.5.1Functional Yield Simulation162
  • 5.5.2Parametric Yield Simulation167
  • 5.6Design Centering171
  • 5.6.1Acceptability Regions172
  • 5.6.2Parametric Yield Optimization173
  • 5.7Process Introduction and Time-to-Yield174
6Statistical Process Control181
  • 6.1Control Chart Basics182
  • 6.2Patterns in Control Charts184
  • 6.3Control Charts for Attributes186
  • 6.3.1Control Chart for Fraction Nonconforming (Chart Design · Variable Sample Size · Operating Characteristic and Average Runlength)187
  • 6.3.2Control Chart for Defects193
  • 6.3.3Control Chart for Defect Density193
  • 6.4Control Charts for Variables195
  • 6.4.1Control Charts for x and R (Rational Subgroups · Operating Characteristic and Average Runlength)195
  • 6.4.2Control Charts for x and s202
  • 6.4.3Process Capability204
  • 6.4.4Modified and Acceptance Charts206
  • 6.4.5Cusum Chart (Tabular Cusum Chart · Average Runlength · Cusum for Variance)208
  • 6.4.6Moving-Average Charts (Basic Moving-Average Chart · Exponentially Weighted Moving-Average Chart)212
  • 6.5Multivariate Control215
  • 6.5.1Control of Means217
  • 6.5.2Control of Variability220
  • 6.6SPC with Correlated Process Data221
  • 6.6.1Time-Series Modeling221
  • 6.6.2Model-Based SPC223
7Statistical Experimental Design228
  • 7.1Comparing Distributions229
  • 7.2Analysis of Variance232
  • 7.2.1Sums of Squares232
  • 7.2.2ANOVA Table (Geometric Interpretation · ANOVA Diagnostics)234
  • 7.2.3Randomized Block Experiments (Mathematical Model · Diagnostic Checking)240
  • 7.2.4Two-Way Designs (Analysis · Data Transformation)245
  • 7.3Factorial Designs249
  • 7.3.1Two-Level Factorials (Main Effects · Interaction Effects · Standard Error · Blocking)250
  • 7.3.2Fractional Factorials (Construction of Fractional Factorials · Resolution)256
  • 7.3.3Analyzing Factorials (The Yates Algorithm · Normal Probability Plots)257
  • 7.3.4Advanced Designs260
  • 7.4Taguchi Method262
  • 7.4.1Categorizing Process Variables263
  • 7.4.2Signal-to-Noise Ratio264
  • 7.4.3Orthogonal Arrays264
  • 7.4.4Data Analysis266
8Process Modeling272
  • 8.1Regression Modeling273
  • 8.1.1Single-Parameter Model (Residuals · Standard Error · Analysis of Variance)274
  • 8.1.2Two-Parameter Model (Analysis of Variance · Precision of Estimates · Linear Model with Nonzero Intercept)277
  • 8.1.3Multivariate Models283
  • 8.1.4Nonlinear Regression285
  • 8.1.5Regression Chart287
  • 8.2Response Surface Methods289
  • 8.2.1Hypothetical Yield Example (Diagnostic Checking · Augmented Model)289
  • 8.2.2Plasma Etching Example (Experimental Design · Experimental Technique · Analysis)294
  • 8.3Evolutionary Operation301
  • 8.4Principal-Component Analysis306
  • 8.5Intelligent Modeling Techniques310
  • 8.5.1Neural Networks310
  • 8.5.2Fuzzy Logic314
  • 8.6Process Optimization318
  • 8.6.1Powell’s Algorithm318
  • 8.6.2Simplex Method320
  • 8.6.3Genetic Algorithms323
  • 8.6.4Hybrid Methods325
  • 8.6.5PECVD Optimization: A Case Study326
9Advanced Process Control333
  • 9.1Run-by-Run Control with Constant Term Adaptation335
  • 9.1.1Single-Variable Methods (Gradual Drift · Abrupt Shifts)335
  • 9.1.2Multivariate Techniques (Exponentially Weighted Moving-Average (EWMA) Gradual Model · Predictor–Corrector Control)343
  • 9.1.3Practical Considerations (Input Bounds · Input Resolution · Input Weights · Output Weights)346
  • 9.2Multivariate Control with Complete Model Adaptation351
  • 9.2.1Detection of Process Disturbances via Model-Based SPC (Malfunction Alarms · Alarms for Feedback Control)352
  • 9.2.2Full Model Adaptation354
  • 9.2.3Automated Recipe Generation356
  • 9.2.4Feedforward Control358
  • 9.3Supervisory Control359
  • 9.3.1Supervisory Control Using Complete Model Adaptation (Acceptable Input Ranges of Photolithographic Machines · Experimental Examples)359
  • 9.3.2Intelligent Supervisory Control364
10Process and Equipment Diagnosis379
  • 10.1Algorithmic Methods381
  • 10.1.1Hippocrates (Measurement Plan · Fault Diagnosis · Example)381
  • 10.1.2MERLIN (Knowledge Representation · Inference Mechanism · Case Study)384
  • 10.2Expert Systems391
  • 10.2.1PIES (Knowledge Base · Diagnostic Reasoning · Examples)391
  • 10.2.2PEDX (Architecture · Rule-Based Reasoning · Implementation)395
  • 10.3Neural Network Approaches398
  • 10.3.1Process Control Neural Network398
  • 10.3.2Pattern Recognition in CVD Diagnosis400
  • 10.4Hybrid Methods402
  • 10.4.1Time-Series Diagnosis402
  • 10.4.2Hybrid Expert System (Dempster–Shafer Theory · Maintenance Diagnosis · Online Diagnosis · Inline Diagnosis)403
부록 A~FSome Properties of the Error Function · Cumulative Standard Normal Distribution · Percentage Points of the χ² Distribution · Percentage Points of the t Distribution · Percentage Points of the F Distribution · Factors for Constructing Variables Control Charts417

원본 목차 PDF로 대조 완료 — 10장 44개 절과 114개 소절, 부록 6종, 쪽수 포함(4단계 116개 항목은 괄호로 합쳤다). 웹 출처로 채워 둔 이전 목차의 절·쪽수는 모두 일치했고, 소절 이름만 원문으로 폈다. Ch.2는 May&Sze의 2~9장을 56쪽으로 압축한 복습이라 단위 공정을 처음부터 가르치지는 않는다. Ch.3이 계측을 웨이퍼 상태(§3.2)와 장비 상태(§3.3)로 나누고 Ch.9이 런투런 제어를 다룬다 — 둘 다 다른 교재에 없어 19.7·19.12가 여기에 기댄다.

Semiconductor Material and Device Characterization

19부Dieter K. Schroder · 3rd ed. · Wiley-IEEE, 2006  원본 대조

1Resistivity1
  • 1.1Introduction1
  • 1.2Two-Point Versus Four-Point Probe2
  • 1.2.1Correction Factors8
  • 1.2.2Resistivity of Arbitrarily Shaped Samples14
  • 1.2.3Measurement Circuits18
  • 1.2.4Measurement Errors and Precautions18
  • 1.3Wafer Mapping21
  • 1.3.1Double Implant21
  • 1.3.2Modulated Photoreflectance23
  • 1.3.3Carrier Illumination (CI)24
  • 1.3.4Optical Densitometry25
  • 1.4Resistivity Profiling25
  • 1.4.1Differential Hall Effect (DHE)26
  • 1.4.2Spreading Resistance Profiling (SRP)29
  • 1.5Contactless Methods34
  • 1.5.1Eddy Current34
  • 1.6Conductivity Type38
  • 1.7Strengths and Weaknesses40
  • 부록1.1 Resistivity as a Function of Doping Density41
  • 부록1.2 Intrinsic Carrier Density43
2Carrier and Doping Density61
  • 2.1Introduction61
  • 2.2Capacitance-Voltage (C-V)61
  • 2.2.1Differential Capacitance61
  • 2.2.2Band Offsets68
  • 2.2.3Maximum-Minimum MOS-C Capacitance71
  • 2.2.4Integral Capacitance75
  • 2.2.5Mercury Probe Contacts76
  • 2.2.6Electrochemical C–V Profiler (ECV)77
  • 2.3Current-Voltage (I-V)79
  • 2.3.1MOSFET Substrate Voltage—Gate Voltage79
  • 2.3.2MOSFET Threshold Voltage81
  • 2.3.3Spreading Resistance82
  • 2.4Measurement Errors and Precautions82
  • 2.4.1Debye Length and Voltage Breakdown82
  • 2.4.2Series Resistance83
  • 2.4.3Minority Carriers and Interface Traps89
  • 2.4.4Diode Edge and Stray Capacitance90
  • 2.4.5Excess Leakage Current91
  • 2.4.6Deep Level Dopants/Traps91
  • 2.4.7Semi-Insulating Substrates93
  • 2.4.8Instrumental Limitations94
  • 2.5Hall Effect94
  • 2.6Optical Techniques97
  • 2.6.1Plasma Resonance97
  • 2.6.2Free Carrier Absorption98
  • 2.6.3Infrared Spectroscopy99
  • 2.6.4Photoluminescence (PL)101
  • 2.7Secondary Ion Mass Spectrometry (SIMS)102
  • 2.8Rutherford Backscattering (RBS)103
  • 2.9Lateral Profiling104
  • 2.10Strengths and Weaknesses105
  • 부록2.1 Parallel or Series Connection?107
  • 부록2.2 Circuit Conversion108
3Contact Resistance and Schottky Barriers127
  • 3.1Introduction127
  • 3.2Metal-Semiconductor Contacts128
  • 3.3Contact Resistance131
  • 3.4Measurement Techniques135
  • 3.4.1Two-Contact Two-Terminal Method135
  • 3.4.2Multiple-Contact Two-Terminal Methods138
  • 3.4.3Four-Terminal Contact Resistance Method149
  • 3.4.4Six-Terminal Contact Resistance Method156
  • 3.4.5Non-Planar Contacts156
  • 3.5Schottky Barrier Height157
  • 3.5.1Current-Voltage158
  • 3.5.2Current—Temperature160
  • 3.5.3Capacitance-Voltage161
  • 3.5.4Photocurrent162
  • 3.5.5Ballistic Electron Emission Microscopy (BEEM)163
  • 3.6Comparison of Methods163
  • 3.7Strengths and Weaknesses164
  • 부록3.1 Effect of Parasitic Resistance165
  • 부록3.2 Alloys for Contacts to Semiconductors167
4Series Resistance, Channel Length and Width, and Threshold Voltage185
  • 4.1Introduction185
  • 4.2PN Junction Diodes185
  • 4.2.1Current-Voltage185
  • 4.2.2Open-Circuit Voltage Decay (OCVD)188
  • 4.2.3Capacitance-Voltage (C–V )190
  • 4.3Schottky Barrier Diodes190
  • 4.3.1Series Resistance190
  • 4.4Solar Cells192
  • 4.4.1Series Resistance—Multiple Light Intensities195
  • 4.4.2Series Resistance—Constant Light Intensity196
  • 4.4.3Shunt Resistance197
  • 4.5Bipolar Junction Transistors198
  • 4.5.1Emitter Resistance200
  • 4.5.2Collector Resistance202
  • 4.5.3Base Resistance202
  • 4.6MOSFETS206
  • 4.6.1Series Resistance and Channel Length–Current-Voltage206
  • 4.6.2Channel Length—Capacitance-Voltage216
  • 4.6.3Channel Width218
  • 4.7MESFETS and MODFETS219
  • 4.8Threshold Voltage222
  • 4.8.1Linear Extrapolation223
  • 4.8.2Constant Drain Current225
  • 4.8.3Sub-threshold Drain Current226
  • 4.8.4Transconductance227
  • 4.8.5Transconductance Derivative228
  • 4.8.6Drain Current Ratio228
  • 4.9Pseudo MOSFET230
  • 4.10Strengths and Weaknesses231
  • 부록4.1 Schottky Diode Current-Voltage Equation231
5Defects251
  • 5.1Introduction251
  • 5.2Generation-Recombination Statistics253
  • 5.2.1A Pictorial View253
  • 5.2.2A Mathematical Description255
  • 5.3Capacitance Measurements258
  • 5.3.1Steady-State Measurements259
  • 5.3.2Transient Measurements259
  • 5.4Current Measurements267
  • 5.5Charge Measurements269
  • 5.6Deep-Level Transient Spectroscopy (DLTS)270
  • 5.6.1Conventional DLTS270
  • 5.6.2Interface Trapped Charge DLTS280
  • 5.6.3Optical and Scanning DLTS283
  • 5.6.4Precautions285
  • 5.7Thermally Stimulated Capacitance and Current288
  • 5.8Positron Annihilation Spectroscopy (PAS)289
  • 5.9Strengths and Weaknesses292
  • 부록5.1 Activation Energy and Capture Cross-Section293
  • 부록5.2 Time Constant Extraction294
  • 부록5.3 Si and GaAs Data296
6Oxide and Interface Trapped Charges, Oxide Thickness319
  • 6.1Introduction319
  • 6.2Fixed, Oxide Trapped, and Mobile Oxide Charge321
  • 6.2.1Capacitance-Voltage Curves321
  • 6.2.2Flatband Voltage327
  • 6.2.3Capacitance Measurements331
  • 6.2.4Fixed Charge334
  • 6.2.5Gate-Semiconductor Work Function Difference335
  • 6.2.6Oxide Trapped Charge338
  • 6.2.7Mobile Charge338
  • 6.3Interface Trapped Charge342
  • 6.3.1Low Frequency (Quasi-static) Methods342
  • 6.3.2Conductance347
  • 6.3.3High Frequency Methods350
  • 6.3.4Charge Pumping352
  • 6.3.5MOSFET Sub-threshold Current359
  • 6.3.6DC-IV361
  • 6.3.7Other Methods363
  • 6.4Oxide Thickness364
  • 6.4.1Capacitance-Voltage364
  • 6.4.2Current-Voltage369
  • 6.4.3Other Methods369
  • 6.5Strengths and Weaknesses369
  • 부록6.1 Capacitance Measurement Techniques371
  • 부록6.2 Effect of Chuck Capacitance and Leakage Current372
7Carrier Lifetimes389
  • 7.1Introduction389
  • 7.2Recombination Lifetime/Surface Recombination Velocity390
  • 7.3Generation Lifetime/Surface Generation Velocity394
  • 7.4Recombination Lifetime—Optical Measurements395
  • 7.4.1Photoconductance Decay (PCD)399
  • 7.4.2Quasi-Steady-State Photoconductance (QSSPC)402
  • 7.4.3Short-Circuit Current/Open-Circuit Voltage Decay (SCCD/OCVD)402
  • 7.4.4Photoluminescence Decay (PLD)404
  • 7.4.5Surface Photovoltage (SPV)404
  • 7.4.6Steady-State Short-Circuit Current (SSSCC)411
  • 7.4.7Free Carrier Absorption413
  • 7.4.8Electron Beam Induced Current (EBIC)416
  • 7.5Recombination Lifetime—Electrical Measurements417
  • 7.5.1Diode Current-Voltage417
  • 7.5.2Reverse Recovery (RR)420
  • 7.5.3Open-Circuit Voltage Decay (OCVD)422
  • 7.5.4Pulsed MOS Capacitor424
  • 7.5.5Other Techniques428
  • 7.6Generation Lifetime—Electrical Measurements429
  • 7.6.1Gate-Controlled Diode429
  • 7.6.2Pulsed MOS Capacitor432
  • 7.7Strengths and Weaknesses440
  • 부록7.1 Optical Excitation441
  • 부록7.2 Electrical Excitation448
8Mobility465
  • 8.1Introduction465
  • 8.2Conductivity Mobility465
  • 8.3Hall Effect and Mobility466
  • 8.3.1Basic Equations for Uniform Layers or Wafers466
  • 8.3.2Non-uniform Layers471
  • 8.3.3Multi Layers474
  • 8.3.4Sample Shapes and Measurement Circuits475
  • 8.4Magnetoresistance Mobility479
  • 8.5Time-of-Flight Drift Mobility482
  • 8.6MOSFET Mobility489
  • 8.6.1Effective Mobility489
  • 8.6.2Field-Effect Mobility500
  • 8.6.3Saturation Mobility502
  • 8.7Contactless Mobility502
  • 8.8Strengths and Weaknesses502
  • 부록8.1 Semiconductor Bulk Mobilities503
  • 부록8.2 Semiconductor Surface Mobilities506
  • 부록8.3 Effect of Channel Frequency Response506
  • 부록8.4 Effect of Interface Trapped Charge507
9Charge-based and Probe Characterization523
  • 9.1Introduction523
  • 9.2Background524
  • 9.3Surface Charging525
  • 9.4The Kelvin Probe526
  • 9.5Applications533
  • 9.5.1Surface Photovoltage (SPV)533
  • 9.5.2Carrier Lifetimes534
  • 9.5.3Surface Modification537
  • 9.5.4Near-Surface Doping Density538
  • 9.5.5Oxide Charge538
  • 9.5.6Oxide Thickness and Interface Trap Density540
  • 9.5.7Oxide Leakage Current541
  • 9.6Scanning Probe Microscopy (SPM)542
  • 9.6.1Scanning Tunneling Microscopy (STM)543
  • 9.6.2Atomic Force Microscopy (AFM)544
  • 9.6.3Scanning Capacitance Microscopy (SCM)547
  • 9.6.4Scanning Kelvin Probe Microscopy (SKPM)550
  • 9.6.5Scanning Spreading Resistance Microscopy (SSRM)553
  • 9.6.6Ballistic Electron Emission Microscopy (BEEM)554
  • 9.7Strengths and Weaknesses556
10Optical Characterization563
  • 10.1Introduction563
  • 10.2Optical Microscopy564
  • 10.2.1Resolution, Magnification, Contrast565
  • 10.2.2Dark-Field, Phase, and Interference Contrast Microscopy568
  • 10.2.3Confocal Optical Microscopy570
  • 10.2.4Interferometric Microscopy572
  • 10.2.5Defect Etches575
  • 10.2.6Near-Field Optical Microscopy (NFOM)575
  • 10.3Ellipsometry579
  • 10.3.1Theory579
  • 10.3.2Null Ellipsometry581
  • 10.3.3Rotating Analyzer Ellipsometry582
  • 10.3.4Spectroscopic Ellipsometry (SE)583
  • 10.3.5Applications584
  • 10.4Transmission585
  • 10.4.1Theory585
  • 10.4.2Instrumentation587
  • 10.4.3Applications590
  • 10.5Reflection592
  • 10.5.1Theory592
  • 10.5.2Applications594
  • 10.5.3Internal Reflection Infrared Spectroscopy598
  • 10.6Light Scattering599
  • 10.7Modulation Spectroscopy600
  • 10.8Line Width601
  • 10.8.1Optical-Physical Methods601
  • 10.8.2Electrical Methods603
  • 10.9Photoluminescence (PL)604
  • 10.10Raman Spectroscopy608
  • 10.11Strengths and Weaknesses610
  • 부록10.1 Transmission Equations611
  • 부록10.2 Absorption Coefficients and Refractive Indices for Selected Semiconductors613
11Chemical and Physical Characterization627
  • 11.1Introduction627
  • 11.2Electron Beam Techniques628
  • 11.2.1Scanning Electron Microscopy (SEM)629
  • 11.2.2Auger Electron Spectroscopy (AES)634
  • 11.2.3Electron Microprobe (EMP)639
  • 11.2.4Transmission Electron Microscopy (TEM)645
  • 11.2.5Electron Beam Induced Current (EBIC)649
  • 11.2.6Cathodoluminescence (CL)651
  • 11.2.7Low-Energy, High-Energy Electron Diffraction (LEED)652
  • 11.3Ion Beam Techniques653
  • 11.3.1Secondary Ion Mass Spectrometry (SIMS)654
  • 11.3.2Rutherford Backscattering Spectrometry (RBS)659
  • 11.4X-Ray and Gamma-Ray Techniques665
  • 11.4.1X-Ray Fluorescence (XRF)666
  • 11.4.2X-Ray Photoelectron Spectroscopy (XPS)668
  • 11.4.3X-Ray Topography (XRT)671
  • 11.4.4Neutron Activation Analysis (NAA)674
  • 11.5Strengths and Weaknesses676
  • 부록11.1 Selected Features of Some Analytical Techniques678
12Reliability and Failure Analysis689
  • 12.1Introduction689
  • 12.2Failure Times and Acceleration Factors690
  • 12.2.1Failure Times690
  • 12.2.2Acceleration Factors690
  • 12.3Distribution Functions692
  • 12.4Reliability Concerns695
  • 12.4.1Electromigration (EM)695
  • 12.4.2Hot Carriers701
  • 12.4.3Gate Oxide Integrity (GOI)704
  • 12.4.4Negative Bias Temperature Instability (NBTI)711
  • 12.4.5Stress Induced Leakage Current (SILC)712
  • 12.4.6Electrostatic Discharge (ESD)712
  • 12.5Failure Analysis Characterization Techniques713
  • 12.5.1Quiescent Drain Current (IDDQ)713
  • 12.5.2Mechanical Probes715
  • 12.5.3Emission Microscopy (EMMI)715
  • 12.5.4Fluorescent Microthermography (FMT)718
  • 12.5.5Infrared Thermography (IRT)718
  • 12.5.6Voltage Contrast718
  • 12.5.7Laser Voltage Probe (LVP)719
  • 12.5.8Liquid Crystals (LC)720
  • 12.5.9Optical Beam Induced Resistance Change (OBIRCH)721
  • 12.5.10Focused Ion Beam (FIB)723
  • 12.5.11Noise723
  • 12.6Strengths and Weaknesses726
  • 부록12.1 Gate Currents728
부록 1·2List of Symbols · Abbreviations and Acronyms741

원본 목차 PDF로 대조 완료 — 12장 92개 절과 172개 소절, 장별 부록 22종, 쪽수 포함. 19.5(전기적 특성 평가)의 사실상 전체 출처다 — 4점 탐침 §1.2, C–V 도핑 프로파일 §2.2, 접촉저항 TLM §3.4, 채널 길이·문턱전압 추출 §4.6·§4.8, DLTS §5.6, 전하 펌핑 §6.3.4, 수명 §7.4~§7.6, 이동도 §8.3~§8.6. 19.13(신뢰성)은 Ch.12(EM·핫캐리어·GOI·NBTI·SILC·ESD)가, 19.4(조성 분석)는 Ch.11(SEM·AES·TEM·SIMS·RBS·XPS)이 받는다. 12개 장이 전부 Strengths and Weaknesses 절로 끝나 방법을 고르는 근거를 준다. 각 장의 References·Problems·Review Questions는 쪽수만 있어 옮기지 않았다.

Introduction to Statistical Quality Control

19부Douglas C. Montgomery · 8th ed. · Wiley, 2019  원본 대조

Part 1 — Introduction1

1Quality Improvement in the Modern Business Environment3
  • 1.1The Meaning of Quality and Quality Improvement3
  • 1.2A Brief History of Quality Control and Improvement9
  • 1.3Statistical Methods for Quality Control and Improvement13
  • 1.4Management Aspects of Quality Improvement16
2The DMAIC Process47
  • 2.1Overview of DMAIC47
  • 2.2The Define Step50
  • 2.3The Measure Step52
  • 2.4The Analyze Step53
  • 2.5The Improve Step54
  • 2.6The Control Step55
  • 2.7Examples of DMAIC56

Part 2 — Statistical Methods Useful in Quality Control and Improvement63

3Modeling Process Quality65
  • 3.1Describing Variation65
  • 3.2Important Discrete Distributions79
  • 3.3Important Continuous Distributions85
  • 3.4Probability Plots96
  • 3.5Some Useful Approximations100
4Inferences About Process Quality103
  • 4.1Statistics and Sampling Distributions104
  • 4.2Point Estimation of Process Parameters109
  • 4.3Statistical Inference for a Single Sample111
  • 4.4Statistical Inference for Two Samples128
  • 4.5What if There Are More than Two Populations? The Analysis of Variance143
  • 4.6Linear Regression Models152

Part 3 — Basic Methods of Statistical Process Control and Capability Analysis173

5Methods and Philosophy of Statistical Process Control175
  • 5.1Introduction175
  • 5.2Chance and Assignable Causes of Quality Variation176
  • 5.3Statistical Basis of the Control Chart177
  • 5.4The Rest of the Magnificent Seven195
  • 5.5Implementing SPC in a Quality Improvement Program201
  • 5.6An Application of SPC202
  • 5.7Applications of Statistical Process Control and Quality Improvement Tools in Transactional and Service Businesses208
6Control Charts for Variables218
  • 6.1Introduction218
  • 6.2Control Charts for x and R219
  • 6.3Control Charts for x and s242
  • 6.4The Shewhart Control Chart for Individual Measurements250
  • 6.5Summary of Procedures for x, R, and s Charts260
  • 6.6Applications of Variables Control Charts261
7Control Charts for Attributes265
  • 7.1Introduction265
  • 7.2The Control Chart for Fraction Nonconforming266
  • 7.3Control Charts for Nonconformities (Defects)289
  • 7.4Choice Between Attributes and Variables Control Charts307
  • 7.5Guidelines for Implementing Control Charts311
8Process and Measurement System Capability Analysis317
  • 8.1Introduction317
  • 8.2Process Capability Analysis Using a Histogram or a Probability Plot319
  • 8.3Process Capability Ratios323
  • 8.4Process Capability Analysis Using a Control Chart336
  • 8.5Process Capability Analysis Using Designed Experiments338
  • 8.6Process Capability Analysis with Attribute Data339
  • 8.7Describing Capability for Many Processes340
  • 8.8Gauge and Measurement System Capability Studies341
  • 8.9Setting Specification Limits on Discrete Components360
  • 8.10Estimating the Natural Tolerance Limits of a Process366

Part 4 — Other Statistical Process-Monitoring and Control Techniques369

9Cumulative Sum and Exponentially Weighted Moving Average Control Charts371
  • 9.1The Cumulative Sum Control Chart372
  • 9.2The Exponentially Weighted Moving Average Control Chart390
  • 9.3The Moving Average Control Chart400
10Other Univariate Statistical Process-Monitoring and Control Techniques403
  • 10.1Statistical Process Control for Short Production Runs404
  • 10.2Modified and Acceptance Control Charts407
  • 10.3Control Charts for Multiple-Stream Processes412
  • 10.4SPC with Autocorrelated Process Data415
  • 10.5Adaptive Sampling Procedures431
  • 10.6Economic Design of Control Charts433
  • 10.7Cuscore Charts442
  • 10.8The Changepoint Model for Process Monitoring444
  • 10.9Profile Monitoring445
  • 10.10Control Charts in Health Care Monitoring and Public Health Surveillance449
  • 10.11Overview of Other Procedures450
11Multivariate Process Monitoring and Control458
  • 11.1The Multivariate Quality-Control Problem459
  • 11.2Description of Multivariate Data460
  • 11.3The Hotelling T2 Control Chart462
  • 11.4The Multivariate EWMA Control Chart473
  • 11.5Regression Adjustment476
  • 11.6Control Charts for Monitoring Variability479
  • 11.7Latent Structure Methods482
12Engineering Process Control and SPC488
  • 12.1Process Monitoring and Process Regulation488
  • 12.2Process Control by Feedback Adjustment489
  • 12.3Combining SPC and EPC500

Part 5 — Process Design and Improvement with Designed Experiments505

13Factorial and Fractional Factorial Experiments for Process Design and Improvement507
  • 13.1What Is Experimental Design?507
  • 13.2Examples of Designed Experiments in Process and Product Improvement509
  • 13.3Guidelines for Designing Experiments512
  • 13.4Factorial Experiments514
  • 13.5The 2k Factorial Design523
  • 13.6Fractional Replication of the 2k Design551
14Process Optimization with Designed Experiments563
  • 14.1Response Surface Methods and Designs563
  • 14.2Process Robustness Studies572
  • 14.3Evolutionary Operation583

Part 6 — Acceptance Sampling589

15Lot-by-Lot Acceptance Sampling for Attributes591
  • 15.1The Acceptance-Sampling Problem591
  • 15.2Single-Sampling Plans for Attributes596
  • 15.3Double, Multiple, and Sequential Sampling606
  • 15.4Military Standard 105E (ANSI/ASQC Z1.4, ISO 2859)615
  • 15.5The Dodge–Romig Sampling Plans623
16Other Acceptance-Sampling Techniques627
  • 16.1Acceptance Sampling by Variables627
  • 16.2Designing a Variables-Sampling Plan with a Specified OC Curve630
  • 16.3MIL STD 414 (ANSI/ASQC Z1.9)631
  • 16.4Other Variables Sampling Procedures635
  • 16.5Chain Sampling636
  • 16.6Continuous Sampling638
  • 16.7Skip-Lot Sampling Plans641
부록Exercises (E-1) · Appendix (A-1) · Bibliography (B-1) · Index (I-1) — 연습문제와 참고문헌은 e-text 제공A-1

원본 목차 PDF로 대조 완료 — 6부 16장 95개 절, 쪽수 포함. 19.10(통계적 공정 관리)의 확장 출처다 — May&Spanos가 Ch.6 한 장 34쪽으로 끝내는 내용을 Ch.5~12(관리도 철학 · 변량형 · 계수형 · 공정능력 · CUSUM/EWMA · 다변량 · EPC)가 300쪽으로 편다. 19.8(통계 기초)은 Ch.3·4, 19.11(실험 계획)은 Ch.13·14가 대응한다. Ch.15·16의 합격 판정 샘플링에는 백과에 대응하는 장이 없다 — 넣는다면 19.10 아래다. 8판은 연습문제와 참고문헌을 인쇄본에서 빼고 e-text로만 준다(목차의 E-1·B-1).

Principles of Instrumental Analysis

19부Skoog · Holler · Crouch · 7th ed. · Cengage, 2017  원본 대조

1Introduction1
  • 1AClassification of Analytical Methods1
  • 1BTypes of Instrumental Methods2
  • 1CInstruments for Analysis3
  • 1DCalibration of Instrumental Methods9
  • 1ESelecting an Analytical Method16

Section 1 — Measurement Basics23

2Electrical Components and Circuits24
  • 2ADirect-Current Circuits and Measurements24
  • 2BAlternating Current Circuits30
  • 2CSemiconductors and Semiconductor Devices39
  • 2DPower Supplies and Regulators43
  • 2EReadout Devices45
3Operational Amplifiers in Chemical Instrumentation52
  • 3AProperties of Operational Amplifiers52
  • 3BOperational Amplifier Circuits54
  • 3CAmplification and Measurement of Transducer Signals58
  • 3DApplication of Operational Amplifiers to Voltage and Current Control62
  • 3EApplication of Operational Amplifiers to Mathematical Operations63
  • 3FApplications of Operational Amplifiers to Comparison65
4Digital Electronics and Computers71
  • 4AAnalog and Digital Signals72
  • 4BCounting and Arithmetic with Binary Numbers72
  • 4CBasic Digital Circuits74
  • 4DComputers and Computerized Instruments80
  • 4EComponents of a Computer82
  • 4FComputer Software84
  • 4GApplications of Computers91
  • 4HComputer Networks92
5Signals and Noise98
  • 5AThe Signal-to-Noise Ratio98
  • 5BSources of Noise in Instrumental Analyses99
  • 5CSignal-to-Noise Enhancement101

Instrumental Analysis in Action — The Electronic Analytical Laboratory113

Section 2 — Atomic Spectroscopy119

6An Introduction to Spectrometric Methods120
  • 6AGeneral Properties of Electromagnetic Radiation120
  • 6BWave Properties of Electromagnetic Radiation121
  • 6CQuantum-Mechanical Properties of Radiation130
  • 6DQuantitative Aspects of Spectrochemical Measurements141
7Components of Optical Instruments148
  • 7AGeneral Designs of Optical Instruments148
  • 7BSources of Radiation150
  • 7CWavelength Selectors160
  • 7DSample Containers174
  • 7ERadiation Transducers174
  • 7FSignal Processors and Readouts184
  • 7GFiber Optics185
  • 7HTypes of Optical Instruments185
  • 7IPrinciples of Fourier Transform Optical Measurements186
8An Introduction to Optical Atomic Spectrometry196
  • 8AOptical Atomic Spectra196
  • 8BAtomization Methods203
  • 8CSample-Introduction Methods204
9Atomic Absorption and Atomic Fluorescence Spectrometry210
  • 9ASample Atomization Techniques210
  • 9BAtomic Absorption Instrumentation216
  • 9CInterferences in Atomic Absorption Spectroscopy220
  • 9DAtomic Absorption Analytical Techniques225
  • 9EAtomic Fluorescence Spectroscopy226
10Atomic Emission Spectrometry231
  • 10AEmission Spectroscopy Based on Plasma Sources232
  • 10BEmission Spectroscopy Based on Arc and Spark Sources246
  • 10COther Sources for Optical Emission Spectroscopy247
11Atomic Mass Spectrometry253
  • 11ASome General Features of Atomic Mass Spectrometry253
  • 11BMass Spectrometers255
  • 11CInductively Coupled Plasma Mass Spectrometry263
  • 11DSpark Source Mass Spectrometry270
  • 11EGlow-Discharge Mass Spectrometry271
  • 11FOther Mass Spectrometric Methods271
12Atomic X-ray Spectrometry274
  • 12AFundamental Principles274
  • 12BInstrument Components280
  • 12CX-ray Fluorescence Methods287
  • 12DX-ray Absorption Methods294
  • 12EThe Electron Microprobe297

Instrumental Analysis in Action — Monitoring Mercury301

Section 3 — Molecular Spectroscopy303

13An Introduction to Ultraviolet-Visible Molecular Absorption Spectrometry304
  • 13AMeasurement of Transmittance and Absorbance304
  • 13BBeer’s Law305
  • 13CThe Effects of Instrumental Noise on Spectrophotometric Analyses310
  • 13DInstrumentation315
14Applications of Ultraviolet-Visible Molecular Absorption Spectrometry331
  • 14AThe Magnitude of Molar Absorptivities331
  • 14BAbsorbing Species331
  • 14CQualitative Applications of Ultraviolet Visible Absorption Spectroscopy335
  • 14DQuantitative Analysis by Absorption Measurements337
  • 14EPhotometric and Spectrophotometric Titrations342
  • 14FSpectrophotometric Kinetic Methods344
  • 14GSpectrophotometric Studies of Complex Ions347
15Molecular Luminescence Spectrometry361
  • 15ATheory of Fluorescence and Phosphorescence362
  • 15BFluorescence and Phosphorescene Instrumentation372
  • 15CApplications of Photoluminescence Methods378
  • 15DChemiluminescence382
16An Introduction to Infrared Spectrometry389
  • 16ATheory of IR Absorption Spectrometry390
  • 16BIR Instrumentation396
  • 16CIR Sources and Transducers406
17Applications of Infrared Spectrometry412
  • 17AMid-IR Absorption Spectrometry412
  • 17BMid-IR Reflection Spectrometry425
  • 17CPhotoacoustic IR Spectroscopy428
  • 17DNear-IR Spectroscopy429
  • 17EFar-IR Spectroscopy431
  • 17FIR Emission Spectroscopy431
  • 17GIR Microscopy and Imaging432
18Raman Spectroscopy437
  • 18ATheory of Raman Spectroscopy437
  • 18BInstrumentation442
  • 18CApplications of Raman Spectroscopy447
  • 18DOther Types of Raman Spectroscopy449
19Nuclear Magnetic Resonance Spectroscopy453
  • 19ATheory of NMR454
  • 19BEnvironmental Effects on NMR Spectra465
  • 19CNMR Spectrometers474
  • 19DApplications of Proton NMR478
  • 19ECarbon-13 NMR481
  • 19FApplication of NMR to Other Nuclei485
  • 19GMultiple Pulse and Multidimensional NMR486
  • 19HMagnetic Resonance Imaging488
20Molecular Mass Spectrometry501
  • 20AMolecular Mass Spectra502
  • 20BIon Sources502
  • 20CMass Spectrometers514
  • 20DApplications of Molecular Mass Spectrometry527
  • 20EQuantitative Applications of Mass Spectrometry532
21Surface Characterization by Spectroscopy and Microscopy537
  • 21AIntroduction to the Study of Surfaces537
  • 21BSpectroscopic Surface Methods538
  • 21CElectron Spectroscopy539
  • 21DIon Spectroscopic Techniques549
  • 21ESurface Photon Spectroscopic Methods550
  • 21FElectron-Stimulated Microanalysis Methods552
  • 21GScanning Probe Microscopes558

Instrumental Analysis in Action — Assessing the Authenticity of the Vinland Map: Surface Analysis in the Service of History, Art, and Forensics568

Section 4 — Electroanalytical Chemistry571

22An Introduction to Electroanalytical Chemistry572
  • 22AElectrochemical Cells572
  • 22BPotentials in Electroanalytical Cells577
  • 22CElectrode Potentials579
  • 22DCalculation of Cell Potentials from Electrode Potentials587
  • 22ECurrents in Electrochemical Cells589
  • 22FTypes of Electroanalytical Methods593
23Potentiometry601
  • 23AGeneral Principles601
  • 23BReference Electrodes602
  • 23CMetallic Indicator Electrodes604
  • 23DMembrane Indicator Electrodes606
  • 23EIon-Selective Field-Effect Transistors616
  • 23FMolecular-Selective Electrode Systems617
  • 23GInstruments for Measuring Cell Potentials623
  • 23HDirect Potentiometric Measurements625
  • 23IPotentiometric Titrations630
24Coulometry636
  • 24ACurrent-Voltage Relationships during an Electrolysis636
  • 24BAn Introduction to Coulometric Methods of Analysis640
  • 24CControlled-Potential Coulometry641
  • 24DCoulometric Titrations644
25Voltammetry653
  • 25AExcitation Signals in Voltammetry654
  • 25BVoltammetric Instrumentation655
  • 25CHydrodynamic Voltammetry660
  • 25DCyclic Voltammetry672
  • 25EPulse Voltammetry676
  • 25FHigh-Frequency and High-Speed Voltammetry678
  • 25GApplications of Voltammetry680
  • 25HStripping Methods681
  • 25IVoltammetry with Microelectrodes684

Instrumental Analysis in Action — Measuring the Parts to Understand the Whole: The Microphysiometer690

Section 5 — Separation Methods695

26An Introduction to Chromatographic Separations696
  • 26AGeneral Description of Chromatography696
  • 26BMigration Rates of Solutes699
  • 26CBand Broadening and Column Efficiency702
  • 26DOptimization of Column Performance708
  • 26ESummary of Chromatographic Relationships713
  • 26FApplications of Chromatography713
27Gas Chromatography720
  • 27APrinciples of GLC720
  • 27BInstruments for GLC721
  • 27CGas Chromatographic Columns and Stationary Phases731
  • 27DApplications of GC736
  • 27EAdvances in GC737
  • 27FGas-Solid Chromatography740
28High-Performance Liquid Chromatography746
  • 28AScope of HPLC747
  • 28BColumn Efficiency in LC747
  • 28CInstrumentation749
  • 28DPartition Chromatography757
  • 28EAdsorption Chromatography766
  • 28FIon Chromatography766
  • 28GSize-Exclusion Chromatography771
  • 28HAffinity Chromatography774
  • 28IThin-Layer Chromatography775
29Supercritical Fluid Chromatography and Extraction782
  • 29AProperties of Supercritical Fluids782
  • 29BSupercritical Fluid Chromatography783
  • 29CSupercritical Fluid Extraction789
30Capillary Electrophoresis, Electrochromatography, and Field-Flow Fractionation793
  • 30AAn Overview of Electrophoresis793
  • 30BCapillary Electrophoresis794
  • 30CApplications of CE800
  • 30DPacked Column Electrochromatography808
  • 30EField-Flow Fractionation808

Instrumental Analysis in Action — The Bisphenol A Controversy815

Section 6 — Miscellaneous Methods819

31Thermal Methods820
  • 31AThermogravimetric Analysis820
  • 31BDifferential Thermal Analysis824
  • 31CDifferential Scanning Calorimetry825
  • 31DMicrothermal Analysis829
32Radiochemical Methods834
  • 32ARadioactive Nuclides834
  • 32BInstrumentation840
  • 32CNeutron Activation Methods842
  • 32DIsotope Dilution Methods847
33Automated Methods of Analysis852
  • 33AOverview852
  • 33BFlow Injection Analysis854
  • 33CMicrofluidics862
  • 33DDiscrete Automatic Systems864
34Particle Size Determination871
  • 34AIntroduction to Particle Size Analysis871
  • 34BLow-Angle Laser Light Scattering872
  • 34CDynamic Light Scattering876
  • 34DPhotosedimentation878

Instrumental Analysis in Action — The John F. Kennedy Assassinaton883

부록 1Evaluation of Analytical Data887
  • a1APrecision and Accuracy887
  • a1BStatistical Treatment of Random Errors890
  • a1CHypothesis Testing901
  • a1DMethod of Least Squares903
부록 2Activity Coefficients910
  • a2AProperties of Activity Coefficients910
  • a2BExperimental Evaluation of Activity Coefficients911
  • a2CThe Debye-Hückel Equation911
부록 3Some Standard and Formal Electrode Potentials913
부록 4Compounds Recommended for the Preparation of Standard Solutions of Some Common Elements917

원본 목차 PDF로 대조 완료 — 6부 34장 191개 절, 부록 4종, 쪽수 포함. 절 번호가 장 번호 + 대문자(1A · 21C) 방식이라 인용할 때 “Skoog §21C”처럼 적는다. 19.4(조성 분석)의 출처는 Ch.21 Surface Characterization(전자분광 §21C · 이온분광 §21D · SPM §21G)이 핵심이고, Ch.11(ICP-MS·글로우방전), Ch.12(XRF·XPS·전자 마이크로프로브), Ch.18(라만), Ch.20(분자 질량분석)이 붙는다. Ch.2~5(회로 · 연산증폭기 · 디지털 전자 · 신호와 잡음)는 계측기 자체의 전자 회로를 다루는 드문 장이라 19.1·19.7의 배경이 된다. 다만 이 책은 분석화학 교재라 반도체 사례가 없다 — 원리만 가져오고 응용은 Schroder로 갈아탈 것.

20부 · TCAD 시뮬레이션

Analysis and Simulation of Semiconductor Devices

20부Siegfried Selberherr · Springer, 1984  원본 대조

1Introduction1
  • 1.1The Goal of Modeling1
  • 1.2The History of Numerical Device Modeling2
  • 1.3References4
2Some Fundamental Properties8
  • 2.1Poisson's Equation8
  • 2.2Continuity Equations10
  • 2.3Carrier Transport Equations11
  • 2.4Carrier Concentrations23
  • 2.5Heat Flow Equation40
  • 2.6The Basic Semiconductor Equations41
  • 2.7References42
3Process Modeling46
  • 3.1Ion Implantation46
  • 3.2Diffusion63
  • 3.3Oxidation72
  • 3.4References76
4The Physical Parameters80
  • 4.1Carrier Mobility Modeling80
  • 4.2Carrier Generation-Recombination Modeling103
  • 4.3Thermal Conductivity Modeling118
  • 4.4Thermal Generation Modeling120
  • 4.5References121
5Analytical Investigations About the Basic Semiconductor Equations127
  • 5.1Domain and Boundary Conditions128
  • 5.2Dependent Variables134
  • 5.3The Existence of Solutions140
  • 5.4Uniqueness or Non-Uniqueness of Solutions141
  • 5.5Scaling141
  • 5.6The Singular Perturbation Approach144
  • 5.7References147
6The Discretization of the Basic Semiconductor Equations149
  • 6.1Finite Differences150
  • 6.2Finite Boxes175
  • 6.3Finite Elements181
  • 6.4The Transient Problem191
  • 6.5Designing a Mesh197
  • 6.6References199
7The Solution of Systems of Nonlinear Algebraic Equations202
  • 7.1Newton's Method and Extensions203
  • 7.2Iterative Methods208
  • 7.3References212
8The Solution of Sparse Systems of Linear Equations214
  • 8.1Direct Methods214
  • 8.2Ordering Methods216
  • 8.3Relaxation Methods239
  • 8.4Alternating Direction Methods245
  • 8.5Strongly Implicit Methods246
  • 8.6Convergence Acceleration of Iterative Methods249
  • 8.7References254
9A Glimpse on Results258
  • 9.1Breakdown Phenomena in MOSFET's258
  • 9.2The Rate Effect in Thyristors270
  • 9.3References284

소자 시뮬레이션의 수치 해석적 토대 — 20.3 수치 해석 기반20.4 메싱의 근거다. 6.2 Finite Boxes가 박스 적분법, 7장이 Newton 반복, 8장이 희소 선형계 풀이·수렴 가속이다. 1984년 책이라 물리 모델(4장)은 낡았지만 이산화와 수렴 이론은 그대로 통용된다 — 최신 모델은 논문으로 보완한다.

V

회로와 산업

Computational Electronics: Semiclassical and Quantum Device Modeling and Simulation

20부Dragica Vasileska · Stephen M. Goodnick · Gerald Klimeck · CRC Press, 2010 · ISBN 978-1-4200-6483-9  원본 대조

1Introduction to Computational Electronics1
  • 1.1Si-Based Nanoelectronics1
  • 1.2Heterostructure Devices in III–V or II–VI Technology11
  • 1.3Modeling of Nanoscale Devices15
  • 1.4The Content of This Book18
2Introductory Concepts23
  • 2.1Crystal Structure23
  • 2.2Semiconductors32
  • 2.3Band Structure36
  • 2.4Preparation of Semiconductor Materials40
  • 2.5Effective Mass45
  • 2.6Density of States54
  • 2.7Electron Mobility57
  • 2.8Semiconductor Statistics59
  • 2.9Semiconductor Devices60
3Semiclassical Transport Theory95
  • 3.1Approximations for the Distribution Function96
  • 3.2Boltzmann Transport Equation98
  • 3.3Relaxation-Time Approximation102
  • 3.4Rode's Iterative Method108
  • 3.5Scattering Mechanisms: Brief Description111
  • 3.6Implementation of the Rode Method for 6H-SiC Mobility Calculation125
4The Drift-Diffusion Equations and Their Numerical Solution151
  • 4.1Drift-Diffusion Model Derivation151
  • 4.2Drift-Diffusion Application Examples168
5Hydrodynamic Modeling193
  • 5.1Introduction193
  • 5.2Extensions of the Drift-Diffusion Model196
  • 5.3Stratton's Approach199
  • 5.4Hydrodynamic (Balance, Bløtekjær) Equations Model200
  • 5.5The Need for Commercial Semiconductor Device Modeling Tools219
  • 5.6State-of-the-Art Commercial Packages222
  • 5.7The Advantages and Disadvantages of Hydrodynamic Models: Simulations of Different Generation FD SOI Devices227
6Particle-Based Device Simulation Methods241
  • 6.1Direct Solution of Boltzmann Transport Equation: Monte Carlo Method242
  • 6.2Multi-Carrier Effects286
  • 6.3Device Simulations292
  • 6.4Coulomb Force Treatment within a Particle-Based Device Simulation Scheme306
  • 6.5Representative Simulation Results of Multiparticle and Discrete Impurity Effects318
7Modeling Thermal Effects in Nano-Devices335
  • 7.1Some General Aspects of Heat Conduction337
  • 7.2Classical Heat Conduction in Solids342
  • 7.3Form of the Heat Source Term343
  • 7.4Modeling Heating Effects with Commercial Simulation Packages345
  • 7.5The ASU Particle-Based Approach to Lattice Heating in Nanoscale Devices349
  • 7.6Open Problems363
8Quantum Corrections to Semiclassical Approaches367
  • 8.1One-Dimensional Quantum-Mechanical Space Quantization369
  • 8.2Quantum Corrections to Drift-Diffusion and Hydrodynamic Simulators383
  • 8.3The Effective Potential Approach in Conjunction with Particle-Based Simulations387
  • 8.4Description of Gate Current Models Used in Device Simulations394
  • 8.5Monte Carlo—k·p—1D Schrödinger Solver for Modeling Transport in p-Channel Strained SiGe Devices405
9Quantum Transport in Semiconductor Systems445
  • 9.1Tunneling446
  • 9.2General Notation448
  • 9.3Transfer Matrix Approach461
  • 9.4Landauer Formula and Usuki Method471
10Far-From-Equilibrium Quantum Transport493
  • 10.1Mixed States and Distribution Function493
  • 10.2Irreversible Processes and MASTER Equations495
  • 10.3The Wigner Distribution Function496
  • 10.4Green's Functions498
  • 10.5Nonequilibrium Keldysh Green's Functions506
  • 10.6Low Field Transport in Strained-Si Inversion Layers513
  • 10.7NEGF in a Quasi-1D Formulation526
  • 10.8Quantum Transport in 1D—Resonant Tunneling Diodes534
  • 10.9Coherent High-Field Transport in 2D and 3D568
11Conclusions599

Appendices605

부록 AElectronic Band Structure Calculation605
부록 BPoisson Equation Solvers633
부록 CComputational Electromagnetics673
부록 DStationary and Time-Dependent Perturbation Theory717

Index747

인쇄 목차를 절·쪽수까지 옮겼다(11개 장 + 부록 4종). 소절(x.y.z)과 장 끝의 Problems·References는 싣지 않았다. 목차 PDF의 글리프 흔적을 바로잡았다 — “k /C1p”는 k·p, “Distributi on/Introducti on/Irreversibl e”는 자간이 벌어진 것이다. 20부의 이론 근거가 Selberherr(1984) 한 권이던 자리를 받는다 — 1984년 책에는 없는 유체역학 모델(5장)·입자 기반 몬테카를로(6장)·양자 보정(8장)·NEGF 양자 수송(9·10장)이 여기 있다. 20.3(수치 해석 기반)은 4장과 부록 B(푸아송 해법), 20.6(소자 시뮬레이션)은 4~6장, 자기발열은 7장이 근거다. 8~10장(양자 보정 · NEGF · 밀도범함수)은 받을 장이 없어 20.7 양자 수송 시뮬레이션을 새로 열었다 — 그 장의 8개 절이 여기서 나온다. 5.6 State-of-the-Art Commercial Packages가 20.1(상용 툴 비교)의 유일한 서적 근거이고, 3장(볼츠만 수송·완화시간 근사)은 7.12와도 닿는다. 같은 저자들의 Computational Electronics(Morgan & Claypool, 2006)는 이 책의 축약 강의노트판이라 따로 싣지 않았다.

21부 · 디지털 논리 회로

Digital Design: With an Introduction to the Verilog HDL, VHDL, and SystemVerilog

21부M. Morris Mano · Michael D. Ciletti · 6th ed. · Pearson, 2018  원본 대조

1Digital Systems and Binary Numbers1
  • 1.1Digital Systems1
  • 1.2Binary Numbers4
  • 1.3Number-Base Conversions6
  • 1.4Octal and Hexadecimal Numbers9
  • 1.5Complements of Numbers11
  • 1.6Signed Binary Numbers17
  • 1.7Binary Codes22
  • 1.8Binary Storage and Registers31
  • 1.9Binary Logic34
2Boolean Algebra and Logic Gates41
  • 2.1Introduction42
  • 2.2Basic Definitions42
  • 2.3Axiomatic Definition of Boolean Algebra43
  • 2.4Basic Theorems and Properties of Boolean Algebra47
  • 2.5Boolean Functions50
  • 2.6Canonical and Standard Forms56
  • 2.7Other Logic Operations65
  • 2.8Digital Logic Gates67
  • 2.9Integrated Circuits73
3Gate-Level Minimization82
  • 3.1Introduction83
  • 3.2The Map Method83
  • 3.3Four-Variable K-Map90
  • 3.4Product-of-Sums Simplification95
  • 3.5Don’t-Care Conditions99
  • 3.6NAND and NOR Implementation102
  • 3.7Other Two-Level Implementations110
  • 3.8Exclusive-OR Function115
  • 3.9Hardware Description Languages (HDLs)121
  • 3.10Truth Tables in HDLs138
4Combinational Logic147
  • 4.1Introduction148
  • 4.2Combinational Circuits148
  • 4.3Analysis of Combinational Circuits149
  • 4.4Design Procedure153
  • 4.5Binary Adder–Subtractor156
  • 4.6Decimal Adder168
  • 4.7Binary Multiplier170
  • 4.8Magnitude Comparator172
  • 4.9Decoders175
  • 4.10Encoders179
  • 4.11Multiplexers182
  • 4.12HDL Models of Combinational Circuits189
  • 4.13Behavioral Modeling215
  • 4.14Writing a Simple Testbench223
  • 4.15Logic Simulation229
5Synchronous Sequential Logic245
  • 5.1Introduction246
  • 5.2Sequential Circuits246
  • 5.3Storage Elements: Latches248
  • 5.4Storage Elements: Flip-Flops253
  • 5.5Analysis of Clocked Sequential Circuits261
  • 5.6Synthesizable HDL Models of Sequential Circuits275
  • 5.7State Reduction and Assignment300
  • 5.8Design Procedure305
6Registers and Counters326
  • 6.1Registers326
  • 6.2Shift Registers330
  • 6.3Ripple Counters338
  • 6.4Synchronous Counters343
  • 6.5Other Counters351
  • 6.6HDL Models of Registers and Counters356
7Memory and Programmable Logic377
  • 7.1Introduction378
  • 7.2Random-Access Memory379
  • 7.3Memory Decoding386
  • 7.4Error Detection and Correction391
  • 7.5Read-Only Memory394
  • 7.6Programmable Logic Array400
  • 7.7Programmable Array Logic404
  • 7.8Sequential Programmable Devices408
8Design at the Register Transfer Level429
  • 8.1Introduction430
  • 8.2Register Transfer Level (RTL) Notation430
  • 8.3RTL Descriptions432
  • 8.4Algorithmic State Machines (ASMs)450
  • 8.5Design Example (ASMD Chart)459
  • 8.6HDL Description of Design Example469
  • 8.7Sequential Binary Multiplier487
  • 8.8Control Logic492
  • 8.9HDL Description of Binary Multiplier498
  • 8.10Design with Multiplexers513
  • 8.11Race-Free Design (Software Race Conditions)529
  • 8.12Latch-Free Design (Why Waste Silicon?)532
  • 8.13SystemVerilog—An Introduction533
9Laboratory Experiments with Standard ICs and FPGAs555
  • 9.1Introduction to Experiments555
  • 9.2Experiment 1: Binary and Decimal Numbers560
  • 9.3Experiment 2: Digital Logic Gates563
  • 9.4Experiment 3: Simplification of Boolean Functions565
  • 9.5Experiment 4: Combinational Circuits567
  • 9.6Experiment 5: Code Converters568
  • 9.7Experiment 6: Design with Multiplexers570
  • 9.8Experiment 7: Adders and Subtractors572
  • 9.9Experiment 8: Flip-Flops575
  • 9.10Experiment 9: Sequential Circuits577
  • 9.11Experiment 10: Counters579
  • 9.12Experiment 11: Shift Registers580
  • 9.13Experiment 12: Serial Addition584
  • 9.14Experiment 13: Memory Unit585
  • 9.15Experiment 14: Lamp Handball587
  • 9.16Experiment 15: Clock-Pulse Generator591
  • 9.17Experiment 16: Parallel Adder and Accumulator593
  • 9.18Experiment 17: Binary Multiplier595
  • 9.19HDL Simulation Experiments and Rapid Prototyping with FPGAs599
10Standard Graphic Symbols605
  • 10.1Rectangular-Shape Symbols605
  • 10.2Qualifying Symbols608
  • 10.3Dependency Notation610
  • 10.4Symbols for Combinational Elements612
  • 10.5Symbols for Flip-Flops614
  • 10.6Symbols for Registers616
  • 10.7Symbols for Counters619
  • 10.8Symbol for RAM621

21.1~21.3(수의 표현과 부울 대수 · 조합 논리 · 순차 논리)과 21.4 레지스터 전송 수준 설계와 HDL의 기준 교재. 절 번호가 장 안에서 1부터 붙는다. 9장은 실험 과제, 10장은 IEEE 표준 기호라 백과 본문에서는 거의 쓰지 않는다. 3.9~3.10과 4.12~4.15가 HDL 도입부이고, 8.13에서 SystemVerilog가 처음 나온다. 원본 목차의 장 끝 Summary·Problems·References 항목은 번호가 없어 싣지 않았다.

Digital Integrated Circuits: A Design Perspective

21부Rabaey · Chandrakasan · Nikolić · 2nd ed. · Prentice Hall, 2003  절 수준 확보

Part I — The Foundations

1Introduction
  • 1.1A Historical Perspective
  • 1.2Issues in Digital Integrated Circuit Design
  • 1.3Quality Metrics of a Digital Design
  • 1.3.1Cost of an Integrated Circuit
  • 1.3.2Functionality and Robustness
  • 1.3.3Performance
  • 1.3.4Power and Energy Consumption
  • 1.4Summary
  • 1.5To Probe Further
2The Manufacturing Process
  • 2.1Introduction
  • 2.2Manufacturing CMOS Integrated Circuits
  • 2.2.1The Silicon Wafer
  • 2.2.2Photolithography
  • 2.2.3Some Recurring Process Steps
  • 2.2.4Simplified CMOS Process Flow
  • 2.3Design Rules — The Contract between Designer and Process Engineer
  • 2.4Packaging Integrated Circuits
  • 2.4.1Package Materials
  • 2.4.2Interconnect Levels
  • 2.4.3Thermal Considerations in Packaging
  • 2.5Perspective — Trends in Process Technology
  • 2.5.1Short-Term Developments
  • 2.5.2In the Longer Term
  • 2.6Summary
  • 2.7To Probe Further
부록 AIC Layout
3The Devices
  • 3.1Introduction
  • 3.2The Diode
  • 3.2.1A First Glance at the Diode — The Depletion Region
  • 3.2.2Static Behavior
  • 3.2.3Dynamic, or Transient, Behavior
  • 3.2.4The Actual Diode—Secondary Effects
  • 3.2.5The SPICE Diode Model
  • 3.3The MOS(FET) Transistor
  • 3.3.1A First Glance at the Device
  • 3.3.2The MOS Transistor under Static Conditions
  • 3.3.3Dynamic Behavior
  • 3.3.4The Actual MOS Transistor—Some Secondary Effects
  • 3.3.5SPICE Models for the MOS Transistor
  • 3.4A Word on Process Variations
  • 3.5Perspective: Technology Scaling
  • 3.6Summary
  • 3.7To Probe Further
부록 BCircuit Simulation
4The Wire
  • 4.1Introduction
  • 4.2A First Glance
  • 4.3Interconnect Parameters — Capacitance, Resistance, and Inductance
  • 4.3.1Capacitance
  • 4.3.2Resistance
  • 4.3.3Inductance
  • 4.4Electrical Wire Models
  • 4.4.1The Ideal Wire
  • 4.4.2The Lumped Model
  • 4.4.3The Lumped RC model
  • 4.4.4The Distributed rc Line
  • 4.4.5The Transmission Line
  • 4.5SPICE Wire Models
  • 4.5.1Distributed rc Lines in SPICE
  • 4.5.2Transmission Line Models in SPICE
  • 4.6Perspective: A Look into the Future
  • 4.7Summary
  • 4.8To Probe Further

Part II — A Circuit Perspective

5The CMOS Inverter
  • 5.1Introduction
  • 5.2The Static CMOS Inverter — An Intuitive Perspective
  • 5.3Evaluating the Robustness of the CMOS Inverter: The Static Behavior
  • 5.3.1Switching Threshold
  • 5.3.2Noise Margins
  • 5.3.3Robustness Revisited
  • 5.4Performance of CMOS Inverter: The Dynamic Behavior
  • 5.4.1Computing the Capacitances
  • 5.4.2Propagation Delay: First-Order Analysis
  • 5.4.3Propagation Delay from a Design Perspective
  • 5.5Power, Energy, and Energy-Delay
  • 5.5.1Dynamic Power Consumption
  • 5.5.2Static Consumption
  • 5.5.3Putting It All Together
  • 5.5.4Analyzing Power Consumption Using SPICE
  • 5.6Perspective: Technology Scaling and its Impact on the Inverter Metrics
  • 5.7Summary
  • 5.8To Probe Further
6Designing Combinational Logic Gates in CMOS
  • 6.1Introduction
  • 6.2Static CMOS Design
  • 6.2.1Complementary CMOS
  • 6.2.2Ratioed Logic
  • 6.2.3Pass-Transistor Logic
  • 6.3Dynamic CMOS Design
  • 6.3.1Dynamic Logic: Basic Principles
  • 6.3.2Speed and Power Dissipation of Dynamic Logic
  • 6.3.3Issues in Dynamic Design
  • 6.3.4Cascading Dynamic Gates
  • 6.4Perspectives
  • 6.4.1How to Choose a Logic Style?
  • 6.4.2Designing Logic for Reduced Supply Voltages
  • 6.5Summary
  • 6.6To Probe Further
부록 CHow to Simulate Complex Logic Gates
  • C.1Representing Digital Data as a Continuous Entity
  • C.2Representing Data as a Discrete Entity
  • C.3Using Higher-Level Data Models
  • C.4To Probe Further
부록 DLayout Techniques for Complex Gates
7Designing Sequential Logic Circuits
  • 7.1Introduction
  • 7.1.1Timing Metrics for Sequential Circuits
  • 7.1.2Classification of Memory Elements
  • 7.2Static Latches and Registers
  • 7.2.1The Bistability Principle
  • 7.2.2Multiplexer-Based Latches
  • 7.2.3Master-Slave Edge-Triggered Register
  • 7.2.4Low-Voltage Static Latches
  • 7.2.5Static SR Flip-Flops—Writing Data by Pure Force
  • 7.3Dynamic Latches and Registers
  • 7.3.1Dynamic Transmission-Gate Edge-triggered Registers
  • 7.3.2C2MOS—A Clock-Skew Insensitive Approach
  • 7.3.3True Single-Phase Clocked Register (TSPCR)
  • 7.4Alternative Register Styles*
  • 7.4.1Pulse Registers
  • 7.4.2Sense-Amplifier Based Registers
  • 7.5Pipelining: An approach to optimize sequential circuits
  • 7.5.1Latch- vs. Register-Based Pipelines
  • 7.5.2NORA-CMOS—A Logic Style for Pipelined Structures
  • 7.6Non-Bistable Sequential Circuits
  • 7.6.1The Schmitt Trigger
  • 7.6.2Monostable Sequential Circuits
  • 7.6.3Astable Circuits
  • 7.7Perspective: Choosing a Clocking Strategy
  • 7.8Summary
  • 7.9To Probe Further

Part III — A System Perspective

8Implementation Strategies for Digital ICs
  • 8.1Introduction
  • 8.2From Custom to Semicustom and Structured Array Design Approaches
  • 8.3Custom Circuit Design
  • 8.4Cell-Based Design Methodology
  • 8.4.1Standard Cell
  • 8.4.2Compiled Cells
  • 8.4.3Macrocells, Megacells and Intellectual Property
  • 8.4.4Semi-Custom Design Flow
  • 8.5Array-Based Implementation Approaches
  • 8.5.1Pre-diffused (or Mask-Programmable) Arrays
  • 8.5.2Pre-wired Arrays
  • 8.6Perspective—The Implementation Platform of the Future
  • 8.7Summary
  • 8.8To Probe Further
부록 ECharacterizing Logic and Sequential Cells
부록 FDesign Synthesis
9Coping with Interconnect
  • 9.1Introduction
  • 9.2Capacitive Parasitics
  • 9.2.1Capacitance and Reliability—Cross Talk
  • 9.2.2Capacitance and Performance in CMOS
  • 9.3Resistive Parasitics
  • 9.3.1Resistance and Reliability—Ohmic Voltage Drop
  • 9.3.2Electromigration
  • 9.3.3Resistance and Performance—RC Delay
  • 9.4Inductive Parasitics
  • 9.4.1Inductance and Reliability— Voltage Drop
  • 9.4.2Inductance and Performance—Transmission Line Effects
  • 9.5Advanced Interconnect Techniques
  • 9.5.1Reduced-Swing Circuits
  • 9.5.2Current-Mode Transmission Techniques
  • 9.6Perspective: Networks-on-a-Chip
  • 9.7Chapter Summary
  • 9.8To Probe Further
10Timing Issues in Digital Circuits
  • 10.1Introduction
  • 10.2Timing Classification of Digital Systems
  • 10.2.1Synchronous Interconnect
  • 10.2.2Mesochronous interconnect
  • 10.2.3Plesiochronous Interconnect
  • 10.2.4Asynchronous Interconnect
  • 10.3Synchronous Design — An In-depth Perspective
  • 10.3.1Synchronous Timing Basics
  • 10.3.2Sources of Skew and Jitter
  • 10.3.3Clock-Distribution Techniques
  • 10.3.4Latch-Based Clocking *
  • 10.4Self-Timed Circuit Design*
  • 10.4.1Self-Timed Logic - An Asynchronous Technique
  • 10.4.2Completion-Signal Generation
  • 10.4.3Self-Timed Signaling
  • 10.4.4Practical Examples of Self-Timed Logic
  • 10.5Synchronizers and Arbiters*
  • 10.5.1Synchronizers—Concept and Implementation
  • 10.5.2Arbiters
  • 10.6Clock Synthesis and Synchronization Using a Phase-Locked Loop
  • 10.6.1Basic Concept
  • 10.6.2Building Blocks of a PLL
  • 10.7Future Directions and Perspectives
  • 10.7.1Distributed Clocking Using DLLs
  • 10.7.2Optical Clock Distribution
  • 10.7.3Synchronous versus Asynchronous Design
  • 10.8Summary
  • 10.9To Probe Further
부록 GDesign Verification
11Designing Arithmetic Building Blocks
  • 11.1Introduction
  • 11.2Datapaths in Digital Processor Architectures
  • 11.3The Adder
  • 11.3.1The Binary Adder: Definitions
  • 11.3.2The Full Adder: Circuit Design Considerations
  • 11.3.3The Binary Adder: Logic Design Considerations
  • 11.4The Multiplier
  • 11.4.1The Multiplier: Definitions
  • 11.4.2Partial-Product Generation
  • 11.4.3Partial Product Accumulation
  • 11.4.4Final Addition
  • 11.4.5Multiplier Summary
  • 11.5The Shifter
  • 11.5.1Barrel Shifter
  • 11.5.2Logarithmic Shifter
  • 11.6Other Arithmetic Operators
  • 11.7Power and Speed Trade-off’s in Datapath Structures
  • 11.7.1Design Time Power-Reduction Techniques
  • 11.7.2Run-Time Power Management
  • 11.7.3Reducing the Power in Standby (or Sleep) Mode
  • 11.8Perspective: Design as a Trade-off
  • 11.9Summary
  • 11.10To Probe Further
12Designing Memory and Array Structures
  • 12.1Introduction
  • 12.1.1Memory Classification
  • 12.1.2Memory Architectures and Building Blocks
  • 12.2The Memory Core
  • 12.2.1Read-Only Memories
  • 12.2.2Nonvolatile Read-Write Memories
  • 12.2.3Read-Write Memories (RAM)
  • 12.2.4Contents-Addressable or Associative Memory (CAM)
  • 12.3Memory Peripheral Circuitry
  • 12.3.1The Address Decoders
  • 12.3.2Sense Amplifiers
  • 12.3.3Voltage References
  • 12.3.4Drivers/Buffers
  • 12.3.5Timing and Control
  • 12.4Memory Reliability and Yield
  • 12.4.1Signal-To-Noise Ratio
  • 12.4.2Memory yield
  • 12.5Power Dissipation in Memories
  • 12.5.1Sources of Power Dissipation in Memories
  • 12.5.2Partitioning of the memory
  • 12.5.3Addressing the Active Power Dissipation
  • 12.5.4Data-retention dissipation
  • 12.5.5Summary
  • 12.6Case Studies in Memory Design
  • 12.6.1The Programmable Logic Array (PLA)
  • 12.6.2A 4 Mbit SRAM
  • 12.6.3A 1 Gbit NAND Flash Memory
  • 12.7Perspective: Semiconductor Memory Trends and Evolutions
  • 12.8Summary
  • 12.9To Probe Further
부록 HValidation and Test of Manufactured Circuits
  • H.1Introduction
  • H.2Test Procedure
  • H.3Design for Testability
  • H.3.1Issues in Design for Testability
  • H.3.2Ad Hoc Testing
  • H.3.3Scan-Based Test
  • H.3.4Boundary-Scan Design
  • H.3.5Built-in Self-Test (BIST)
  • H.4Test-Pattern Generation
  • H.4.1Fault Models
  • H.4.2Automatic Test-Pattern Generation (ATPG)
  • H.4.3Fault Simulation
  • H.5To Probe Further

CMOS 인버터·지연·전력의 기준 교재 — 21.5 CMOS 논리 구현 · 21.6 래치와 플립플롭 회로 · 21.9 타이밍과 전력을 맡는다. 5.4가 전파 지연, 5.5가 동적·정적 전력, 10.3이 클록 스큐와 지터이고, 4장·9장이 21.7 배선과 기생 성분, 11장이 21.13 데이터패스 회로다. 장 사이의 Design Methodology Insert A~H는 번호 없는 별도 꼭지라 「부록 A」식으로 적었다 — 인용할 때는 “Rabaey, Insert H: Design for Testability”처럼 쓴다. 확보한 원본 목차에 쪽수가 없어 절 번호까지만 실었다. 별표(*)는 원본이 선택 절로 표시한 것이다.

CMOS VLSI Design: A Circuits and Systems Perspective

21부Weste · Harris · 4th ed. · Addison-Wesley, 2010  원본 대조

1Introduction
  • 1.1A Brief History1
  • 1.2Preview6
  • 1.3MOS Transistors6
  • 1.4CMOS Logic9
  • 1.4.1The Inverter9
  • 1.4.2The NAND Gate9
  • 1.4.3CMOS Logic Gates9
  • 1.4.4The NOR Gate11
  • 1.4.5Compound Gates11
  • 1.4.6Pass Transistors and Transmission Gates12
  • 1.4.7Tristates14
  • 1.4.8Multiplexers15
  • 1.4.9Sequential Circuits16
  • 1.5CMOS Fabrication and Layout19
  • 1.5.1Inverter Cross-Section19
  • 1.5.2Fabrication Process20
  • 1.5.3Layout Design Rules24
  • 1.5.4Gate Layouts27
  • 1.5.5Stick Diagrams28
  • 1.6Design Partitioning29
  • 1.6.1Design Abstractions30
  • 1.6.2Structured Design31
  • 1.6.3Behavioral, Structural, and Physical Domains31
  • 1.7Example: A Simple MIPS Microprocessor33
  • 1.7.1MIPS Architecture33
  • 1.7.2Multicycle MIPS Microarchitecture34
  • 1.8Logic Design38
  • 1.8.1Top-Level Interfaces38
  • 1.8.2Block Diagrams38
  • 1.8.3Hierarchy40
  • 1.8.4Hardware Description Languages40
  • 1.9Circuit Design42
  • 1.10Physical Design45
  • 1.10.1Floorplanning45
  • 1.10.2Standard Cells48
  • 1.10.3Pitch Matching50
  • 1.10.4Slice Plans50
  • 1.10.5Arrays51
  • 1.10.6Area Estimation51
  • 1.11Design Verification53
  • 1.12Fabrication, Packaging, and Testing54
2MOS Transistor Theory
  • 2.1Introduction61
  • 2.2Long-Channel I-V Characteristics64
  • 2.3C-V Characteristics68
  • 2.3.1Simple MOS Capacitance Models68
  • 2.3.2Detailed MOS Gate Capacitance Model70
  • 2.3.3Detailed MOS Diffusion Capacitance Model72
  • 2.4Nonideal I-V Effects74
  • 2.4.1Mobility Degradation and Velocity Saturation75
  • 2.4.2Channel Length Modulation78
  • 2.4.3Threshold Voltage Effects79
  • 2.4.4Leakage80
  • 2.4.5Temperature Dependence85
  • 2.4.6Geometry Dependence86
  • 2.4.7Summary86
  • 2.5DC Transfer Characteristics87
  • 2.5.1Static CMOS Inverter DC Characteristics88
  • 2.5.2Beta Ratio Effects90
  • 2.5.3Noise Margin91
  • 2.5.4Pass Transistor DC Characteristics92
  • 2.6Pitfalls and Fallacies93
3CMOS Processing Technology
  • 3.1Introduction99
  • 3.2CMOS Technologies100
  • 3.2.1Wafer Formation100
  • 3.2.2Photolithography101
  • 3.2.3Well and Channel Formation103
  • 3.2.4Silicon Dioxide (SiO2)105
  • 3.2.5Isolation106
  • 3.2.6Gate Oxide107
  • 3.2.7Gate and Source/Drain Formations108
  • 3.2.8Contacts and Metallization110
  • 3.2.9Passivation112
  • 3.2.10Metrology112
  • 3.3Layout Design Rules113
  • 3.3.1Design Rule Background113
  • 3.3.2Scribe Line and Other Structures116
  • 3.3.3MOSIS Scalable CMOS Design Rules117
  • 3.3.4Micron Design Rules118
  • 3.4CMOS Process Enhancements119
  • 3.4.1Transistors119
  • 3.4.2Interconnect122
  • 3.4.3Circuit Elements124
  • 3.4.4Beyond Conventional CMOS129
  • 3.5Technology-Related CAD Issues130
  • 3.5.1Design Rule Checking (DRC)131
  • 3.5.2Circuit Extraction132
  • 3.6Manufacturing Issues133
  • 3.6.1Antenna Rules133
  • 3.6.2Layer Density Rules134
  • 3.6.3Resolution Enhancement Rules134
  • 3.6.4Metal Slotting Rules135
  • 3.6.5Yield Enhancement Guidelines135
  • 3.7Pitfalls and Fallacies136
  • 3.8Historical Perspective137
4Delay
  • 4.1Introduction141
  • 4.1.1Definitions141
  • 4.1.2Timing Optimization142
  • 4.2Transient Response143
  • 4.3RC Delay Model146
  • 4.3.1Effective Resistance146
  • 4.3.2Gate and Diffusion Capacitance147
  • 4.3.3Equivalent RC Circuits147
  • 4.3.4Transient Response148
  • 4.3.5Elmore Delay150
  • 4.3.6Layout Dependence of Capacitance153
  • 4.3.7Determining Effective Resistance154
  • 4.4Linear Delay Model155
  • 4.4.1Logical Effort156
  • 4.4.2Parasitic Delay156
  • 4.4.3Delay in a Logic Gate158
  • 4.4.4Drive159
  • 4.4.5Extracting Logical Effort from Datasheets159
  • 4.4.6Limitations to the Linear Delay Model160
  • 4.5Logical Effort of Paths163
  • 4.5.1Delay in Multistage Logic Networks163
  • 4.5.2Choosing the Best Number of Stages166
  • 4.5.3Example168
  • 4.5.4Summary and Observations169
  • 4.5.5Limitations of Logical Effort171
  • 4.5.6Iterative Solutions for Sizing171
  • 4.6Timing Analysis Delay Models173
  • 4.6.1Slope-Based Linear Model173
  • 4.6.2Nonlinear Delay Model174
  • 4.6.3Current Source Model174
  • 4.7Pitfalls and Fallacies174
  • 4.8Historical Perspective175
5Power
  • 5.1Introduction181
  • 5.1.1Definitions182
  • 5.1.2Examples182
  • 5.1.3Sources of Power Dissipation184
  • 5.2Dynamic Power185
  • 5.2.1Activity Factor186
  • 5.2.2Capacitance188
  • 5.2.3Voltage190
  • 5.2.4Frequency192
  • 5.2.5Short-Circuit Current193
  • 5.2.6Resonant Circuits193
  • 5.3Static Power194
  • 5.3.1Static Power Sources194
  • 5.3.2Power Gating197
  • 5.3.3Multiple Threshold Voltages and Oxide Thicknesses199
  • 5.3.4Variable Threshold Voltages199
  • 5.3.5Input Vector Control200
  • 5.4Energy-Delay Optimization200
  • 5.4.1Minimum Energy200
  • 5.4.2Minimum Energy-Delay Product203
  • 5.4.3Minimum Energy Under a Delay Constraint203
  • 5.5Low Power Architectures204
  • 5.5.1Microarchitecture204
  • 5.5.2Parallelism and Pipelining204
  • 5.5.3Power Management Modes205
  • 5.6Pitfalls and Fallacies206
  • 5.7Historical Perspective207
6Interconnect
  • 6.1Introduction211
  • 6.1.1Wire Geometry211
  • 6.1.2Example: Intel Metal Stacks212
  • 6.2Interconnect Modeling213
  • 6.2.1Resistance214
  • 6.2.2Capacitance215
  • 6.2.3Inductance218
  • 6.2.4Skin Effect219
  • 6.2.5Temperature Dependence220
  • 6.3Interconnect Impact220
  • 6.3.1Delay220
  • 6.3.2Energy222
  • 6.3.3Crosstalk222
  • 6.3.4Inductive Effects224
  • 6.3.5An Aside on Effective Resistance and Elmore Delay227
  • 6.4Interconnect Engineering229
  • 6.4.1Width, Spacing, and Layer229
  • 6.4.2Repeaters230
  • 6.4.3Crosstalk Control232
  • 6.4.4Low-Swing Signaling234
  • 6.4.5Regenerators236
  • 6.5Logical Effort with Wires236
  • 6.6Pitfalls and Fallacies237
7Robustness
  • 7.1Introduction241
  • 7.2Variability241
  • 7.2.1Supply Voltage242
  • 7.2.2Temperature242
  • 7.2.3Process Variation243
  • 7.2.4Design Corners244
  • 7.3Reliability246
  • 7.3.1Reliability Terminology246
  • 7.3.2Oxide Wearout247
  • 7.3.3Interconnect Wearout249
  • 7.3.4Soft Errors251
  • 7.3.5Overvoltage Failure252
  • 7.3.6Latchup253
  • 7.4Scaling254
  • 7.4.1Transistor Scaling255
  • 7.4.2Interconnect Scaling257
  • 7.4.3International Technology Roadmap for Semiconductors258
  • 7.4.4Impacts on Design259
  • 7.5Statistical Analysis of Variability263
  • 7.5.1Properties of Random Variables263
  • 7.5.2Variation Sources266
  • 7.5.3Variation Impacts269
  • 7.6Variation-Tolerant Design274
  • 7.6.1Adaptive Control275
  • 7.6.2Fault Tolerance275
  • 7.7Pitfalls and Fallacies277
  • 7.8Historical Perspective278
8Circuit Simulation
  • 8.1Introduction287
  • 8.2A SPICE Tutorial288
  • 8.2.1Sources and Passive Components288
  • 8.2.2Transistor DC Analysis292
  • 8.2.3Inverter Transient Analysis292
  • 8.2.4Subcircuits and Measurement294
  • 8.2.5Optimization296
  • 8.2.6Other HSPICE Commands298
  • 8.3Device Models298
  • 8.3.1Level 1 Models299
  • 8.3.2Level 2 and 3 Models300
  • 8.3.3BSIM Models300
  • 8.3.4Diffusion Capacitance Models300
  • 8.3.5Design Corners302
  • 8.4Device Characterization303
  • 8.4.1I-V Characteristics303
  • 8.4.2Threshold Voltage306
  • 8.4.3Gate Capacitance308
  • 8.4.4Parasitic Capacitance308
  • 8.4.5Effective Resistance310
  • 8.4.6Comparison of Processes311
  • 8.4.7Process and Environmental Sensitivity313
  • 8.5Circuit Characterization313
  • 8.5.1Path Simulations313
  • 8.5.2DC Transfer Characteristics315
  • 8.5.3Logical Effort315
  • 8.5.4Power and Energy318
  • 8.5.5Simulating Mismatches319
  • 8.5.6Monte Carlo Simulation319
  • 8.6Interconnect Simulation319
  • 8.7Pitfalls and Fallacies322
9Combinational Circuit Design
  • 9.1Introduction327
  • 9.2Circuit Families328
  • 9.2.1Static CMOS329
  • 9.2.2Ratioed Circuits334
  • 9.2.3Cascode Voltage Switch Logic339
  • 9.2.4Dynamic Circuits339
  • 9.2.5Pass-Transistor Circuits349
  • 9.3Circuit Pitfalls354
  • 9.3.1Threshold Drops355
  • 9.3.2Ratio Failures355
  • 9.3.3Leakage356
  • 9.3.4Charge Sharing356
  • 9.3.5Power Supply Noise356
  • 9.3.6Hot Spots357
  • 9.3.7Minority Carrier Injection357
  • 9.3.8Back-Gate Coupling358
  • 9.3.9Diffusion Input Noise Sensitivity358
  • 9.3.10Process Sensitivity358
  • 9.3.11Example: Domino Noise Budgets359
  • 9.4More Circuit Families360
  • 9.5Silicon-On-Insulator Circuit Design360
  • 9.5.1Floating Body Voltage361
  • 9.5.2SOI Advantages362
  • 9.5.3SOI Disadvantages362
  • 9.5.4Implications for Circuit Styles363
  • 9.5.5Summary364
  • 9.6Subthreshold Circuit Design364
  • 9.6.1Sizing365
  • 9.6.2Gate Selection365
  • 9.7Pitfalls and Fallacies366
  • 9.8Historical Perspective367
10Sequential Circuit Design
  • 10.1Introduction375
  • 10.2Sequencing Static Circuits376
  • 10.2.1Sequencing Methods376
  • 10.2.2Max-Delay Constraints379
  • 10.2.3Min-Delay Constraints383
  • 10.2.4Time Borrowing386
  • 10.2.5Clock Skew389
  • 10.3Circuit Design of Latches and Flip-Flops391
  • 10.3.1Conventional CMOS Latches392
  • 10.3.2Conventional CMOS Flip-Flops393
  • 10.3.3Pulsed Latches395
  • 10.3.4Resettable Latches and Flip-Flops396
  • 10.3.5Enabled Latches and Flip-Flops397
  • 10.3.6Incorporating Logic into Latches398
  • 10.3.7Klass Semidynamic Flip-Flop (SDFF)399
  • 10.3.8Differential Flip-Flops399
  • 10.3.9Dual Edge-Triggered Flip-Flops400
  • 10.3.10Radiation-Hardened Flip-Flops401
  • 10.3.11True Single-Phase-Clock (TSPC) Latches and Flip-Flops402
  • 10.4Static Sequencing Element Methodology402
  • 10.4.1Choice of Elements403
  • 10.4.2Characterizing Sequencing Element Delays405
  • 10.4.3State Retention Registers408
  • 10.4.4Level-Converter Flip-Flops408
  • 10.4.5Design Margin and Adaptive Sequential Elements409
  • 10.4.6Two-Phase Timing Types411
  • 10.5Sequencing Dynamic Circuits411
  • 10.6Synchronizers411
  • 10.6.1Metastability412
  • 10.6.2A Simple Synchronizer415
  • 10.6.3Communicating Between Asynchronous Clock Domains416
  • 10.6.4Common Synchronizer Mistakes417
  • 10.6.5Arbiters419
  • 10.6.6Degrees of Synchrony419
  • 10.7Wave Pipelining420
  • 10.8Pitfalls and Fallacies422
  • 10.9Case Study: Pentium 4 and Itanium 2 Sequencing Methodologies423
11Datapath Subsystems
  • 11.1Introduction429
  • 11.2Addition/Subtraction429
  • 11.2.1Single-Bit Addition430
  • 11.2.2Carry-Propagate Addition434
  • 11.2.3Subtraction458
  • 11.2.4Multiple-Input Addition458
  • 11.2.5Flagged Prefix Adders459
  • 11.3One/Zero Detectors461
  • 11.4Comparators462
  • 11.4.1Magnitude Comparator462
  • 11.4.2Equality Comparator462
  • 11.4.3K=A+B Comparator463
  • 11.5Counters463
  • 11.5.1Binary Counters464
  • 11.5.2Fast Binary Counters465
  • 11.5.3Ring and Johnson Counters466
  • 11.5.4Linear-Feedback Shift Registers466
  • 11.6Boolean Logical Operations468
  • 11.7Coding468
  • 11.7.1Parity468
  • 11.7.2Error-Correcting Codes468
  • 11.7.3Gray Codes470
  • 11.7.4XOR/XNOR Circuit Forms471
  • 11.8Shifters472
  • 11.8.1Funnel Shifter473
  • 11.8.2Barrel Shifter475
  • 11.8.3Alternative Shift Functions476
  • 11.9Multiplication476
  • 11.9.1Unsigned Array Multiplication478
  • 11.9.2Two’s Complement Array Multiplication479
  • 11.9.3Booth Encoding480
  • 11.9.4Column Addition485
  • 11.9.5Final Addition489
  • 11.9.6Fused Multiply-Add490
  • 11.9.7Serial Multiplication490
  • 11.9.8Summary490
  • 11.10Parallel-Prefix Computations491
  • 11.11Pitfalls and Fallacies493
12Array Subsystems
  • 12.1Introduction497
  • 12.2SRAM498
  • 12.2.1SRAM Cells499
  • 12.2.2Row Circuitry506
  • 12.2.3Column Circuitry510
  • 12.2.4Multi-Ported SRAM and Register Files514
  • 12.2.5Large SRAMs515
  • 12.2.6Low-Power SRAMs517
  • 12.2.7Area, Delay, and Power of RAMs and Register Files520
  • 12.3DRAM522
  • 12.3.1Subarray Architectures523
  • 12.3.2Column Circuitry525
  • 12.3.3Embedded DRAM526
  • 12.4Read-Only Memory527
  • 12.4.1Programmable ROMs529
  • 12.4.2NAND ROMs530
  • 12.4.3Flash531
  • 12.5Serial Access Memories533
  • 12.5.1Shift Registers533
  • 12.5.2Queues (FIFO, LIFO)533
  • 12.6Content-Addressable Memory535
  • 12.7Programmable Logic Arrays537
  • 12.8Robust Memory Design541
  • 12.8.1Redundancy541
  • 12.8.2Error Correcting Codes (ECC)543
  • 12.8.3Radiation Hardening543
  • 12.9Historical Perspective544
13Special-Purpose Subsystems
  • 13.1Introduction549
  • 13.2Packaging and Cooling549
  • 13.2.1Package Options549
  • 13.2.2Chip-to-Package Connections551
  • 13.2.3Package Parasitics552
  • 13.2.4Heat Dissipation552
  • 13.2.5Temperature Sensors553
  • 13.3Power Distribution555
  • 13.3.1On-Chip Power Distribution Network556
  • 13.3.2IR Drops557
  • 13.3.3L di/dt Noise558
  • 13.3.4On-Chip Bypass Capacitance559
  • 13.3.5Power Network Modeling560
  • 13.3.6Power Supply Filtering564
  • 13.3.7Charge Pumps564
  • 13.3.8Substrate Noise565
  • 13.3.9Energy Scavenging565
  • 13.4Clocks566
  • 13.4.1Definitions566
  • 13.4.2Clock System Architecture568
  • 13.4.3Global Clock Generation569
  • 13.4.4Global Clock Distribution571
  • 13.4.5Local Clock Gaters575
  • 13.4.6Clock Skew Budgets577
  • 13.4.7Adaptive Deskewing579
  • 13.5PLLs and DLLs580
  • 13.5.1PLLs580
  • 13.5.2DLLs587
  • 13.5.3Pitfalls589
  • 13.6I/O590
  • 13.6.1Basic I/O Pad Circuits591
  • 13.6.2Electrostatic Discharge Protection593
  • 13.6.3Example: MOSIS I/O Pads594
  • 13.6.4Mixed-Voltage I/O596
  • 13.7High-Speed Links597
  • 13.7.1High-Speed I/O Channels597
  • 13.7.2Channel Noise and Interference600
  • 13.7.3High-Speed Transmitters and Receivers601
  • 13.7.4Synchronous Data Transmission606
  • 13.7.5Clock Recovery in Source-Synchronous Systems606
  • 13.7.6Clock Recovery in Mesochronous Systems608
  • 13.7.7Clock Recovery in Pleisochronous Systems610
  • 13.8Random Circuits610
  • 13.8.1True Random Number Generators610
  • 13.8.2Chip Identification611
  • 13.9Pitfalls and Fallacies612
14Design Methodology and Tools
  • 14.1Introduction615
  • 14.2Structured Design Strategies617
  • 14.2.1A Software Radio—A System Example618
  • 14.2.2Hierarchy620
  • 14.2.3Regularity623
  • 14.2.4Modularity625
  • 14.2.5Locality626
  • 14.2.6Summary627
  • 14.3Design Methods627
  • 14.3.1Microprocessor/DSP627
  • 14.3.2Programmable Logic628
  • 14.3.3Gate Array and Sea of Gates Design631
  • 14.3.4Cell-Based Design632
  • 14.3.5Full Custom Design634
  • 14.3.6Platform-Based Design—System on a Chip635
  • 14.3.7Summary636
  • 14.4Design Flows636
  • 14.4.1Behavioral Synthesis Design Flow (ASIC Design Flow)637
  • 14.4.2Automated Layout Generation641
  • 14.4.3Mixed-Signal or Custom-Design Flow645
  • 14.5Design Economics646
  • 14.5.1Non-Recurring Engineering Costs (NREs)647
  • 14.5.2Recurring Costs649
  • 14.5.3Fixed Costs650
  • 14.5.4Schedule651
  • 14.5.5Personpower653
  • 14.5.6Project Management653
  • 14.5.7Design Reuse654
  • 14.6Data Sheets and Documentation655
  • 14.6.1The Summary655
  • 14.6.2Pinout655
  • 14.6.3Description of Operation655
  • 14.6.4DC Specifications655
  • 14.6.5AC Specifications656
  • 14.6.6Package Diagram656
  • 14.6.7Principles of Operation Manual656
  • 14.6.8User Manual656
  • 14.7CMOS Physical Design Styles656
  • 14.8Pitfalls and Fallacies657
15Testing, Debugging, and Verification
  • 15.1Introduction659
  • 15.1.1Logic Verification660
  • 15.1.2Debugging662
  • 15.1.3Manufacturing Tests664
  • 15.2Testers, Test Fixtures, and Test Programs666
  • 15.2.1Testers and Test Fixtures666
  • 15.2.2Test Programs668
  • 15.2.3Handlers669
  • 15.3Logic Verification Principles670
  • 15.3.1Test Vectors670
  • 15.3.2Testbenches and Harnesses671
  • 15.3.3Regression Testing671
  • 15.3.4Version Control672
  • 15.3.5Bug Tracking673
  • 15.4Silicon Debug Principles673
  • 15.5Manufacturing Test Principles676
  • 15.5.1Fault Models677
  • 15.5.2Observability679
  • 15.5.3Controllability679
  • 15.5.4Repeatability679
  • 15.5.5Survivability679
  • 15.5.6Fault Coverage680
  • 15.5.7Automatic Test Pattern Generation (ATPG)680
  • 15.5.8Delay Fault Testing680
  • 15.6Design for Testability681
  • 15.6.1Ad Hoc Testing681
  • 15.6.2Scan Design682
  • 15.6.3Built-In Self-Test (BIST)684
  • 15.6.4IDDQ Testing687
  • 15.6.5Design for Manufacturability687
  • 15.7Boundary Scan688
  • 15.8Testing in a University Environment689
  • 15.9Pitfalls and Fallacies690
부록 AHardware Description Languages
  • A.1Introduction699
  • A.1.1Modules700
  • A.1.2Simulation and Synthesis701
  • A.2Combinational Logic702
  • A.2.1Bitwise Operators702
  • A.2.2Comments and White Space703
  • A.2.3Reduction Operators703
  • A.2.4Conditional Assignment704
  • A.2.5Internal Variables706
  • A.2.6Precedence and Other Operators708
  • A.2.7Numbers708
  • A.2.8Zs and Xs709
  • A.2.9Bit Swizzling711
  • A.2.10Delays712
  • A.3Structural Modeling713
  • A.4Sequential Logic717
  • A.4.1Registers717
  • A.4.2Resettable Registers718
  • A.4.3Enabled Registers719
  • A.4.4Multiple Registers720
  • A.4.5Latches721
  • A.4.6Counters722
  • A.4.7Shift Registers724
  • A.5Combinational Logic with Always / Process Statements724
  • A.5.1Case Statements726
  • A.5.2If Statements729
  • A.5.3SystemVerilog Casez731
  • A.5.4Blocking and Nonblocking Assignments731
  • A.6Finite State Machines735
  • A.6.1FSM Example735
  • A.6.2State Enumeration736
  • A.6.3FSM with Inputs738
  • A.7Type Idiosyncracies740
  • A.8Parameterized Modules742
  • A.9Memory745
  • A.9.1RAM745
  • A.9.2Multiported Register Files747
  • A.9.3ROM748
  • A.10Testbenches749
  • A.11SystemVerilog Netlists754
  • A.12Example: MIPS Processor755
  • A.12.1Testbench756
  • A.12.2SystemVerilog757
  • A.12.3VHDL766

21부에서 가장 넓게 쓰는 교재 — 21.8 지연 모델과 논리적 노력(4장) · 21.11 변동과 신뢰성(7장) · 21.12 회로 시뮬레이션(8장) · 21.14 칩 레벨 서브시스템(13장) · 21.15 회로 구현과 레이아웃(1.5·3.3·3.5) · 21.16 검증과 테스트(15장)를 맡는다. 4.4~4.5의 logical effort가 이 책의 간판이고, 1.5가 공정·레이아웃, 3장이 CMOS 공정, 12장이 SRAM·DRAM·플래시 회로다(15부와 겹친다). 절이 3단(x.y.z)까지 번호가 붙으므로 인용은 “Weste&Harris §4.4.1”처럼 3단까지 적는다. 장 끝 Summary·Exercises와 원본의 “WEB ENHANCED” 표시는 번호가 없어 싣지 않았다.

Computer Architecture: A Quantitative Approach

15·21·23부John L. Hennessy · David A. Patterson · 6th ed. · Morgan Kaufmann, 2017 · ISBN 978-0-12-811905-1  원본 대조

1Fundamentals of Quantitative Design and Analysis
  • 1.1Introduction2
  • 1.2Classes of Computers6
  • 1.3Defining Computer Architecture11
  • 1.4Trends in Technology18
  • 1.5Trends in Power and Energy in Integrated Circuits23
  • 1.6Trends in Cost29
  • 1.7Dependability36
  • 1.8Measuring, Reporting, and Summarizing Performance39
  • 1.9Quantitative Principles of Computer Design48
  • 1.10Putting It All Together: Performance, Price, and Power55
  • 1.11Fallacies and Pitfalls58
  • 1.12Concluding Remarks64
  • 1.13Historical Perspectives and References67
2Memory Hierarchy Design
  • 2.1Introduction78
  • 2.2Memory Technology and Optimizations84
  • 2.3Ten Advanced Optimizations of Cache Performance94
  • 2.4Virtual Memory and Virtual Machines118
  • 2.5Cross-Cutting Issues: The Design of Memory Hierarchies126
  • 2.6Putting It All Together: Memory Hierarchies in the ARM Cortex-A53 and Intel Core i7 6700129
  • 2.7Fallacies and Pitfalls142
  • 2.8Concluding Remarks: Looking Ahead146
  • 2.9Historical Perspectives and References148
3Instruction-Level Parallelism and Its Exploitation
  • 3.1Instruction-Level Parallelism: Concepts and Challenges168
  • 3.2Basic Compiler Techniques for Exposing ILP176
  • 3.3Reducing Branch Costs With Advanced Branch Prediction182
  • 3.4Overcoming Data Hazards With Dynamic Scheduling191
  • 3.5Dynamic Scheduling: Examples and the Algorithm201
  • 3.6Hardware-Based Speculation208
  • 3.7Exploiting ILP Using Multiple Issue and Static Scheduling218
  • 3.8Exploiting ILP Using Dynamic Scheduling, Multiple Issue, and Speculation222
  • 3.9Advanced Techniques for Instruction Delivery and Speculation228
  • 3.10Cross-Cutting Issues240
  • 3.11Multithreading: Exploiting Thread-Level Parallelism to Improve Uniprocessor Throughput242
  • 3.12Putting It All Together: The Intel Core i7 6700 and ARM Cortex-A53247
  • 3.13Fallacies and Pitfalls258
  • 3.14Concluding Remarks: What's Ahead?264
  • 3.15Historical Perspective and References266
4Data-Level Parallelism in Vector, SIMD, and GPU Architectures
  • 4.1Introduction282
  • 4.2Vector Architecture283
  • 4.3SIMD Instruction Set Extensions for Multimedia304
  • 4.4Graphics Processing Units310
  • 4.5Detecting and Enhancing Loop-Level Parallelism336
  • 4.6Cross-Cutting Issues345
  • 4.7Putting It All Together: Embedded Versus Server GPUs and Tesla Versus Core i7346
  • 4.8Fallacies and Pitfalls353
  • 4.9Concluding Remarks357
  • 4.10Historical Perspective and References357
5Thread-Level Parallelism
  • 5.1Introduction368
  • 5.2Centralized Shared-Memory Architectures377
  • 5.3Performance of Symmetric Shared-Memory Multiprocessors393
  • 5.4Distributed Shared-Memory and Directory-Based Coherence404
  • 5.5Synchronization: The Basics412
  • 5.6Models of Memory Consistency: An Introduction417
  • 5.7Cross-Cutting Issues422
  • 5.8Putting It All Together: Multicore Processors and Their Performance426
  • 5.9Fallacies and Pitfalls438
  • 5.10The Future of Multicore Scaling442
  • 5.11Concluding Remarks444
  • 5.12Historical Perspectives and References445
6Warehouse-Scale Computers to Exploit Request-Level and Data-Level Parallelism
  • 6.1Introduction466
  • 6.2Programming Models and Workloads for Warehouse-Scale Computers471
  • 6.3Computer Architecture of Warehouse-Scale Computers477
  • 6.4The Efficiency and Cost of Warehouse-Scale Computers482
  • 6.5Cloud Computing: The Return of Utility Computing490
  • 6.6Cross-Cutting Issues501
  • 6.7Putting It All Together: A Google Warehouse-Scale Computer503
  • 6.8Fallacies and Pitfalls514
  • 6.9Concluding Remarks518
  • 6.10Historical Perspectives and References519
7Domain-Specific Architectures
  • 7.1Introduction540
  • 7.2Guidelines for DSAs543
  • 7.3Example Domain: Deep Neural Networks544
  • 7.4Google's Tensor Processing Unit, an Inference Data Center Accelerator557
  • 7.5Microsoft Catapult, a Flexible Data Center Accelerator567
  • 7.6Intel Crest, a Data Center Accelerator for Training579
  • 7.7Pixel Visual Core, a Personal Mobile Device Image Processing Unit579
  • 7.8Cross-Cutting Issues592
  • 7.9Putting It All Together: CPUs Versus GPUs Versus DNN Accelerators595
  • 7.10Fallacies and Pitfalls602
  • 7.11Concluding Remarks604
  • 7.12Historical Perspectives and References606

Appendices

부록 AInstruction Set Principles
  • A.1Introduction
  • A.2Classifying Instruction Set Architectures
  • A.3Memory Addressing
  • A.4Type and Size of Operands
  • A.5Operations in the Instruction Set
  • A.6Instructions for Control Flow
  • A.7Encoding an Instruction Set
  • A.8Cross-Cutting Issues: The Role of Compilers
  • A.9Putting It All Together: The RISC-V Architecture
  • A.10Fallacies and Pitfalls
  • A.11Concluding Remarks
  • A.12Historical Perspective and References
부록 BReview of Memory Hierarchy
  • B.1Introduction
  • B.2Cache Performance
  • B.3Six Basic Cache Optimizations
  • B.4Virtual Memory
  • B.5Protection and Examples of Virtual Memory
  • B.6Fallacies and Pitfalls
  • B.7Concluding Remarks
  • B.8Historical Perspective and References
부록 CPipelining: Basic and Intermediate Concepts
  • C.1Introduction
  • C.2The Major Hurdle of Pipelining—Pipeline Hazards
  • C.3How Is Pipelining Implemented?
  • C.4What Makes Pipelining Hard to Implement?
  • C.5Extending the RISC V Integer Pipeline to Handle Multicycle Operations
  • C.6Putting It All Together: The MIPS R4000 Pipeline
  • C.7Cross-Cutting Issues
  • C.8Fallacies and Pitfalls
  • C.9Concluding Remarks
  • C.10Historical Perspective and References
부록 DStorage Systems
부록 EEmbedded Systems
부록 FInterconnection Networks
부록 GVector Processors in More Depth
부록 HHardware and Software for VLIW and EPIC
부록 ILarge-Scale Multiprocessors and Scientific Applications
부록 JComputer Arithmetic
부록 KSurvey of Instruction Set Architectures
부록 LAdvanced Concepts on Address Translation
부록 MHistorical Perspectives and References

인쇄 목차를 절까지 옮겼다(7개 장 + 부록 A~M). 이 책의 목차에는 장 시작 쪽수가 없어 절 쪽수만 실었고, 부록 A~C는 쪽 번호가 A-2·B-15처럼 본문과 따로 매겨져 있어 쪽을 싣지 않았다. 부록 D~M은 온라인 부록이라 쪽이 없다(목차에는 장별 저자가 함께 실려 있으나 옮기지 않았다). 자간 흔적을 바로잡았다 — “Advance d/Performanc e/Impleme nted” 등이다. 15.13 메모리 중심 아키텍처(6절)가 서적 근거 없이 서 있던 자리를 받는다 — 2장이 메모리 계층과 대역폭 병목의 정면 근거이고, 7장 Domain-Specific Architectures가 TPU·Catapult·Pixel Visual Core를 절 단위로 다뤄 23.6 AI 반도체의 근거가 된다(7.3~7.4가 DNN과 TPU). 21.17의 파이프라이닝·프로세서 구조는 3장부록 C, 15.2의 캐시 계층은 2.1~2.2와 부록 B다. 6장(창고 규모 컴퓨터)은 데이터센터 전력·냉각(23.6)과 닿는다. 백과의 다른 교재가 모두 소자·회로에서 멈추는 데 비해 이 책만 시스템 쪽에서 내려온다.

22부 · 아날로그·혼성신호와 디지털 신호 처리

Fundamentals of Microelectronics

22부Razavi · 3rd ed. · Wiley, 2021  원본 대조

1Introduction to Microelectronics1
  • 1.1Electronics Versus Microelectronics1
  • 1.2Examples of Electronic Systems2
  • 1.2.1Cellular Telephone2
  • 1.2.2Digital Camera5
  • 1.2.3Analog Versus Digital7
  • 1.3Basic Concepts8
  • 1.3.1Analog and Digital Signals8
  • 1.3.2Analog Circuits10
  • 1.3.3Digital Circuits11
  • 1.3.4Basic Circuit Theorems12
  • 1.4Chapter Summary20
2Basic Physics of Semiconductors21
  • 2.1Semiconductor Materials and Their Properties22
  • 2.1.1Charge Carriers in Solids22
  • 2.1.2Modification of Carrier Densities25
  • 2.1.3Transport of Carriers28
  • 2.2pn Junction35
  • 2.2.1pn Junction in Equilibrium36
  • 2.2.2pn Junction Under Reverse Bias41
  • 2.2.3pn Junction Under Forward Bias46
  • 2.2.4I/V Characteristics49
  • 2.3Reverse Breakdown54
  • 2.3.1Zener Breakdown55
  • 2.3.2Avalanche Breakdown55
  • 2.4Chapter Summary56
3Diode Models and Circuits61
  • 3.1Ideal Diode62
  • 3.1.1Initial Thoughts62
  • 3.1.2Ideal Diode63
  • 3.1.3Application Examples67
  • 3.2pn Junction as a Diode72
  • 3.3Additional Examples74
  • 3.4Large-Signal and Small-Signal Operation80
  • 3.5Applications of Diodes89
  • 3.5.1Half-Wave and Full-Wave Rectifiers89
  • 3.5.2Voltage Regulation100
  • 3.5.3Limiting Circuits103
  • 3.5.4Voltage Doublers106
  • 3.5.5Diodes as Level Shifters and Switches112
  • 3.6Chapter Summary114
4Physics of Bipolar Transistors124
  • 4.1General Considerations125
  • 4.2Structure of Bipolar Transistor126
  • 4.3Operation of Bipolar Transistor in Active Mode127
  • 4.3.1Collector Current129
  • 4.3.2Base and Emitter Currents133
  • 4.4Bipolar Transistor Models and Characteristics135
  • 4.4.1Large-Signal Model135
  • 4.4.2I/V Characteristics137
  • 4.4.3Concept of Transconductance139
  • 4.4.4Small-Signal Model141
  • 4.4.5Early Effect145
  • 4.5Operation of Bipolar Transistor in Saturation Mode152
  • 4.6The PNP Transistor155
  • 4.6.1Structure and Operation155
  • 4.6.2Large-Signal Model156
  • 4.6.3Small-Signal Model159
  • 4.7Chapter Summary162
5Bipolar Amplifiers172
  • 5.1General Considerations173
  • 5.1.1Input and Output Impedances173
  • 5.1.2Biasing178
  • 5.1.3DC and Small-Signal Analysis178
  • 5.2Operating Point Analysis and Design180
  • 5.2.1Simple Biasing181
  • 5.2.2Resistive Divider Biasing183
  • 5.2.3Biasing with Emitter Degeneration186
  • 5.2.4Self-Biased Stage190
  • 5.2.5Biasing of PNP Transistors192
  • 5.3Bipolar Amplifier Topologies196
  • 5.3.1Common-Emitter Topology197
  • 5.3.2Common-Base Topology224
  • 5.3.3Emitter Follower238
  • 5.4Summary and Additional Examples246
  • 5.5Chapter Summary253
6Physics of MOS Transistors269
  • 6.1Structure of MOSFET270
  • 6.2Operation of MOSFET272
  • 6.2.1Qualitative Analysis272
  • 6.2.2Derivation of I-V Characteristics279
  • 6.2.3Channel-Length Modulation288
  • 6.2.4MOS Transconductance290
  • 6.2.5Velocity Saturation292
  • 6.2.6Other Second-Order Effects292
  • 6.3MOS Device Models293
  • 6.3.1Large-Signal Model293
  • 6.3.2Small-Signal Model295
  • 6.4PMOS Transistor296
  • 6.5CMOS Technology299
  • 6.6Comparison of Bipolar and MOS Devices300
  • 6.7Chapter Summary300
7CMOS Amplifiers309
  • 7.1General Considerations310
  • 7.1.1MOS Amplifier Topologies310
  • 7.1.2Biasing310
  • 7.1.3Realization of Current Sources313
  • 7.2Common-Source Stage315
  • 7.2.1CS Core315
  • 7.2.2CS Stage with Current-Source Load318
  • 7.2.3CS Stage with DiodeConnected Load319
  • 7.2.4CS Stage with Degeneration320
  • 7.2.5CS Core with Biasing323
  • 7.3Common-Gate Stage325
  • 7.3.1CG Stage with Biasing329
  • 7.4Source Follower331
  • 7.4.1Source Follower Core331
  • 7.4.2Source Follower with Biasing333
  • 7.5Summary and Additional Examples336
  • 7.6Chapter Summary340
8Operational Amplifier as a Black Box355
  • 8.1General Considerations356
  • 8.2Op-Amp-Based Circuits358
  • 8.2.1Noninverting Amplifier358
  • 8.2.2Inverting Amplifier360
  • 8.2.3Integrator and Differentiator363
  • 8.2.4Voltage Adder371
  • 8.3Nonlinear Functions373
  • 8.3.1Precision Rectifier373
  • 8.3.2Logarithmic Amplifier374
  • 8.3.3Square-Root Amplifier375
  • 8.4Op Amp Nonidealities376
  • 8.4.1DC Offsets376
  • 8.4.2Input Bias Current379
  • 8.4.3Speed Limitations382
  • 8.4.4Finite Input and Output Impedances387
  • 8.5Design Examples388
  • 8.6Chapter Summary390
9Cascode Stages and Current Mirrors398
  • 9.1Cascode Stage399
  • 9.1.1Cascode as a Current Source399
  • 9.1.2Cascode as an Amplifier405
  • 9.2Current Mirrors414
  • 9.2.1Initial Thoughts414
  • 9.2.2Bipolar Current Mirror416
  • 9.2.3MOS Current Mirror425
  • 9.3Chapter Summary429
10Differential Amplifiers443
  • 10.1General Considerations444
  • 10.1.1Initial Thoughts444
  • 10.1.2Differential Signals446
  • 10.1.3Differential Pair449
  • 10.2Bipolar Differential Pair452
  • 10.2.1Qualitative Analysis452
  • 10.2.2Large-Signal Analysis458
  • 10.2.3Small-Signal Analysis463
  • 10.3MOS Differential Pair469
  • 10.3.1Qualitative Analysis469
  • 10.3.2Large-Signal Analysis473
  • 10.3.3Small-Signal Analysis478
  • 10.4Cascode Differential Amplifiers481
  • 10.5Common-Mode Rejection485
  • 10.6Differential Pair with Active Load489
  • 10.6.1Qualitative Analysis490
  • 10.6.2Quantitative Analysis492
  • 10.7Chapter Summary496
11Frequency Response511
  • 11.1Fundamental Concepts512
  • 11.1.1General Considerations512
  • 11.1.2Relationship Between Transfer Function and Frequency Response515
  • 11.1.3Bode'sRules518
  • 11.1.4Association of Poles with Nodes519
  • 11.1.5Miller'sTheorem521
  • 11.1.6General Frequency Response525
  • 11.2High-Frequency Models of Transistors529
  • 11.2.1High-Frequency Model of Bipolar Transistor529
  • 11.2.2High-Frequency Model of MOSFET531
  • 11.2.3Transit Frequency532
  • 11.3Analysis Procedure534
  • 11.4Frequency Response of CE and CS Stages535
  • 11.4.1Low-Frequency Response535
  • 11.4.2High-Frequency Response536
  • 11.4.3Use of Miller's Theorem537
  • 11.4.4Direct Analysis539
  • 11.4.5Input Impedance543
  • 11.5Frequency Response of CB and CG Stages544
  • 11.5.1Low-Frequency Response544
  • 11.5.2High-Frequency Response544
  • 11.6Frequency Response of Followers547
  • 11.6.1Input and Output Impedances550
  • 11.7Frequency Response of Cascode Stage553
  • 11.7.1Input and Output Impedances557
  • 11.8Frequency Response of Differential Pairs558
  • 11.8.1Common-Mode Frequency Response559
  • 11.9Additional Examples561
  • 11.10Chapter Summary564
12Feedback575
  • 12.1General Considerations577
  • 12.1.1Loop Gain579
  • 12.2Properties of Negative Feedback582
  • 12.2.1Gain Desensitization582
  • 12.2.2Bandwidth Extension584
  • 12.2.3Modification of I/O Impedances586
  • 12.2.4Linearity Improvement589
  • 12.3Types of Amplifiers591
  • 12.3.1Simple Amplifier Models591
  • 12.3.2Examples of Amplifier Types593
  • 12.4Sense and Return Techniques595
  • 12.5Polarity of Feedback598
  • 12.6Feedback Topologies600
  • 12.6.1Voltage-Voltage Feedback600
  • 12.6.2Voltage-Current Feedback605
  • 12.6.3Current-Voltage Feedback608
  • 12.6.4Current-Current Feedback613
  • 12.7Effect of Nonideal I/O Impedances616
  • 12.7.1Inclusion of I/O Effects617
  • 12.8Stability in Feedback Systems628
  • 12.8.1Review of Bode's Rules629
  • 12.8.2Problem of Instability630
  • 12.8.3Stability Condition633
  • 12.8.4Phase Margin636
  • 12.8.5Frequency Compensation638
  • 12.8.6Miller Compensation641
  • 12.9Chapter Summary642
13Oscillators656
  • 13.1General Considerations656
  • 13.2Ring Oscillators659
  • 13.3LC Oscillators664
  • 13.3.1Parallel LC Tanks664
  • 13.3.2Cross-Coupled Oscillator667
  • 13.3.3Colpitts Oscillator670
  • 13.4Phase Shift Oscillator672
  • 13.5Wien-Bridge Oscillator675
  • 13.6Crystal Oscillators677
  • 13.6.1Crystal Model678
  • 13.6.2Negative-Resistance Circuit679
  • 13.6.3Crystal Oscillator Implementation681
  • 13.7Chapter Summary683
14Output Stages and Power Amplifiers690
  • 14.1General Considerations690
  • 14.2Emitter Follower as Power Amplifier691
  • 14.3Push-Pull Stage694
  • 14.4Improved Push-Pull Stage697
  • 14.4.1Reduction of Crossover Distortion697
  • 14.4.2Addition of CE Stage701
  • 14.5Large-Signal Considerations704
  • 14.5.1Biasing Issues704
  • 14.5.2Omission of PNP Power Transistor705
  • 14.5.3High-Fidelity Design708
  • 14.6Short-Circuit Protection708
  • 14.7Heat Dissipation709
  • 14.7.1Emitter Follower Power Rating710
  • 14.7.2Push-Pull Stage Power Rating711
  • 14.7.3Thermal Runaway713
  • 14.8Efficiency714
  • 14.8.1Efficiency of Emitter Follower714
  • 14.8.2Efficiency of Push-Pull Stage715
  • 14.9Power Amplifier Classes716
  • 14.10Chapter Summary717
15Analog Filters725
  • 15.1General Considerations725
  • 15.1.1Filter Characteristics726
  • 15.1.2Classification of Filters727
  • 15.1.3Filter Transfer Function730
  • 15.1.4Problem of Sensitivity734
  • 15.2First-Order Filters735
  • 15.3Second-Order Filters738
  • 15.3.1Special Cases738
  • 15.3.2RLC Realizations742
  • 15.4Active Filters747
  • 15.4.1Sallen and Key Filter747
  • 15.4.2Integrator-Based Biquads753
  • 15.4.3Biquads Using Simulated Inductors756
  • 15.5Approximation of Filter Response761
  • 15.5.1Butterworth Response762
  • 15.5.2Chebyshev Response766
  • 15.6Chapter Summary771
16Digital CMOS Circuits778
  • 16.1General Considerations778
  • 16.1.1Static Characterization of Gates779
  • 16.1.2Dynamic Characterization of Gates786
  • 16.1.3Power-Speed Trade-Off789
  • 16.2CMOS Inverter791
  • 16.2.1Initial Thoughts791
  • 16.2.2Voltage Transfer Characteristic793
  • 16.2.3Dynamic Characteristics799
  • 16.2.4Power Dissipation804
  • 16.3CMOS NOR and NAND Gates808
  • 16.3.1NOR Gate808
  • 16.3.2NAND Gate811
  • 16.4Chapter Summary812
17CMOS Amplifiers819
  • 17.1General Considerations819
  • 17.1.1Input and Output Impedances820
  • 17.1.2Biasing824
  • 17.1.3DC and Small-Signal Analysis825
  • 17.2Operating Point Analysis and Design826
  • 17.2.1Simple Biasing828
  • 17.2.2Biasing with Source Degeneration830
  • 17.2.3Self-Biased Stage833
  • 17.2.4Biasing of PMOS Transistors834
  • 17.2.5Realization of Current Sources835
  • 17.3CMOS Amplifier Topologies836
  • 17.4Common-Source Topology837
  • 17.4.1CS Stage with Current-Source Load842
  • 17.4.2CS Stage with DiodeConnected Load843
  • 17.4.3CS Stage with Source Degeneration844
  • 17.4.4Common-Gate Topology856
  • 17.4.5Source Follower867
  • 17.5Additional Examples874
  • 17.6Chapter Summary878

22부의 입문 축. 다이오드·BJT·MOSFET을 소자에서 증폭기로 잇는 순서가 12·13부의 소신호 모델이 끝나는 자리와 맞물린다. 3판은 CMOS 트랙이 뒤로 밀려 7장과 17장이 같은 제목(CMOS Amplifiers)으로 두 번 나온다 — 인용할 때 어느 쪽인지 반드시 밝힐 것. 부록 A의 쪽 번호가 A-1이라 17장의 끝쪽을 목차에서 유도할 수 없어, 17장 인용에는 쪽을 적지 않는다. 22.1~22.2의 기준이고, 15장(아날로그 필터)이 22.13의 앞머리를 맡는다.

Design of Analog CMOS Integrated Circuits

22부Razavi · 2nd ed. · McGraw-Hill, 2016  원본 대조

1Introduction to Analog Design1
  • 1.1Why Analog?1
  • 1.1.1Sensing and Processing Signals1
  • 1.1.2When Digital Signals Become Analog2
  • 1.1.3Analog Design Is in Great Demand3
  • 1.1.4Analog Design Challenges .4
  • 1.2Why Integrated?4
  • 1.3Why CMOS?5
  • 1.4Why This Book?5
  • 1.5Levels of Abstraction5
2Basic MOS Device Physics7
  • 2.1General Considerations7
  • 2.1.1MOSFET as a Switch7
  • 2.1.2MOSFET Structure8
  • 2.1.3MOS Symbols9
  • 2.2MOS I/V Characteristics10
  • 2.2.1Threshold Voltage10
  • 2.2.2Derivation of I/V Characteristics12
  • 2.2.3MOS Transconductance19
  • 2.3Second-Order Effects20
  • 2.4MOS Device Models26
  • 2.4.1MOS Device Layout26
  • 2.4.2MOS Device Capacitances27
  • 2.4.3MOS Small-Signal Model31
  • 2.4.4MOS SPICE models34
  • 2.4.5NMOS Versus PMOS Devices35
  • 2.4.6Long-Channel Versus Short-Channel Devices35
  • 2.5Appendix A: FinFETs36
  • 2.6Appendix B: Behavior of a MOS Device as a Capacitor37
3Single-Stage Amplifiers45
  • 3.1Applications45
  • 3.2General Considerations45
  • 3.3Common-Source Stage47
  • 3.3.1Common-Source Stage with Resistive Load47
  • 3.3.2CS Stage with Diode-Connected Load52
  • 3.3.3CS Stage with Current-Source Load58
  • 3.3.4CS Stage with Active Load59
  • 3.3.5CS Stage with Triode Load60
  • 3.3.6CS Stage with Source Degeneration61
  • 3.4Source Follower68
  • 3.5Common-Gate Stage75
  • 3.6Cascode Stage82
  • 3.6.1Folded Cascode90
  • 3.7Choice of Device Models92
4Differential Amplifiers100
  • 4.1Single-Ended and Differential Operation100
  • 4.2Basic Differential Pair103
  • 4.2.1Qualitative Analysis104
  • 4.2.2Quantitative Analysis106
  • 4.2.3Degenerated Differential Pair116
  • 4.3Common-Mode Response118
  • 4.4Differential Pair with MOS Loads123
  • 4.5Gilbert Cell126
5Current Mirrors and Biasing Techniques134
  • 5.1Basic Current Mirrors134
  • 5.2Cascode Current Mirrors139
  • 5.3Active Current Mirrors146
  • 5.3.1Large-Signal Analysis149
  • 5.3.2Small-Signal Analysis152
  • 5.3.3Common-Mode Properties156
  • 5.3.4Other Properties of Five-Transistor OTA159
  • 5.4Biasing Techniques160
  • 5.4.1CS Biasing161
  • 5.4.2CG Biasing164
  • 5.4.3Source Follower Biasing165
  • 5.4.4Differential Pair Biasing166
6Frequency Response of Amplifiers173
  • 6.1General Considerations173
  • 6.1.1Miller Effect174
  • 6.1.2Association of Poles with Nodes179
  • 6.2Common-Source Stage180
  • 6.3Source Followers188
  • 6.4Common-Gate Stage193
  • 6.5Cascode Stage196
  • 6.6Differential Pair198
  • 6.6.1Differential Pair with Passive Loads198
  • 6.6.2Differential Pair with Active Load201
  • 6.7Gain-Bandwidth Trade-Offs203
  • 6.7.1One-Pole Circuits204
  • 6.7.2Multi-Pole Circuits205
  • 6.8Appendix A: Extra Element Theorem206
  • 6.9Appendix B: Zero-Value Time Constant Method208
  • 6.10Appendix C: Dual of Miller's Theorem212
7Noise219
  • 7.1Statistical Characteristics of Noise219
  • 7.1.1Noise Spectrum221
  • 7.1.2Amplitude Distribution224
  • 7.1.3Correlated and Uncorrelated Sources225
  • 7.1.4Signal-to-Noise Ratio226
  • 7.1.5Noise Analysis Procedure227
  • 7.2Types of Noise228
  • 7.2.1Thermal Noise228
  • 7.2.2Flicker Noise234
  • 7.3Representation of Noise in Circuits236
  • 7.4Noise in Single-Stage Amplifiers243
  • 7.4.1Common-Source Stage244
  • 7.4.2Common-Gate Stage249
  • 7.4.3Source Followers253
  • 7.4.4Cascode Stage254
  • 7.5Noise in Current Mirrors254
  • 7.6Noise in Differential Pairs256
  • 7.7Noise-Power Trade-Off263
  • 7.8Noise Bandwidth264
  • 7.9Problem of Input Noise Integration265
  • 7.10Appendix A: Problem of Noise Correlation265
8Feedback274
  • 8.1General Considerations274
  • 8.1.1Properties of Feedback Circuits275
  • 8.1.2Types of Amplifiers282
  • 8.1.3Sense and Return Mechanisms284
  • 8.2Feedback Topologies286
  • 8.2.1Voltage-Voltage Feedback286
  • 8.2.2Current-Voltage Feedback291
  • 8.2.3Voltage-Current Feedback294
  • 8.2.4Current-Current Feedback297
  • 8.3Effect of Feedback on Noise298
  • 8.4Feedback Analysis Difficulties299
  • 8.5Effect of Loading303
  • 8.5.1Two-Port Network Models303
  • 8.5.2Loading in Voltage-Voltage Feedback304
  • 8.5.3Loading in Current-Voltage Feedback308
  • 8.5.4Loading in Voltage-Current Feedback310
  • 8.5.5Loading in Current-Current Feedback313
  • 8.5.6Summary of Loading Effects315
  • 8.6Bode's Analysis of Feedback Circuits315
  • 8.6.1Observations315
  • 8.6.2Interpretation of Coefficients317
  • 8.6.3Bode's Analysis320
  • 8.6.4Blackman's Impedance Theorem325
  • 8.7Middlebrook's Method331
  • 8.8Loop Gain Calculation Issues332
  • 8.8.1Preliminary Concepts332
  • 8.8.2Difficulties with Return Ratio334
  • 8.9Alternative Interpretations of Bode's Method336
9Operational Amplifiers344
  • 9.1General Considerations344
  • 9.1.1Performance Parameters344
  • 9.2One-Stage Op Amps349
  • 9.2.1Basic Topologies349
  • 9.2.2Design Procedure353
  • 9.2.3Linear Scaling354
  • 9.2.4Folded-Cascode Op Amps355
  • 9.2.5Folded-Cascode Properties358
  • 9.2.6Design Procedure359
  • 9.3Two-Stage Op Amps361
  • 9.3.1Design Procedure363
  • 9.4Gain Boosting364
  • 9.4.1Basic Idea364
  • 9.4.2Circuit Implementation368
  • 9.4.3Frequency Response371
  • 9.5Comparison373
  • 9.6Output Swing Calculations373
  • 9.7Common-Mode Feedback374
  • 9.7.1Basic Concepts374
  • 9.7.2CM Sensing Techniques377
  • 9.7.3CM Feedback Techniques380
  • 9.7.4CMFB in Two-Stage Op Amps386
  • 9.8Input Range Limitations388
  • 9.9Slew Rate390
  • 9.10High-Slew-Rate Op Amps397
  • 9.10.1One-Stage Op Amps397
  • 9.10.2Two-Stage Op Amps399
  • 9.11Power Supply Rejection400
  • 9.12Noise in Op Amps402
10Stability and Frequency Compensation410
  • 10.1General Considerations410
  • 10.2Multipole Systems414
  • 10.3Phase Margin416
  • 10.4Basic Frequency Compensation420
  • 10.5Compensation of Two-Stage Op Amps426
  • 10.6Slewing in Two-Stage Op Amps433
  • 10.7Other Compensation Techniques436
  • 10.8Nyquist's Stability Criterion439
  • 10.8.1Motivation439
  • 10.8.2Basic Concepts440
  • 10.8.3Construction of Polar Plots442
  • 10.8.4Cauchy's Principle447
  • 10.8.5Nyquist's Method447
  • 10.8.6Systems with Poles at Origin450
  • 10.8.7Systems with Multiple 180° Crossings454
11Nanometer Design Studies459
  • 11.1Transistor Design Considerations459
  • 11.2Deep-Submicron Effects460
  • 11.3Transconductance Scaling463
  • 11.4Transistor Design466
  • 11.4.1Design for Given ID and VDS,min466
  • 11.4.2Design for Given gm and ID469
  • 11.4.3Design for Given gm and VDS,min470
  • 11.4.4Design for a Given gm471
  • 11.4.5Choice of Channel Length472
  • 11.5Op Amp Design Examples472
  • 11.5.1Telescopic Op Amp473
  • 11.5.2Two-Stage Op Amp487
  • 11.6High-Speed Amplifier495
  • 11.6.1General Considerations496
  • 11.6.2Op Amp Design500
  • 11.6.3Closed-Loop Small-Signal Performance501
  • 11.6.4Op Amp Scaling502
  • 11.6.5Large-Signal Behavior505
  • 11.7Summary507
12Bandgap References509
  • 12.1General Considerations509
  • 12.2Supply-Independent Biasing509
  • 12.3Temperature-Independent References513
  • 12.3.1Negative-TC Voltage513
  • 12.3.2Positive-TC Voltage514
  • 12.3.3Bandgap Reference515
  • 12.4PTAT Current Generation523
  • 12.5Constant-Gm Biasing524
  • 12.6Speed and Noise Issues525
  • 12.7Low-Voltage Bandgap References529
  • 12.8Case Study533
13Introduction to Switched-Capacitor Circuits539
  • 13.1General Considerations539
  • 13.2Sampling Switches543
  • 13.2.1MOSFETs as Switches543
  • 13.2.2Speed Considerations547
  • 13.2.3Precision Considerations549
  • 13.2.4Charge Injection Cancellation553
  • 13.3Switched-Capacitor Amplifiers555
  • 13.3.1Unity-Gain Sampler/Buffer555
  • 13.3.2Noninverting Amplifier562
  • 13.3.3Precision Multiply-by-Two Circuit567
  • 13.4Switched-Capacitor Integrator568
  • 13.5Switched-Capacitor Common-Mode Feedback571
14Nonlinearity and Mismatch576
  • 14.1Nonlinearity576
  • 14.1.1General Considerations576
  • 14.1.2Nonlinearity of Differential Circuits579
  • 14.1.3Effect of Negative Feedback on Nonlinearity581
  • 14.1.4Capacitor Nonlinearity583
  • 14.1.5Nonlinearity in Sampling Circuits584
  • 14.1.6Linearization Techniques585
  • 14.2Mismatch591
  • 14.2.1Effect of Mismatch593
  • 14.2.2Offset Cancellation Techniques598
  • 14.2.3Reduction of Noise by Offset Cancellation602
  • 14.2.4Alternative Definition of CMRR603
15Oscillators607
  • 15.1General Considerations607
  • 15.2Ring Oscillators609
  • 15.3LC Oscillators618
  • 15.3.1Basic Concepts618
  • 15.3.2Cross-Coupled Oscillator621
  • 15.3.3Colpitts Oscillator624
  • 15.3.4One-Port Oscillators626
  • 15.4Voltage-Controlled Oscillators630
  • 15.4.1Tuning in Ring Oscillators633
  • 15.4.2Tuning in LC Oscillators641
  • 15.5Mathematical Model of VCOs644
16Phase-Locked Loops651
  • 16.1Simple PLL651
  • 16.1.1Phase Detector651
  • 16.1.2Basic PLL Topology653
  • 16.1.3Dynamics of Simple PLL660
  • 16.2Charge-Pump PLLs666
  • 16.2.1Problem of Lock Acquisition666
  • 16.2.2Phase/Frequency Detector667
  • 16.2.3Charge Pump669
  • 16.2.4Basic Charge-Pump PLL671
  • 16.3Nonideal Effects in PLLs677
  • 16.3.1PFD/CP Nonidealities677
  • 16.3.2Jitter in PLLs681
  • 16.4Delay-Locked Loops683
  • 16.5Applications685
  • 16.5.1Frequency Multiplication and Synthesis685
  • 16.5.2Skew Reduction687
  • 16.5.3Jitter Reduction688
17Short-Channel Effects and Device Models691
  • 17.1Scaling Theory691
  • 17.2Short-Channel Effects695
  • 17.2.1Threshold Voltage V ariation695
  • 17.2.2Mobility Degradation with V ertical Field697
  • 17.2.3V elocity Saturation698
  • 17.2.4Hot Carrier Effects700
  • 17.2.5Output Impedance V ariation with Drain-Source Voltage700
  • 17.3MOS Device Models701
  • 17.3.1Level 1 Model702
  • 17.3.2Level 2 Model702
  • 17.3.3Level 3 Model704
  • 17.3.4BSIM Series706
  • 17.3.5Other Models707
  • 17.3.6Charge and Capacitance Modeling707
  • 17.3.7Temperature Dependence708
  • 17.4Process Corners708
18CMOS Processing Technology712
  • 18.1General Considerations712
  • 18.2Wafer Processing713
  • 18.3Photolithography714
  • 18.4Oxidation715
  • 18.5Ion Implantation716
  • 18.6Deposition and Etching718
  • 18.7Device Fabrication718
  • 18.7.1Active Devices718
  • 18.7.2Passive Devices721
  • 18.7.3Interconnects727
  • 18.8Latch-Up730
19Layout and Packaging733
  • 19.1General Layout Considerations733
  • 19.1.1Design Rules734
  • 19.1.2Antenna Effect736
  • 19.2Analog Layout Techniques736
  • 19.2.1Multifinger Transistors737
  • 19.2.2Symmetry739
  • 19.2.3Shallow Trench Isolation Issues743
  • 19.2.4Well Proximity Effects744
  • 19.2.5Reference Distribution744
  • 19.2.6Passive Devices746
  • 19.2.7Interconnects753
  • 19.2.8Pads and ESD Protection757
  • 19.3Substrate Coupling760
  • 19.4Packaging764

22부의 주축. 장 순서가 단일단 → 차동쌍 → 전류 미러 → 주파수 응답 → 잡음 → 되먹임 → 연산증폭기 → 안정성이고 22.2~22.9가 이 배열을 그대로 따른다. 되먹임(8장)과 안정성·보상(10장)을 따로 떼어 놓은 것이 이 책의 성격이다. 15·16장(발진기·PLL)은 21.14와, 17~19장(단채널·공정·레이아웃)은 14·18·21부와 겹쳐 22부에서는 쓰지 않는다.

Analysis and Design of Analog Integrated Circuits

22부Gray · Hurst · Lewis · Meyer · 6th ed. · Wiley, 2024  원본 대조

1Models for Integrated-Circuit Active Devices1
  • 1.1Introduction1
  • 1.2Depletion Region of a pnJunction1
  • 1.2.1Depletion-Region Capacitance5
  • 1.2.2Junction Breakdown7
  • 1.3Large-Signal Behavior of Bipolar Transistors9
  • 1.3.1Large-Signal Models in the Forward-Active Region9
  • 1.3.2Effects of Collector Voltage on Large-Signal Characteristics in the Forward-Active Region14
  • 1.3.3Saturation and Inverse-Active Regions16
  • 1.3.4Transistor Breakdown Voltages21
  • 1.3.5Dependence of Transistor Current Gainβ Operating Conditions24
  • 1.4Small-Signal Models of Bipolar Transistors26
  • 1.4.1Transconductance26
  • 1.4.2Base-Charging Capacitance28
  • 1.4.3Input Resistance29
  • 1.4.4Output Resistance30
  • 1.4.5Basic Small-Signal Model of the Bipolar Transistor30
  • 1.4.6Collector-Base Resistance31
  • 1.4.7Parasitic Elements in the Small-Signal Model31
  • 1.4.8Specification of Transistor Frequency Response35
  • 1.5Large-Signal Behavior of Metal-Oxide-Semiconductor Field-Effect Transistors39
  • 1.5.1Transfer Characteristics of MOS Devices39
  • 1.5.2Comparison of Operating Regions of Bipolar and MOS Transistors46
  • 1.5.3Decomposition of Gate-Source Voltage48
  • 1.5.4Threshold Temperature Dependence48
  • 1.5.5MOS Device Voltage Limitations49
  • 1.6Small-Signal Models of MOS Transistors50
  • 1.6.1Transconductance51
  • 1.6.2Intrinsic Gate-Source and Gate-Drain Capacitance52
  • 1.6.3Input Resistance53
  • 1.6.4Output Resistance53
  • 1.6.5Basic Small-Signal Model of the MOS Transistor53
  • 1.6.6Body Transconductance54
  • 1.6.7Parasitic Elements in the Small-Signal Model55
  • 1.6.8MOS Transistor Frequency Response57
  • 1.7Short-Channel Effects in MOS Transistors60
  • 1.7.1V elocity Saturation from the Horizontal Field60
  • 1.7.2Transconductance and Transition Frequency64
  • 1.7.3Mobility Degradation from the V ertical Field66
  • 1.8Weak Inversion in MOS Transistors67
  • 1.8.1Drain Current in Weak Inversion67
  • 1.8.2Transconductance and Transition Frequency in Weak Inversion70
  • 1.9Substrate Current Flow in MOS Transistors73
2Bipolar, MOS, and BiCMOS Integrated-Circuit Technology81
  • 2.1Introduction81
  • 2.2Basic Processes in Integrated-Circuit Fabrication82
  • 2.2.1Electrical Resistivity of Silicon82
  • 2.2.2Solid-State Diffusion83
  • 2.2.3Electrical Properties of Diffused Layers85
  • 2.2.4Photolithography87
  • 2.2.5Epitaxial Growth89
  • 2.2.6Ion Implantation90
  • 2.2.7Local Oxidation90
  • 2.2.8Polysilicon Deposition90
  • 2.3High-Voltage Bipolar Integrated-Circuit Fabrication91
  • 2.4Advanced Bipolar Integrated-Circuit Fabrication95
  • 2.5Active Devices in Bipolar Analog Integrated Circuits98
  • 2.5.1Integrated-Circuit npn Transistors99
  • 2.5.2Integrated-Circuit pnp Transistors111
  • 2.6Passive Components in Bipolar Integrated Circuits118
  • 2.6.1Diffused Resistors119
  • 2.6.2Epitaxial and Epitaxial-Pinch Resistors122
  • 2.6.3Integrated-Circuit Capacitors124
  • 2.6.4Zener Diodes124
  • 2.6.5Junction Diodes125
  • 2.7Modifications to the Basic Bipolar Process127
  • 2.7.1Dielectric Isolation127
  • 2.7.2Compatible Processing for High-Performance Active Devices128
  • 2.7.3High-Performance Passive Components131
  • 2.8MOS Integrated-Circuit Fabrication131
  • 2.9Active Devices in MOS Integrated Circuits135
  • 2.9.1n-Channel Transistors135
  • 2.9.2p-Channel Transistors148
  • 2.9.3Depletion Devices148
  • 2.9.4Bipolar Transistors149
  • 2.10Passive Components in MOS Technology150
  • 2.10.1Resistors150
  • 2.10.2Capacitors in MOS Technology152
  • 2.10.3Latchup in CMOS Technology155
  • 2.11BiCMOS Technology156
  • 2.12Heterojunction Bipolar Transistors157
  • 2.13Interconnect Delay160
  • 2.14Economics of Integrated-Circuit Fabrication160
  • 2.14.1Yield Considerations in Integrated-Circuit Fabrication161
  • 2.14.2Cost Considerations in Integrated-Circuit Fabrication163
3Single-Transistor and Multiple-Transistor Amplifiers173
  • 3.1Device Model Selection for Approximate Analysis of Analog Circuits174
  • 3.2Two-Port Modeling of Amplifiers175
  • 3.3Basic Single-Transistor Amplifier Stages177
  • 3.3.1Common-Emitter Configuration178
  • 3.3.2Common-Source Configuration182
  • 3.3.3Common-Base Configuration186
  • 3.3.4Common-Gate Configuration189
  • 3.3.5Common-Base and Common-Gate Configurations with Finitero191
  • 3.3.6Common-Collector Configuration (Emitter Follower)195
  • 3.3.7Common-Drain Configuration (Source Follower)198
  • 3.3.8Common-Emitter Amplifier with Emitter Degeneration201
  • 3.3.9Common-Source Amplifier with Source Degeneration204
  • 3.4Multiple-Transistor Amplifier Stages206
  • 3.4.1The CC-CE, CC-CC, and Darlington Configurations206
  • 3.4.2The Cascode Configuration210
  • 3.4.3The Active Cascode214
  • 3.4.4The Super Source Follower216
  • 3.5Differential Pairs219
  • 3.5.1The dc Transfer Characteristic of an Emitter-Coupled Pair219
  • 3.5.2The dc Transfer Characteristic with Emitter Degeneration221
  • 3.5.3The dc Transfer Characteristic of a Source-Coupled Pair222
  • 3.5.4Introduction to the Small-Signal Analysis of Differential Amplifiers225
  • 3.5.5Small-Signal Characteristics of Balanced Differential Amplifiers228
  • 3.5.6Device Mismatch Effects in Differential Amplifiers235
4Current Mirrors, Active Loads, and References259
  • 4.1Introduction259
  • 4.2Replica Biasing259
  • 4.3Current Mirrors261
  • 4.3.1General Properties261
  • 4.3.2Simple Current Mirror263
  • 4.3.3Simple Current Mirror with Beta Helper269
  • 4.3.4Simple Current Mirror with Degeneration270
  • 4.3.5Cascode Current Mirror272
  • 4.3.6Wilson Current Mirror283
  • 4.4Active Loads287
  • 4.4.1Motivation287
  • 4.4.2Common-Emitter–Common-Source Amplifier with Complementary Load288
  • 4.4.3Common-Emitter–Common-Source Amplifier with Depletion Load291
  • 4.4.4Common-Emitter–Common-Source Amplifier with Diode-Connected Load293
  • 4.4.5Differential Pair with Current-Mirror Load296
  • 4.5Voltage and Current References309
  • 4.5.1Low-Current Biasing309
  • 4.5.2Supply-Insensitive Biasing315
  • 4.5.3Temperature-Insensitive Biasing327
5Output Stages355
  • 5.1Introduction355
  • 5.2The Emitter Follower as an Output Stage355
  • 5.2.1Transfer Characteristics of the Emitter-Follower356
  • 5.2.2Power Output and Efficiency359
  • 5.2.3Emitter-Follower Drive Requirements366
  • 5.2.4Small-Signal Properties of the Emitter Follower366
  • 5.3The Source Follower as an Output Stage368
  • 5.3.1Transfer Characteristics of the Source Follower368
  • 5.3.2Distortion in the Source Follower370
  • 5.3.3Transfer Characteristics of the Super Source Follower374
  • 5.4Class B Push–Pull Output Stage378
  • 5.4.1Transfer Characteristic of the Class B Stage378
  • 5.4.2Power Output and Efficiency of the Class B Stage381
  • 5.4.3Practical Realizations of Class B Complementary Output Stages385
  • 5.4.4All-npnClass B Output Stage392
  • 5.4.5Quasi-Complementary Output Stages394
  • 5.4.6Overload Protection397
  • 5.5CMOS Class AB Output Stages399
  • 5.5.1Common-Drain Configuration399
  • 5.5.2Common-Source Configuration with Error Amplifiers401
  • 5.5.3Alternative Configurations408
6Operational Amplifiers with Single-Ended Outputs421
  • 6.1Applications of Operational Amplifiers422
  • 6.1.1Basic Feedback Concepts422
  • 6.1.2Inverting Amplifier423
  • 6.1.3Noninverting Amplifier425
  • 6.1.4Differential Amplifier425
  • 6.1.5Nonlinear Analog Operations426
  • 6.1.6Integrator, Differentiator427
  • 6.1.7Internal Amplifiers428
  • 6.2Deviations from Ideality in Real Operational Amplifiers436
  • 6.2.1Input Bias Current437
  • 6.2.2Input Offset Current437
  • 6.2.3Input Offset Voltage438
  • 6.2.4Common-Mode Input Range438
  • 6.2.5Common-Mode Rejection Ratio (CMRR)439
  • 6.2.6Power-Supply Rejection Ratio (PSRR)440
  • 6.2.7Input Resistance441
  • 6.2.8Output Resistance442
  • 6.2.9Frequency Response442
  • 6.2.10Operational-Amplifier Equivalent Circuit442
  • 6.3Basic Two-Stage MOS Operational Amplifiers443
  • 6.3.1Input Resistance, Output Resistance, and Open-Circuit Voltage Gain444
  • 6.3.2Output Swing446
  • 6.3.3Input Offset Voltage446
  • 6.3.4Common-Mode Rejection Ratio450
  • 6.3.5Common-Mode Input Range451
  • 6.3.6Power-Supply Rejection Ratio (PSRR)453
  • 6.3.7Effect of Overdrive Voltages458
  • 6.3.8Layout Considerations459
  • 6.3.9Amplifier with Level Shifting in the Input Stage462
  • 6.4Two-Stage MOS Operational Amplifiers with Cascodes465
  • 6.5MOS Folded-Cascode Operational Amplifiers467
  • 6.6MOS Telescopic-Cascode Operational Amplifiers471
  • 6.7Replica Biasing of the Tail Current Source475
  • 6.8MOS Active-Cascode Operational Amplifiers489
7Frequency Response of Integrated Circuits499
  • 7.1Introduction499
  • 7.2Single-Stage Amplifiers499
  • 7.2.1Single-Stage Voltage Amplifiers and the Miller Effect499
  • 7.2.2Frequency Response of the Common-Mode Gain for a Differential Amplifier511
  • 7.2.3Frequency Response of Voltage Buffers513
  • 7.2.4Frequency Response of Current Buffers527
  • 7.3Multistage Amplifier Frequency Response531
  • 7.3.1Dominant-Pole Approximation531
  • 7.3.2Zero-Value Time Constant Analysis532
  • 7.3.3Cascade Voltage-Amplifier Frequency Response537
  • 7.3.4Cascode Frequency Response541
  • 7.3.5Frequency Response of a Current Mirror Loading a Differential Pair548
  • 7.3.6Short-Circuit Time Constants549
  • 7.3.7Weighted Zero-Value Time Constants554
  • 7.4Relation Between Frequency Response and Time Response563
  • 7.5Pole-Zero Doublets565
  • 7.5.1Effect of a Pole-Zero Doublet on Settling Time565
  • 7.5.2Frequency Dependence of a Cascode Current-Source Load570
  • 7.5.3Frequency Dependence of an Active-Cascode Current-Source Load572
  • 7.5.4Doublet in a Differential Amplifier with Mismatch574
8Feedback585
  • 8.1Ideal Feedback Equation585
  • 8.2Gain Sensitivity587
  • 8.3Effect of Negative Feedback on Distortion587
  • 8.4Feedback Configurations589
  • 8.4.1Series-Shunt Feedback589
  • 8.4.2Shunt-Shunt Feedback592
  • 8.4.3Shunt-Series Feedback594
  • 8.4.4Series-Series Feedback595
  • 8.5Practical Configurations and the Effect of Loading595
  • 8.5.1Shunt-Shunt Feedback596
  • 8.5.2Series-Series Feedback602
  • 8.5.3Series-Shunt Feedback611
  • 8.5.4Shunt-Series Feedback617
  • 8.5.5Summary620
  • 8.6Single-Stage Feedback620
  • 8.6.1Local Series-Series Feedback622
  • 8.6.2Local Series-Shunt Feedback624
  • 8.7The Voltage Regulator as a Feedback Circuit626
  • 8.8Feedback Circuit Analysis Using the Return Ratio632
  • 8.8.1Closed-Loop Gain Using the Return Ratio634
  • 8.8.2Closed-Loop Impedance Formula Using the Return Ratio640
  • 8.8.3Summary—Return-Ratio Analysis646
  • 8.9Modeling Input and Output Ports in Feedback Circuits646
9Frequency Response and Stability of Feedback Amplifiers657
  • 9.1Introduction657
  • 9.2Relation Between Gain and Bandwidth in Feedback Amplifiers657
  • 9.3Instability659
  • 9.3.1The Nyquist Criterion659
  • 9.3.2Phase Margin and Gain Margin661
  • 9.3.3Stability of the Super Source Follower666
  • 9.4Compensation671
  • 9.4.1Theory of Compensation671
  • 9.4.2Methods of Compensation676
  • 9.4.3Two-Stage MOS Amplifier Compensation681
  • 9.4.4Compensation of Single-Stage CMOS Op Amps693
  • 9.4.5Nested Miller Compensation696
  • 9.5Root-Locus Techniques705
  • 9.5.1Root Locus for a Three-Pole Transfer Function705
  • 9.5.2Rules for Root-Locus Construction708
  • 9.5.3Root Locus for Dominant-Pole Compensation718
  • 9.5.4Root Locus for Feedback-Zero Compensation719
  • 9.6Slew Rate723
  • 9.6.1Origin of Slew-Rate Limitations723
  • 9.6.2Methods of Improving Slew Rate in Two-Stage Op Amps725
  • 9.6.3Improving Slew Rate in Bipolar Op Amps728
  • 9.6.4Improving Slew Rate in MOS Op Amps729
  • 9.6.5Effect of Slew-Rate Limitations on Large-Signal Sinusoidal Performance733
  • 9.7Effect of Feedback on a Pole-Zero Doublet734
10Nonlinear Analog Circuits747
  • 10.1Introduction747
  • 10.2Analog Multipliers Employing the Bipolar Transistor747
  • 10.2.1The Emitter-Coupled Pair as a Simple Multiplier748
  • 10.2.2The dc Analysis of the Gilbert Multiplier Cell750
  • 10.2.3The Gilbert Cell as an Analog Multiplier752
  • 10.2.4A Complete Analog Multiplier755
  • 10.2.5The Gilbert Multiplier Cell as a Balanced Modulator and Phase Detector756
  • 10.3Phase-Locked Loops760
  • 10.3.1Phase-Locked Loop Concepts760
  • 10.3.2The Phase-Locked Loop in the Locked Condition762
  • 10.3.3Integrated-Circuit Phase-Locked Loops771
  • 10.4Nonlinear Function Synthesis775
11Noise in Integrated Circuits781
  • 11.1Introduction781
  • 11.2Sources of Noise781
  • 11.2.1Shot Noise781
  • 11.2.2Thermal Noise785
  • 11.2.3Flicker Noise (1/f Noise)786
  • 11.2.4Burst Noise (Popcorn Noise)787
  • 11.2.5Avalanche Noise787
  • 11.3Noise Models of Integrated-Circuit Components789
  • 11.3.1Junction Diode789
  • 11.3.2Bipolar Transistor790
  • 11.3.3MOS Transistor791
  • 11.3.4Resistors798
  • 11.3.5Capacitors and Inductors799
  • 11.4Circuit Noise Calculations799
  • 11.4.1Bipolar Transistor Noise Performance802
  • 11.4.2Equivalent Input Noise and the Minimum Detectable Signal805
  • 11.4.3MOS Transistor Noise Performance807
  • 11.5Equivalent Input Noise Generators812
  • 11.5.1Bipolar Transistor Noise Generators813
  • 11.5.2MOS Transistor Noise Generators818
  • 11.6Effect of Feedback on Noise Performance820
  • 11.6.1Effect of Ideal Feedback on Noise Performance821
  • 11.6.2Effect of Practical Feedback on Noise Performance821
  • 11.7Noise Performance of Other Transistor Configurations828
  • 11.7.1Common-Base-Stage Noise Performance828
  • 11.7.2Emitter-Follower Noise Performance829
  • 11.7.3Differential-Pair Noise Performance830
  • 11.7.4Super-Source-Follower Noise Performance833
  • 11.8Noise in Operational Amplifiers836
  • 11.9Noise Bandwidth840
  • 11.10Noise Figure and Noise Temperature845
  • 11.10.1Noise Figure845
  • 11.10.2Noise Temperature849
12Fully Differential Operational Amplifiers857
  • 12.1Introduction857
  • 12.2Properties of Fully Differential Amplifiers857
  • 12.3Small-Signal Models for Balanced Differential Amplifiers860
  • 12.4Common-Mode Feedback865
  • 12.4.1Common-Mode Feedback at Low Frequencies867
  • 12.4.2Stability and Compensation Considerations in a CMFB Loop871
  • 12.5CMFB Circuits873
  • 12.5.1CMFB Using Resistive Divider and Amplifier873
  • 12.5.2CMFB Using Two Differential Pairs878
  • 12.5.3CMFB Using Transistors in the Triode Region880
  • 12.5.4Switched-Capacitor CMFB882
  • 12.6Fully Differential Op Amps885
  • 12.6.1A Fully Differential Two-Stage Op Amp885
  • 12.6.2Fully Differential Telescopic-Cascode Op Amp896
  • 12.6.3Fully Differential Folded-Cascode Op Amp897
  • 12.6.4A Differential Op Amp with Two Differential Input Stages898
  • 12.6.5Neutralization899
  • 12.7Unbalanced Fully Differential Circuits901
  • 12.8Bandwidth of the CMFB Loop907
  • 12.9Analysis of a CMOS Fully Differential Folded-Cascode Op Amp909
  • 12.9.1DC Biasing911
  • 12.9.2Low-Frequency Analysis914
  • 12.9.3Frequency and Time Responses in a Feedback Application920

BJT를 CMOS와 대등하게 다루는 정통서. 되먹임(8장)과 그 안정성(9장)에 각각 70쪽 넘게 쓰고, 잡음(11장)의 유도가 가장 상세하다. 6판에서 완전차동 연산증폭기가 12장으로 독립했다. 장 끝마다 부록(A.n.n)·Problems·References가 붙어 있어 목차를 옮길 때 마지막 절의 쪽수와 섞이기 쉽다 — 전사할 때 걸러 냈다.

Analog Integrated Circuit Design

22부Johns · Martin · 2nd ed. · Wiley, 2012  원본 대조

1Integrated-Circuit Devices and Modelling1
  • 1.1Semiconductors and pn Junctions1
  • 1.1.1Diodes2
  • 1.1.2Reverse-Biased Diodes4
  • 1.1.3Graded Junctions8
  • 1.1.4Large-Signal Junction Capacitance10
  • 1.1.5Forward-Biased Junctions11
  • 1.1.6Junction Capacitance of Forward-Biased Diode12
  • 1.1.7Small-Signal Model of a Forward-Biased Diode13
  • 1.1.8Schottky Diodes14
  • 1.2MOS Transistors15
  • 1.2.1Symbols for MOS Transistors16
  • 1.2.2Basic Operation17
  • 1.2.3Large-Signal Modelling22
  • 1.2.4Body Effect25
  • 1.2.5p-Channel Transistors26
  • 1.2.6Low-Frequency Small-Signal Modelling in the Active Region26
  • 1.2.7High-Frequency Small-Signal Modelling in the Active Region32
  • 1.2.8Small-Signal Modelling in the Triode and Cutoff Regions35
  • 1.2.9Analog Figures of Merit and Trade-offs37
  • 1.3Device Model Summary39
  • 1.3.1Constants40
  • 1.3.2Diode Equations40
  • 1.3.3MOS Transistor Equations41
  • 1.4Advanced MOS Modelling43
  • 1.4.1Subthreshold Operation43
  • 1.4.2Mobility Degradation46
  • 1.4.3Summary of Subthreshold and Mobility Degradation Equations48
  • 1.4.4Parasitic Resistances48
  • 1.4.5Short-Channel Effects49
  • 1.4.6Leakage Currents50
  • 1.5SPICE Modelling Parameters51
  • 1.5.1Diode Model51
  • 1.5.2MOS Transistors52
  • 1.5.3Advanced SPICE Models of MOS Transistors52
  • 1.6Passive Devices55
  • 1.6.1Resistors55
  • 1.6.2Capacitors59
  • 1.7Appendix61
  • 1.7.1Diode Exponential Relationship61
  • 1.7.2Diode-Diffusion Capacitance63
  • 1.7.3MOS Threshold Voltage and the Body Effect65
  • 1.7.4MOS Triode Relationship67
  • 1.8Key Points69
  • 1.9References70
  • 1.10Problems70
2Processing and Layout73
  • 2.1CMOS Processing73
  • 2.1.1The Silicon Wafer73
  • 2.1.2Photolithography and Well Definition74
  • 2.1.3Diffusion and Ion Implantation76
  • 2.1.4Chemical Vapor Deposition and Defining the Active Regions78
  • 2.1.5Transistor Isolation78
  • 2.1.6Gate-Oxide and Threshold-Voltage Adjustments81
  • 2.1.7Polysilicon Gate Formation82
  • 2.1.8Implanting the Junctions, Depositing SiO 2, and Opening Contact Holes82
  • 2.1.9Annealing, Depositing and Patterning Metal, and Overglass Deposition84
  • 2.1.10Additional Processing Steps84
  • 2.2CMOS Layout and Design Rules86
  • 2.2.1Spacing Rules86
  • 2.2.2Planarity and Fill Requirements94
  • 2.2.3Antenna Rules94
  • 2.2.4Latch-Up95
  • 2.3V ariability and Mismatch96
  • 2.3.1Systematic Variations Including Proximity Effects96
  • 2.3.2Process Variations98
  • 2.3.3Random Variations and Mismatch99
  • 2.4Analog Layout Considerations103
  • 2.4.1Transistor Layouts103
  • 2.4.2Capacitor Matching104
  • 2.4.3Resistor Layout107
  • 2.4.4Noise Considerations109
  • 2.5Key Points112
  • 2.6References113
  • 2.7Problems114
3Basic Current Mirrors and Single-Stage Amplifiers117
  • 3.1Simple CMOS Current Mirror118
  • 3.2Common-Source Amplifier120
  • 3.3Source-Follower or Common-Drain Amplifier122
  • 3.4Common-Gate Amplifier124
  • 3.5Source-Degenerated Current Mirrors127
  • 3.6Cascode Current Mirrors129
  • 3.7Cascode Gain Stage131
  • 3.8MOS Differential Pair and Gain Stage135
  • 3.9Key Points138
  • 3.10References139
  • 3.11Problems139
4Frequency Response of Electronic Circuits144
  • 4.1Frequency Response of Linear Systems144
  • 4.1.1Magnitude and Phase Response145
  • 4.1.2First-Order Circuits147
  • 4.1.3Second-Order Low-Pass Transfer Functions with Real Poles154
  • 4.1.4Bode Plots157
  • 4.1.5Second-Order Low-Pass Transfer Functions with Complex Poles163
  • 4.2Frequency Response of Elementary Transistor Circuits164
  • 4.2.1High-Frequency MOS Small-Signal Model164
  • 4.2.2Common-Source Amplifier166
  • 4.2.3Miller Theorem and Miller Effect169
  • 4.2.4Zero-Value Time-Constant Analysis173
  • 4.2.5Common-Source Design Examples176
  • 4.2.6Common-Gate Amplifier179
  • 4.3Cascode Gain Stage181
  • 4.4Source-Follower Amplifier187
  • 4.5Differential Pair193
  • 4.5.1High-Frequency T Model193
  • 4.5.2Symmetric Differential Amplifier194
  • 4.5.3Single-Ended Differential Amplifier195
  • 4.5.4Differential Pair with Active Load196
  • 4.6Key Points197
  • 4.7References198
  • 4.8Problems198
5Feedback Amplifiers204
  • 5.1Ideal Model of Negative Feedback204
  • 5.1.1Basic Definitions204
  • 5.1.2Gain Sensitivity205
  • 5.1.3Bandwidth206
  • 5.1.4Linearity207
  • 5.1.5Summary207
  • 5.2Dynamic Response of Feedback Amplifiers208
  • 5.2.1Stability Criteria209
  • 5.2.2Phase Margin211
  • 5.3Firstand Second-Order Feedback Systems213
  • 5.3.1First-Order Feedback Systems213
  • 5.3.2Second-Order Feedback Systems217
  • 5.3.3Higher-Order Feedback Systems220
  • 5.4Common Feedback Amplifiers221
  • 5.4.1Obtaining the Loop Gain, L(s)222
  • 5.4.2Noninverting Amplifier226
  • 5.4.3Transimpedance (Inverting) Amplifiers231
  • 5.5Summary of Key Points235
  • 5.6References236
  • 5.7Problems236
6Basic Opamp Design and Compensation242
  • 6.1Two-Stage CMOS Opamp242
  • 6.1.1Opamp Gain243
  • 6.1.2Frequency Response245
  • 6.1.3Slew Rate249
  • 6.1.4n-Channel or p-Channel Input Stage252
  • 6.1.5Systematic Offset Voltage253
  • 6.2Opamp Compensation254
  • 6.2.1Dominant-Pole Compensation and Lead Compensation255
  • 6.2.2Compensating the Two-Stage Opamp256
  • 6.2.3Making Compensation Independent of Process and Temperature260
  • 6.3Advanced Current Mirrors262
  • 6.3.1Wide-Swing Current Mirrors262
  • 6.3.2Enhanced Output-Impedance Current Mirrors and Gain Boosting263
  • 6.3.3Wide-Swing Current Mirror with Enhanced Output Impedance266
  • 6.3.4Current-Mirror Symbol267
  • 6.4Folded-Cascode Opamp268
  • 6.4.1Small-Signal Analysis270
  • 6.4.2Slew Rate272
  • 6.5Current Mirror Opamp275
  • 6.6Linear Settling Time Revisited279
  • 6.7Fully Differential Opamps281
  • 6.7.1Fully Differential Folded-Cascode Opamp283
  • 6.7.2Alternative Fully Differential Opamps284
  • 6.7.3Low Supply Voltage Opamps286
  • 6.8Common-Mode Feedback Circuits288
  • 6.9Summary of Key Points292
  • 6.10References293
  • 6.11Problems294
7Biasing, References, and Regulators302
  • 7.1Analog Integrated Circuit Biasing302
  • 7.1.1Bias Circuits303
  • 7.1.2Reference Circuits305
  • 7.1.3Regulator Circuits306
  • 7.2Establishing Constant Transconductance307
  • 7.2.1Basic Constant-Transconductance Circuit307
  • 7.2.2Improved Constant-Transconductance Circuits309
  • 7.3Establishing Constant Voltages and Currents310
  • 7.3.1Bandgap Voltage Reference Basics310
  • 7.3.2Circuits for Bandgap References314
  • 7.3.3Low-Voltage Bandgap Reference319
  • 7.3.4Current Reference320
  • 7.4Voltage Regulation321
  • 7.4.1Regulator Specifications321
  • 7.4.2Feedback Analysis322
  • 7.4.3Low Dropout Regulators324
  • 7.5Summary of Key Points327
  • 7.6References327
  • 7.7Problems328
8Bipolar Devices and Circuits331
  • 8.1Bipolar-Junction Transistors331
  • 8.1.1Basic Operation331
  • 8.1.2Analog Figures of Merit341
  • 8.2Bipolar Device Model Summary344
  • 8.3SPICE Modeling345
  • 8.4Bipolar and BICMOS Processing346
  • 8.4.1Bipolar Processing346
  • 8.4.2Modern SiGe BiCMOS HBT Processing347
  • 8.4.3Mismatch in Bipolar Devices348
  • 8.5Bipolar Current Mirro rs and Gain Stages349
  • 8.5.1Current Mirrors349
  • 8.5.2Emitter Follower350
  • 8.5.3Bipolar Differential Pair353
  • 8.6Appendix356
  • 8.6.1Bipolar Transistor Exponential Relationship356
  • 8.6.2Base Charge Storage of an Active BJT359
  • 8.7Summary of Key Points359
  • 8.8References360
  • 8.9Problems360
9Noise and Linearity Analysis and Modelling363
  • 9.1Time-Domain Analysis363
  • 9.1.1Root Mean Square (rms) Value364
  • 9.1.2SNR365
  • 9.1.3Units of dBm365
  • 9.1.4Noise Summation366
  • 9.2Frequency-Domain Analysis367
  • 9.2.1Noise Spectral Density367
  • 9.2.2White Noise369
  • 9.2.31/f, or Flicker, Noise370
  • 9.2.4Filtered Noise371
  • 9.2.5Noise Bandwidth373
  • 9.2.6Piecewise Integration of Noise375
  • 9.2.71/f Noise Tangent Principle377
  • 9.3Noise Models for Circuit Elements377
  • 9.3.1Resistors378
  • 9.3.2Diodes378
  • 9.3.3Bipolar Transistors380
  • 9.3.4MOSFETs380
  • 9.3.5Opamps382
  • 9.3.6Capacitors and Inductors382
  • 9.3.7Sampled Signal Noise384
  • 9.3.8Input-Referred Noise384
  • 9.4Noise Analysis Examples387
  • 9.4.1Opamp Example387
  • 9.4.2Bipolar Common-Emitter Example390
  • 9.4.3CMOS Differential Pair Example392
  • 9.4.4Fiber-Optic Transimpedance Amplifier Example395
  • 9.5Dynamic Range Performance397
  • 9.5.1Total Harmonic Distortion (THD)398
  • 9.5.2Third-Order Intercept Point (IP3)400
  • 9.5.3Spurious-Free Dynamic Range (SFDR)402
  • 9.5.4Signal-to-Noise and Distortion Ratio (SNDR)404
  • 9.6Key Points405
  • 9.7References406
  • 9.8Problems406
10Comparators413
  • 10.1Comparator Specifications413
  • 10.1.1Input Offset and Noise413
  • 10.1.2Hysteresis414
  • 10.2Using an Opamp for a Comparator415
  • 10.2.1Input-Offset Voltage Errors417
  • 10.3Charge-Injection Errors418
  • 10.3.1Making Charge-Injection Signal Independent421
  • 10.3.2Minimizing Errors Due to Charge-Injection421
  • 10.3.3Speed of Multi-Stage Comparators424
  • 10.4Latched Comparators426
  • 10.4.1Latch-Mode Time Constant428
  • 10.4.2Latch Offset430
  • 10.5Examples of CMOS and BiCMOS Comparators432
  • 10.5.1Input-Transistor Charge Trapping435
  • 10.6Examples of Bipolar Comparators437
  • 10.7Key Points439
  • 10.8References440
  • 10.9Problems441
11Sample-and-Hold and Translinear Circuits444
  • 11.1Performance of Sample-and-Hold Circuits444
  • 11.1.1Testing Sample-and-Holds445
  • 11.2MOS Sample-and-Hold Basics446
  • 11.3Examples of CMOS S/H Circuits452
  • 11.4Bipolar and BiCMOS Sample-and-Holds456
  • 11.5Translinear Gain Cell460
  • 11.6Translinear Multiplier462
  • 11.7Key Points464
  • 11.8References465
  • 11.9Problems466
12Continuous-Time Filters469
  • 12.1Introduction to Co ntinuous-Time Filters469
  • 12.1.1First-Order Filters470
  • 12.1.2Second-Order Filters470
  • 12.2Introduction to G m-C Filters471
  • 12.2.1Integrators and Summers472
  • 12.2.2Fully Differential Integrators473
  • 12.2.3First-Order Filter475
  • 12.2.4Biquad Filter477
  • 12.3Transconductors Using Fixed Resistors478
  • 12.4CMOS Transconductors Using Triode Transistors483
  • 12.4.1Transconductors Using a Fixe d-Bias Triode Transistor484
  • 12.4.2Transconductors Using Varying Bias-Triode Transistors486
  • 12.4.3Transconductors Using Constant Drain-Source Voltages490
  • 12.5CMOS Transconductors Using Active Transistors492
  • 12.5.1CMOS Pair493
  • 12.5.2Constant Sum of Gate-Source Voltages494
  • 12.5.3Source-Connected Differential Pair495
  • 12.5.4Inverter-Based495
  • 12.5.5Differential-Pair with Floating Voltage Sources496
  • 12.5.6Bias-Offset Cross-C oupled Differential Pairs499
  • 12.6Bipolar Transconductors499
  • 12.6.1Gain-Cell Transconductors500
  • 12.6.2Transconductors Using Multiple Differential Pairs502
  • 12.7BiCMOS Transconductors506
  • 12.7.1Tunable MOS in Triode506
  • 12.7.2Fixed-Resistor Transconductor with a Translinear Multiplier507
  • 12.7.3Fixed Active MOS Transconductor with a Translinear Multiplier508
  • 12.8Active RC and MO SFET-C Filters509
  • 12.8.1Active RC Filters510
  • 12.8.2MOSFET-C Two-Tran sistor Integrators512
  • 12.8.3Four-Transistor Integrators515
  • 12.8.4R-MOSFET-C Filters516
  • 12.9Tuning Circuitry517
  • 12.9.1Tuning Overview517
  • 12.9.2Constant Transconductance519
  • 12.9.3Frequency Tuning520
  • 12.9.4Q-Factor Tuning522
  • 12.9.5Tuning Methods Based on Adaptive Filtering523
  • 12.10Introduction to Complex Filters525
  • 12.10.1Complex Signal Processing525
  • 12.10.2Complex Operations526
  • 12.10.3Complex Filters527
  • 12.10.4Frequency-Translated Analog Filters528
  • 12.11Key Points531
  • 12.12References532
  • 12.13Problems534
13Discrete-Time Signals537
  • 13.1Overview of Some Signal Spectra537
  • 13.2Laplace Transforms of Discrete-Time Signals537
  • 13.2.1Spectra of Discrete-Time Signals540
  • 13.3z-Transform541
  • 13.4Downsampling and Upsampling543
  • 13.5Discrete-Time Filters545
  • 13.5.1Frequency Response of Discrete-Time Filters545
  • 13.5.2Stability of Discrete-Time Filters548
  • 13.5.3IIR and FIR Filters550
  • 13.5.4Bilinear Transform550
  • 13.6Sample-and-Hold Response552
  • 13.7Key Points554
  • 13.8References555
  • 13.9Problems555
14Switched-Capacitor Circuits557
  • 14.1Basic Building Blocks557
  • 14.1.1Opamps557
  • 14.1.2Capacitors558
  • 14.1.3Switches558
  • 14.1.4Nonoverlapping Clocks559
  • 14.2Basic Operation and Analysis560
  • 14.2.1Resistor Equivalence of a Switched Capacitor560
  • 14.2.2Parasitic-Sensitive Integrator563
  • 14.2.3Parasitic-Insensitive Integrators565
  • 14.2.4Signal-Flow-Graph Analysis569
  • 14.3Noise in Switched-Capacitor Circuits570
  • 14.4First-Order Filters572
  • 14.4.1Switch Sharing575
  • 14.4.2Fully Differential Filters575
  • 14.5Biquad Filters577
  • 14.5.1Low-Q Biquad Filter577
  • 14.5.2High-Q Biquad Filter581
  • 14.6Charge Injection585
  • 14.7Switched-Capacitor Gain Circuits588
  • 14.7.1Parallel Resistor-Capacitor Circuit588
  • 14.7.2Resettable Gain Circuit588
  • 14.7.3Capacitive-Reset Gain Circuit591
  • 14.8Correlated Double-Sampling Techniques593
  • 14.9Other Switched-Capacitor Circuits594
  • 14.9.1Amplitude Modulator594
  • 14.9.2Full-Wave Rectifier595
  • 14.9.3Peak Detectors596
  • 14.9.4Voltage-Controlled Oscillator596
  • 14.9.5Sinusoidal Oscillator598
  • 14.10Key Points600
  • 14.11References601
  • 14.12Problems602
15Data Converter Fundamentals606
  • 15.1Ideal D/A Converter606
  • 15.2Ideal A/D Converter608
  • 15.3Quantization Noise609
  • 15.3.1Deterministic Approach609
  • 15.3.2Stochastic Approach610
  • 15.4Signed Codes612
  • 15.5Performance Limitations614
  • 15.5.1Resolution614
  • 15.5.2Offset and Gain Error615
  • 15.5.3Accuracy and Linearity615
  • 15.6Key Points620
  • 15.7References620
  • 15.8Problems620
16Nyquist-Rate D/A Converters623
  • 16.1Decoder-Based Converters623
  • 16.1.1Resistor-String Converters623
  • 16.1.2Folded Resistor-String Converters625
  • 16.1.3Multiple Resistor-String Converters626
  • 16.1.4Signed Outputs628
  • 16.2Binary-Scaled Converters629
  • 16.2.1Binary-Weighted Resistor Converters629
  • 16.2.2Reduced-Resistance-Ratio Ladders630
  • 16.2.3R-2R-Based Converters631
  • 16.2.4Charge-Redistribution Switched-Capacitor Converters632
  • 16.2.5Current-Mode Converters633
  • 16.2.6Glitches633
  • 16.3Thermometer-Code Converters634
  • 16.3.1Thermometer-Code Current-Mode D/A Converters636
  • 16.3.2Single-Supply Positive-Output Converters637
  • 16.3.3Dynamically Matched Current Sources638
  • 16.4Hybrid Converters640
  • 16.4.1Resistor-Capacitor Hybrid Converters640
  • 16.4.2Segmented Converters640
  • 16.5Key Points642
  • 16.6References643
  • 16.7Problems643
17Nyquist-Rate A/D Converters646
  • 17.1Integrating Converters646
  • 17.2Successive-Approximation Converters650
  • 17.2.1D/A-Based Successive Approximation652
  • 17.2.2Charge-Redistribution A/D653
  • 17.2.3Resistor-Capacitor Hybrid658
  • 17.2.4Speed Estimate for Charge -Redistribution Converters659
  • 17.2.5Error Correction in Successive-Approximation Converters660
  • 17.2.6Multi-Bit Successive-Approximation662
  • 17.3Algorithmic (or Cyclic) A/D Converter662
  • 17.3.1Ratio-Independent Algorithmic Converter663
  • 17.4Pipelined A/D Converters667
  • 17.4.1One-Bit-Per-Stage Pipelined Converter667
  • 17.4.21.5 Bit Per Stage Pipelined Converter670
  • 17.4.3Pipelined Converter Circuits673
  • 17.4.4Generalized k-Bit-Per-Stage Pipelined Converters673
  • 17.5Flash Converters674
  • 17.5.1Issues in Designing Flash A/D Converters675
  • 17.6Two-Step A/D Converters678
  • 17.6.1Two-Step Converter with Digital Error Correction679
  • 17.7Interpolating A/D Converters681
  • 17.8Folding A/D Converters684
  • 17.9Time-Interleaved A/D Converters687
  • 17.10Key Points690
  • 17.11References691
  • 17.12Problems692
18Oversampling Converters696
  • 18.1Oversampling without Noise Shaping696
  • 18.1.1Quantization Noise Modelling697
  • 18.1.2White Noise Assumption697
  • 18.1.3Oversampling Advantage698
  • 18.1.4The Advantage of 1-Bit D/A Converters700
  • 18.2Oversampling with Noise Shaping701
  • 18.2.1Noise-Shaped Delta-Sigma Modulator702
  • 18.2.2First-Order Noise Shaping703
  • 18.2.3Switched-Capacitor Realization of a First-Order A/D Converter705
  • 18.2.4Second-Order Noise Shaping705
  • 18.2.5Noise Transfer-Function Curves707
  • 18.2.6Quantization Noise Power of 1-Bit Modulators708
  • 18.2.7Error-Feedback Structure708
  • 18.3System Architectures710
  • 18.3.1System Architecture of Delta-Sigma A/D Converters710
  • 18.3.2System Architecture of Delta-Sigma D/A Converters712
  • 18.4Digital Decimation Filters713
  • 18.4.1Multi-Stage714
  • 18.4.2Single Stage716
  • 18.5Higher-Order Modulators717
  • 18.5.1Interpolative Architecture717
  • 18.5.2Multi-Stage Noise Shaping (MASH) Architecture718
  • 18.6Bandpass Oversampling Converters720
  • 18.7Practical Considerations721
  • 18.7.1Stability721
  • 18.7.2Linearity of Two-Level Converters722
  • 18.7.3Idle Tones724
  • 18.7.4Dithering725
  • 18.7.5Opamp Gain725
  • 18.8Multi-Bit Oversampling Converters726
  • 18.8.1Dynamic Element Matching726
  • 18.8.2Dynamically Matched Current Source D/A Converters727
  • 18.8.3Digital Calibration A/D Converter727
  • 18.8.4A/D with Both Multi-Bit and Single-Bit Feedback728
  • 18.9Third-Order A/D Design Example729
  • 18.10Key Points731
  • 18.11References733
  • 18.12Problems734
19Phase-Locked Loops737
  • 19.1Basic Phase-Locked Loop Architecture737
  • 19.1.1Voltage-Controlled Oscillator738
  • 19.1.2Divider739
  • 19.1.3Phase Detector740
  • 19.1.4Loop Filer745
  • 19.1.5The PLL in Lock746
  • 19.2Linearized Small-Signal Analysis747
  • 19.2.1Second-Order PLL Model748
  • 19.2.2Limitations of the Second-Order Small-Signal Model750
  • 19.2.3PLL Design Example752
  • 19.3Jitter and Phase Noise754
  • 19.3.1Period Jitter758
  • 19.3.2P-Cycle Jitter758
  • 19.3.3Adjacent Period Jitter759
  • 19.3.4Other Spectral Representations of Jitter760
  • 19.3.5Probability Density Function of Jitter761
  • 19.4Electronic Oscillators763
  • 19.4.1Ring Oscillators764
  • 19.4.2LC Oscillators768
  • 19.4.3Phase Noise of Oscillators770
  • 19.5Jitter and Phase Noise in PLLs774
  • 19.5.1Input Phase Noise and Divider Phase Noise775
  • 19.5.2VCO Phase Noise775
  • 19.5.3Loop Filter Noise776
  • 19.6Key Points779
  • 19.7References779
  • 19.8Problems780

스위치드 커패시터(14장)와 데이터 변환기(15~18장)를 교재 수준으로 다루는 거의 유일한 책. 22.12~22.17 여섯 장이 사실상 이 책에서 나온다 — 10·11장(비교기·표본화유지)은 22.12, 12장(연속시간 필터)은 22.13, 13장(이산시간 신호)은 22.14, 14장(SC)은 22.15, 15~18장(변환기)은 22.16~22.17. 7장(바이어스·기준·레귤레이터)은 22.11에 대응한다. 절마다 Key Points·References·Problems가 번호를 달고 붙어 있어 절 수가 실제 내용보다 많아 보인다.

Discrete-Time Signal Processing

22부Oppenheim · Schafer · 3rd ed. · Pearson (Custom Library 판)  원본 대조

1Introduction1
  • 1.0Introduction1
  • 1.1Historic Perspective5
  • 1.2Future Promise8
  • 1.3Bibliography8
2Discrete-Time Signals and Systems11
  • 2.0Introduction11
  • 2.1Discrete-Time Signals12
  • 2.2Discrete-Time Systems19
  • 2.2.1Memoryless Systems20
  • 2.2.2Linear Systems21
  • 2.2.3Time-Invariant Systems22
  • 2.2.4Causality24
  • 2.2.5Stability24
  • 2.3Linear Time-Invariant Systems25
  • 2.4Properties of Linear Time-Invariant Systems32
  • 2.5Linear Constant-Coefficient Difference Equations37
  • 2.6Frequency-Domain Representation of Discrete-Time Signals and Systems42
  • 2.6.1Eigenfunctions for Linear Time-Invariant Systems42
  • 2.6.2Suddenly Applied Complex Exponential Inputs48
  • 2.7Representation of Sequences by Fourier Transforms50
  • 2.8Symmetry Properties of the Fourier Transform56
  • 2.9Fourier Transform Theorems60
  • 2.9.1Linearity of the Fourier Transform61
  • 2.9.2Time Shifting and Frequency Shifting Theorem61
  • 2.9.3Time Reversal Theorem61
  • 2.9.4Differentiation in Frequency Theorem61
  • 2.9.5Parseval's Theorem62
  • 2.9.6The Convolution Theorem62
  • 2.9.7The Modulation or Windowing Theorem63
  • 2.10Discrete-Time Random Signals66
  • 2.11Summary72
3The z-Transform105
  • 3.0Introduction105
  • 3.1z-Transform105
  • 3.2Properties of the ROC for the z-Transform116
  • 3.3The Inverse z-Transform121
  • 3.3.1Inspection Method122
  • 3.3.2Partial Fraction Expansion122
  • 3.3.3Power Series Expansion128
  • 3.4z-Transform Properties130
  • 3.4.1Linearity130
  • 3.4.2Time Shifting131
  • 3.4.3Multiplication by an Exponential Sequence132
  • 3.4.4Differentiation of X(z)133
  • 3.4.5Conjugation of a Complex Sequence135
  • 3.4.6Time Reversal135
  • 3.4.7Convolution of Sequences136
  • 3.4.8Summary of Some z-Transform Properties137
  • 3.5z-Transforms and LTI Systems137
  • 3.6The Unilateral z-Transform141
  • 3.7Summary143
4Sampling of Continuous-Time Signals163
  • 4.0Introduction163
  • 4.1Periodic Sampling163
  • 4.2Frequency-Domain Representation of Sampling166
  • 4.3Reconstruction of a Bandlimited Signal from Its Samples173
  • 4.4Discrete-Time Processing of Continuous-Time Signals179
  • 4.4.1Linear Time-Invariant Discrete-Time Systems180
  • 4.4.2Impulse Invariance186
  • 4.5Continuous-Time Processing of Discrete-Time Signals190
  • 4.6Changing the Sampling Rate Using Discrete-Time Processing193
  • 4.6.1Sampling Rate Reduction by an Integer Factor: Downsampling194
  • 4.6.2Sampling Rate Increase by an Integer Factor: Upsampling199
  • 4.6.3Changing the Sampling Rate by a Noninteger Factor204
  • 4.7Multirate Signal Processing209
  • 4.7.1Interchange of Filtering and Downsampling/Upsampling209
  • 4.7.2Polyphase Decompositions211
  • 4.7.3Polyphase Implementation of Decimation Filters214
  • 4.7.4Polyphase Implementation of Interpolation Filters216
  • 4.7.5Multistage Implementations219
  • 4.7.6Maximally Decimated Filter Banks221
  • 4.8Digital Processing of Analog Signals230
  • 4.8.1Prefiltering to Avoid Aliasing231
  • 4.8.2Analog-to-Digital (A/D) Conversion234
  • 4.8.3Analysis of Quantization Errors240
  • 4.8.4D/A Conversion245
  • 4.9Oversampling and Noise Shaping in A/D and D/A Conversion248
  • 4.9.1Oversampled A/D Conversion with 1-Bit Quantization and First-Order Noise Shaping248
  • 4.9.2Oversampled A/D Conversion with Multi-Bit Quantization and Noise Shaping256
  • 4.9.3Oversampling and Noise Shaping in D/A Conversion258
  • 4.10Summary263
5Transform Analysis of Linear Time-Invariant Systems287
  • 5.0Introduction287
  • 5.1The Frequency Response of LTI Systems288
  • 5.1.1Ideal Frequency-Selective Filters288
  • 5.1.2Phase Distortion and Delay289
  • 5.2System Functions for Systems Characterized by Linear Constant-Coefficient Difference Equations295
  • 5.2.1Stability and Causality297
  • 5.2.2Inverse Systems300
  • 5.2.3Impulse Response for Rational System Functions303
  • 5.3Frequency Response for Rational System Functions306
  • 5.3.1Frequency Response of a Single Zero or Pole308
  • 5.3.2Examples with Multiple Poles and Zeros317
  • 5.4Relationship between Magnitude and Phase326
  • 5.5Allpass Systems331
  • 5.6Minimum-Phase Systems338
  • 5.6.1Minimum-Phase and Allpass Decomposition338
  • 5.6.2Frequency-Response Compensation341
  • 5.6.3Properties of Minimum-Phase Systems345
  • 5.7Linear Systems with Generalized Linear Phase349
  • 5.7.1Systems with Linear Phase350
  • 5.7.2Generalized Linear Phase353
  • 5.7.3Causal Generalized Linear-Phase Systems357
  • 5.7.4Relation of FIR Linear-Phase Systems to Minimum-Phase Systems370
  • 5.8Summary372
6Structures for Discrete-Time Systems391
  • 6.0Introduction391
  • 6.1Block Diagram Representation of Linear Constant-Coefficient Difference Equations392
  • 6.2Signal Flow Graph Representation of Linear Constant-Coefficient Difference Equations398
  • 6.3Basic Structures for IIR Systems404
  • 6.3.1Direct Forms404
  • 6.3.2Cascade Form407
  • 6.3.3Parallel Form411
  • 6.3.4Feedback in IIR Systems414
  • 6.4Transposed Forms416
  • 6.5Basic Network Structures for FIR Systems422
  • 6.5.1Direct Form422
  • 6.5.2Cascade Form423
  • 6.5.3Structures for Linear-Phase FIR Systems424
  • 6.6Lattice Structures427
  • 6.6.1FIR Lattice Filters428
  • 6.6.2All-Pole Lattice Systems438
  • 6.6.3IIR Lattice Systems444
  • 6.6.4Other Lattice Structures446
  • 6.7Overview of Finite-Precision Numerical Effects447
  • 6.7.1Number Representations448
  • 6.7.2Quantization in Implementing Systems453
  • 6.8Effects of Coefficient Quantization457
  • 6.8.1Effects of Coefficient Quantization in IIR Systems458
  • 6.8.2Coefficient Quantization in FIR Systems466
  • 6.9Effects of Round-off Noise in Digital Filters471
  • 6.9.1Analysis of the Direct-Form IIR Structures471
  • 6.9.2Scaling in Fixed-Point Implementations of IIR Systems481
  • 6.9.3Analysis of Cascade Form IIR Systems486
  • 6.9.4Analysis of Direct-Form FIR Systems496
  • 6.9.5Floating-Point Quantization499
  • 6.10Zero-Input Limit Cycles in Fixed-Point Realizations of IIR Digital Filters501
  • 6.10.1Limit Cycles Due to Round-off501
  • 6.10.2Limit Cycles Due to Overflow504
  • 6.10.3Avoiding Limit Cycles506
  • 6.11Summary507
7Filter Design Techniques517
  • 7.0Introduction517
  • 7.1Filter Design Specifications518
  • 7.2Design of Discrete-Time IIR Filters from Continuous-Time Filters521
  • 7.2.1Filter Design by Impulse Invariance522
  • 7.2.2Bilinear Transformation529
  • 7.2.3Examples of Bilinear Transformation Design535
  • 7.3Design of FIR Filters by Windowing544
  • 7.3.1Properties of Commonly Used Windows547
  • 7.3.2Incorporation of Generalized Linear Phase551
  • 7.3.3The Kaiser Window Filter Design Method554
  • 7.3.4Relationship of the Kaiser Window to Other Windows560
  • 7.4Optimum Approximations of FIR Filters562
  • 7.4.1Optimal Type I and Type II Linear-Phase Filters567
  • 7.4.2Optimal Type III and Type IV Linear-Phase Filters578
  • 7.4.3The Parks-McClellan Algorithm583
  • 7.4.4Examples of FIR Equiripple Approximation587
  • 7.4.5Deciding between FIR and IIR Filters598
  • 7.5Design of FIR Differentiators599
  • 7.6Design of Hilbert Transformers605
  • 7.7Summary611
8The Discrete Fourier Transform651
  • 8.0Introduction651
  • 8.1Representation of Periodic Sequences: The Discrete Fourier Series (DFS)652
  • 8.2Properties of the Discrete Fourier Series656
  • 8.2.1Linearity656
  • 8.2.2Shift of a Sequence656
  • 8.2.3Duality657
  • 8.2.4Symmetry Properties658
  • 8.2.5Periodic Convolution659
  • 8.2.6Summary of Properties of the DFS Representation of Periodic Sequences661
  • 8.3The Fourier Transform of Periodic Signals662
  • 8.4Sampling the Fourier Transform667
  • 8.5Fourier Representation of Finite-Duration Sequences: The Discrete Fourier Transform (DFT)671
  • 8.6Properties of the Discrete Fourier Transform676
  • 8.6.1Linearity676
  • 8.6.2Circular Shift of a Sequence676
  • 8.6.3Duality680
  • 8.6.4Symmetry Properties682
  • 8.6.5Circular Convolution685
  • 8.6.6Summary of Properties of the DFT692
  • 8.7Linear Convolution Using the Discrete Fourier Transform693
  • 8.7.1Linear Convolution of Two Finite-Length Sequences694
  • 8.7.2Filtering Long Data Sequences699
  • 8.8The Discrete Cosine Transform (DCT)705
  • 8.8.1Definitions of the DCT706
  • 8.8.2Energy Compaction Property of the DCT-2710
  • 8.8.3Relationship between the DFT and the DCT-2714
  • 8.9Summary717
9Computation of the Discrete Fourier Transform747
  • 9.0Introduction747
  • 9.1Efficient Computation of the Discrete Fourier Transform748
  • 9.2The Goertzel Algorithm751
  • 9.3Decimation-in-Time FFT Algorithms755
  • 9.3.1In-Place Computations762
  • 9.3.2Alternative Forms766
  • 9.4Decimation-in-Frequency FFT Algorithms770
  • 9.4.1In-Place Computations775
  • 9.4.2Alternative Forms777
  • 9.5Practical Considerations780
  • 9.5.1Indexing780
  • 9.5.2Coefficients782
  • 9.5.3Algorithms for More General Values of N783
  • 9.6Implementation of the DFT Using Convolution784
  • 9.6.1Overview of the Chirp Transform784
  • 9.6.2The Chirp-z Transform Algorithm785
  • 9.6.3The Bluestein (Chirp) Algorithm790
  • 9.7Effects of Finite Register Length793
  • 9.8Summary803
10Fourier Analysis of Signals Using the Discrete Fourier Transform827
  • 10.0Introduction827
  • 10.1Fourier Analysis of Sinusoids Using the DFT828
  • 10.1.1DFT Analysis of Sinusoidal Signals829
  • 10.1.2Sinusoidal Signals with Non-Integer Frequencies835
  • 10.2Time-Dependent Fourier Analysis842
  • 10.3Block Convolution Using the Time-Dependent Fourier Transform850
  • 10.4Fourier Analysis of Nonstationary Signals853
  • 10.4.1Time-Dependent Fourier Analysis of Speech Signals854
  • 10.4.2Time-Dependent Fourier Analysis of Radar Signals863
  • 10.5Fourier Analysis of Stationary Random Signals: Estimation of the Spectrum866
  • 10.5.1The Periodogram868
  • 10.5.2Properties of the Periodogram871
  • 10.5.3Periodogram Averaging876
  • 10.5.4Computation of Average Periodograms Using the FFT879
  • 10.5.5An Example of Spectrum Estimation881
  • 10.6Spectrum Analysis of Random Signals Using Estimates of the Autocorrelation Sequence886
  • 10.7Summary896
11Parametric Signal Modeling931
  • 11.0Introduction931
  • 11.1All-Pole Modeling of Signals932
  • 11.1.1Least-Squares Approximation933
  • 11.1.2Least-Squares Inverse Model935
  • 11.1.3Calculation of the Predictor Coefficients937
  • 11.2Deterministic and Stochastic Autocorrelation Methods940
  • 11.2.1Deterministic Autocorrelation Method940
  • 11.2.2Stochastic Autocorrelation Method944
  • 11.2.3Properties of the Autocorrelation Methods946
  • 11.3Estimation of the Parameters of the All-Pole Model949
  • 11.3.1The Levinson-Durbin Algorithm950
  • 11.3.2Cumulative Error and Lattice Predictors956
  • 11.4Experimental Examples of All-Pole Modeling960
  • 11.5Autoregressive Moving-Average (ARMA) Models969
  • 11.6Summary973
12Discrete Hilbert Transforms985
  • 12.0Introduction985
  • 12.1Real- and Imaginary-Part Sufficiency of the Fourier Transform for Causal Sequences986
  • 12.2Minimum-Phase Condition for Magnitude-Phase Relationship993
  • 12.3The Hilbert Transform Relationship for Periodic Sequences996
  • 12.4Discrete Hilbert Transform Relationships for Finite-Duration Sequences1000
  • 12.5Computation of the Discrete Hilbert Transform1007
  • 12.6Summary1012

Appendix A — Random Signals1025

Appendix B — Continuous-Time Filters1039

Index1047

22.14~22.23의 주축. 4장(표본화)이 에일리어싱·재구성·표본화율 변환·오버샘플링을 한 장에 담아 22.16과 22.23의 뼈대가 되고, 6장(구조)이 계수 양자화·반올림 잡음·리밋 사이클을 다뤄 22.20의 근거가 된다. 확보한 것은 Pearson Custom Library 편집판이라 표준 3판과 쪽 번호가 다르고 13장(Cepstrum)이 빠져 12장까지다 — 인용은 이 판의 쪽을 따른다.

Digital Signal Processing

22부Proakis · Manolakis · 4th ed. (Pearson New International Edition)  원본 대조

1Introduction1
  • 1.1Signals, Systems, and Signal Processing2
  • 1.1.1Basic Elements of a Digital Signal Processing System4
  • 1.1.2Advantages of Digital over Analog Signal Processing5
  • 1.2Classification of Signals6
  • 1.2.1Multichannel and Multidimensional Signals6
  • 1.2.2Continuous-Time Versus Discrete-Time Signals9
  • 1.2.3Continuous-Valued Versus Discrete-Valued Signals10
  • 1.2.4Deterministic Versus Random Signals11
  • 1.3The Concept of Frequency in Continuous-Time and Discrete-Time Signals12
  • 1.3.1Continuous-Time Sinusoidal Signals12
  • 1.3.2Discrete-Time Sinusoidal Signals14
  • 1.3.3Harmonically Related Complex Exponentials17
  • 1.4Analog-to-Digital and Digital-to-Analog Conversion19
  • 1.4.1Sampling of Analog Signals21
  • 1.4.2The Sampling Theorem26
  • 1.4.3Quantization of Continuous-Amplitude Signals31
  • 1.4.4Quantization of Sinusoidal Signals34
  • 1.4.5Coding of Quantized Samples35
  • 1.4.6Digital-to-Analog Conversion36
  • 1.4.7Analysis of Digital Signals and Systems Versus Discrete-Time Signals and Systems36
  • 1.5Summary and References37
2Discrete-Time Signals and Systems43
  • 2.1Discrete-Time Signals44
  • 2.1.1Some Elementary Discrete-Time Signals45
  • 2.1.2Classification of Discrete-Time Signals47
  • 2.1.3Simple Manipulations of Discrete-Time Signals52
  • 2.2Discrete-Time Systems55
  • 2.2.1Input-Output Description of Systems56
  • 2.2.2Block Diagram Representation of Discrete-Time Systems59
  • 2.2.3Classification of Discrete-Time Systems61
  • 2.2.4Interconnection of Discrete-Time Systems69
  • 2.3Analysis of Discrete-Time Linear Time-Invariant Systems71
  • 2.3.1Techniques for the Analysis of Linear Systems71
  • 2.3.2Resolution of a Discrete-Time Signal into Impulses73
  • 2.3.3Response of LTI Systems to Arbitrary Inputs: The Convolution Sum75
  • 2.3.4Properties of Convolution and the Interconnection of LTI Systems82
  • 2.3.5Causal Linear Time-Invariant Systems85
  • 2.3.6Stability of Linear Time-Invariant Systems87
  • 2.3.7Systems with Finite-Duration and Infinite-Duration Impulse Response90
  • 2.4Discrete-Time Systems Described by Difference Equations91
  • 2.4.1Recursive and Nonrecursive Discrete-Time Systems92
  • 2.4.2Linear Time-Invariant Systems Characterized by Constant-Coefficient Difference Equations95
  • 2.4.3Solution of Linear Constant-Coefficient Difference Equations100
  • 2.4.4The Impulse Response of a Linear Time-Invariant Recursive System108
  • 2.5Implementation of Discrete-Time Systems111
  • 2.5.1Structures for the Realization of Linear Time-Invariant Systems111
  • 2.5.2Recursive and Nonrecursive Realizations of FIR Systems115
  • 2.6Correlation of Discrete-Time Signals118
  • 2.6.1Crosscorrelation and Autocorrelation Sequences120
  • 2.6.2Properties of the Autocorrelation and Crosscorrelation Sequences122
  • 2.6.3Correlation of Periodic Sequences125
  • 2.6.4Input-Output Correlation Sequences127
  • 2.7Summary and References130
3The z-Transform and Its Application to the Analysis of LTI Systems151
  • 3.1The z-Transform151
  • 3.1.1The Direct z-Transform152
  • 3.1.2The Inverse z-Transform160
  • 3.2Properties of the z-Transform161
  • 3.3Rational z-Transforms174
  • 3.3.1Poles and Zeros174
  • 3.3.2Pole Location and Time-Domain Behavior for Causal Signals177
  • 3.3.3The System Function of a Linear Time-Invariant System180
  • 3.4Inversion of the z-Transform183
  • 3.4.1The Inverse z-Transform by Contour Integration183
  • 3.4.2The Inverse z-Transform by Power Series Expansion186
  • 3.4.3The Inverse z-Transform by Partial-Fraction Expansion189
  • 3.4.4Decomposition of Rational z-Transforms196
  • 3.5Analysis of Linear Time-Invariant Systems in the z-Domain197
  • 3.5.1Response of Systems with Rational System Functions197
  • 3.5.2Transient and Steady-State Responses199
  • 3.5.3Causality and Stability201
  • 3.5.4Pole–Zero Cancellations203
  • 3.5.5Multiple-Order Poles and Stability205
  • 3.5.6Stability of Second-Order Systems206
  • 3.6The One-Sided z-Transform210
  • 3.6.1Definition and Properties210
  • 3.6.2Solution of Difference Equations214
  • 3.6.3Response of Pole–Zero Systems with Nonzero Initial Conditions216
  • 3.7Summary and References218
4Frequency Analysis of Signals229
  • 4.1Frequency Analysis of Continuous-Time Signals230
  • 4.1.1The Fourier Series for Continuous-Time Periodic Signals230
  • 4.1.2Power Density Spectrum of Periodic Signals234
  • 4.1.3The Fourier Transform for Continuous-Time Aperiodic Signals238
  • 4.1.4Energy Density Spectrum of Aperiodic Signals241
  • 4.2Frequency Analysis of Discrete-Time Signals244
  • 4.2.1The Fourier Series for Discrete-Time Periodic Signals244
  • 4.2.2Power Density Spectrum of Periodic Signals248
  • 4.2.3The Fourier Transform of Discrete-Time Aperiodic Signals250
  • 4.2.4Convergence of the Fourier Transform254
  • 4.2.5The Energy Density Spectrum of Aperiodic Signals258
  • 4.2.6Relationship of the Fourier Transform to the z-Transform261
  • 4.2.7Cepstrum263
  • 4.2.8The Fourier Transform of Signals with Poles on the Unit Circle264
  • 4.3Frequency-Domain and Time-Domain Signal Properties266
  • 4.4Properties of the Fourier Transform for Discrete-Time Signals270
  • 4.4.1Symmetry Properties of the Fourier Transform270
  • 4.4.2Fourier Transform Theorems and Properties278
  • 4.5Summary and References288
5Frequency-Domain Analysis of LTI Systems307
  • 5.1Frequency-Domain Characteristics of Linear Time-Invariant Systems307
  • 5.1.1Response to Complex Exponential and Sinusoidal Signals: The Frequency Response Function308
  • 5.1.2Steady-State and Transient Response to Sinusoidal Inputs315
  • 5.1.3Response to Aperiodic Input Signals317
  • 5.2Frequency Response of LTI Systems320
  • 5.2.1Frequency Response of a System with Rational System Functions321
  • 5.2.2Computation of the Frequency Response324
  • 5.3Correlation Functions and Spectra at the Output of LTI Systems331
  • 5.4Linear Time-Invariant Systems as Frequency-Selective Filters336
  • 5.4.1Ideal Filter Characteristics336
  • 5.4.2Lowpass, Highpass, and Bandpass Filters339
  • 5.4.3Digital Resonators347
  • 5.4.4Notch Filters351
  • 5.4.5Comb Filters354
  • 5.4.6All-Pass Filters359
  • 5.4.7Digital Sinusoidal Oscillators362
  • 5.5Inverse Systems and Deconvolution365
  • 5.5.1Invertibility of Linear Time-Invariant Systems365
  • 5.5.2Minimum-Phase, Maximum-Phase, and Mixed-Phase Systems369
  • 5.5.3System Identification and Deconvolution373
  • 5.5.4Homomorphic Deconvolution375
  • 5.6Summary and References377
6Sampling and Reconstruction of Signals395
  • 6.1Ideal Sampling and Reconstruction of Continuous-Time Signals395
  • 6.2Discrete-Time Processing of Continuous-Time Signals408
  • 6.3Analog-to-Digital and Digital-to-Analog Converters414
  • 6.3.1Sampling and Hold Devices414
  • 6.3.2Quantization and Coding417
  • 6.3.3Analysis of Quantization Errors420
  • 6.3.4Oversampling A/D Converters424
  • 6.3.5Digital-to-Analog Converters425
  • 6.3.6Oversampling D/A Converters429
  • 6.4Sampling and Reconstruction of Continuous-Time Bandpass Signals430
  • 6.5Sampling of Discrete-Time Signals436
  • 6.5.1Decimation by a Factor D436
  • 6.5.2Interpolation by a Factor I440
  • 6.5.3Sampling Rate Conversion by a Rational Factor I/D444
  • 6.6Oversampling A/D and D/A Converters446
  • 6.6.1Oversampling A/D Converters446
  • 6.6.2Oversampling D/A Converters451
  • 6.7Summary and References453
7The Discrete Fourier Transform: Its Properties and Applications461
  • 7.1Frequency Domain Sampling: The Discrete Fourier Transform461
  • 7.1.1Frequency-Domain Sampling and Reconstruction of Discrete-Time Signals461
  • 7.1.2The Discrete Fourier Transform (DFT)465
  • 7.1.3The DFT as a Linear Transformation470
  • 7.1.4Relationship of the DFT to Other Transforms473
  • 7.2Properties of the DFT475
  • 7.2.1Periodicity, Linearity, and Symmetry Properties476
  • 7.2.2Multiplication of Two DFTs and Circular Convolution481
  • 7.2.3Additional DFT Properties488
  • 7.3Linear Filtering Methods Based on the DFT491
  • 7.3.1Use of the DFT in Linear Filtering491
  • 7.3.2Filtering of Long Data Sequences494
  • 7.4Frequency Analysis of Signals Using the DFT497
  • 7.5The Discrete Cosine Transform504
  • 7.5.1Forward DCT504
  • 7.5.2Inverse DCT507
  • 7.5.3DCT as an Orthogonal Transform508
  • 7.6Summary and References510
8Efficient Computation of the DFT: Fast Fourier Transform Algorithms523
  • 8.1Efficient Computation of the DFT: FFT Algorithms523
  • 8.1.1Direct Computation of the DFT524
  • 8.1.2Radix-2 FFT Algorithms526
  • 8.1.3Radix-4 FFT Algorithms536
  • 8.1.4Split-Radix FFT Algorithms541
  • 8.1.5Implementation of FFT Algorithms544
  • 8.2Applications of FFT Algorithms546
  • 8.2.1Efficient Computation of the DFT of Two Real Sequences546
  • 8.2.2Efficient Computation of the DFT of a 2N-Point Real Sequence547
  • 8.2.3Use of the FFT Algorithm in Linear Filtering and Correlation548
  • 8.3A Linear Filtering Approach to Computation of the DFT550
  • 8.3.1The Goertzel Algorithm550
  • 8.3.2The Chirp-z Transform Algorithm553
  • 8.4Quantization Effects in the Computation of the DFT557
  • 8.4.1Quantization Errors in the Direct Computation of the DFT558
  • 8.4.2Quantization Errors in FFT Algorithms560
  • 8.5Summary and References565
9Implementation of Discrete-Time Systems577
  • 9.1Structures for the Realization of Discrete-Time Systems578
  • 9.2Structures for FIR Systems579
  • 9.2.1Direct-Form Structure579
  • 9.2.2Cascade-Form Structures581
  • 9.2.3Frequency-Sampling Structures583
  • 9.2.4Lattice Structure588
  • 9.3Structures for IIR Systems598
  • 9.3.1Direct-Form Structures598
  • 9.3.2Signal Flow Graphs and Transposed Structures601
  • 9.3.3Cascade-Form Structures605
  • 9.3.4Parallel-Form Structures608
  • 9.3.5Lattice and Lattice-Ladder Structures for IIR Systems611
  • 9.4State-Space System Analysis and Structures620
  • 9.4.1State-Space Descriptions of LTI Systems620
  • 9.4.2Solution of State-Space Equations624
  • 9.5Representation of Numbers626
  • 9.5.1Fixed-Point Representation of Numbers627
  • 9.5.2Floating-Point Representation of Numbers630
  • 9.5.3Errors Resulting from Rounding and Truncation632
  • 9.6Quantization of Filter Coefficients636
  • 9.6.1Analysis of Sensitivity to Quantization of Filter Coefficients637
  • 9.6.2Quantization Effects in Direct-Form Realizations of IIR Filters640
  • 9.6.3Quantization Effects in Direct-Form Realizations of FIR Filters644
  • 9.7Round-Off Effects in Digital Filters646
  • 9.7.1Limit-Cycle Oscillations in Recursive Systems647
  • 9.7.2Scaling to Prevent Overflow651
  • 9.7.3Statistical Characterization of Quantization Effects in Fixed-Point Realizations of Digital Filters654
  • 9.8Summary and References658
10Design of Digital Filters669
  • 10.1General Considerations669
  • 10.1.1Causality and Its Implications670
  • 10.1.2Characteristics of Practical Frequency-Selective Filters674
  • 10.2Design of FIR Filters677
  • 10.2.1Symmetric and Antisymmetric FIR Filters677
  • 10.2.2Design of Linear-Phase FIR Filters Using Windows683
  • 10.2.3Design of Linear-Phase FIR Filters by the Frequency-Sampling Method693
  • 10.2.4Design of Optimum Equiripple Linear-Phase FIR Filters700
  • 10.3Design of IIR Filters From Analog Filters714
  • 10.3.1IIR Filter Design by Approximation of Derivatives715
  • 10.3.2IIR Filter Design by Impulse Invariance718
  • 10.3.3IIR Filter Design by the Bilinear Transformation722
  • 10.3.4Characteristics of Commonly Used Analog Filters727
  • 10.4Frequency Transformations739
  • 10.4.1Frequency Transformations in the Analog Domain739
  • 10.4.2Frequency Transformations in the Digital Domain742
  • 10.5Design of Digital Filters Based on Least-Squares Fit746
  • 10.5.1Pade Approximation Method746
  • 10.5.2Least-Squares Design Methods749
  • 10.5.3FIR Least-Squares Inverse752
  • 10.6Summary and References754
11Multirate Digital Signal Processing767
  • 11.1Introduction767
  • 11.2Decimation by a Factor D768
  • 11.3Interpolation by a Factor I772
  • 11.4Sampling Rate Conversion by a Rational Factor I/D775
  • 11.5Implementation of Sampling Rate Conversion779
  • 11.5.1Polyphase Filter Structures780
  • 11.5.2Interchange of Filters and Downsamplers/Upsamplers785
  • 11.6Multistage Implementation of Sampling Rate Conversion788
  • 11.7Sampling Rate Conversion of Bandpass Signals794
  • 11.7.1Decimation and Interpolation of Bandpass Signals794
  • 11.7.2Resampling of Bandpass Signals by Quadrature Modulation798
  • 11.8Sampling Rate Conversion by an Arbitrary Factor800
  • 11.8.1First-Order Approximation802
  • 11.8.2Linear Interpolation803
  • 11.8.3Polyphase Filter Implementation805
  • 11.9Applications of Multirate Signal Processing807
  • 11.9.1Design of Phase Shifters807
  • 11.9.2Interfacing of Digital Systems with Different Sampling Rates809
  • 11.9.3Subband Coding of Speech Signals810
  • 11.9.4Oversampling A/D and D/A Converters812
  • 11.10Digital Filter Banks813
  • 11.10.1Uniform DFT Filter Banks813
  • 11.10.2Two-Channel Quadrature Mirror Filter (QMF) Banks817
  • 11.10.3Perfect Reconstruction Two-Channel QMF Banks823
  • 11.11Summary and References828
12Linear Prediction and Optimum Linear Filters841
  • 12.1Random Signals, Correlation Functions and Power Spectra841
  • 12.2Innovations Representation of a Stationary Random Process847
  • 12.2.1Rational Power Spectra848
  • 12.2.2Relationships Between the Filter Parameters and the Autocorrelation Sequence850
  • 12.3Forward and Backward Linear Prediction852
  • 12.3.1Forward Linear Prediction852
  • 12.3.2Backward Linear Prediction856
  • 12.3.3Optimum Reflection Coefficients for the Lattice Forward and Backward Predictors858
  • 12.3.4Relationship of an AR Process to Linear Prediction860
  • 12.4Solution of the Normal Equations861
  • 12.4.1The Levinson-Durbin Algorithm861
  • 12.4.2The Schür Algorithm866
  • 12.5Properties of the Linear Prediction-Error Filters870
  • 12.6AR Lattice and ARMA Lattice-Ladder Filters873
  • 12.6.1AR Lattice Filter873
  • 12.6.2ARMA Lattice-Ladder Filter875
  • 12.7Wiener Filters for Filtering and Prediction877
  • 12.7.1FIR Wiener Filter878
  • 12.7.2Noncausal IIR Wiener Filter881
  • 12.7.3Causal IIR Wiener Filter883
  • 12.8Summary and References886
13Adaptive Filters899
  • 13.1Applications of Adaptive Filters900
  • 13.1.1Adaptive System Identification900
  • 13.1.2Adaptive Channel Equalization901
  • 13.1.3Adaptive Noise Cancelling903
  • 13.1.4Adaptive Linear Prediction905
  • 13.2Adaptive Direct-Form FIR Filters – The LMS Algorithm906
  • 13.2.1Minimum Mean-Square Error Criterion906
  • 13.2.2The LMS Algorithm and Its Convergence910
  • 13.2.3Excess Mean-Square Error and Misadjustment917
  • 13.2.4Normalized LMS Algorithm921
  • 13.3Adaptive Direct-Form FIR Filters – RLS Algorithms923
  • 13.3.1The Exponentially Weighted RLS Algorithm924
  • 13.3.2Sliding-Window RLS Algorithm930
  • 13.4Adaptive Lattice-Ladder Filters931
  • 13.4.1Recursive LMS Lattice-Ladder Algorithm932
  • 13.4.2Recursive Least-Squares Lattice-Ladder Algorithm936
  • 13.5Summary and References946

Appendix — Random Number Generators981

Appendix — Tables of Transition Coefficients for Linear-Phase FIR Filters987

References and Bibliography993

Index1007

Oppenheim의 대조본. 11장 다중률 신호 처리가 데시메이션·인터폴레이션·다상 분해·필터 뱅크를 독립된 장으로 다뤄 22.23의 기준이 되고, 9장(구현)이 수의 표현과 양자화를 회로 쪽에 가깝게 쓴다. 6장이 표본화와 A/D·D/A를 함께 놓아 22.16과 22.18을 잇는다.

VLSI Digital Signal Processing Systems: Design and Implementation

22부Parhi · Wiley, 1999  원본 대조

1Introduction to Digital Signal Processing Systems1
  • 1.1Introduction1
  • 1.2Typical DSP Algorithms2
  • 1.3DSP Application Demands and Scaled CMOS Technologies27
  • 1.4Representations of DSP Algorithms31
  • 1.5Book Outline40
2Iteration Bound43
  • 2.1Introduction43
  • 2.2Data-Flow Graph Representations43
  • 2.3Loop Bound and Iteration Bound45
  • 2.4Algorithms for Computing Iteration Bound47
  • 2.5Iteration Bound of Multirate Data-Flow Graphs55
  • 2.6Conclusions57
  • 2.7Problems58
3Pipelining and Parallel Processing63
  • 3.1Introduction63
  • 3.2Pipelining of FIR Digital Filters64
  • 3.3Parallel Processing69
  • 3.4Pipelining and Parallel Processing for Low Power74
  • 3.5Conclusions82
  • 3.6Problems83
4Retiming91
  • 4.1Introduction91
  • 4.2Definitions and Properties93
  • 4.3Solving Systems of Inequalities95
  • 4.4Retiming Techniques97
  • 4.5Conclusions112
  • 4.6Problems112
5Unfolding119
  • 5.1Introduction119
  • 5.2An Algorithm for Unfolding121
  • 5.3Properties of Unfolding124
  • 5.4Critical Path, Unfolding, and Retiming127
  • 5.5Applications of Unfolding128
  • 5.6Conclusions140
  • 5.7Problems140
6Folding149
  • 6.1Introduction149
  • 6.2Folding Transformation151
  • 6.3Register Minimization Techniques157
  • 6.4Register Minimization in Folded Architectures163
  • 6.5Folding of Multirate Systems170
  • 6.6Conclusions174
  • 6.7Problems174
7Systolic Architecture Design189
  • 7.1Introduction189
  • 7.2Systolic Array Design Methodology190
  • 7.3FIR Systolic Arrays192
  • 7.4Selection of Scheduling Vector201
  • 7.5Matrix-Matrix Multiplication and 2D Systolic Array Design205
  • 7.6Systolic Design for Space Representations Containing Delays210
  • 7.7Conclusions213
  • 7.8Problems213
8Fast Convolution227
  • 8.1Introduction227
  • 8.2Cook-Toom Algorithm228
  • 8.3Winograd Algorithm237
  • 8.4Iterated Convolution244
  • 8.5Cyclic Convolution246
  • 8.6Design of Fast Convolution Algorithm by Inspection250
  • 8.7Conclusions251
  • 8.8Problems251
9Algorithmic Strength Reduction in Filters and Transforms255
  • 9.1Introduction255
  • 9.2Parallel FIR Filters256
  • 9.3Discrete Cosine Transform and Inverse DCT275
  • 9.4Parallel Architectures for Rank-Order Filters285
  • 9.5Conclusions297
  • 9.6Problems297
10Pipelined and Parallel Recursive and Adaptive Filters313
  • 10.1Introduction313
  • 10.2Pipeline Interleaving in Digital Filters314
  • 10.3Pipelining in 1st-Order IIR Digital Filters320
  • 10.4Pipelining in Higher-Order IIR Digital Filters325
  • 10.5Parallel Processing for IIR Filters339
  • 10.6Combined Pipelining and Parallel Processing for IIR Filters345
  • 10.7Low-Power IIR Filter Design Using Pipelining and Parallel Processing348
  • 10.8Pipelined Adaptive Digital Filters351
  • 10.9Conclusions367
  • 10.10Problems367
11Scaling and Roundoff Noise377
  • 11.1Introduction377
  • 11.2Scaling and Roundoff Noise378
  • 11.3State Variable Description of Digital Filters382
  • 11.4Scaling and Roundoff Noise Computation386
  • 11.5Roundoff Noise in Pipelined IIR Filters391
  • 11.6Roundoff Noise Computation Using State Variable Description403
  • 11.7Slow-Down, Retiming, and Pipelining405
  • 11.8Conclusions410
  • 11.9Problems410
12Digital Lattice Filter Structures421
  • 12.1Introduction421
  • 12.2Schur Algorithm422
  • 12.3Digital Basic Lattice Filters429
  • 12.4Derivation of One-Multiplier Lattice Filter437
  • 12.5Derivation of Normalized Lattice Filter444
  • 12.6Derivation of Scaled-Normalized Lattice Filter447
  • 12.7Roundoff Noise Calculation in Lattice Filters454
  • 12.8Pipelining of Lattice IIR Digital Filters458
  • 12.9Design Examples of Pipelined Lattice Filters464
  • 12.10Low-Power CMOS Lattice IIR Filters469
  • 12.11Conclusions470
  • 12.12Problems470
13Bit-Level Arithmetic Architectures477
  • 13.1Introduction477
  • 13.2Parallel Multipliers478
  • 13.3Interleaved Floor-plan and Bit-Plane-Based Digital Filters489
  • 13.4Bit-Serial Multipliers490
  • 13.5Bit-Serial Filter Design and Implementation499
  • 13.6Canonic Signed Digit Arithmetic505
  • 13.7Distributed Arithmetic511
  • 13.8Conclusions518
  • 13.9Problems518
14Redundant Arithmetic529
  • 14.1Introduction529
  • 14.2Redundant Number Representations530
  • 14.3Carry-Free Radix-2 Addition and Subtraction531
  • 14.4Hybrid Radix-4 Addition536
  • 14.5Radix-2 Hybrid Redundant Multiplication Architectures540
  • 14.6Data Format Conversion545
  • 14.7Redundant to Nonredundant Converter547
  • 14.8Conclusions551
  • 14.9Problems552
15Numerical Strength Reduction559
  • 15.1Introduction559
  • 15.2Subexpression Elimination560
  • 15.3Multiple Constant Multiplication560
  • 15.4Subexpression Sharing in Digital Filters566
  • 15.5Additive and Multiplicative Number Splitting574
  • 15.6Conclusions583
  • 15.7Problems583
16Synchronous, Wave, and Asynchronous Pipelines591
  • 16.1Introduction591
  • 16.2Synchronous Pipelining and Clocking Styles593
  • 16.3Clock Skew and Clock Distribution in Bit-Level Pipelined VLSI Designs601
  • 16.4Wave Pipelining606
  • 16.5Constraint Space Diagram and Degree of Wave Pipelining612
  • 16.6Implementation of Wave-Pipelined Systems614
  • 16.7Asynchronous Pipelining619
  • 16.8Signal Transition Graphs622
  • 16.9Use of STG to Design Interconnection Circuits626
  • 16.10Implementation of Computational Units631
  • 16.11Conclusions640
  • 16.12Problems640
17Low-Power Design645
  • 17.1Introduction645
  • 17.2Theoretical Background648
  • 17.3Scaling Versus Power Consumption650
  • 17.4Power Analysis652
  • 17.5Power Reduction Techniques662
  • 17.6Power Estimation Approaches671
  • 17.7Conclusions688
  • 17.8Problems688
18Programmable Digital Signal Processors695
  • 18.1Introduction695
  • 18.2Evolution of Programmable Digital Signal Processors696
  • 18.3Important Features of DSP Processors697
  • 18.4DSP Processors for Mobile and Wireless Communications703
  • 18.5Processors for Multimedia Signal Processing704
  • 18.6Conclusions714

Appendix A — Shortest Path Algorithms717

Appendix B — Scheduling and Allocation Techniques723

Appendix C — Euclidean GCD Algorithm743

Appendix D — Orthonormality of Schur Polynomials747

Appendix E — Fast Binary Adders and Multipliers753

Appendix F — Scheduling in Bit-Serial Systems763

Appendix G — Coefficient Quantization in FIR Filters771

Index775

22.24~22.27의 기준. 반복 한계·리타이밍·언폴딩·폴딩·시스톨릭 배열처럼 DSP 알고리즘을 실리콘 구조로 옮기는 변환을 다루는 거의 유일한 교재다. 13~15장(비트 수준 산술·중복 산술·강도 축소)은 21.13 데이터패스와 맞물리고, 17장(저전력)은 21.9와 겹치므로 22부에서는 DSP 특유의 부분만 쓴다. 확보한 PDF는 폰트 인코딩이 깨져(숫자 9와 U·z·q·V가 누락) 텍스트 추출을 못 써서 목차 7쪽을 이미지로 읽어 옮겼다.

23부 · 반도체 산업

IRDS — International Roadmap for Devices and Systems

23부IEEE · 연간 개정 · 무료 공개  미확보

목차 미확보직접 확인해 채워 넣을 것

교재가 아니라 로드맵 문서. 23.2 기술 로드맵의 1차 자료이며 매년 갱신되므로 인용 시 연도 판을 반드시 명시한다.

각사 기술 발표 · 리서치 리포트

23부TSMC/삼성/SK하이닉스 기술 심포지엄, 시장 조사 자료  미확보

목차 미확보직접 확인해 채워 넣을 것

23부는 교재로 쓸 수 없는 파트다. 전부 /references/papers에서 출처와 연도를 붙여 관리한다.

운영 규칙

절 번호 체계가 책마다 다르다. Kittel은 절에 번호를 붙이지 않고 제목과 쪽수만 싣는다. Reif는 가운뎃점(1·1)으로 찍는다. Boas는 장 안에서 절 번호가 1부터 다시 시작한다. Atkins는 Focus–Topic 체계다. 인용 형식을 파트별로 통일해 둘 것.

판을 고정한다. 판이 바뀌면 절 번호가 달라진다. Taur&Ning은 2판과 3판의 장 구성이 완전히 다르고, Sze는 3판과 4판의 절 구성이 다르며, Porter는 4판에서 6장이 전면 개편돼 3판 절 번호를 그대로 쓰면 어긋나며, Campbell은 3판과 4판 사이에 절이 추가됐다(그래서 원본을 확보한 3판으로 인용 판을 고정했다). 본문에서 인용할 때는 반드시 판을 함께 적는다.

목차가 없으면 지시도 없다. 집필 파이프라인 3단계(“Taur&Ning §5.1.2 Charge Sheet Model 기준”)는 이 페이지가 채워져 있어야 성립한다. 서적 52권 가운데 47권이 원본 대조를 마쳤다 — 22개 파트 전부 지금 지시를 내릴 수 있다. 남은 두 권은 원본 목차 자체를 구하지 못한 경우다. Hu는 인쇄 목차가 없어 절 목록만 따로 대조했고, Rabaey는 확보한 원본 목차에 쪽수가 없다. 둘 다 구해 오는 대로 교체한다.

교재로 안 되는 파트가 있다. 15부(메모리 제품 기술)와 23부(산업)는 교재보다 학회 자료와 로드맵이 앞선다. 이쪽은 /references/papers에서 출처와 연도를 붙여 관리한다. 이 페이지에 미확보로 남은 세 항목(IRDS · IEDM/ISSCC/VLSI 자료 · 각사 기술 발표)이 바로 그것이라, 목차를 채워 넣을 대상이 아니다.

저작권. 이 페이지는 서지 정보와 목차만 담는다. 목차는 사실의 나열이라 문제되지 않지만, 본문·도표·그림을 그대로 옮기지 않는다. 백과 본문은 개념을 본인 언어로 재구성하고 그림은 직접 작도하거나 출처가 명확한 것을 인용한다.